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1. 发明授权

US5618996A Metal sampling method and system for non-hydrolyzable gases 失效
标题翻译：非水解气体的金属取样方法和系统
公开(公告)号：US5618996A
公开(公告)日：1997-04-08
申请号：US609836
申请日：1996-03-01
申请人： Hwa-Chi Wang , Richard J. Udischas
发明人： Hwa-Chi Wang , Richard J. Udischas
IPC分类号： G01N1/22
CPC分类号： G01N1/2205 , G01N2001/2223 , G01N2001/2282
摘要： Provided is a portable system useful for sampling both particulate and vapor phase metallic impurities from gases that cannot by hydrolyzed. The system comprises valves for introducing and controlling the exhaust of the gas to be sampled from the system. The metallic impurities are entrapped on filters, with one filter being operated at ambient temperature to remove particulate metallic impurities, and with another filter being operated at a temperature below ambient in order to remove vapor phase metallic impurities. In operating the system, the system is first back-filled to create a pressure equilibrium across the valve which introduces the gas to the first filter means. The flow of gas through the entire sampling system is controlled by means of a critical orifice located between the filters and the valve for controlling exhaust of the gas from the system. The entire system is portable and allows for transport of the system with its filters to a laboratory in order to permit the most sophisticated and effective analysis of the metallic impurities in the filters under controlled laboratory conditions.
摘要翻译：提供了一种便携式系统，其用于从不能水解的气体中采集颗粒和气相金属杂质。该系统包括用于引入和控制从系统取样的气体的排气的阀。金属杂质被截留在过滤器上，一个过滤器在环境温度下操作以除去颗粒状金属杂质，另一个过滤器在低于环境温度下操作，以除去气相金属杂质。在操作系统时，系统首先被填充以在阀门上产生压力平衡，该压力平衡将气体引入到第一过滤器装置。通过整个采样系统的气体流通过位于过滤器和阀之间的临界孔来控制，用于控制来自系统的气体的排气。整个系统是便携式的，并允许将其过滤器的系统运输到实验室，以便在受控实验室条件下允许对过滤器中的金属杂质进行最复杂和有效的分析。

2. 发明授权

US5398712A Purgeable connection for gas cylinders 失效
标题翻译：气瓶的可吹扫连接
公开(公告)号：US5398712A
公开(公告)日：1995-03-21
申请号：US72304
申请日：1993-05-27
申请人： Hwa-Chi Wang , Richard J. Udischas , Benjamin Jurcik
发明人： Hwa-Chi Wang , Richard J. Udischas , Benjamin Jurcik
IPC分类号： B08B9/027 , B01J19/00 , B08B9/00 , B08B9/02 , B08B9/032 , C23C16/44 , B01F5/04 , B08B5/02
CPC分类号： C23C16/4402 , B08B9/00 , B08B9/0328 , Y10T137/043 , Y10T137/4259 , Y10T137/87587
摘要： A device and a method for its use for the removal of contaminants from a gas cylinder valve assembly. The valve assembly output is fed to the device which in turn has inlet and outlet connections to receive and to pass purge gas therethrough. The device is sized and positioned so that contaminants can be purged and a vacuum drawn from the gas cylinder valve assembly at the assembly location itself thus increasing the efficiency of contaminant removal.
摘要翻译：用于从气瓶阀组件中去除污染物的装置和方法。阀组件输出被输送到装置，该装置又具有入口和出口连接件以接收和通过吹扫气体。该装置的尺寸和位置使得污染物可被清除，并且在组装位置处从气瓶阀组件抽取真空，从而提高污染物去除的效率。

3. 发明申请

US20070204631A1 Liquefied Chemical Gas Delivery System 审中-公开
标题翻译：液化气输送系统
公开(公告)号：US20070204631A1
公开(公告)日：2007-09-06
申请号：US11462270
申请日：2006-08-03
申请人： Richard J. Udischas , Hwa-Chi Wang
发明人： Richard J. Udischas , Hwa-Chi Wang
IPC分类号： F17C9/02
CPC分类号： F17C9/02 , F17C2203/0643 , F17C2205/0142 , F17C2205/0323 , F17C2205/0338 , F17C2223/0153 , F17C2223/033 , F17C2225/0123 , F17C2225/035 , F17C2227/0302 , F17C2227/0393 , F17C2227/044 , F17C2250/01 , F17C2250/032 , F17C2250/0421 , F17C2250/043 , F17C2250/0443 , F17C2250/0636 , F17C2250/077 , F17C2265/015 , F17C2270/0518
摘要： Disclosed herein is an apparatus for providing a chemical gas comprising a fabrication plant, a first vessel having a volume and proximate to the fabrication plant, the first vessel adapted to receive a liquefied chemical gas and to communicate a vaporized chemical gas to the fabrication plant, a source container located at a distance from the fabrication plant, the source container having a volume and adapted to communicate a liquefied chemical gas to the first vessel, and wherein the source container volume is substantially larger than the first vessel volume. Other embodiments and methods are described herein.
摘要翻译：本文公开了一种用于提供化学气体的装置，包括制造工厂，具有体积并且靠近制造工厂的第一容器，第一容器适于接收液化化学气体并将蒸发的化学气体连通到制造工厂，源容器，其位于与制造工厂相距一定距离处，源容器具有容积并适于将液化化学气体连通到第一容器，并且其中源容器容积基本上大于第一容器体积。本文描述了其它实施例和方法。

4. 发明授权

US06199384B1 System and method for controlled delivery of liquefied gases including control aspects 有权
标题翻译：液化气控制输送系统和方法，包括控制方面
公开(公告)号：US06199384B1
公开(公告)日：2001-03-13
申请号：US09350155
申请日：1999-07-09
申请人： Richard J. Udischas , Hwa-Chi Wang , Robert Irwin
发明人： Richard J. Udischas , Hwa-Chi Wang , Robert Irwin
IPC分类号： F17C704
CPC分类号： F17C13/026 , F17C7/02 , F17C7/04 , F17C13/025 , F17C2205/0326 , F17C2221/013 , F17C2221/03 , F17C2223/0153 , F17C2223/033 , F17C2227/0135 , F17C2227/0313 , F17C2227/0334 , F17C2227/044 , F17C2250/032 , F17C2250/036 , F17C2250/043 , F17C2250/0439 , F17C2250/0636 , F17C2250/072 , F17C2260/025 , F17C2265/05 , F17C2270/0518 , Y02E60/321
摘要： Provided is a novel system for delivery of a gas from a liquefied state. The system includes: (a) a cabinet having a first and second panel disposed therein; (b) at least one compressed liquefied gas cylinder corresponding to each panel disposed in the cabinet; (c) temperature and/or pressure sensors disposed on each the cylinder; and (d) a controller for monitoring and adjusting the energy input into each of the cylinders based on the temperature and/or pressure in each of the cylinders sensed by the temperature and/or pressure sensors.
摘要翻译：提供了一种用于从液化状态输送气体的新型系统。该系统包括：（a）具有设置在其中的第一和第二面板的机柜; （b）至少一个对应于设置在机柜中的每个面板的压缩液化气瓶; （c）设置在每个气缸上的温度和/或压力传感器; 以及（d）控制器，用于基于由温度和/或压力传感器感测的每个气缸中的温度和/或压力来监测和调节每个气缸中的能量输入。

5. 发明授权

US5814741A Metal sampling method and system for non-hydrolyzable gases 失效
标题翻译：非水解气体的金属取样方法和系统
公开(公告)号：US5814741A
公开(公告)日：1998-09-29
申请号：US709875
申请日：1996-09-09
申请人： Hwa-Chi Wang , Richard J. Udischas
发明人： Hwa-Chi Wang , Richard J. Udischas
IPC分类号： G01N1/00 , G01N1/02 , G01N1/22 , G01N21/31
CPC分类号： G01N1/2205 , G01N2001/2223 , G01N2001/2282
摘要： Provided is a portable system useful for sampling both particulate and vapor phase metallic impurities from gases that cannot by hydrolyzed. The system comprises a valve for introducing and controlling the exhaust of the gas to be sampled from the system. The metallic impurities are entrapped on a filter, with one filter being operated at ambient temperature to remove particulate metallic impurities, and with another filter being operated at a temperature below ambient in order to remove vapor phase metallic impurities. In operating the system, the system is first back-filled to create a pressure equilibrium across the valve which introduces the gas to the first filter. The flow of gas through the entire sampling system is controlled by means of a critical orifice located between the filter and the valve for controlling exhaust of the gas from the system. The entire system is portable and allows for transport of the system with its filters to a laboratory in order to permit the most sophisticated and effective analysis of the metallic impurities in the filters under controlled laboratory conditions.
摘要翻译：提供了一种便携式系统，其用于从不能水解的气体中采集颗粒和气相金属杂质。该系统包括用于引入和控制从系统取样的气体的排气的阀。金属杂质被夹带在过滤器上，一个过滤器在环境温度下操作以除去颗粒状金属杂质，另一个过滤器在低于环境温度下操作，以除去气相金属杂质。在操作系统时，系统首先被填充以在阀上产生压力平衡，该压力平衡将气体引入第一过滤器。通过整个采样系统的气体流动通过位于过滤器和阀之间的临界孔来控制，用于控制来自系统的气体的排出。整个系统是便携式的，并允许将其过滤器的系统运输到实验室，以便在受控实验室条件下允许对过滤器中的金属杂质进行最复杂和有效的分析。

6. 发明授权

US5209102A Method of introducing and controlling compressed gases for impurity analysis 失效
标题翻译：引入和控制压缩气体进行杂质分析的方法
公开(公告)号：US5209102A
公开(公告)日：1993-05-11
申请号：US828403
申请日：1992-01-31
申请人： Hwa-Chi Wang , Richard J. Udischas
发明人： Hwa-Chi Wang , Richard J. Udischas
IPC分类号： G01N15/00 , G01N1/00 , G01N1/24 , G01N15/06 , G01N33/00
CPC分类号： G01N33/0029 , G01N15/06 , G01N33/0026 , G01N2001/244
摘要： A system for analyzing particles from compressed gas. The system employs a back-filling technique to slowly balance the pressures on both sides of a control valve before operation. Use of a critical orifice as a flow control device for compressed gases of varying pressure is employed to provide a constant volumetric flow rate and thus a constant residence time within an impurity sensor.

7. 发明授权

US5992216A Method to analyze particle contaminants in compressed gases 失效
标题翻译：分析压缩气体中颗粒污染物的方法
公开(公告)号：US5992216A
公开(公告)日：1999-11-30
申请号：US865104
申请日：1997-05-29
申请人： Hwa-chi Wang , Richard J. Udischas
发明人： Hwa-chi Wang , Richard J. Udischas
IPC分类号： G01N1/22 , G01N7/00 , G01N15/06 , G01N1/00
CPC分类号： G01N15/06 , G01N1/2226 , G01N2001/2238
摘要： A system and a method for analyzing impurities in compressed gas, a method for controlling the particle growth in the monitored gas and a method for determining the optimum monitoring temperature for an individual gas are disclosed.
摘要翻译：公开了一种用于分析压缩气体中的杂质的系统和方法，用于控制监测气体中的颗粒生长的方法和用于确定单独气体的最佳监测温度的方法。

8. 发明授权

US5665902A Method to analyze particle contaminants in compressed gases 失效
标题翻译：分析压缩气体中颗粒污染物的方法
公开(公告)号：US5665902A
公开(公告)日：1997-09-09
申请号：US240485
申请日：1994-05-10
申请人： Hwa-chi Wang , Richard J. Udischas
发明人： Hwa-chi Wang , Richard J. Udischas
IPC分类号： G01N1/22 , G01N7/00 , G01N15/06 , G01N1/00
CPC分类号： G01N15/06 , G01N1/2226 , G01N2001/2238
摘要： A system and a method for analyzing impurities in compressed gas, a method for controlling the particle growth in the monitored gas and a method for determining the optimum monitoring temperature for an individual gas are disclosed. The system includes a source of compressed gas, a sensor for measuring particle impurity within the gas, a temperature controller for controlling the temperature of the gas prior to said gas entering the sensor, with the temperature being controlled to eliminate particle formation from molecular clustering and condensation, and a pressure balancer.
摘要翻译：公开了一种用于分析压缩气体中的杂质的系统和方法，用于控制监测气体中的颗粒生长的方法和用于确定单独气体的最佳监测温度的方法。该系统包括压缩气体源，用于测量气体中的颗粒杂质的传感器，用于在所述气体进入传感器之前控制气体的温度的温度控制器，其中控制温度以消除分子聚集的颗粒形成，冷凝和压力平衡器。

9. 发明申请

US20070163273A1 Liquid Purge for a Vaporizer 审中-公开
标题翻译：蒸发器的液体清洗
公开(公告)号：US20070163273A1
公开(公告)日：2007-07-19
申请号：US11462286
申请日：2006-08-03
申请人： Richard J. Udischas , Hwa-Chi Wang
发明人： Richard J. Udischas , Hwa-Chi Wang
IPC分类号： F17C9/02
CPC分类号： F17C9/02 , F17C5/06 , F17C13/025 , F17C2221/05 , F17C2223/0153 , F17C2223/033 , F17C2223/035 , F17C2223/047 , F17C2225/0123 , F17C2225/033 , F17C2225/035 , F17C2227/0107 , F17C2227/0302 , F17C2227/0393 , F17C2227/044 , F17C2250/043 , F17C2270/0518
摘要： Disclosed herein is an apparatus for supplying a liquefied chemical gas comprising a vaporizer disposed within a fabrication plant, the vaporizer adapted to receive the liquefied chemical gas and output a vaporized chemical gas, a purge vessel connected to and in fluid communication with the vaporizer, and wherein the vaporizer is adapted to purge a volume of the liquefied chemical gas and the purge vessel is adapted to receive the volume of liquefied chemical gas. Other embodiments and methods are described herein.
摘要翻译：本文公开了一种用于供应液化化学气体的装置，其包括设置在制造工厂内的蒸发器，所述蒸发器适于接收液化化学气体并输出蒸发的化学气体，连接到蒸发器并与蒸发器流体连通的净化容器，以及其中所述蒸发器适于吹扫一定体积的所述液化化学气体，并且所述吹扫容器适于容纳所述液化化学气体的体积。本文描述了其它实施例和方法。

10. 发明授权

US06363728B1 System and method for controlled delivery of liquefied gases from a bulk source 有权
标题翻译：用于从大量源控制输送液化气体的系统和方法
公开(公告)号：US06363728B1
公开(公告)日：2002-04-02
申请号：US09597262
申请日：2000-06-20
申请人： Richard J. Udischas , Benjamin J. Jurcik , Hwa-Chi Wang , Robert G. Irwin
发明人： Richard J. Udischas , Benjamin J. Jurcik , Hwa-Chi Wang , Robert G. Irwin
IPC分类号： F17C704
CPC分类号： F17C7/04 , F17C9/02 , F17C2221/05 , F17C2223/013 , F17C2225/0123 , F17C2227/0369 , F17C2250/043 , F17C2250/0631 , F17C2270/0518 , Y02E60/321
摘要： Provided is a novel system and method for delivery of gas from a liquefied state. The system includes (a) a delivery vessel holding a bulk quantity of liquefied gas therein; (b) a heat exchanger disposed on the delivery vessel to provide or remove energy from the liquefied gas only; and (c) a pressure controller for monitoring and adjusting the energy delivered to the vessel. The system and method allow for controlled delivery of liquefied gas from a delivery vessel at a predetermined flow rate. Particular applicability is found in the delivery of gases to semiconductor process tools.
摘要翻译：提供了一种用于从液化状态输送气体的新型系统和方法。该系统包括（a）在其中容纳大量液化气体的输送容器; （b）设置在输送容器上以便仅提供或从液化气体中除去能量的热交换器; 和（c）压力控制器，用于监测和调节输送到船舶的能量。该系统和方法允许以预定流量从输送容器控制输送液化气体。在向半导体加工工具输送气体时发现了特殊的适用性。

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