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1. 发明专利

JPS6217705A TELECENTRIC OPTICAL SYSTEM LIGHTING DEVICE 失效
公开(公告)号：JPS6217705A
公开(公告)日：1987-01-26
申请号：JP15663385
申请日：1985-07-16
申请人： NIPPON KOGAKU KK
发明人： TAKAGI SHUHEI , SUDO TAKESHI
IPC分类号： G02B6/42 , F21V8/00 , G01M11/00 , G02B6/00
摘要： PURPOSE:To prevent ununiform light quantity on a pupil surface of an illuminating light by dividing the incident luminous flux which is made incident on one end face of a random fiber bundle for leading the luminous flux which has condensed light from a light source, to an object side, into plural fluxes, and distributing them uniformly in the other end face. CONSTITUTION:The illuminating light from a light source 1 is focused to an incident end face 20a of a random fiber bundle 20 by a condensing lens 2 and a concave mirror 3, and emitted from an emitting and face 20b. Its light travels to a lighting system lens 5 through an aperture diaphragm 4, condensed and becomes a parallel luminous flux, reflected along an objective lens optical axis by a half-transmission flux, reflected along an objective lens optical axis by a half-transmission prism 6, focused at a pupil position of the first objective lens 8 through the second objective lens 7, and an image of the aperture diaphragm 4 is formed at its pupil position together with an image of the emitting end face 20b. The light becomes a parallel luminous flux again and projected to an object to be inspected 10 from the first objective lens 8, and illuminates vertically the object to be inspected 10, along the optical axis. The random fiber bundle 20 is formed by bundling plural optical fibers, making a line of fibers of one end face different from a line of fibers of the other end face, and twisting them together so that they become an irregular arrangement each other.

2. 发明专利

JPS6238303A OPTICAL DETECTING DEVICE FOR BODY POSITION 失效
公开(公告)号：JPS6238303A
公开(公告)日：1987-02-19
申请号：JP17842285
申请日：1985-08-13
申请人： NIPPON KOGAKU KK
发明人： TAKAGI SHUHEI , UEHARA MAKOTO , MATSUMOTO KOICHI
IPC分类号： G02B27/46 , G01B11/00 , G01S17/02 , G03F9/00 , H01L21/027
摘要： PURPOSE:To detect the position of a body with high precision regardless of the divergence of laser light by projecting the origin of the angle of divergence of luminous flux from a laser light source upon the pupil surface of an objective. CONSTITUTION:The laser luminous flux from the light source 1 includes a light beam which has an angle epsilon of divergence. The origin of the angle of divergence is distributed in a plane P0 (virtual light emission surface) perpendicular to the optical axis. Luminous flux which is emitted from points A and B at both ends of the light emission plane P0 and has the angle epsilon of divergence is passed through the optical system consisting of a beam expander 2, a condenser lens 4, etc., and converged on points (a) and (b) on the pupil surface P1 of the projection objective L0. Namely, the laser luminous flux is present within a constant circular area on the pupil surface P1 of the lens L0 and causes no blur. Consequently,k the area of luminous flux which is reflected regularly by a wafer W and returned becomes distinctive and the light shield area on the optical axis of a spatial filter F is minimized. Therefore, the SN ratio of a detection signal for an alignment mark on the wafer W is improved.

3. 发明专利

JPS6210614A PHOTOCHEMICAL REACTION DEVICE 失效
公开(公告)号：JPS6210614A
公开(公告)日：1987-01-19
申请号：JP15092885
申请日：1985-07-09
申请人： NIPPON KOGAKU KK
发明人： MATSUMOTO KOICHI , TAKAGI SHUHEI , UEHARA MAKOTO , UMAGOME NOBUTAKA
IPC分类号： G02B27/00 , H01L21/205 , H01L21/263 , H01L21/302
摘要： PURPOSE:To cause photochemical reaction uniformly and efficiently by forming an afocal system where an illuminating optical system has a negative magnification in a plane perpendicular to the surface of an object to be treated and bringing a position conjugate to the origin position of divergence of the spread angle of a laser light source neat the center of the surface of the object to be treated. CONSTITUTION:The laser luminous flux supplied from a laser resonator S is rays of light parallel to the optical axis but has a slight spread angle epsilon1, and this luminous flux is supplied as if it is emitted from divergence origins A and B. If divergence origins of this spread angle are distributed on a plane perpendicular to the optical axis, the laser luminous flux from a virtual light emitting plane P passes an afocal system La which is formed with an illuminating optical system L and has a negative magnification and is supplied to air above the surface of a horizontally arranged wafer W in parallel with the surface of the wafer W. The device is so constituted that the position conjugate to the virtual light emitting plane P coincides approximately with a plane Q perpendicular to the center of the wafer W. Thus, the degree of concentration of optical energy on the surface of the wafer is raised to cause photochemical reaction uniformly and efficiently.

4. 发明专利

JP2518171B2 失效
公开(公告)号：JP2518171B2
公开(公告)日：1996-07-24
申请号：JP15663285
申请日：1985-07-16
申请人： NIPPON KOGAKU KK
发明人： TAKAGI SHUHEI , SUDO TAKESHI , KONNO KUNIO , MOROI AKIHIKO
IPC分类号： G01M11/00

5. 发明专利

JPS6242112A OPTICAL COMPENSATION SYSTEM FOR LENGTH OF OPTICAL PATH 失效
公开(公告)号：JPS6242112A
公开(公告)日：1987-02-24
申请号：JP18243685
申请日：1985-08-20
申请人： NIPPON KOGAKU KK
发明人： UEHARA MAKOTO , ENDO KAZUMASA , MORI SUSUMU , TAKAGI SHUHEI , KAKIZAKI YUKIO
IPC分类号： G02B27/00 , G02B26/10 , G03F7/20 , G03F9/00
摘要： PURPOSE:To maintain the conjugate relation between an image and a pupil even when an objective is moved freely in a two-dimensional plane by moving the 2nd reflecting member so that the rear focus position of the 1st objective coincides with the front focus position of the 2nd objective at any time. CONSTITUTION:The quantity OP of movement of a vertical mirror M11 is decomposed into an (x)-directional and a (y)-directional component, the optical path length between a moving mirror M12 and the 1st objective L11 varies by the quantity DELTAx of (x) directional movement, and the optical path length between the moving mirror M12 and the 3rd mirror M13 varies by the quantity of DELTAy of (y)-directional movement, so that the quantity of variation in optical path length between the 1st objective L11 and the 2nd objection L12 is DELTAx+DELTAy. Further, a correction moving device Mv3 moves a couple of mirrors M13 and M14 by delta along the optical axis of the 2nd objective L12, and then the optical path length between the 1st objective L11 and the 2nd objective L12 varies by 2delta. For the purpose, the couple of mirrors M13 and M14 are only moved satisfying and equation so as to hold the optical path length between the 1st objective L11 and the 2nd objective L12 constant.

6. 发明专利

JPS61275816A SCANNING OPTICAL DEVICE 失效
公开(公告)号：JPS61275816A
公开(公告)日：1986-12-05
申请号：JP11930885
申请日：1985-05-31
申请人： NIPPON KOGAKU KK
发明人： MATSUMOTO KOICHI , UEHARA MAKOTO , TAKAGI SHUHEI , KAKIZAKI YUKIO
IPC分类号： G02B26/10
摘要： PURPOSE:To facilitate the assembly of a driving mechanism, to obtain good deviation reproducibility and deviation of proper extent, and to eliminate curvature of field by reflecting luminous flux which is passed through the peripheral part of parallel plane transmission member to the peripheral part of the transmission member. CONSTITUTION:The parallel luminous flux from a laser beam source 1 is converged by an optical image formation system 2 and displaced (h) by passing through the peripheral part 7a of a halving glass 7. The halving glass 7 is rotated around a rotating shaft 6 while its transmission surface is slanted by an angle theta, the intersection of the luminous flux passed through the peripheral part 7a of the halving glass 7 and a surface perpendicular to the optical axis 20 draws a circular track. The luminous flux passes through the peripheral part 7a is reflected twice by reflecting mirrors 81 and 82 to return the peripheral part 7a of the halving glass 7, and the luminous flux is displaced by the halving glass 7 as well as on the forward path. Namely, the luminous flux passed through the peripheral part 7a of the halving glass 7 draws a linear reciprocal track on the return path and its amplitude is 2h.

7. 发明专利

JPS6217630A APPARATUS FOR INSPECTING FIBER BUNDLE FOR ILLUMINATION 失效
公开(公告)号：JPS6217630A
公开(公告)日：1987-01-26
申请号：JP15663285
申请日：1985-07-16
申请人： NIPPON KOGAKU KK
发明人： TAKAGI SHUHEI , SUDO TAKESHI , KONNO KUNIO , MOROI AKIHIKO
IPC分类号： G01M11/00
摘要： PURPOSE:To perform inspection generating no illumination irregularity, by scanning the emitting end surface of an illumination fiber bundle by an aperture stop having a predetermined aperture and measuring the quantity of light passing through the aperture to measure the quantity-of-light distribution of emitted luminous flux at the emitting end surface. CONSTITUTION:The light of a light source 2 lighting by the current supplied from a power source 1 is incident on one end 20a of a random fiber bundle 20 by a condensing lens 3 and emitted from the emitting end 20b thereof. The emitting end part 20c of the fiber bundle 20 is held by a fixed holding jig 4. One end of a rotary mirror cylinder 5 is supported in a rotatable manner by the jig 4 and an iris plate 6 having a fan-shaped aperture 6a, a condensing lens 7 and a light receiving element 8 are provided in the mirror cylinder 5. The output of the element 8 is amplified by an amplifier 9 and subsequently displayed by a digital voltmeter 10. The change in the quantity of light during measurement is detected by a light receiving element 11 and the measured value of the meter 10 is corrected on the basis of detected output. By this method, inspection generating no illumination irregularity can be performed.

8. 发明专利

JPS61275815A SCANNING OPTICAL DEVICE 失效
公开(公告)号：JPS61275815A
公开(公告)日：1986-12-05
申请号：JP11930785
申请日：1985-05-31
申请人： NIPPON KOGAKU KK
发明人： UEHARA MAKOTO , MATSUMOTO KOICHI , TAKAGI SHUHEI , KAKIZAKI YUKIO
IPC分类号： G02B26/10
摘要： PURPOSE:To obtain good deviation reproducibility and deviation of proper extent and to eliminate curvature of field by forming two parallel plane transmission members rotatably around an optical axis at the same angular velocity in the mutually opposite directions. CONSTITUTION:This optical device consists of a laser light source 1, an optical image forming system 2 which forms an image at a rear focus position BF with parallel luminous flux from the laser light source 1, and halving glasses Hf and Hs as parallel plane transmission members put in converged luminous flux of the optical image forming system 2. The angles thetaf and thetas, thicknesses (df) and (ds), and refractive indexes (nf) and (ns) of the two halving glasses Hf and Hs are so determined that their deviations (hf) and (hs) are equal to each other. The halving glasses Hf and Hs are rotated at around the optical axis 20 of the optical image forming system 2 at the same angular velocity in the mutually opposite direction to displace reciprocally the image forming point of the light beam from the laser light source 1 only in a Y-axis direction on the X-Y coordinate plane at the rear focus position BF, so that a sine-wave scan in the Y-axis direction is made to an amplitude h5=2hf.

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