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1. 发明授权

US07259436B2 Micromechanical component and corresponding production method 有权
标题翻译：微机械部件及相应的生产方式
公开(公告)号：US07259436B2
公开(公告)日：2007-08-21
申请号：US10018180
申请日：2001-03-22
申请人： Michael Offenberg , Markus Lutz
发明人： Michael Offenberg , Markus Lutz
IPC分类号： H01L29/76 , H01L29/94 , C30B23/00 , C30B25/00
CPC分类号： B81C1/00246 , B81C2203/0735
摘要： A micromechanical component includes: a substrate; a micromechanical functional plane provided on the substrate; a covering plane provided on the micromechanical functional plane; and a printed circuit trace plane provided on the covering plane. The covering plane includes a monocrystalline region which is epitaxially grown on an underlying monocrystalline region, and the covering plane includes a polycrystalline region which is epitaxially grown on an underlying polycrystalline starting layer at the same time.
摘要翻译：微机械部件包括：基板; 设置在基板上的微机械功能平面; 设置在微机械功能平面上的覆盖平面; 以及设置在覆盖平面上的印刷电路迹线平面。覆盖平面包括在下面的单晶区域外延生长的单晶区域，并且覆盖平面包括同时在下面的多晶起始层上外延生长的多晶区域。

2. 发明授权

US06187607B1 Manufacturing method for micromechanical component 有权
标题翻译：微机械部件的制造方法
公开(公告)号：US06187607B1
公开(公告)日：2001-02-13
申请号：US09292282
申请日：1999-04-15
申请人： Michael Offenberg , Udo Bischof , Markus Lutz
发明人： Michael Offenberg , Udo Bischof , Markus Lutz
IPC分类号： H01L21302
CPC分类号： G01C19/5769 , B81B2201/025 , B81B2203/0136 , B81C1/00571 , B81C2201/014 , B81C2201/053
摘要： A manufacturing method for a micromechanical component, and in particular for a micromechanical rotation rate sensor, which has a supporting first layer, an insulating second layer that is arranged on the first layer, and a conductive third layer that is arranged on the second layer. The method includes the following steps: provide the second layer, in the form of patterned first and second insulation regions, on the first layer; provide a first protective layer on an edge region of the first insulation regions and on a corresponding boundary region of the first layer; provide the third layer on the structure resulting from the previous steps; pattern out a structure of conductor paths running on the first insulation regions, and a functional structure of the micromechanical component above the second insulation regions, from the third layer; and remove the second layer in the second insulation regions, the second layer being protected in the first insulation regions by the first protective layer in such a way that it is essentially not removed there.
摘要翻译：具有支撑第一层，布置在第一层上的绝缘第二层和布置在第二层上的导电第三层的微机械组件的制造方法，特别是用于微机械转速传感器的制造方法。该方法包括以下步骤：在第一层上提供呈图案化的第一和第二绝缘区域的形式的第二层; 在所述第一绝缘区域的边缘区域和所述第一层的对应边界区域上提供第一保护层; 提供由上述步骤导致的结构上的第三层; 形成在第一绝缘区域上运行的导体路径的结构以及来自第三层的第二绝缘区域上方的微机械部件的功能结构; 并且在所述第二绝缘区域中移除所述第二层，所述第二层在所述第一绝缘区域中被所述第一保护层保护，使得其基本上不被去除。

3. 发明授权

US5627317A Acceleration sensor 失效
标题翻译：加速度传感器
公开(公告)号：US5627317A
公开(公告)日：1997-05-06
申请号：US466841
申请日：1995-06-06
申请人： Michael Offenberg , Wolfgang Buchholtz , Markus Lutz
发明人： Michael Offenberg , Wolfgang Buchholtz , Markus Lutz
IPC分类号： G01G3/00 , G01L1/14 , G01P15/08 , G01P15/125
CPC分类号： G01P15/0802 , G01P15/125
摘要： A sensor in which the structure of a movable element is produced from an upper silicon layer of a laminated substrate. Individual regions of the upper layer are insulated from one another by insulation trenches which are bridged by conductor tracks coupled to at least one electrode on the movable element and at least one stationary electrode on the upper layer proximate to the at least one electrode on the movable element.
摘要翻译：传感器，其中可移动元件的结构由层压基板的上硅层制成。上层的单个区域通过绝缘沟槽彼此绝缘，所述绝缘沟槽由耦合到可移动元件上的至少一个电极的导体轨道桥接，并且在上层上的至少一个固定电极，靠近可移动的至少一个电极元件。

4. 发明授权

US6140709A Bonding pad structure and method for manufacturing the bonding pad structure 有权
标题翻译：接合垫结构及其制造方法
公开(公告)号：US6140709A
公开(公告)日：2000-10-31
申请号：US306181
申请日：1999-05-06
申请人： Horst Muenzel , Michael Offenberg , Udo Bischof , Eckhard Graf , Markus Lutz
发明人： Horst Muenzel , Michael Offenberg , Udo Bischof , Eckhard Graf , Markus Lutz
IPC分类号： H01L23/12 , B81B7/00 , B81C1/00 , G01C19/56 , G01P15/08 , H01L21/60 , H01L23/48 , H01L29/40 , H01L25/52
CPC分类号： G01P15/0802 , B81C1/00301 , B81C1/00801 , G01C19/56 , H01L24/02 , B81B2207/07 , B81B2207/097 , B81C2201/014 , B81C2201/053 , H01L2224/0401 , H01L2924/01004 , H01L2924/01005 , H01L2924/01013 , H01L2924/01014 , H01L2924/01033 , H01L2924/01068 , H01L2924/01072 , H01L2924/01074
摘要： A bonding pad structure, in particular for a micromechanical sensor, includes a substrate, an electrically insulating sacrificial layer provided on the substrate, a patterned conductor path layer buried in the sacrificial layer, a contact hole provided in the sacrificial layer, and a bonding pad base, composed of an electrically conductive material. The bonding pad base has a first region extending over the sacrificial layer, and a second layer in contact with the conductor path region and extending through the contact hole. A protective layer is provided at least temporarily on the sacrificial layer in a specific region beneath and around the bonding pad base to prevent underetching of the sacrificial layer beneath the bonding pad base during etching of the sacrificial layer in such a way that the substrate and/or the conductor path is exposed.
摘要翻译：特别是用于微机械传感器的焊盘结构包括衬底，设置在衬底上的电绝缘牺牲层，埋在牺牲层中的图案化导体通路层，设置在牺牲层中的接触孔，以及焊盘基底，由导电材料组成。焊盘基部具有在牺牲层上延伸的第一区域，以及与导体路径区域接触并延伸穿过接触孔的第二层。保护层至少临时地设置在接合焊盘基座的下面和周围的特定区域中的牺牲层上，以防止牺牲层在蚀刻牺牲层期间的牺牲层的去抛光，使得衬底和/ 或导体路径露出。

5. 发明授权

US06214243B1 Process for producing a speed of rotation coriolis sensor 有权
标题翻译：生产旋转速度科里奥利传感器的方法
公开(公告)号：US06214243B1
公开(公告)日：2001-04-10
申请号：US09051878
申请日：1998-10-20
申请人： Horst Muenzel , Franz Laermer , Michael Offenberg , Andrea Schilp , Markus Lutz
发明人： Horst Muenzel , Franz Laermer , Michael Offenberg , Andrea Schilp , Markus Lutz
IPC分类号： B81B702
CPC分类号： G01C19/5747 , B81B3/0051 , B81B2201/0242 , B81B2203/058 , G01C19/5769
摘要： A process for the manufacture of a Coriolis rate-of-rotation sensor with oscillatory support masses spring-suspended on a substrate as well as driving means for the excitation of the planar oscillation of the oscillating masses and evaluation means for the determination of a Coriolis acceleration. Oscillating masses, driving means and integrated stops are structured in a common operation by means of plasma etching from a silicon-on-insulator (SOI) wafer.
摘要翻译：用于制造具有弹簧悬浮在基板上的振荡支撑质量的科里奥利旋转速度传感器的方法以及用于激发振荡块的平面振荡的驱动装置和用于确定科里奥利加速度的评估装置。通过从绝缘体上硅（SOI）晶片进行等离子体蚀刻，振荡质量，驱动装置和集成止动器通过共同的操作构成。

6. 发明授权

US6117701A Method for manufacturing a rate-of-rotation sensor 失效
标题翻译：旋转传感器的制造方法
公开(公告)号：US6117701A
公开(公告)日：2000-09-12
申请号：US907601
申请日：1997-08-08
申请人： Nicholas Buchan , Horst Muenzel , Franz Laermer , Michael Offenberg , Udo Bischof , Markus Lutz
发明人： Nicholas Buchan , Horst Muenzel , Franz Laermer , Michael Offenberg , Udo Bischof , Markus Lutz
IPC分类号： G01C19/56 , G01C19/5755 , G01C19/5769 , G01P15/08 , H01L29/84 , H01L41/08 , H01L21/00 , G01P15/00
CPC分类号： G01C19/5755 , G01C19/5769 , G01P15/0802 , G01P2015/0814
摘要： A rate-of-rotation sensor includes a three-layer system. The rate-of-rotation sensor and the conductor traces are patterned out of the third layer. The conductor traces are electrically insulated (isolated) by cutouts from other regions of the third layer and by a second electrically insulating layer from a first layer. Thus, a simple electrical contacting (configuration) is achieved that is patterned out of a three-layer system. Since the same etching process is used for the first and the third layer, an especially efficient manufacturing is possible.
摘要翻译：旋转速度传感器包括三层系统。转速传感器和导体迹线从第三层图案化。导体迹线通过从第三层的其它区域的切口和与第一层的第二电绝缘层的切口电绝缘（隔离）。因此，实现了由三层系统构图的简单的电接触（构造）。由于在第一和第三层使用相同的蚀刻工艺，所以可以进行特别有效的制造。

7. 发明授权

US06055858A Acceleration sensor 有权
标题翻译：加速度传感器
公开(公告)号：US06055858A
公开(公告)日：2000-05-02
申请号：US362936
申请日：1999-07-28
申请人： Horst Muenzel , Dietrich Schubert , Alexandra Boehringer , Michael Offenberg , Klaus Heyers , Markus Lutz
发明人： Horst Muenzel , Dietrich Schubert , Alexandra Boehringer , Michael Offenberg , Klaus Heyers , Markus Lutz
IPC分类号： G01P15/02 , G01P3/48 , G01P9/04 , G01P15/08 , G01P15/125 , H01L29/84 , G01P3/00
CPC分类号： G01P3/48 , G01P15/0802 , G01P15/125 , G01P2015/0814 , Y10S148/135 , Y10S148/159
摘要： An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system. One exemplary application of the acceleration sensor includes mounting the acceleration sensor on a vibrational system of an rpm (rate-of-rotation sensor). This simplifies the manufacturing of an rpm sensor, since the vibrational system and the acceleration sensor are configured out of a three-layer system, wherein the conductor tracks are run into the frame of the rpm sensor in which the vibrational system is suspended, so as to allow excursion.
摘要翻译：加速度传感器由三层系统组成。将加速度传感器和导体轨迹从第三层图案化。导体轨道通过凹部与第三层的其它区域电绝缘，并且通过第二电绝缘层与第一层电绝缘。以这种方式，实现了由三层系统构成的简单的电接触。加速度传感器的一个示例性应用包括将加速度传感器安装在rpm（转速传感器）的振动系统上。这简化了rpm传感器的制造，因为振动系统和加速度传感器是由三层系统构成的，其中导体轨道运行到其中悬挂振动系统的转速传感器的框架中，以便允许游览。

8. 发明授权

US5937275A Method of producing acceleration sensors 失效
标题翻译：生产加速度传感器的方法
公开(公告)号：US5937275A
公开(公告)日：1999-08-10
申请号：US809945
申请日：1997-10-27
申请人： Horst Munzel , Michael Offenberg , Klaus Heyers , Bernhard Elsner , Markus Lutz , Helmut Skapa , Heinz-Georg Vossenberg , Nicholas Buchan , Eckhard Graf
发明人： Horst Munzel , Michael Offenberg , Klaus Heyers , Bernhard Elsner , Markus Lutz , Helmut Skapa , Heinz-Georg Vossenberg , Nicholas Buchan , Eckhard Graf
IPC分类号： G01P15/08 , H01L29/84 , G01L23/10 , G01P15/09
CPC分类号： G01P15/0802
摘要： A method for producing acceleration sensors is proposed, in which a silicon layer that is deposited in an epitaxial application system is used. Above sacrificial layers (2) applied to the substrate (1), the material grows in the form of a polysilicon layer (6), which has a certain surface roughness. By application of a photoresist and by a wet etching process, this surface roughness is eliminated. Alternatively, chemical-mechanical smoothing is contemplated.
摘要翻译： PCT No.PCT / DE96 / 01236 Sec。 371日期1997年10月27日第 102（e）1997年10月27日PCT PCT 1996年7月9日PCT公布。第WO97 / 04319号公报日期1997年2月6日提出了一种用于制造加速度传感器的方法，其中使用沉积在外延应用系统中的硅层。在施加到基板（1）的牺牲层（2）上方，材料以具有一定表面粗糙度的多晶硅层（6）的形式生长。通过施加光致抗蚀剂和通过湿蚀刻工艺，可以消除该表面粗糙度。或者，考虑化学机械平滑化。

9. 发明授权

US5631422A Sensor comprising multilayer substrate 失效
标题翻译：传感器包括多层基板
公开(公告)号：US5631422A
公开(公告)日：1997-05-20
申请号：US550484
申请日：1995-10-30
申请人： Peter Sulzberger , Michael Offenberg , Bernhard Elsner , Markus Lutz
发明人： Peter Sulzberger , Michael Offenberg , Bernhard Elsner , Markus Lutz
IPC分类号： G01P15/08 , G01P15/125 , H01L29/84 , H01G7/00
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814
摘要： A sensor includes a first silicon layer, and a sensor element including at least one electrode structured from the first silicon layer. The sensor also includes at least one connecting element also structured from the first silicon layer. The connecting element has a doping less than the doping of the electrode. The sensor comprises at least one conductor track on the first silicon layer routed over the connecting element and coupled to the sensor element for supplying an external signal.
摘要翻译：传感器包括第一硅层和包括由第一硅层构成的至少一个电极的传感器元件。该传感器还包括至少一个也由第一硅层构成的连接元件。连接元件的掺杂小于电极的掺杂。传感器包括在连接元件上布线的第一硅层上的至少一个导体轨道，并且耦合到传感器元件以提供外部信号。

10. 发明授权

US5959208A Acceleration sensor 失效
标题翻译：加速度传感器
公开(公告)号：US5959208A
公开(公告)日：1999-09-28
申请号：US933446
申请日：1997-09-18
申请人： Horst Muenzel , Dietrich Schubert , Alexandra Boehringer , Michael Offenberg , Klaus Heyers , Markus Lutz
发明人： Horst Muenzel , Dietrich Schubert , Alexandra Boehringer , Michael Offenberg , Klaus Heyers , Markus Lutz
IPC分类号： G01P15/02 , G01P3/48 , G01P9/04 , G01P15/08 , G01P15/125 , H01L29/84
CPC分类号： G01P3/48 , G01P15/0802 , G01P15/125 , G01P2015/0814 , Y10S148/135 , Y10S148/159
摘要： An acceleration sensor is composed of a three layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system.
摘要翻译：加速度传感器由三层系统组成。将加速度传感器和导体轨迹从第三层图案化。导体轨道通过凹部与第三层的其它区域电绝缘，并且通过第二电绝缘层与第一层电绝缘。以这种方式，实现了由三层系统构成的简单的电接触。

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