专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06899116B2 Pressure vessel systems and methods for dispensing liquid chemical compositions 失效
标题翻译：用于分配液体化学成分的压力容器系统和方法
公开(公告)号：US06899116B2
公开(公告)日：2005-05-31
申请号：US10830953
申请日：2004-04-23
申请人： Mindi Xu , Hwa-Chi Wang , Herve E. Dulphy
发明人： Mindi Xu , Hwa-Chi Wang , Herve E. Dulphy
IPC分类号： B24B37/04 , B24B57/02 , C12N15/12 , F04F1/06 , H01L21/304
CPC分类号： B24B37/04 , B24B57/02 , Y10T137/0396 , Y10T137/3124 , Y10T137/3127 , Y10T137/3133
摘要： Apparatus and processes are presented to contact a dry, preferably high purity inert gas with a chemical composition in a pressure vessel, or a wetting composition, to form a wet inert gas, which is then used to pressurize the chemical composition out of the pressure vessel. No additional space is needed for an external humidifier. Since a very small amount of vapor is needed to form a wet inert gas, the composition of chemical composition will not be significantly affected.
摘要翻译：提供了装置和方法，以将干燥的，优选高纯度的惰性气体与压力容器或润湿组合物中的化学组成接触，以形成湿惰性气体，然后将其用于将化学组合物从压力容器。外部加湿器不需要额外的空间。由于需要非常少量的蒸气来形成湿惰性气体，所以化学成分的组成不会受到显着的影响。

2. 发明授权

US06736154B2 Pressure vessel systems and methods for dispensing liquid chemical compositions 失效
标题翻译：用于分配液体化学成分的压力容器系统和方法
公开(公告)号：US06736154B2
公开(公告)日：2004-05-18
申请号：US10024087
申请日：2001-12-17
申请人： Mindi Xu , Hwa-Chi Wang , Herve E. Dulphy
发明人： Mindi Xu , Hwa-Chi Wang , Herve E. Dulphy
IPC分类号： F04F106
CPC分类号： B24B37/04 , B24B57/02 , Y10T137/0396 , Y10T137/3124 , Y10T137/3127 , Y10T137/3133
摘要： Apparatus and processes are presented to contact a dry, preferably high purity inert gas with a chemical composition in a pressure vessel, or a wetting composition, to form a wet inert gas, which is then used to pressurize the chemical composition out of the pressure vessel. No additional space is needed for an external humidifier. Since a very small amount of vapor is needed to form a wet inert gas, the composition of chemical composition will not be significantly affected.
摘要翻译：提供了装置和方法，以将干燥的，优选高纯度的惰性气体与压力容器或润湿组合物中的化学组成接触，以形成湿惰性气体，然后将其用于将化学组合物从压力容器。外部加湿器不需要额外的空间。由于需要非常少量的蒸气来形成湿惰性气体，所以化学成分的组成不会受到显着影响。

3. 发明申请

US20060005704A1 Purification and transfilling of ammonia 有权
标题翻译：氨的净化和转运
公开(公告)号：US20060005704A1
公开(公告)日：2006-01-12
申请号：US11009510
申请日：2004-12-13
申请人： Derong Zhou , John Borzio , Mindi Xu , Hwa-Chi Wang , Tran Vuong
发明人： Derong Zhou , John Borzio , Mindi Xu , Hwa-Chi Wang , Tran Vuong
IPC分类号： B01D53/02
CPC分类号： B01D53/261 , B01D53/02 , C01C1/024 , Y10S203/17
摘要： An ammonia purification system includes a hydrocarbon removal station that removes hydrocarbons from gaseous ammonia via adsorption, a moisture removal station that removes water from gaseous ammonia via adsorption, and a distillation station including a distillation column connected with a condenser to facilitate removal of impurities from ammonia and condensation of gaseous ammonia to form a purified liquid ammonia product. The system further includes a storage tank to receive purified ammonia, a remote station connected with the storage tank, and a vaporizer connected with the storage tank. The vaporizer is configured to receive and vaporize liquid ammonia from the storage tank and deliver gaseous ammonia back to the storage tank so as to facilitate pumping of the ammonia to the remote station based upon a vapor pressure established within the storage tank.
摘要翻译：氨净化系统包括通过吸附从气态氨除去烃的除烃站，通过吸附从气态氨除去水的除湿站，以及包括与冷凝器连接的蒸馏塔以便于从氨除去杂质的蒸馏站和气态氨的缩合形成纯化的液氨产物。该系统还包括用于接收净化氨的储罐，与储罐连接的远程站以及与储存罐连接的蒸发器。蒸发器被配置为从储罐接收和蒸发液氨，并将气态氨返回到储罐，以便于基于在储罐内建立的蒸汽压力将氨泵送到远程站。

4. 发明授权

US07297181B2 Purification and transfilling of ammonia 有权
标题翻译：氨的净化和转运
公开(公告)号：US07297181B2
公开(公告)日：2007-11-20
申请号：US11009510
申请日：2004-12-13
申请人： Derong Zhou , John P. Borzio , Mindi Xu , Hwa-Chi Wang , Tran Vuong
发明人： Derong Zhou , John P. Borzio , Mindi Xu , Hwa-Chi Wang , Tran Vuong
IPC分类号： C01C1/02 , B01D53/04
CPC分类号： B01D53/261 , B01D53/02 , C01C1/024 , Y10S203/17
摘要： An ammonia purification system includes a hydrocarbon removal station that removes hydrocarbons from gaseous ammonia via adsorption, a moisture removal station that removes water from gaseous ammonia via adsorption, and a distillation station including a distillation column connected with a condenser to facilitate removal of impurities from ammonia and condensation of gaseous ammonia to form a purified liquid ammonia product. The system further includes a storage tank to receive purified ammonia, a remote station connected with the storage tank, and a vaporizer connected with the storage tank. The vaporizer is configured to receive and vaporize liquid ammonia from the storage tank and deliver gaseous ammonia back to the storage tank so as to facilitate pumping of the ammonia to the remote station based upon a vapor pressure established within the storage tank.
摘要翻译：氨净化系统包括通过吸附从气态氨除去烃的除烃站，通过吸附从气态氨除去水的除湿站，以及包括与冷凝器连接的蒸馏塔以便于从氨除去杂质的蒸馏站和气态氨的缩合形成纯化的液氨产物。该系统还包括用于接收净化氨的储罐，与储罐连接的远程站以及与储存罐连接的蒸发器。蒸发器被配置为从储罐接收和蒸发液氨，并将气态氨返回到储罐，以便于基于在储罐内建立的蒸汽压力将氨泵送到远程站。

5. 发明授权

US06214173B1 On-site manufacture of ultra-high-purity nitric acid 失效
标题翻译：现场制造超高纯度硝酸
公开(公告)号：US06214173B1
公开(公告)日：2001-04-10
申请号：US08759213
申请日：1996-12-05
申请人： Mindi Xu , Wallace I. Yuan , Tracey Jacksier , Hwa-Chi Wang , Joe G. Hoffman , R. Scot Clark
发明人： Mindi Xu , Wallace I. Yuan , Tracey Jacksier , Hwa-Chi Wang , Joe G. Hoffman , R. Scot Clark
IPC分类号： B01D300
CPC分类号： C01B21/46 , B01D3/143 , B01D3/34
摘要： Provided is a novel on-site system and method for providing ultra-high-purity nitric acid to a point of use. The system includes a source of nitric acid at a concentration greater than 68 wt %; a reflux distillation column having an inlet in communication with the nitric acid source for introducing nitric acid into the column, a reboiler, and a condensate outlet to provide a flow of nitric acid condensate from the column; a reservoir in communication with the condensate outlet for receiving the flow of nitric acid condensate; and piping for delivering nitric acid from the reservoir to a point of use. The system and method can be used as an on-site subsystem, in a semiconductor device fabrication facility for supplying the nitric acid condensate to points of use in the semiconductor device fabrication facility.
摘要翻译：提供了一种用于在使用点提供超高纯度硝酸的新型现场系统和方法。该系统包括浓度大于68重量％的硝酸源; 回流蒸馏塔，其具有与硝酸源连通以将硝酸引入塔中的入口，再沸器和冷凝物出口，以从塔中提供硝酸冷凝物流; 与冷凝水出口连通的用于接收硝酸冷凝物流的储存器; 以及用于将硝酸从储存器输送到使用点的管道。该系统和方法可以用作半导体器件制造设备中的现场子系统，用于将硝酸冷凝物供应到半导体器件制造设备中的使用点。

6. 发明申请

US20070163273A1 Liquid Purge for a Vaporizer 审中-公开
标题翻译：蒸发器的液体清洗
公开(公告)号：US20070163273A1
公开(公告)日：2007-07-19
申请号：US11462286
申请日：2006-08-03
申请人： Richard J. Udischas , Hwa-Chi Wang
发明人： Richard J. Udischas , Hwa-Chi Wang
IPC分类号： F17C9/02
CPC分类号： F17C9/02 , F17C5/06 , F17C13/025 , F17C2221/05 , F17C2223/0153 , F17C2223/033 , F17C2223/035 , F17C2223/047 , F17C2225/0123 , F17C2225/033 , F17C2225/035 , F17C2227/0107 , F17C2227/0302 , F17C2227/0393 , F17C2227/044 , F17C2250/043 , F17C2270/0518
摘要： Disclosed herein is an apparatus for supplying a liquefied chemical gas comprising a vaporizer disposed within a fabrication plant, the vaporizer adapted to receive the liquefied chemical gas and output a vaporized chemical gas, a purge vessel connected to and in fluid communication with the vaporizer, and wherein the vaporizer is adapted to purge a volume of the liquefied chemical gas and the purge vessel is adapted to receive the volume of liquefied chemical gas. Other embodiments and methods are described herein.
摘要翻译：本文公开了一种用于供应液化化学气体的装置，其包括设置在制造工厂内的蒸发器，所述蒸发器适于接收液化化学气体并输出蒸发的化学气体，连接到蒸发器并与蒸发器流体连通的净化容器，以及其中所述蒸发器适于吹扫一定体积的所述液化化学气体，并且所述吹扫容器适于容纳所述液化化学气体的体积。本文描述了其它实施例和方法。

7. 发明授权

US06493086B1 Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use 失效
标题翻译：室内污水监测系统和半导体处理系统，包括吸收光谱测量系统和使用方法
公开(公告)号：US06493086B1
公开(公告)日：2002-12-10
申请号：US09722610
申请日：2000-11-28
申请人： James McAndrew , Hwa-Chi Wang , Benjamin J. Jurcik, Jr.
发明人： James McAndrew , Hwa-Chi Wang , Benjamin J. Jurcik, Jr.
IPC分类号： G01N2100
CPC分类号： G01N21/031 , C23C16/4412 , G01J3/433 , G01N21/3504 , G01N21/3554 , G01N21/39
摘要： Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.
摘要翻译：提供了一种新型室流出物监测系统。该系统包括具有连接到其上的排气管的室。排气管线包括样品区域，其中基本上所有的室排出物也通过样品区域。该系统还包括用于检测气相分子种类的吸收光谱测量系统。测量系统包括光源和主检测器，其通过一个或多个光透射窗与样品区域光学连通。光源通过一个或多个透光窗中的一个将光束引导到样品区域中。光束通过样品区域并通过一个或多个透光窗口之一离开样品区域。主检测器响应离开样品区域的光束。该系统允许原位测量室流出物中的分子气体杂质，特别是在来自半导体处理室的流出物中。在半导体制造过程控制和危险气体泄漏检测中发现了特殊的适用性。

8. 发明授权

US06363728B1 System and method for controlled delivery of liquefied gases from a bulk source 有权
标题翻译：用于从大量源控制输送液化气体的系统和方法
公开(公告)号：US06363728B1
公开(公告)日：2002-04-02
申请号：US09597262
申请日：2000-06-20
申请人： Richard J. Udischas , Benjamin J. Jurcik , Hwa-Chi Wang , Robert G. Irwin
发明人： Richard J. Udischas , Benjamin J. Jurcik , Hwa-Chi Wang , Robert G. Irwin
IPC分类号： F17C704
CPC分类号： F17C7/04 , F17C9/02 , F17C2221/05 , F17C2223/013 , F17C2225/0123 , F17C2227/0369 , F17C2250/043 , F17C2250/0631 , F17C2270/0518 , Y02E60/321
摘要： Provided is a novel system and method for delivery of gas from a liquefied state. The system includes (a) a delivery vessel holding a bulk quantity of liquefied gas therein; (b) a heat exchanger disposed on the delivery vessel to provide or remove energy from the liquefied gas only; and (c) a pressure controller for monitoring and adjusting the energy delivered to the vessel. The system and method allow for controlled delivery of liquefied gas from a delivery vessel at a predetermined flow rate. Particular applicability is found in the delivery of gases to semiconductor process tools.
摘要翻译：提供了一种用于从液化状态输送气体的新型系统和方法。该系统包括（a）在其中容纳大量液化气体的输送容器; （b）设置在输送容器上以便仅提供或从液化气体中除去能量的热交换器; 和（c）压力控制器，用于监测和调节输送到船舶的能量。该系统和方法允许以预定流量从输送容器控制输送液化气体。在向半导体加工工具输送气体时发现了特殊的适用性。

9. 发明授权

US06032483A System and method for delivery of a vapor phase product to a point of use 失效
标题翻译：用于将气相产物输送到使用点的系统和方法
公开(公告)号：US06032483A
公开(公告)日：2000-03-07
申请号：US55970
申请日：1998-04-07
申请人： Joseph E. Paganessi , Benjamin J. Jurcik , Richard Udischas , Hwa-Chi Wang
发明人： Joseph E. Paganessi , Benjamin J. Jurcik , Richard Udischas , Hwa-Chi Wang
IPC分类号： F17C7/04 , F25J3/08 , F25J1/00
CPC分类号： C01C1/003 , C01B17/453 , C01B7/01 , C01B7/093 , C01B7/191 , C01B7/24 , F17C7/04 , F25J3/08 , F17C2205/0323 , F17C2205/0338 , F17C2221/013 , F17C2221/014 , F17C2221/016 , F17C2221/017 , F17C2221/037 , F17C2227/0114 , F17C2227/044 , F17C2227/045 , F17C2270/0518 , F25J2200/02 , F25J2200/04 , F25J2200/74 , F25J2215/80 , F25J2220/84 , F25J2280/02 , F25J2290/60 , F25J2290/62 , Y10S62/924
摘要： Provided are a novel system and method for delivery of a vapor phase product to a point of use, as well as a novel on-site chemical distribution system and method. The system for delivery of a vapor phase product includes a storage vessel containing a liquid chemical under its own vapor pressure, a column connected to receive the chemical in liquified state from the storage vessel, wherein the chemical is fractionated into a contaminated liquid heavy fraction and a purified light vapor fraction and a conduit connected to the column for removing the purified light vapor fraction therefrom. The system is connected to the point of use for introducing the purified vapor fraction thereto. Particular applicability is found in semiconductor manufacturing in the delivery of electronics specialty gases to one or more semiconductor processing tools.
摘要翻译：提供了一种用于将气相产物输送到使用点的新型系统和方法，以及新颖的现场化学分配系统和方法。用于输送气相产物的系统包括在其自身蒸气压下容纳液体化学品的储存容器，连接成从储存容器接收液化状态的化学品的柱，其中化学品被分馏成污染的液体重质馏分，纯化的轻蒸气馏分和连接到塔的导管，用于从其中除去纯化的轻蒸气馏分。该系统连接到用于将纯化的蒸汽馏分引入其的使用点。在向一个或多个半导体加工工具传送电子专用气体的半导体制造中发现了特定的适用性。

10. 发明授权

US06392745B1 Method and apparatus for the fast detection of surface characteristics 失效
标题翻译：快速检测表面特性的方法和装置
公开(公告)号：US06392745B1
公开(公告)日：2002-05-21
申请号：US09593644
申请日：2000-06-13
申请人： Rashid Mavliev , Hwa-Chi Wang
发明人： Rashid Mavliev , Hwa-Chi Wang
IPC分类号： G01N100
CPC分类号： G01N21/94 , G01N15/0205 , G01N15/065 , G01N21/9501
摘要： A method and apparatus for quickly detecting the surface characteristics of a surface, such as features, anomalies or contaminants are disclosed. The method and apparatus use heterogeneous condensation of a vapor on a surface and evaporation to reveal the surface characteristics of the surface and thereby enable the detection of such features.
摘要翻译：公开了用于快速检测表面的表面特性（例如特征，异常或污染物）的方法和装置。该方法和装置使用蒸气在表面上的异质凝结和蒸发以揭示表面的表面特性，从而能够检测这些特征。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式