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1. 发明专利

JP2013152979A Solar cell module and manufacturing method therefor 有权
标题翻译：太阳能电池模块及其制造方法
公开(公告)号：JP2013152979A
公开(公告)日：2013-08-08
申请号：JP2012011837
申请日：2012-01-24
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： HAMAGUCHI TSUNEO , YABUGAKI YOSHIMI , NONOGAKI MITSUHIRO , MIYAMOTO SHINSUKE
IPC分类号： H01L31/042 , H01L31/04
CPC分类号： Y02E10/50
摘要： PROBLEM TO BE SOLVED: To provide a low cost solar cell module having a high conversion efficiency in which a wiring material and a thin line electrode can attain a sufficient mechanical bonding strength, and warpage of a solar cell element is reduced, and to provide a manufacturing method therefor.SOLUTION: A solar cell module 100 includes a solar cell element 1, a plurality of thin line electrodes 2a formed on the light-receiving surface 1a of the solar cell element 1, a back electrode formed on the rear surface 1b of the solar cell element 1, and a wiring material 5 for taking out power from the thin line electrodes 2a and the back electrode. A reinforcement electrode 6 wider than the thin line electrodes 2a is provided at an end of the light-receiving surface 1a. The reinforcement electrode 6 and the thin line electrodes 2a are joined to the wiring material 5 using a solder 3. Both sides of the solder joint are covered with a thermosetting resin 4, and a part of the light-receiving surface 1a, not provided with the reinforcement electrode 6 and the thin line electrodes 2a, and the wiring material 5 are bonded by the thermosetting resin 4.
摘要翻译：要解决的问题：为了提供具有高转换效率的低成本太阳能电池模块，其中布线材料和细线电极可以获得足够的机械结合强度，并且太阳能电池元件的翘曲减小，并且提供太阳能电池模块100包括太阳能电池元件1，形成在太阳能电池元件1的受光面1a上的多条细线电极2a，形成在太阳能电池元件1的背面1b上的背面电极太阳能电池元件1和用于从细线电极2a和背面电极取出电力的布线材料5。在光接收表面1a的一端设有比细线电极2a宽的加强电极6。加强电极6和细线电极2a使用焊料3接合到布线材料5.焊接接头的两侧被热固性树脂4覆盖，并且光接收表面1a的一部分没有加强电极6和细线电极2a以及布线材料5通过热固性树脂4接合。

2. 发明专利

JP2011165806A Method of manufacturing solar cell 审中-公开
标题翻译：制造太阳能电池的方法
公开(公告)号：JP2011165806A
公开(公告)日：2011-08-25
申请号：JP2010025378
申请日：2010-02-08
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： KOBAYASHI JUNJI , MURAKAMI TOSHIYA , SAWAI TAKASHI , NONOGAKI MITSUHIRO , TAKADA TAKESHI
IPC分类号： H01L31/04
CPC分类号： Y02E10/50
摘要： PROBLEM TO BE SOLVED: To provide a solar cell that is superior in designability and photoelectric conversion efficiency, suitable for mass-production, and inexpensive. SOLUTION: The method of manufacturing the solar cell having an n-type phosphorus-diffused layer formed by diffusing phosphorus to a surface of a p-type semiconductor substrate, and a nitride film provided on the phosphorus-diffused layer includes a first process of forming the phosphorus-diffused layer by diffusing the phosphorus to the surface of the semiconductor substrate, a second process of removing a phosphorus glass layer formed on a surface of the semiconductor substrate including a top of the phosphorus-diffused layer in the first process, and a third process of forming the nitride film on the phosphorus-diffused layer having the phosphorus glass layer removed. The adsorption of an organic substance whose mass spectrum by mass spectrometry has the largest peak in mass-to-charge ratio (mass number/electric charge) 88 is judged for a surface of the phosphorus glass layer after the first process and before the second process, and only when it is determined that the organic substance is adsorbed, the surface of the phosphorus-diffused layer is subjected to plasma processing using ammonia gas after the second process and before the third process. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种太阳能电池，其设计性和光电转换效率优异，适合批量生产，价格便宜。解决方案：制造具有通过将磷扩散到p型半导体衬底的表面而形成的n型磷扩散层的太阳能电池的制造方法和设置在磷扩散层上的氮化物膜包括第一通过将磷扩散到半导体衬底的表面来形成磷扩散层的工艺，在第一工序中除去形成在包括磷扩散层的顶部的半导体衬底的表面上的磷玻璃层的第二工序以及在去除了磷玻璃层的磷扩散层上形成氮化物膜的第三工序。在第一次处理之后和第二次处理之前，对质量比（质量/电荷）88具有最大峰值质量谱的有机物质的吸附判定为磷玻璃层的表面只有当确定有机物质被吸附时，磷扩散层的表面在第二次处理之后和第三次处理之前使用氨气进行等离子体处理。版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2011096853A Solar battery cell and manufacturing method thereof 有权
标题翻译：太阳能电池及其制造方法
公开(公告)号：JP2011096853A
公开(公告)日：2011-05-12
申请号：JP2009249381
申请日：2009-10-29
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： MURAKAMI TOSHIYA , KOBAYASHI JUNJI , NONOGAKI MITSUHIRO , HOSOKAWA YUICHIRO , HAMA ATSURO
IPC分类号： H01L31/04 , H01L21/28 , H01L21/288 , H01L31/042
CPC分类号： Y02E10/546
摘要： PROBLEM TO BE SOLVED: To obtain a solar battery cell preventing an occurrence of a bulge and a protrusion of an aluminum electrode to achieve a good process yield, and to obtain its manufacturing method. SOLUTION: The solar battery cell has: a p-type polycrystalline Si substrate 1; an n-type diffusion layer 2 formed on a light-receiving surface of the p-type polycrystalline Si substrate 1; a surface side electrode 7 provided on the n-type diffusion layer 2; and an aluminum electrode 5 and a silver electrode 16 provided on the surface layer of the surface opposite to the light-receiving surface of the p-type polycrystalline Si substrate 1. An Si oxide film 4 is interposed between the aluminum electrode 5 and a silver electrode 16, and the p-type polycrystalline Si substrate 1, and is heat treated. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：解决的问题：为了获得防止发生铝电极的凸起和突出的太阳能电池，以获得良好的加工收率，并获得其制造方法。太阳能电池单元具有：p型多晶Si衬底1; 形成在p型多晶Si衬底1的受光面上的n型扩散层2; 设置在n型扩散层2上的表面侧电极7; 以及设置在与p型多晶Si基板1的受光面相反的表面的表面层上的铝电极5和银电极16.在铝电极5和银之间插入有氧化硅膜4 电极16和p型多晶Si基板1，进行热处理。版权所有（C）2011，JPO＆INPIT

4. 发明专利

JP2010192858A Solar cell and method of manufacturing the same 审中-公开
标题翻译：太阳能电池及其制造方法
公开(公告)号：JP2010192858A
公开(公告)日：2010-09-02
申请号：JP2009038565
申请日：2009-02-20
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： KOBAYASHI JUNJI , MURAKAMI TOSHIYA , NONOGAKI MITSUHIRO , HOSOKAWA YUICHIRO , HAMA ATSURO
IPC分类号： H01L31/04 , H01L21/28
CPC分类号： Y02E10/546
摘要： PROBLEM TO BE SOLVED: To provide a solar cell superior in the yield wherein the occurrence of blister and protrusion in a back electrode is prevented, and to provide a method of manufacturing the same. SOLUTION: The solar cell includes a silicon substrate 13 comprising a first conductive type layer, a second conductive type layer 15 formed on a light receiving surface of the silicon substrate 13, a light receiving surface side electrode 21 provided on the second conductive type layer 15, and a back electrode 27 provided on the backside opposite to the light receiving surface of the silicon substrate 13. The back electrode 27 includes a first back electrode 29 provided on the backside with an aluminum as a main component, and a second back electrode 31 which contains one or more kinds of metal selected from a group containing silver, copper, gold and nickel, and is provided on the entire surface of the first back electrode 29. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种防止在背面电极中发生起泡和突起的产率优异的太阳能电池，并提供其制造方法。解决方案：太阳能电池包括硅基板13，其包括第一导电类型层，形成在硅基板13的光接收表面上的第二导电类型层15，设置在第二导电类型上的光接收表面侧电极21 类型层15和设置在与硅基板13的光接收表面相对的背面上的背面电极27.背面电极27包括设置在背面的铝作为主要部件的第一背面电极29，背面电极31，其包含选自银，铜，金和镍的一种或多种金属，并且设置在第一背面电极29的整个表面上。（C）2010，JPO和INPIT

5. 发明专利

JP2014203849A 太陽電池用基板の製造方法及び太陽電池有权
标题翻译：太阳能电池和太阳能电池基板的制造方法
公开(公告)号：JP2014203849A
公开(公告)日：2014-10-27
申请号：JP2013076231
申请日：2013-04-01
申请人：三菱電機株式会社 , Mitsubishi Electric Corp
发明人： NONOGAKI MITSUHIRO , TSUGENO HAJIME , KARAKIDA SHOICHI , OSHIRO YUSUKE , KAWASAKI TAKAHIRO
IPC分类号： H01L31/04 , H01L21/306
CPC分类号： Y02E10/50 , Y02P70/521
摘要：【課題】薬液使用コストを低減でき、かつ基板面内均一で太陽電池特性低下を引き起こさないテクスチャー構造を得ること。【解決手段】加工用スラリーを用いて半導体インゴットをスライスして半導体基板を切り出し、ウエハ表面のスラリーを除去した後、該基板を表面処理することにより、基板表面にテクスチャーを形成する太陽電池用基板の製造方法であって、p型単結晶シリコン基板などの半導体基板の表面処理を、少なくとも過酸化水素と金属捕捉剤を含む第1の水溶液に浸漬して基板表面の有機不純物と金属不純物を除去した(S1003)後、少なくともアルカリ物質を含む第2の水溶液で、前記半導体基板のスライスにより生じた基板表面のダメージ層を除去した(S1004)後、アルカリ系水溶液などの第3の水溶液に浸漬して、異方性エッチングを行い(S1005)、凹凸部からなるテクスチャー構造を形成する。【選択図】図1
摘要翻译：要解决的问题：获得可以降低液体化学品使用成本的纹理结构，其在基板表面中是均匀的，并且防止太阳能电池的特性被降低。解决方案：一种制造方法用于太阳能电池的衬底包括：通过在使用处理浆料的同时切割半导体锭来切割半导体衬底; 以及在除去晶片表面上的浆料之后，通过对基板进行表面处理，在基板的表面上形成纹理。在诸如p型单晶硅衬底的半导体衬底的表面处理中，将半导体衬底浸入至少含有过氧化氢和金属清除剂的第一水溶液中，以除去有机杂质和金属杂质基板表面（S1003），然后在含有至少一种碱性物质的第二水溶液（S1004）中除去在半导体晶片上切片得到半导体基板而导致的基板表面上的损伤层（S1004），然后将其浸入第三水溶液溶液，例如碱性水溶液，用于进行各向异性蚀刻（S1005），从而形成由凹凸形成的织构结构。

6. 发明专利

JP2013229387A Etching device and solar cell manufacturing method using the same 审中-公开
标题翻译：蚀刻装置和使用其的太阳能电池制造方法
公开(公告)号：JP2013229387A
公开(公告)日：2013-11-07
申请号：JP2012098949
申请日：2012-04-24
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： KANO SHINTARO , NONOGAKI MITSUHIRO , YOSHIDA YASUHIRO
IPC分类号： H01L21/306 , H01L31/04
CPC分类号： Y02E10/546
摘要： PROBLEM TO BE SOLVED: To form uniform texture in a silicon substrate and thereby manufacture a solar cell having high power generation efficiency at a high yield rate.SOLUTION: A texture etching apparatus (etching apparatus) 100 is an etching apparatus used to etch a silicon substrate such as a p-type single crystal silicon substrate 8 by immersing it in an etching liquid 9. The etching apparatus 100 comprises: an etching tank 1 in which the etching liquid 9 is stored; a silicate removing device 4 in which silicate having liquated out in the etching liquid 9 is deposited and then removed; and an etching liquid standby tank 7 in which an etching liquid 9 having its silicate concentration lowered is kept on standby.
摘要翻译：要解决的问题：在硅衬底中形成均匀的结构，从而以高产率制造具有高发电效率的太阳能电池。解决方案：纹理蚀刻装置（蚀刻装置）100是用于蚀刻硅的蚀刻装置基板，例如p型单晶硅基板8，浸渍在蚀刻液9中。蚀刻装置100包括：蚀刻槽1，其中存储有蚀刻液9; 硅酸盐去除装置4，其中沉积蚀刻液9中已液化的硅酸盐然后除去; 以及其中硅酸盐浓度降低的蚀刻液9保持待机的蚀刻液体备用槽7。

7. 发明专利

JP2009290013A Method of manufacturing solar cell, and solar cell 审中-公开
标题翻译：制造太阳能电池和太阳能电池的方法
公开(公告)号：JP2009290013A
公开(公告)日：2009-12-10
申请号：JP2008141394
申请日：2008-05-29
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： NONOGAKI MITSUHIRO , KOBAYASHI JUNJI , FUJIWARA TOSHIHIKO , MIZUGUCHI KAZUO
IPC分类号： H01L31/04
CPC分类号： Y02E10/50
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell which uses as a base material a silicon board obtaining a cleaning degree by which an improvement of a power generation efficiency is expected by removing a metal stuck to a front surface by a procedure which is safe, very simple and cheap. SOLUTION: Out of processes of manufacturing the solar cell, a silicon board cleaning process SW is carried out immediately after any process of a damaged layer removal process S2 and a texture formation process S3. This silicon board cleaning process SW is formed by carrying out an immersion treatment of the silicon board which is the base material of the solar cell in mixed solution of hydrofluoric acid and hydrogen peroxide, and by removing the metal stuck on the silicon board. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种制造太阳能电池的方法，该太阳能电池使用获得清洁度的硅板作为基材，通过该硅板预期通过去除粘附在前表面上的金属来预期发电效率的提高通过安全，非常简单和便宜的程序。解决方案：在制造太阳能电池的工艺之外，在损坏层去除工艺S2和纹理形成工艺S3的任何工艺之后立即执行硅板清洁工艺SW。该硅板清洗工序SW是通过在氢氟酸和过氧化氢的混合溶液中进行作为太阳能电池基材的硅板的浸渍处理，以及通过去除粘在硅板上的金属来形成的。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2012248633A Etching device, manufacturing method of solar cell, and solar cell 审中-公开
标题翻译：蚀刻装置，太阳能电池的制造方法和太阳能电池
公开(公告)号：JP2012248633A
公开(公告)日：2012-12-13
申请号：JP2011118383
申请日：2011-05-26
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： MURAKAMI TOSHIYA , YASUNAGA NOZOMI , KARAKIDA SHOICHI , NONOGAKI MITSUHIRO , KOBAYASHI JUNJI , YOSHIDA YASUHIRO , OSHIRO YUSUKE
IPC分类号： H01L21/306 , H01L31/04
CPC分类号： Y02E10/546
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a solar cell capable of manufacturing a solar cell having high generation efficiency with a high yield by forming a uniform texture in a silicon substrate surface by reducing cation concentration in an etching liquid by a texture etching step which uses an alkali solution and using a substrate whose surface is not contaminated.SOLUTION: A texture etching device (etching device) 100 for etching a silicon substrate 8 containing a p- or n-type dopant by immersing the silicon substrate in an etching liquid 9 comprises: an etching bath 1 which stores the etching liquid 9; and a first cation removal device 4A and a second cation removal device 4B which adsorb and collect the cations which are eluted into the etching liquid 9.
摘要翻译：解决的问题：提供一种太阳能电池的制造方法，其能够通过在蚀刻液中通过减少蚀刻液中的阳离子浓度来减少蚀刻液中的阳离子浓度，通过在硅衬底表面中形成均匀的织构，以高产率制造具有高发电效率的太阳能电池纹理蚀刻步骤，其使用碱溶液并使用表面未被污染的基材。解决方案：通过将硅衬底浸渍在蚀刻液体9中来蚀刻包含p型或n型掺杂剂的硅衬底8的纹理蚀刻装置（蚀刻装置）100包括：蚀刻槽1，其存储蚀刻液 9; 以及第一阳离子去除装置4A和第二阳离子去除装置4B，其吸附并收集洗脱到蚀刻液体9中的阳离子。版权所有（C）2013，JPO＆INPIT

9. 发明专利

JP2014167979A Process of manufacturing solar cell 审中-公开
标题翻译：制造太阳能电池的过程
公开(公告)号：JP2014167979A
公开(公告)日：2014-09-11
申请号：JP2013039295
申请日：2013-02-28
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： OKIMOTO TAKASHI , NONOGAKI MITSUHIRO , NAKATANI MITSUNORI , KAWASAKI TAKAHIRO
IPC分类号： H01L31/04 , H01L31/06
CPC分类号： Y02E10/547
摘要： PROBLEM TO BE SOLVED: To obtain with high yield a solar cell excellent in photoelectric conversion efficiency by removing foreign matters without breaking a fine uneven structure.SOLUTION: The process of manufacturing a solar cell includes steps of: preparing a first conductivity type crystal system semiconductor substrate having a second conductivity type semiconductor layer 3 on a first front surface side having a texture structure; forming an anti-reflection coating 4 on the second conductivity type semiconductor layer 3; removing foreign matters 14 of a surface of the anti-reflection coating 4; and forming on the anti-reflection coating 4 a light-receiving surface side electrode that is electrically coupled to the second conductivity type semiconductor layer 3.
摘要翻译：要解决的问题为了获得高产率的太阳能电池，通过去除异物而不破坏微细的不均匀结构，光电转换效率优异。解决方案：制造太阳能电池的过程包括以下步骤：制备第一导电型晶体系统半导体在具有纹理结构的第一前表面侧上具有第二导电类型半导体层3的衬底; 在第二导电类型半导体层3上形成防反射涂层4; 去除防反射涂层4的表面的异物14; 并且在防反射涂层4上形成电耦合到第二导电类型半导体层3的受光面侧电极。

10. 发明专利

JP2013098301A Etching apparatus, etching method, and method for manufacturing solar cell 审中-公开
标题翻译：蚀刻装置，蚀刻方法和制造太阳能电池的方法
公开(公告)号：JP2013098301A
公开(公告)日：2013-05-20
申请号：JP2011238807
申请日：2011-10-31
申请人： Mitsubishi Electric Corp , 三菱電機株式会社
发明人： MURAKAMI TOSHIYA , YOSHIDA YASUHIRO , YASUNAGA NOZOMI , KARAKIDA SHOICHI , NONOGAKI MITSUHIRO , KOBAYASHI JUNJI , TSUGENO HAJIME , OSHIRO YUSUKE
IPC分类号： H01L21/306 , H01L31/04
CPC分类号： Y02E10/50
摘要： PROBLEM TO BE SOLVED: To obtain an etching apparatus which is capable of suppressing a texture formation failure as compared with conventional ones in a texture etching process in solar cell manufacturing.SOLUTION: The etching apparatus for etching a silicon substrate 100 by immersing it in an etchant 13 includes: an etching bath 11 in which the etchant 13 is stored and the silicon substrate 100 is etched; and a hydrophobic organic substance collection part 15 for collecting a hydrophobic organic substance eluted into the etchant 13.
摘要翻译：要解决的问题：与太阳能电池制造中的纹理蚀刻工艺中的传统方法相比，获得能够抑制纹理形成故障的蚀刻装置。解决方案：用于通过将硅衬底100浸入蚀刻剂13中来蚀刻硅衬底100的蚀刻装置包括：其中存储蚀刻剂13并蚀刻硅衬底100的蚀刻槽11; 和用于收集洗脱到蚀刻剂13中的疏水性有机物质的疏水性有机物质收集部分15.权利要求：（C）2013，JPO＆INPIT

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