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1. 发明公开

EP2648405A4 IMAGING ELEMENT AND IMAGING DEVICE 审中-公开
标题翻译：图元与图像设备
公开(公告)号：EP2648405A4
公开(公告)日：2014-07-30
申请号：EP11845487
申请日：2011-11-29
申请人： NIPPON KOGAKU KK
发明人： SHIBAZAKI KIYOSHIGE , HAMASHIMA MUNEKI , MORI SUSUMU , SUZUKI SATOSHI
IPC分类号： H04N5/369 , H01L27/14 , H04N9/07 , H04N13/02
CPC分类号： H04N13/0285 , H01L27/14621 , H01L27/14623 , H01L27/14629 , H04N13/0225 , H04N13/0257
摘要： In order to acquire an image having a plurality of parallaxes, it is necessary to prepare a corresponding number of complex image capturing systems. To solve this problem, provided is an image capturing element comprising photoelectric converting elements that are arranged two-dimensionally and photoelectrically convert incident light into an electric signal; aperture masks that correspond one-to-one with the photoelectric converting elements; and color filters that correspond one-to-one with the photoelectric converting elements. Among n adjacent photoelectric converting elements, where n is an integer no less than three, apertures of the aperture masks corresponding to at least three of the photoelectric converting elements are included within each pattern of a color filter pattern formed from at least two types of the color filters that respectively pass different wavelength bands, and are positioned to respectively pass light from different partial regions within a cross-sectional region of the incident light, and photoelectric converting element groups that are each formed of the n photoelectric converting elements are arranged in series.

2. 发明公开

EP2876482A4 OPTICAL ELEMENT, OPTICAL DEVICE, MEASUREMENT DEVICE, AND SCREENING DEVICE 审中-公开
标题翻译：光学元件的光学设备，测量装置和筛分装置
公开(公告)号：EP2876482A4
公开(公告)日：2016-04-13
申请号：EP13820496
申请日：2013-07-09
申请人： NIPPON KOGAKU KK
发明人： MORI SUSUMU , SAITO TOMOYA , UEDA TAKEHIKO , HAMASHIMA MUNEKI , YOSHINO KUNIHIKO , KATO MASANOBU
IPC分类号： G02B21/06 , G01B11/00 , G01N21/27 , G01N21/64 , G02B5/26 , G02B5/28 , G02B21/16 , G02B27/10
CPC分类号： G02B5/22 , G01N21/64 , G01N21/6458 , G02B5/285 , G02B21/16 , G02B27/1006
摘要： An optical element includes a separation section that can separate incident light according to a wavelength. The separation section has an optical characteristic in which incident light in a first wavelength band is reflected, incident light in a second wavelength band is transmitted, and incident light in a third wavelength band is partially transmitted and partially reflected.

3. 发明公开

EP1011128A4 PROJECTION EXPOSURE METHOD, PROJECTION ALIGNER, AND METHODS OF MANUFACTURING AND OPTICALLY CLEANING THE ALIGNER 失效
标题翻译：投射曝光过程中，PROJEKTIONSAUSRICHTEINRICHTUNG和方法生产光学和清洁对齐
公开(公告)号：EP1011128A4
公开(公告)日：2004-11-10
申请号：EP98933886
申请日：1998-07-22
申请人： NIPPON KOGAKU KK
发明人： MATSUMOTO YUKAKO , MORI SUSUMU , OGATA TARO
IPC分类号： G03F7/20 , H01L21/027 , H01L21/304
CPC分类号： G03F7/70108 , G03F7/2006 , G03F7/70208 , G03F7/70925
摘要： A laser beam emitted from an exposure laser beam source has a uniform illuminance distribution after passing through a fly-eye lens selected according to the aperture stop. The exposure light is projected onto a reticle on which a predetermined pattern is formed, and the reticle pattern is projected onto a wafer by means of a projection optical system having a pupil filter inserted therein. A cleaning light beam branching off from the exposure light beam is projected through a beam splitter and a total reflection mirror onto the fly-eye lens located at a retraction position. A plane-parallel plate at the retraction position is irradiated with a cleaning light beam. The fly-eye lens and the plane-parallel plate are self-cleansed by the cleaning light beam, so that the transmissivity is kept higher than a predetermined value during standby.

4. 发明公开

EP3081974A4 OPTICAL APPARATUS, MEASURING APPARATUS, MEASURING METHOD, SCREENING APPARATUS, AND SCREENING METHOD 有权
标题翻译： OPTISCHE VORRICHTUNG，MESSVORRICHTUNG，MESSVERFAHREN，SCREENING-VORRICHTUNG UND SCREENING-VERFAHREN
公开(公告)号：EP3081974A4
公开(公告)日：2017-07-26
申请号：EP14869374
申请日：2014-12-08
申请人： NIPPON KOGAKU KK
发明人： MORI SUSUMU , SAITO TOMOYA
IPC分类号： G02B21/00 , G01N21/64 , G02B5/22 , G02B5/26 , G02B21/12 , G02B27/14
CPC分类号： G02B21/0032 , G01N21/6458 , G01N21/6486 , G01N2021/6471 , G02B5/22 , G02B5/26 , G02B21/0064 , G02B21/0076 , G02B21/12 , G02B27/141
摘要： An optical apparatus includes a first optical element and a second optical element capable of separating incident light according to a wavelength of the incident light. The first optical element includes a first separation section having first optical characteristics for reflecting light in a first wavelength band, transmitting light in a second wavelength band, and partially transmitting and partially reflecting light in a third wavelength band. The second optical element includes a second separation section having second optical characteristics for separating incident light that is incident in two wavelength bands including the first wavelength band or the second wavelength band and the third wavelength band into the light in the first wavelength band or the light in the second wavelength band and the light in the third wavelength band according to the wavelength.
摘要翻译：一种光学设备包括能够根据入射光的波长分离入射光的第一光学元件和第二光学元件。第一光学元件包括第一分离部分，该第一分离部分具有用于反射第一波段中的光，传输第二波段中的光以及部分地传输和部分地反射第三波段中的光的第一光学特性。第二光学元件包括具有第二光学特性的第二分离部分，用于将入射在包括第一波长带或第二波长带和第三波长带的两个波长带中的入射光分离为第一波长带中的光或者光根据波长在第二波长带和第三波长带的光。

5. 发明公开

EP1075017A4 OPTICAL DEVICE AND EXPOSURE SYSTEM EQUIPPED WITH OPTICAL DEVICE 审中-公开
标题翻译：光学装置和如此装备的曝光系统
公开(公告)号：EP1075017A4
公开(公告)日：2005-04-20
申请号：EP99910730
申请日：1999-03-26
申请人： NIPPON KOGAKU KK
发明人： MURAYAMA MASAYUKI , NAKAMURA KYOJI , OGATA TARO , MORI SUSUMU
IPC分类号： G03F7/20 , H01L21/027
CPC分类号： G03F7/70058 , G03F7/70808 , G03F7/70883 , G03F7/70933 , G03F7/70983
摘要： An optical apparatus having at least one optical element arranged along an optical path of an irradiation light. A first hermetic chamber is defined along the optical path separating the optical path from ambient air and charged with a predetermined gas. A second hermetic chamber is located in the first hermetic chamber separating the optical path from the gas in the first hermetic chamber and retaining the optical elements.

6. 发明专利

JPH0581046B2 失效
公开(公告)号：JPH0581046B2
公开(公告)日：1993-11-11
申请号：JP29144285
申请日：1985-12-24
申请人： NIPPON KOGAKU KK
发明人： KAKIZAKI YUKIO , UMAGOME NOBUTAKA , MORI SUSUMU , HAYASHI YUTAKA
IPC分类号： H01L21/30 , G03F7/20 , G03F9/00 , H01L21/027 , H01L21/67 , H01L21/68

7. 发明专利

JPH0521331B2 失效
公开(公告)号：JPH0521331B2
公开(公告)日：1993-03-24
申请号：JP15019686
申请日：1986-06-26
申请人： NIPPON KOGAKU KK
发明人： OKUYAMA TAKESHI , KAKIZAKI YUKIO , MORI SUSUMU
IPC分类号： G01B11/00 , G03F9/00 , H01L21/027 , H01L21/30 , H01L21/67 , H01L21/68

8. 发明专利

JPS6242112A OPTICAL COMPENSATION SYSTEM FOR LENGTH OF OPTICAL PATH 失效
公开(公告)号：JPS6242112A
公开(公告)日：1987-02-24
申请号：JP18243685
申请日：1985-08-20
申请人： NIPPON KOGAKU KK
发明人： UEHARA MAKOTO , ENDO KAZUMASA , MORI SUSUMU , TAKAGI SHUHEI , KAKIZAKI YUKIO
IPC分类号： G02B27/00 , G02B26/10 , G03F7/20 , G03F9/00
摘要： PURPOSE:To maintain the conjugate relation between an image and a pupil even when an objective is moved freely in a two-dimensional plane by moving the 2nd reflecting member so that the rear focus position of the 1st objective coincides with the front focus position of the 2nd objective at any time. CONSTITUTION:The quantity OP of movement of a vertical mirror M11 is decomposed into an (x)-directional and a (y)-directional component, the optical path length between a moving mirror M12 and the 1st objective L11 varies by the quantity DELTAx of (x) directional movement, and the optical path length between the moving mirror M12 and the 3rd mirror M13 varies by the quantity of DELTAy of (y)-directional movement, so that the quantity of variation in optical path length between the 1st objective L11 and the 2nd objection L12 is DELTAx+DELTAy. Further, a correction moving device Mv3 moves a couple of mirrors M13 and M14 by delta along the optical axis of the 2nd objective L12, and then the optical path length between the 1st objective L11 and the 2nd objective L12 varies by 2delta. For the purpose, the couple of mirrors M13 and M14 are only moved satisfying and equation so as to hold the optical path length between the 1st objective L11 and the 2nd objective L12 constant.

9. 发明专利

JP2541219B2 失效
公开(公告)号：JP2541219B2
公开(公告)日：1996-10-09
申请号：JP11716787
申请日：1987-05-15
申请人： NIPPON KOGAKU KK
发明人： MORI SUSUMU , SHIBUYA MASATO
IPC分类号： H01L21/30 , G03F7/20 , G03F9/00 , H01L21/027

10. 发明专利

JPS6111715A Large aperture diameter single lens 失效
标题翻译：大孔径直径单镜头
公开(公告)号：JPS6111715A
公开(公告)日：1986-01-20
申请号：JP13150084
申请日：1984-06-26
申请人： Nippon Kogaku Kk
发明人： MATSUMOTO KOUICHI , MORI SUSUMU
IPC分类号： G02B9/02 , G02B13/00 , G02B13/18
摘要： PURPOSE: To provide the sensitivity with parallel eccentricity which is not excessively large and to correct satisfactorily sine conditions as well by forming a titled lens in such a way that the aspherical shape of the lens face on the further conjugation point side out of both aspherical faces satisfies the specific conditions and that the central thickness of the single lens satisfies the specific conditions.
CONSTITUTION: The two lens faces of the single lens having a biconvex shape are formed of the aspherical faces and the shape of the aspherical face of the lens face on the further conjugation point side of the two aspherical faces is formed to satisfy the conditions 0 2 zi . The conditions 0.3
摘要翻译：目的：为了提供不过大的平行偏心的灵敏度，并且通过形成标题透镜，使得透镜的非球面形状在另外的共轭点侧面处于两个非球面的两面以外，正确地满足正弦条件满足具体条件，单透镜的中心厚度满足特定条件。构成：具有双凸形状的单透镜的两个透镜面由非球面形成，并且在两个非球面的另一共轭点侧的透镜面的非球面形状形成为满足条件0 < 当所述形状由所述非球面上的点与透镜面的顶点处的切线平面的距离指定为（x）时，所述形状由下式表示：K <5,0

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