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1. 发明专利

JP2551049B2 失效
公开(公告)号：JP2551049B2
公开(公告)日：1996-11-06
申请号：JP28336587
申请日：1987-11-10
申请人： NIPPON KOGAKU KK
发明人： UMAGOME NOBUTAKA , ENDO KAZUMASA , OGAWA MASAYA , TATENO HIROTAKA
IPC分类号： G01B11/00 , G03F7/20 , G03F9/00 , H01L21/027 , H01L21/30 , H01L21/68

2. 发明专利

JPS60221729A LIGHT SCATTER CONTROLLER USING LIQUID CRYSTAL 失效
公开(公告)号：JPS60221729A
公开(公告)日：1985-11-06
申请号：JP7906084
申请日：1984-04-19
申请人： NIPPON KOGAKU KK
发明人： MIYAJI AKIRA , ICHIHARA YUTAKA , UMAGOME NOBUTAKA
IPC分类号： G02F1/137 , G02F1/1333
摘要： PURPOSE:To obtain the light scatter controller which does not utilize the light scatter effect of a liquid crystal itself by injecting the liquid crystal which has refractive indexes ne, no between a couple of substrates which have a transparent conductive film or opposite electrode on an rugged surface. CONSTITUTION:The transparent substrates 1 and 5 each have a rugged surface as one side, a transparent electrode 2, counter electrode 5, and oriented films 2a and 4a are formed, and the liquid crystal 3 having refractive indexes ne and no is injected through a spacer 6 and a sealing material 7. A voltage is applied between a conductive film 2 and the counter electrode 4 to vary the refractive indexes of the liquid crystal. When the refractive indexes of the liquid crystal coincides with those of the substrates 1 and 5, the liquid crystal becomes transparent and when not, light is scattered to obtain a cloudy state.

3. 发明专利

JPS5764139A Interferometer 失效
标题翻译：干扰仪
公开(公告)号：JPS5764139A
公开(公告)日：1982-04-19
申请号：JP13992980
申请日：1980-10-08
申请人： Nippon Kogaku Kk
发明人： UMAGOME NOBUTAKA , ICHIHARA YUTAKA
IPC分类号： G01M11/02 , G01B9/02
CPC分类号： G01M11/0271 , G01B2290/30
摘要： PURPOSE:To produce interference fringes in arbitraty directions with good accuracy and improve the accuracy of reading by splitting the luminous flux from an object to be detected to two luminous fluxes, and generating diffracted light from one of these luminous fluxes. CONSTITUTION:An optical system 4 forms a focus on a semitransparent plate 7, but since a diffraction grating 8 is placed betweeen an optical system 4 to be detected and a semitransparent plate 7, a number of focuses of different degrees are formed on the plate 7. A focus 0 of zero order and a focus 10 of 1st order form the focus of the wave surface having the aberration on the plate 7, and are so adjusted that a pinhole 12 is located roughly at the center of the focus 10, In this case, the points 9 and 12 where two wave surfaces W1 and W2 are produced are apart in position, and therefore, aberrations are measured in the form of the distortion from the reference interference fringe, and the accuracy is improved.
摘要翻译：目的：以准确的方式在仲裁方向上产生干涉条纹，并通过将被检测物体的光通量分成两个光束，并从这些光通量之一产生衍射光，提高读取精度。构成：光学系统4在半透明板7上形成焦点，但是由于衍射光栅8被放置在要被检测的光学系统4和半透明板7之间，所以在板7上形成不同程度的焦点数零级的焦点0和第一级的焦点10形成具有在板7上的像差的波面的焦点，并且被调整为使得针孔12大致位于焦点10的中心。在这情况下，产生两个波面W1和W2的点9和12分开位置，因此以参考干涉条纹的失真的形式测量像差，并提高精度。

4. 发明专利

JPS61284922A SUBSTRATE PROVIDED WITH DIFFRACTION GRATING AND APPARATUS FOR DETECTING POSITION OF SAID SUBSTRATE 失效
公开(公告)号：JPS61284922A
公开(公告)日：1986-12-15
申请号：JP12584785
申请日：1985-06-10
申请人： NIPPON KOGAKU KK
发明人： UMAGOME NOBUTAKA , KAMEYAMA MASAOMI
IPC分类号： H01L21/30 , G03F9/00 , H01L21/027 , H01L21/67 , H01L21/68
摘要： PURPOSE:To make the width to be detected as a mark narrower than the width of the diffraction grating itself while preventing the minimum width of the grating element from lacking stability upon detection by making the length of each edge of multiple grating elements or the position of each edge in the elongation direction differ with respect to the orientation direction. CONSTITUTION:A plurality of grating elements 1a, 1b having edges, which contribute the diffraction and are parallel with each other, are regularly orientated in one direction so that those individual edges become parallel with each other. Further, the length of each edge or the position of each edge in the elongation direction is made periodically different with respect to said one direction, thereby forming a plurality of regions wherein the distribution of the diffracted light to be generated is different with respect to the width direction orthogonal to said one direction. For example, square (projected) grating elements 1a, 1b, the dimensions of which in the y- and x-directions are both B, are alternately arranged in the y-direction, thereby forming a diffraction grating 1. Moreover, the grating elements 1a, 1b are slightly shifted in the x-direction so that the row of the grating elements 1a and that of the grating elements 1b are overlapped with each other in the x-direction by a dimension D.

5. 发明专利

JPS61215905A POSITION DETECTING DEVICE 失效
公开(公告)号：JPS61215905A
公开(公告)日：1986-09-25
申请号：JP5789085
申请日：1985-03-22
申请人： NIPPON KOGAKU KK
发明人： UMAGOME NOBUTAKA
IPC分类号： H01L21/30 , G01B11/00 , G03F9/00 , H01L21/027 , H01L21/67 , H01L21/68
摘要： PURPOSE:To execute the highly accurate position detection by obtaining a prescribed frequency difference at two beams of luminous fluxe, generating the optical beat at the interference of two or more diffracted light beams and detecting the phase difference with a reference signal having the frequency of the difference between the optical beat signal and the frequency of two beams of luminous fluxe. CONSTITUTION:A laser beam LB from a laser light source 1 makes incident on an acoustic optical modulator 2 and a zero-order beam 10 parallel to the beam LB irradiates a substrate 4 from diagonally. A beam 12 frequency-modulated by the modulator 2 is deflected by a certain angle only to the beam 10 and irradiates the substrate 4 from diagonally. Since for the beam 10 and the beam 12, only the frequency (f) is different, the photoelectric signal goes to be an optical beat signal, and goes to be the sine waveform of the frequency (f) similar to a reference signal MS. The phase difference between the signal MS and the photoelectric signal is obtained by the level of a phase difference signal PDS from a phase difference detecting circuit 8. Here, presently, when the substrate 4 is positioned for two beams of luminous fluxe 10 and 12, the coarse positioning is executed by using a stage 5, after this is completed, a main control device 22 reads the signal PDS and the direction of dislocation is detected by the polarity and the dislocation quantity is detected by the size.

6. 发明专利

JPH0629929B2 失效
公开(公告)号：JPH0629929B2
公开(公告)日：1994-04-20
申请号：JP23280084
申请日：1984-11-05
申请人： NIPPON KOGAKU KK
发明人： ICHIHARA YUTAKA , UMAGOME NOBUTAKA , IIZUKA YUTAKA , KUNIMATSU SHUJI , INABA TOMONARI
IPC分类号： G03B13/24

7. 发明专利

JPH0581046B2 失效
公开(公告)号：JPH0581046B2
公开(公告)日：1993-11-11
申请号：JP29144285
申请日：1985-12-24
申请人： NIPPON KOGAKU KK
发明人： KAKIZAKI YUKIO , UMAGOME NOBUTAKA , MORI SUSUMU , HAYASHI YUTAKA
IPC分类号： H01L21/30 , G03F7/20 , G03F9/00 , H01L21/027 , H01L21/67 , H01L21/68

8. 发明专利

JPS6265327A ALIGNMENT DEVICE 失效
公开(公告)号：JPS6265327A
公开(公告)日：1987-03-24
申请号：JP20483885
申请日：1985-09-17
申请人： NIPPON KOGAKU KK
发明人： NISHI TAKECHIKA , UMAGOME NOBUTAKA
IPC分类号： H01L21/30 , G03F9/00 , H01L21/027 , H01L21/67 , H01L21/68
摘要： PURPOSE:To assure the alignment with high precision eliminating the operation moving a mask and a substrate by a method wherein two materials (or images) are formed on the same plane in an alignment optical system with color aberration corresponding to the interval between the two materials (or images). CONSTITUTION:When a mark space image WMi on a wafer is formed on an optical axis AX, the space image WMi is reformed as a dark vision image WM' on the projection side surface DP of an objective lens 10 intersecting with the optical axis AX. Besides, the images of mark RM1, RM2 are formed as dark vision images RM1', RM2' on the surface DP. Three dark vision images WM', RM1', RM2' of the marks WM, RM1, RM2 are arranged in parallel with one another on the surface DP so that image signals may be transmitted whenever scanning beams of an image pick-up element 11 photoelectrically detect the dark vision images. An image processing circuit detects peaks P1, P2 and P3 by the dark vision image WM' to calculate the distance d1 between the positions x1 and x3 as well as the other distance d2 between the positions x2 and x3 confirming the difference (d1-d2) to be equivalent to the deflection of reticle from the wafer.

9. 发明专利

JPS61110125A Focus plate 失效
标题翻译：聚焦板
公开(公告)号：JPS61110125A
公开(公告)日：1986-05-28
申请号：JP23280084
申请日：1984-11-05
申请人： Nippon Kogaku Kk
发明人： ICHIHARA YUTAKA , UMAGOME NOBUTAKA , IIZUKA YUTAKA , KUNIMATSU SHUJI , INABA TOMONARI
IPC分类号： G03B13/24
摘要： PURPOSE: To prevent a split prism part from turning dark even when a lens is dark or stopped down by forming the 1st ridge prism with the 1st width and the 2nd ridge prism with the 2nd width aperiodically on the surface of a wedge prism.
CONSTITUTION: Two wedge prisms 2a and 2b are formed on the mat surface 1a of a focus plate 1. The 1st ridge prism P
1 of the 1st width which has a ridge line almost at right angles to the displacing direction of a subject image formed by the wedge prism 2a and the 2nd ridge prism P
1 of the 1st width which is wider than the 1st wedge prism P
1 are arrayed aperiodically on the slanting surface of the wedge prism 2a to constitute a group of ridge lines. The wedge prism 3b is the same.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：通过在楔形棱镜的表面上不定期地形成具有第一宽度的第一脊棱镜和第二棱镜的第二宽度不定期地防止棱镜部分变暗，即使透镜较暗或停止。构成：在聚焦板1的垫表面1a上形成有两个楔形棱镜2a和2b。第一宽度的第一脊棱镜P1具有几乎与由像素形成的被摄体图像的位移方向成直角的脊线楔形棱镜2a和比第一楔形棱镜P1宽的第一宽度的第二脊棱镜P1非周期地排列在楔形棱镜2a的倾斜表面上以构成一组脊线。楔形棱镜3b是相同的。

10. 发明专利

JPH0629928B2 失效
公开(公告)号：JPH0629928B2
公开(公告)日：1994-04-20
申请号：JP22179184
申请日：1984-10-22
申请人： NIPPON KOGAKU KK
发明人： ICHIHARA YUTAKA , UMAGOME NOBUTAKA , IIZUKA YUTAKA , KUNIMATSU SHUJI , INABA TOMONARI
IPC分类号： G02B26/10 , G03B13/24

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