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热词
    • 3. 发明授权
    • Heating process apparatus
    • 加热处理装置
    • US08150243B2
    • 2012-04-03
    • US12613288
    • 2009-11-05
    • Akira KumagaiMasami ShibagakiKenji NumajiriAkihiro Egami
    • Akira KumagaiMasami ShibagakiKenji NumajiriAkihiro Egami
    • A21B2/00
    • G01J5/60G01J5/62
    • A heating process apparatus includes a process chamber, a heat-processed object support member provided in the process chamber for heating a substrate disposed thereon, a cap for covering the substrate disposed on the heat-processed object support member, a heater for heating the heat-processed object support member, a temperature measuring unit for measuring the temperature of the heat-processed object support member, and a controller for controlling the heater. A first measuring unit measures a temperature of the cap, and the controller controls the heater so as to set the cap temperature to a predetermined temperature. A second measuring unit measures a temperature of the heat-processed object support member, and the controller turns off the heater when the temperature of the heat-processed object support member exceeds an over-heat critical temperature.
    • 加热处理装置包括处理室,设置在处理室中的用于加热其上设置的基板的热处理对象支撑构件,用于覆盖设置在热处理对象支撑构件上的基板的盖,用于加热热量的加热器 加工对象支撑构件,用于测量加热对象支撑构件的温度的温度测量单元,以及用于控制加热器的控制器。 第一测量单元测量盖的温度,并且控制器控制加热器,以将盖温度设定到预定温度。 第二测量单元测量热处理对象支撑构件的温度,并且当热处理对象支撑构件的温度超过过热临界温度时,控制器关闭加热器。