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    • 4. 发明授权
    • Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
    • 具有高填充因子阵列铰链悬挂结构的微机电系统二维镜
    • US07443569B2
    • 2008-10-28
    • US11505378
    • 2006-08-17
    • Mohiuddin MalaThomas DucellierAlan Hnatiw
    • Mohiuddin MalaThomas DucellierAlan Hnatiw
    • G02B26/00G02B26/08
    • G02B6/3584B81B3/0062G02B6/3518G02B6/3546G02B6/3548G02B26/0841
    • The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end, and having a flexible connection at a second end opposite the first end. The invention also provides a MEMS mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end; and a vertical actuator connected to the 2-dimensional T-shaped hinge through a rigid connection. The invention also provides a MEMS mirror device, comprising: a mirror connected to a first end of a rotational actuator through bending springs at a first end, and having a torsional spring at a second end opposite the first end; a movable cantilever connected to the mirror through the torsional spring; and a support structure connected to the first end and a second end of the rotational actuator through torsional springs and connected to the movable cantilever.
    • 本发明提供了一种微机电系统(MEMS)镜装置,其包括:在第一端处具有二维旋转T形铰链的反射镜,并且在与第一端相对的第二端处具有柔性连接。 本发明还提供一种MEMS反射镜装置,包括:在第一端具有二维旋转T形铰链的反射镜; 以及通过刚性连接件连接到二维T形铰链的垂直致动器。 本发明还提供了一种MEMS反射镜装置,包括:反射镜,其通过第一端处的弯曲弹簧连接到旋转致动器的第一端,并且在与第一端相对的第二端处具有扭转弹簧; 通过扭转弹簧连接到镜子的可移动悬臂; 以及支撑结构,其通过扭转弹簧连接到旋转致动器的第一端和第二端,并连接到可动悬臂。
    • 5. 发明申请
    • Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
    • 具有高填充因子阵列铰链悬挂结构的微机电系统二维镜
    • US20070058238A1
    • 2007-03-15
    • US11505378
    • 2006-08-17
    • Mohiuddin MalaThomas DucellierAlan Hnatiw
    • Mohiuddin MalaThomas DucellierAlan Hnatiw
    • G02B26/00
    • G02B6/3584B81B3/0062G02B6/3518G02B6/3546G02B6/3548G02B26/0841
    • The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end, and having a flexible connection at a second end opposite the first end. The invention also provides a MEMS mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end; and a vertical actuator connected to the 2-dimensional T-shaped hinge through a rigid connection. The invention also provides a MEMS mirror device, comprising: a mirror connected to a first end of a rotational actuator through bending springs at a first end, and having a torsional spring at a second end opposite the first end; a movable cantilever connected to the mirror through the torsional spring; and a support structure connected to the first end and a second end of the rotational actuator through torsional springs and connected to the movable cantilever.
    • 本发明提供了一种微机电系统(MEMS)镜装置,其包括:在第一端处具有二维旋转T形铰链的反射镜,并且在与第一端相对的第二端处具有柔性连接。 本发明还提供一种MEMS反射镜装置,包括:在第一端具有二维旋转T形铰链的反射镜; 以及通过刚性连接件连接到二维T形铰链的垂直致动器。 本发明还提供了一种MEMS反射镜装置,包括:反射镜,其通过第一端处的弯曲弹簧连接到旋转致动器的第一端,并且在与第一端相对的第二端处具有扭转弹簧; 通过扭转弹簧连接到镜子的可移动悬臂; 以及支撑结构,其通过扭转弹簧连接到旋转致动器的第一端和第二端,并连接到可动悬臂。