专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

FR481021A 未知
公开(公告)号：FR481021A
公开(公告)日：1916-10-24
申请号：FR481021D
申请日：1916-02-22
申请人： GRAHAM MCKINNON
发明人： MCKINNON GRAHAM
IPC分类号： A61G9/00

2. 发明授权

US07432629B2 Articulated MEMs structures 有权
标题翻译：铰接式MEMs结构
公开(公告)号：US07432629B2
公开(公告)日：2008-10-07
申请号：US11354052
申请日：2006-02-15
申请人： Mohiuddin Mala , Barrie Keyworth , John Michael Miller , Thomas Ducellier , Graham McKinnon
发明人： Mohiuddin Mala , Barrie Keyworth , John Michael Miller , Thomas Ducellier , Graham McKinnon
IPC分类号： H02N1/00
CPC分类号： G02B6/3584 , G02B6/3512 , G02B6/356 , G02B6/357 , G02B26/0833
摘要： The present invention relates to an articulated micro-electro-mechanical (MEMS) device, which is constructed in such a way as to enable several of the devices to be closely packed together, i.e. high fill factor, for redirecting specific wavelengths of light from a dispersed optical signal to different output ports. The articulated MEMS device includes multiple pivotally connected sections that are pivotable about two perpendicular axes for limiting the amount of dynamic cross-talk as the device is rotated between different positions.
摘要翻译：铰接式微电机械（MEMS）装置技术领域本发明涉及一种关节式微电机械（MEMS）装置，其以这样的方式构造，以使得几个装置能够紧密地包装在一起，即高填充因子，用于重定向来自将光信号分散到不同的输出端口。铰接的MEMS装置包括多个可枢转地连接的部分，其可围绕两个垂直轴线枢转，以限制当装置在不同位置之间旋转时的动态串扰量。

3. 发明授权

US07302131B2 Sunken electrode configuration for MEMs Micromirror 有权
标题翻译： MEMs微镜的沉没电极配置
公开(公告)号：US07302131B2
公开(公告)日：2007-11-27
申请号：US10944838
申请日：2004-09-21
申请人： Yuan Ma , Graham McKinnon , John Michael Miller
发明人： Yuan Ma , Graham McKinnon , John Michael Miller
IPC分类号： G02B6/26 , G02B6/35 , G02B26/08
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/356 , G02B6/3584 , G02B26/0841 , Y10S359/904
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention electrostatic charges, which build up on exposed dielectric surfaces causing the mirror's angular position to drift over time, are minimized by positioning the hot and ground electrodes at different levels separated by a vertical surface, and placing the dielectric material on the vertical surface.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上，仅具有相对的两者之间的空气间隙较小。在本发明的优选实施例中，通过将热电极和接地电极定位在由垂直表面分开的不同水平处，使暴露的电介质表面上积聚的导致反射镜的角位置随时间漂移的静电电荷被最小化，并且将电介质材料在垂直面上。

4. 发明授权

US06934439B2 Piano MEMs micromirror 有权
标题翻译：钢琴MEMs微镜
公开(公告)号：US06934439B2
公开(公告)日：2005-08-23
申请号：US10445360
申请日：2003-05-27
申请人： Mohiuddin Mala , John Michael Miller , Graham McKinnon , Yuan Ma
发明人： Mohiuddin Mala , John Michael Miller , Graham McKinnon , Yuan Ma
IPC分类号： B81B3/00 , B81B7/02 , B81B7/04 , G02B6/35 , H04J14/02 , G02B26/08
CPC分类号： B81B3/0062 , B81B2201/042 , G02B6/3518 , G02B6/3544 , G02B6/356 , G02B6/357 , G02B6/3584 , Y10S359/904
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相同的轴线枢转地安装，仅具有相对的两者之间的空气间隙较小。在为波长切换应用专门设计的本发明的优选实施例中，通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜，这确保了多个相邻的反射镜装置具有高的填充因子，而不必依靠复杂而昂贵的制造工艺。

5. 发明申请

US20060210238A1 Sunken electrode configuration for MEMs micromirror 有权
标题翻译： MEMs微镜的沉没电极配置
公开(公告)号：US20060210238A1
公开(公告)日：2006-09-21
申请号：US11437652
申请日：2006-05-22
申请人： Yuan Ma , Graham McKinnon , John Miller
发明人： Yuan Ma , Graham McKinnon , John Miller
IPC分类号： G02B6/00
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/356 , G02B6/3584 , G02B26/0841 , Y10S359/904
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention electrostatic charges, which build up on exposed dielectric surfaces causing the mirror's angular position to drift over time, are minimized by positioning the hot and ground electrodes at different levels separated by a vertical surface, and placing the dielectric material on the vertical surface.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上，仅具有相对的两者之间的空气间隙较小。在本发明的优选实施例中，通过将热电极和接地电极定位在由垂直表面分开的不同水平处，使暴露的电介质表面上积聚的导致反射镜的角位置随时间漂移的静电电荷被最小化，并且将电介质材料在垂直面上。

6. 发明申请

US20050089266A1 Sunken electrode configuration for MEMs micromirror 有权
标题翻译： MEMs微镜的沉没电极配置
公开(公告)号：US20050089266A1
公开(公告)日：2005-04-28
申请号：US10944838
申请日：2004-09-21
申请人： Yuan Ma , Graham McKinnon , John Miller
发明人： Yuan Ma , Graham McKinnon , John Miller
IPC分类号： G02B6/26 , G02B6/35
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/356 , G02B6/3584 , G02B26/0841 , Y10S359/904
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention electrostatic charges, which build up on exposed dielectric surfaces causing the mirror's angular position to drift over time, are minimized by positioning the hot and ground electrodes at different levels separated by a vertical surface, and placing the dielectric material on the vertical surface.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于相同的轴线枢转地安装，仅具有相对的两者之间的空气间隙较小。在本发明的优选实施例中，通过将热电极和接地电极定位在由垂直表面分开的不同水平处，使暴露的电介质表面上积聚的导致反射镜的角位置随时间漂移的静电电荷被最小化，并且将电介质材料在垂直面上。

7. 发明授权

US07302132B2 Electrical x-talk shield for MEMs micromirrors 有权
标题翻译：用于MEMs微镜的电气x对讲屏蔽
公开(公告)号：US07302132B2
公开(公告)日：2007-11-27
申请号：US11431665
申请日：2006-05-11
申请人： John Michael Miller , Yuan Ma , Barrie Keyworth , Mohiuddin Mala , Graham McKinnon
发明人： John Michael Miller , Yuan Ma , Barrie Keyworth , Mohiuddin Mala , Graham McKinnon
IPC分类号： G02B6/26 , G02B26/00
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/356 , G02B6/3584
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上，仅具有相对的两者之间的空气间隙较小。在为波长切换应用专门设计的本发明的优选实施例中，通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜，这确保了多个相邻的反射镜装置具有高的填充因子，而不必依靠复杂而昂贵的制造工艺。为了限制相邻反射镜之间的电串扰量，屏蔽可以位于电极之间。屏蔽可以从基板向上延伸和/或从反射镜的下表面向下延伸。当提供两种类型的屏蔽时，一组彼此偏移以防止其邻接，并且能够实现重叠效果，这增强了保护。

8. 发明授权

US07110635B2 Electrical x-talk shield for MEMS micromirrors 有权
标题翻译：用于MEMS微镜的电气x对讲屏蔽
公开(公告)号：US07110635B2
公开(公告)日：2006-09-19
申请号：US10850424
申请日：2004-05-21
申请人： John Michael Miller , Yuan Ma , Barrie Keyworth , Mohiuddin Mala , Graham McKinnon
发明人： John Michael Miller , Yuan Ma , Barrie Keyworth , Mohiuddin Mala , Graham McKinnon
IPC分类号： G02B6/26 , G02B6/35 , G02B26/08
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/356 , G02B6/3584
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上，仅具有相对的两者之间的空气间隙较小。在为波长切换应用专门设计的本发明的优选实施例中，通过使平台能够围绕两个垂直轴线旋转来提供用于其上安装的反射镜的更大范围的弓形运动。根据本发明的优选实施例的MEM反射镜装置使得镜可以通过使用“内部”万向环结构来绕两个垂直轴倾斜，这确保了多个相邻的反射镜装置具有高的填充因子，而不必依靠复杂而昂贵的制造工艺。为了限制相邻反射镜之间的电串扰量，屏蔽可以位于电极之间。屏蔽可以从基板向上延伸和/或从反射镜的下表面向下延伸。当提供两种类型的屏蔽时，一组彼此偏移以防止其邻接，并且能够实现重叠效果，这增强了保护。

9. 发明授权

US07203413B2 Sunken electrode configuration for MEMs micromirror 有权
标题翻译： MEMs微镜的沉没电极配置
公开(公告)号：US07203413B2
公开(公告)日：2007-04-10
申请号：US11437652
申请日：2006-05-22
申请人： Yuan Ma , Graham McKinnon , John Michael Miller
发明人： Yuan Ma , Graham McKinnon , John Michael Miller
IPC分类号： G02B6/00 , G02B6/26 , G02B26/08
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/356 , G02B6/3584 , G02B26/0841 , Y10S359/904
摘要： A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention electrostatic charges, which build up on exposed dielectric surfaces causing the mirror's angular position to drift over time, are minimized by positioning the hot and ground electrodes at different levels separated by a vertical surface, and placing the dielectric material on the vertical surface.
摘要翻译：公开了一种用于光开关的微机电（MEMs）镜装置。 “钢琴”型MEMs装置包括通过扭转铰链靠近其中间枢转地安装的细长平台。平台的中间部分和扭转铰链的组合宽度小于平台的其余部分的宽度，由此，这些“钢琴”MEM装置中的几个可以彼此相邻地定位成相对于枢转地安装在同一轴线上，仅具有相对的两者之间的空气间隙较小。在本发明的优选实施例中，通过将热电极和接地电极定位在由垂直表面分开的不同水平处，使暴露的电介质表面上积聚的导致反射镜的角位置随时间漂移的静电电荷被最小化，并且将电介质材料在垂直面上。

10. 发明申请

US20060145793A1 Micro-electromechanical relay and related methods 失效
标题翻译：微机电继电器及相关方法
公开(公告)号：US20060145793A1
公开(公告)日：2006-07-06
申请号：US11028620
申请日：2005-01-05
申请人： Yuebin Ning , Graham McKinnon , Cameron Howey , Michael Colgan
发明人： Yuebin Ning , Graham McKinnon , Cameron Howey , Michael Colgan
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H61/02 , H01H2061/006 , Y10T29/49083 , Y10T29/49147 , Y10T29/49155
摘要： The present invention provides a micro-electromechanical relay that can produce low electrical contact resistance, and is capable of mechanical latching. More specifically, the present invention combines the clamping actions of cantilever beams with a movable shuttle-like spacer to generate high contact forces at the metal-metal contacts of the micro-electromechanical relay, thereby producing a very low electrical contact resistance and a mechanism for mechanical latching. Methods of fabricating the micro-electromechanical relay are also provided in this invention, which offer the advantages of both design and fabrication flexibilities by processing the top and bottom substrates separately prior to joining them together.
摘要翻译：本发明提供一种能够产生低电接触电阻并且能够机械闭锁的微机电继电器。更具体地，本发明将悬臂梁的夹持动作与可移动的梭状间隔件结合，以在微机电继电器的金属 - 金属触点处产生高接触力，由此产生非常低的电接触电阻和用于机械闭锁。在本发明中还提供了制造微机电继电器的方法，其通过在将它们连接在一起之前分别处理顶部和底部基底来提供设计和制造灵活性的优点。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式