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1. 发明申请

US20090196487A1 METHOD AND SYSTEM FOR EVALUATING A VARIATION IN A PARAMETER OF A PATTERN 有权
标题翻译：用于评估模式参数中的变化的方法和系统
公开(公告)号：US20090196487A1
公开(公告)日：2009-08-06
申请号：US11994412
申请日：2007-02-01
申请人： Michael Ben Yishai , Mark Wagner , Avishai Bartov , Gadi Greenberg , Lior Shoval , Ophir Gvirtzer
发明人： Michael Ben Yishai , Mark Wagner , Avishai Bartov , Gadi Greenberg , Lior Shoval , Ophir Gvirtzer
IPC分类号： G06K9/00
CPC分类号： G06T7/0004 , G06T2207/30148
摘要： A method and system are presented for evaluating a variation of a parameter of a pattern, the method includes: processing data indicative of an aerial intensity image of at least a portion of a patterned article, and determining values of a certain functional of the aerial image intensity for predetermined regions within said at least portion of the patterned article, said values of the aerial image intensity functional being indicative of a variation of at least one parameter of the pattern within said at least portion of the patterned article or of a variation of at least one parameter of a pattern manufactured by utilizing the patterned article.
摘要翻译：提出了一种用于评估图案的参数变化的方法和系统，所述方法包括：处理指示图案制品的至少一部分的空间强度图像的数据，以及确定空中图像的某个功能的值所述图案制品的所述至少部分内的预定区域的强度，所述空间图像强度函数的值表示所述图案制品的所述至少部分内的图案的至少一个参数的变化，或通过利用图案制品制造的图案的至少一个参数。

2. 发明授权

US08160350B2 Method and system for evaluating a variation in a parameter of a pattern 有权
标题翻译：用于评估图案参数变化的方法和系统
公开(公告)号：US08160350B2
公开(公告)日：2012-04-17
申请号：US11994412
申请日：2007-02-01
申请人： Michael Ben Yishai , Mark Wagner , Avishai Bartov , Gadi Greenberg , Lior Shoval , Ophir Gvirtzer
发明人： Michael Ben Yishai , Mark Wagner , Avishai Bartov , Gadi Greenberg , Lior Shoval , Ophir Gvirtzer
IPC分类号： G06K9/00
CPC分类号： G06T7/0004 , G06T2207/30148
摘要： A method and system are presented for evaluating a variation of a parameter of a pattern. The method includes processing data indicative of an aerial intensity image of at least a portion of a patterned article, and determining values of a certain functional of the aerial image intensity for predetermined regions within the at least portion of the patterned article. The values of the aerial image intensity functional are indicative of a variation of at least one parameter of the pattern within the at least portion of the patterned article or are indicative of a variation of at least one parameter of a pattern manufactured by utilizing the patterned article.
摘要翻译：提出了一种用于评估模式参数变化的方法和系统。该方法包括处理指示图案制品的至少一部分的空间强度图像的数据，以及确定图案化物品的至少部分内的预定区域的空间图像强度的某一功能的值。空间图像强度函数的值表示图案制品的至少部分内的图案的至少一个参数的变化，或指示通过利用图案化制品制造的图案的至少一个参数的变化。

3. 发明申请

US20130066454A1 METHOD OF GENERATING A RECIPE FOR A MANUFACTURING TOOL AND SYSTEM THEREOF 有权
标题翻译：生产制造工具的配方及其制造方法
公开(公告)号：US20130066454A1
公开(公告)日：2013-03-14
申请号：US13230483
申请日：2011-09-12
申请人： Mark Geshel , Avishai Bartov
发明人： Mark Geshel , Avishai Bartov
IPC分类号： G05B19/18
CPC分类号： G06F17/50 , G05B19/41865 , G05B2219/32096 , Y02P90/14 , Y02P90/18 , Y02P90/20
摘要： A computer creates a recipe for a manufacturing tool based on design data. The computer obtains the design data, which includes basic elements and hierarchical levels corresponding to the basic elements. The computer selects one or more basic elements of interest and generates one or more sets of simple array cells corresponding to a level of interest. The computer uses the sets of simple array cells to identify periodical areas in level-of-interest coordinates to enable automated recipe creation. The periodical areas are identified with respect to one or more basic elements.
摘要翻译：计算机基于设计数据创建制造工具的配方。计算机获取设计数据，其中包括与基本元素相对应的基本元素和层次等级。计算机选择一个或多个感兴趣的基本元素，并且生成与感兴趣的级别相对应的一组或多组简单阵列单元。计算机使用一组简单的阵列单元来识别兴趣级别坐标中的周期性区域，以实现自动配方创建。相对于一个或多个基本元素确定周期性区域。

4. 发明授权

US09587939B2 Method and system for measuring content of a bin 有权
标题翻译：用于测量垃圾箱内容的方法和系统
公开(公告)号：US09587939B2
公开(公告)日：2017-03-07
申请号：US13747493
申请日：2013-01-23
申请人： Avishai Bartov , Yossi Zlotnick
发明人： Avishai Bartov , Yossi Zlotnick
IPC分类号： G01F23/00 , G01B21/20 , G01F23/296
CPC分类号： G01B21/20 , G01F23/0076 , G01F23/2962
摘要： A method, non-transitory computer readable medium and a system that includes a confidence level module arranged to calculate, in response to detection signals, estimated upper surface points and to associate a non-binary confidence level with each estimated upper surface point; wherein the detection signals are generated by a receiver in response to an irradiation of at least a portion of the upper surface of the content with radiation pulses transmitted by a transmitter; and an estimator that is arranged to calculate an estimate of the upper surface based upon the estimated upper surface points and the non-binary confidence level associated with each estimated upper surface point.
摘要翻译：一种方法，非暂时性计算机可读介质和包括置信度模块的系统，所述置信度模块被布置为响应于检测信号计算估计的上表面点并将非二进制置信水平与每个估计的上表面点相关联; 其中所述检测信号由接收机响应于所述内容物的所述上表面的至少一部分的照射由发射器发射的辐射脉冲产生; 以及估计器，其被布置为基于与每个估计的上表面点相关联的估计上表面点和非二进制置信水平来计算上表面的估计。

5. 发明授权

US09518860B2 System and method for fuzzy logic based measurement of a content of a bin 有权
标题翻译：用于基于模糊逻辑的测量箱体内容的系统和方法
公开(公告)号：US09518860B2
公开(公告)日：2016-12-13
申请号：US13755176
申请日：2013-01-31
申请人： Avishai Bartov , Yossi Zlotnick
发明人： Avishai Bartov , Yossi Zlotnick
IPC分类号： G01F23/76 , G01F23/296 , G01F23/00
CPC分类号： G01F23/2962 , G01F23/0076
摘要： A method, non-transitory computer readable medium and a system that includes a fuzzy logic module arranged to apply a fuzzy logic algorithm for calculating, in response to received echoes that are received by a receiver, confidence levels of origins of received echoes; wherein the received echoes are reflected or scattered from the origins; and a volume calculator that is arranged to calculate a volume of the content in response to (a) estimated locations of the origins, and (b) the confidence levels of the origins.
摘要翻译：一种方法，非暂时性计算机可读介质和包括模糊逻辑模块的系统，所述模糊逻辑模块被布置为应用模糊逻辑算法来响应于接收机接收到的接收到的回波来计算接收到的回波的起点的置信水平; 其中所接收的回波从所述起点反射或散射; 以及体积计算器，其被布置为响应于（a）原点的估计位置来计算内容的体积，以及（b）起源的置信水平。

6. 发明授权

US09562799B2 System and method for shape attribute based detection of obstacles within a bin 有权
标题翻译：基于形状属性的系统和方法，用于检测仓内的障碍物
公开(公告)号：US09562799B2
公开(公告)日：2017-02-07
申请号：US13752402
申请日：2013-01-29
申请人： Avishai Bartov , Yossi Zlotnick
发明人： Avishai Bartov , Yossi Zlotnick
IPC分类号： G01F23/296 , G01F23/00
CPC分类号： G01F23/2962 , G01F23/0076
摘要： A method and a system for automatically mapping obstacles within a bin that stores content, the system may include: a location estimator that is arranged to calculate, in response to detection signals, an estimated shape of an upper surface of the content; wherein the detection signals are generated by a receiver in response to radiation signals reflected or scattered from multiple points within the bin; and an obstacle detector that is arranged to detect at least one obstacle point that belongs to an obstacle in response to (a) the estimated shape of the upper surface of the content, and (b) an expected shape attribute of the upper surface of the content.
摘要翻译：一种用于自动映射存储内容的存储区内的障碍物的方法和系统，所述系统可以包括：位置估计器，被布置为响应于检测信号计算内容的上表面的估计形状; 其中所述检测信号由接收机响应于从所述箱内的多个点反射或散射的辐射信号而产生; 以及障碍物检测器，被配置为响应于（a）内容的上表面的估计形状来检测属于障碍物的至少一个障碍点，以及（b）所述内容的上表面的预期形状属性内容。

7. 发明授权

US09518859B2 System and method for content estimate based detection of obstacles within a bin 有权
标题翻译：用于基于垃圾箱内的障碍物的内容估计的系统和方法
公开(公告)号：US09518859B2
公开(公告)日：2016-12-13
申请号：US13752406
申请日：2013-01-29
申请人： Avishai Bartov , Yossi Zlotnick
发明人： Avishai Bartov , Yossi Zlotnick
IPC分类号： G01F23/296
CPC分类号： G01F23/2962
摘要： A method and a system for automatically mapping obstacles within a bin that stores content, the system may include a location estimator that is arranged to calculate, in response to detection signals, multiple estimates of shapes of the upper surface of the content at different time periods; wherein the detection signals are generated by a receiver in response to radiation signals reflected or scattered within the bin; and an obstacle detector that is arranged to detect an obstacle in response to relationships between the multiple estimates of shapes of the upper surface of the content.
摘要翻译：一种用于自动映射存储内容的存储区内的障碍物的方法和系统，所述系统可以包括位置估计器，其被布置为响应于检测信号计算不同时间段内容的上表面的形状的多个估计 ; 其中所述检测信号由接收机响应于在所述箱内反射或散射的辐射信号而产生; 以及障碍物检测器，其布置成响应于内容的上表面的形状的多个估计之间的关系来检测障碍物。

8. 发明授权

US09153413B2 Multi-beam scanning electron beam device and methods of using the same 有权
标题翻译：多光束扫描电子束装置及其使用方法
公开(公告)号：US09153413B2
公开(公告)日：2015-10-06
申请号：US12528307
申请日：2008-02-22
申请人： Gilad Almogy , Avishai Bartov , Juergen Frosien , Pavel Adamec , Helmut Banzhof
发明人： Gilad Almogy , Avishai Bartov , Juergen Frosien , Pavel Adamec , Helmut Banzhof
IPC分类号： G21K7/00 , H01J37/05 , H01J37/10 , H01J37/147 , H01J37/28
CPC分类号： H01J37/05 , H01J37/10 , H01J37/147 , H01J37/28 , H01J2237/0635 , H01J2237/1508 , H01J2237/2449 , H01J2237/2817
摘要： A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.
摘要翻译：描述了多光束扫描电子束装置（100）。具有列的多头扫描电子束装置包括用于发射多个电子束（12,13,14）的多光束发射器（110），至少一个共同的电子束光学元件（130）用于多个电子束中的至少两个的开口，并适用于共同影响多个电子束中的至少两个，用于单独影响多个电子束的至少一个单独的电子束光学元件（140），共同的目标透镜组件（150），用于聚焦具有用于聚焦多个电子束中的至少两个的共同激发的多个电子束，并且适于将多个电子束聚焦到样本（20）上以产生多个信号光束（121,131,141）和检测组件（170），用于分别检测相应检测元件上的每个信号光束。

9. 发明申请

US20140207412A1 Method and system for measuring content of a bin 有权
标题翻译：用于测量垃圾箱内容的方法和系统
公开(公告)号：US20140207412A1
公开(公告)日：2014-07-24
申请号：US13747493
申请日：2013-01-23
申请人： Avishai Bartov , Yossi Zlotnick
发明人： Avishai Bartov , Yossi Zlotnick
IPC分类号： G01F23/00 , G01B21/20
CPC分类号： G01B21/20 , G01F23/0076 , G01F23/2962
摘要： A method, non-transitory computer readable medium and a system that includes a confidence level module arranged to calculate, in response to detection signals, estimated upper surface points and to associate a non-binary confidence level with each estimated upper surface point; wherein the detection signals are generated by a receiver in response to an irradiation of at least a portion of the upper surface of the content with radiation pulses transmitted by a transmitter; and an estimator that is arranged to calculate an estimate of the upper surface based upon the estimated upper surface points and the non-binary confidence level associated with each estimated upper surface point.
摘要翻译：一种方法，非暂时性计算机可读介质和包括置信度模块的系统，所述置信度模块被布置为响应于检测信号计算估计的上表面点并将非二进制置信水平与每个估计的上表面点相关联; 其中所述检测信号由接收机响应于所述内容物的所述上表面的至少一部分的照射由发射器发射的辐射脉冲产生; 以及估计器，其被布置为基于与每个估计的上表面点相关联的估计上表面点和非二进制置信水平来计算上表面的估计。

10. 发明申请

US20100320382A1 HIGH THROUGHPUT SEM TOOL 有权
标题翻译：高通量扫描仪刀具
公开(公告)号：US20100320382A1
公开(公告)日：2010-12-23
申请号：US12528307
申请日：2008-02-22
申请人： Gilad Almogy , Avishai Bartov , Jürgen Frosien , Pavel Adamec , Helmut Banzhof
发明人： Gilad Almogy , Avishai Bartov , Jürgen Frosien , Pavel Adamec , Helmut Banzhof
IPC分类号： G01N23/00 , H01J37/147
CPC分类号： H01J37/05 , H01J37/10 , H01J37/147 , H01J37/28 , H01J2237/0635 , H01J2237/1508 , H01J2237/2449 , H01J2237/2817
摘要： A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.
摘要翻译：描述了多光束扫描电子束装置（100）。具有列的多头扫描电子束装置包括用于发射多个电子束（12,13,14）的多光束发射器（110），至少一个共同的电子束光学元件（130）用于多个电子束中的至少两个的开口，并适用于共同影响多个电子束中的至少两个，用于单独影响多个电子束的至少一个单独的电子束光学元件（140），共同的目标透镜组件（150），用于聚焦具有用于聚焦多个电子束中的至少两个的共同激发的多个电子束，并且适于将多个电子束聚焦到样本（20）上以产生多个信号光束（121,131,141）和检测组件（170），用于分别检测相应检测元件上的每个信号光束。

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