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1. 发明授权

US07253417B2 Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens 有权
标题翻译：多轴复合透镜，使用复合透镜的光束系统，以及使用复合透镜的方法
公开(公告)号：US07253417B2
公开(公告)日：2007-08-07
申请号：US10539179
申请日：2003-12-12
申请人： Jürgen Frosien , Pavel Adamec
发明人： Jürgen Frosien , Pavel Adamec
IPC分类号： H01J3/07 , H01J29/51
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/145 , H01J37/3177
摘要： The invention provides an optical system for a charged particle multi-beam system. The optical system comprises an electrostatic lens component and a magnetic lens component. The components are used to focus a plurality of charged particle beams in a separate opening for each of at least a plurality a charged particle beams traveling through the optical system.
摘要翻译：本发明提供了一种用于带电粒子多光束系统的光学系统。光学系统包括静电透镜部件和磁性透镜部件。这些部件用于将多个带电粒子束聚焦在分开的开口中，用于至少多个穿过光学系统的带电粒子束中的每一个。

2. 发明授权

US09305740B2 Charged particle beam system and method of operating thereof 有权
标题翻译：带电粒子束系统及其操作方法
公开(公告)号：US09305740B2
公开(公告)日：2016-04-05
申请号：US13920284
申请日：2013-06-18
申请人： Jürgen Frosien , Benjamin John Cook
发明人： Jürgen Frosien , Benjamin John Cook
IPC分类号： H01J37/04 , H01J37/147 , H01J37/153 , H01J37/26
CPC分类号： H01J37/045 , H01J37/1478 , H01J37/153 , H01J37/263 , H01J2237/1534 , H01J2237/281 , H01J2237/2815
摘要： A charged particle beam device is described. In one aspect, the charged particle beam device includes a charged particle beam source, and a switchable multi-aperture for generating two or more beam bundles from a charged particle beam which includes: two or more aperture openings, wherein each of the two or more aperture openings is provided for generating a corresponding beam bundle of the two or more beam bundles; a beam blanker arrangement configured for individually blanking the two or more beam bundles; and a stopping aperture for blocking beam bundles. The device further includes a control unit configured to control the individual blanking of the two or more beam bundles for switching of the switchable multi-aperture and an objective lens configured for focusing the two or more beam bundles on a specimen or wafer.
摘要翻译：描述带电粒子束装置。一方面，带电粒子束装置包括带电粒子束源和用于从带电粒子束产生两束或更多束束的可切换多孔，该多束光束包括：两个或更多孔径开口，其中两个或更多个提供孔径开口以产生两个或更多束束的相应束束; 束消除器配置，其被配置为单独地消隐所述两个或更多个束束; 以及用于阻挡束束的止动孔。该装置还包括控制单元，该控制单元被配置为控制用于切换可切换多孔的两个或更多束束的单独消隐，以及被配置用于将两束或更多束束聚焦在样本或晶片上的物镜。

3. 发明申请

US20120091359A1 SIMPLIFIED PARTICLE EMITTER AND METHOD OF OPERATING THEREOF 审中-公开
标题翻译：简化粒子发射器及其操作方法
公开(公告)号：US20120091359A1
公开(公告)日：2012-04-19
申请号：US12910240
申请日：2010-10-22
申请人： Stefan LANIO , Jürgen FROSIEN
发明人： Stefan LANIO , Jürgen FROSIEN
IPC分类号： H01J3/14
CPC分类号： H01J37/063 , H01J37/06 , H01J37/08 , H01J37/09 , H01J37/16 , H01J2237/06375
摘要： An emitter assembly for emitting a charged particle beam along an optical axis is described. The emitter assembly being housed in a gun chamber and includes an emitter having an emitter tip, wherein the emitter tip is positioned at a first plane perpendicular to the optical axis and wherein the emitter is configured to be biased to a first potential, an extractor having an opening, wherein the opening is positioned at a second plane perpendicular to the optical axis and wherein the extractor is configured to be biased to a second potential, wherein the second plane has a first distance from the first plane of 2.25 mm and above.
摘要翻译：描述了用于沿光轴发射带电粒子束的发射器组件。发射器组件被容纳在枪室中并且包括具有发射极尖端的发射器，其中发射极尖端位于垂直于光轴的第一平面处，并且其中发射器被配置为偏置到第一电位，提取器具有开口，其中所述开口定位在垂直于所述光轴的第二平面处，并且其中所述提取器构造成被偏置到第二电位，其中所述第二平面具有距离所述第一平面2.25mm及以上的第一距离。

4. 发明申请

US20110220795A1 TWIN BEAM CHARGED PARTICLE COLUMN AND METHOD OF OPERATING THEREOF 有权
标题翻译：双梁带电颗粒柱及其操作方法
公开(公告)号：US20110220795A1
公开(公告)日：2011-09-15
申请号：US13045068
申请日：2011-03-10
申请人： Jürgen FROSIEN
发明人： Jürgen FROSIEN
IPC分类号： H01J37/29
CPC分类号： H01J37/147 , H01J37/1471 , H01J37/244 , H01J37/28 , H01J2237/0453 , H01J2237/04756 , H01J2237/1514 , H01J2237/153 , H01J2237/24465 , H01J2237/24592 , H01J2237/2817
摘要： A column for a charged particle beam device is described. The column includes a charged particle emitter for emitting a primary charged particle beam as one source of the primary charged particle beam; a biprism adapted for acting on the primary charged particle beam so that two virtual sources are generated; and a charged particle beam optics adapted to focus the charged particle beam simultaneously on two positions of a specimen corresponding to images of the two virtual sources.
摘要翻译：描述带电粒子束装置的柱。该柱包括用于发射初级带电粒子束作为初级带电粒子束的一个源的带电粒子发射器; 适于作用于初级带电粒子束的双棱镜，从而产生两个虚拟源; 以及带电粒子束光学器件，其适于将带电粒子束同时聚焦在对应于两个虚拟源的图像的样本的两个位置上。

5. 发明授权

US07847266B2 Device and method for selecting an emission area of an emission pattern 有权
标题翻译：用于选择发射模式的发射区域的装置和方法
公开(公告)号：US07847266B2
公开(公告)日：2010-12-07
申请号：US11469753
申请日：2006-09-01
申请人： Fang Zhou , Jürgen Frosien
发明人： Fang Zhou , Jürgen Frosien
IPC分类号： H01J3/14
CPC分类号： H01J37/06 , H01J2237/045 , H01J2237/06316 , H01J2237/15
摘要： A charged particle beam apparatus and a method for measuring an emission pattern of such an apparatus are provided. The apparatus comprises an emitter with an emission pattern including at least two emission peaks, a gun lens, and a diaphragm, wherein the gun lens comprises a deflector unit and the deflector unit is adapted to direct an emission peak of the at least two emission peaks to an opening of the diaphragm to thereby select the emission peak of the at least two emission peaks from the emission pattern.
摘要翻译：提供一种带电粒子束装置和用于测量这种装置的发射图案的方法。该装置包括具有包括至少两个发射峰值的发射图案的发射器，枪式透镜和隔膜，其中枪形透镜包括偏转器单元，偏转器单元适于引导至少两个发射峰的发射峰到所述隔膜的开口，从而从所述发射图案中选择所述至少两个发射峰的发射峰。

6. 发明授权

US07763866B2 Charged particle beam device with aperture 有权
标题翻译：带孔的带电粒子束装置
公开(公告)号：US07763866B2
公开(公告)日：2010-07-27
申请号：US10576547
申请日：2004-10-19
申请人： Jürgen Frosien , Stefan Lanio , Helmut Banzhof
发明人： Jürgen Frosien , Stefan Lanio , Helmut Banzhof
IPC分类号： G21K5/00
CPC分类号： H01J37/09 , H01J2237/0455
摘要： The present invention relates to a charged particle beam device (1) for inspecting or structuring a specimen (3) comprising a charged particle beam source (5) to generate a charged particle beam (7), a focussing lens (9) to focus the charged particle beam (7) onto the specimen (3), and an aperture system (13) for defining an aperture (6) for the charged particle beam (7). The aperture system (13) includes a first member (20) to block a first portion (7a) of the charged particle beam (7) between the charged particle beam source (5) and the focussing lens (9), a second member (30) to block a second portion (7b) of the charged particle beam (7) between the charged particle beam source (5) and the focussing lens (9), first means (24) for moving the first member (20) to adjust the size of the blocked first portion (7a) of the charged particle beam (7), and second means (34) for moving the second member (30) independently from the first portion (7b). With such aperture system (13), it is possible to freely adjust the size of the aperture (6) and align it to the optical axis (8) during operation.
摘要翻译：本发明涉及一种用于检查或构造包括带电粒子束源（5）以产生带电粒子束（7）的样本（3）的带电粒子束装置（1），聚焦透镜（9）带电粒子束（7）到样品（3）上，以及孔径系统（13），用于限定带电粒子束（7）的孔（6）。孔径系统（13）包括阻挡带电粒子束源（5）和聚焦透镜（9）之间的带电粒子束（7）的第一部分（7a）的第一构件（20），第二构件 30）阻挡带电粒子束源（5）和聚焦透镜（9）之间的带电粒子束（7）的第二部分（7b），第一装置（24）用于移动第一构件（20）以调整带电粒子束（7）的阻挡的第一部分（7a）的尺寸以及用于独立于第一部分（7b）移动第二部件（30）的第二装置（34）。利用这种孔径系统（13），可以在操作期间自由地调整孔径（6）的尺寸并将其对准光轴（8）。

7. 发明申请

US20070200069A1 Double Stage Charged Particle Beam Energy Width Reduction System For Charged Particle Beam System 有权
标题翻译：用于带电粒子束系统的双级带电粒子束能量减少系统
公开(公告)号：US20070200069A1
公开(公告)日：2007-08-30
申请号：US10571347
申请日：2004-09-02
申请人： Jürgen Frosien , Ralf Degenhardt , Stefan Lanio
发明人： Jürgen Frosien , Ralf Degenhardt , Stefan Lanio
IPC分类号： G21K1/08
CPC分类号： H01J37/26 , B82Y10/00 , B82Y40/00 , H01J37/05 , H01J37/153 , H01J37/3174 , H01J2237/057 , H01J2237/1534 , H01J2237/1538
摘要： The present invention relates to e.g. a charged particle beam energy width reduction system for a charged particle beam with a z-axis along the optical axis and a first and a second plane, comprising, a first element (110) acting in a focusing and dispersive manner, a second element (112) acting in a focusing and dispersive manner, a first quadrupole element (410) being positioned such that, in operation, a field of the first quadrupole element overlaps with a field of the first element acting in a focusing and dispersive manner, a second quadrupole element (412) being positioned such that, in operation, a field of the second quadrupole element overlaps with a field of the second element acting in a focusing and dispersive manner, a first charged particle selection element (618) being positioned, in beam direction, before the first element acting in a focusing and dispersive manner, and a second charged particle selection element (616;716) being positioned, in beam direction, after the first element acting in a focusing and dispersive manner. Thereby, a virtually dispersive source-like location without an inherent dispersion limitation can be realized.
摘要翻译：本发明涉及例如用于沿着光轴具有z轴的带电粒子束的带电粒子束能量宽度减小系统以及包括以聚焦和分散方式起作用的第一元件（110）的第一和第二平面，第二元件（ 112），第一四极元件（410）被定位成使得在操作中，第一四极元件的场与以聚焦和分散方式作用的第一元件的场重叠，第二四极元件四极元件（412）被定位成使得在操作中，第二四极元件的场与以聚焦和分散方式作用的第二元件的场重叠，第一带电粒子选择元件（618）被定位成束方向，在第一元件以聚焦和分散方式作用之前，第二带电粒子选择元件（616; 716）在光束方向上位于第一元件作用于第一元件聚焦和分散的方式。因此，可以实现没有固有分散限制的虚拟色散源状位置。

8. 发明授权

US06407388B1 Corpuscular beam device 失效
标题翻译：球形束装置
公开(公告)号：US06407388B1
公开(公告)日：2002-06-18
申请号：US09551003
申请日：2000-04-18
申请人： Jürgen Frosien
发明人： Jürgen Frosien
IPC分类号： H01J3726
CPC分类号： H01J37/28 , H01J37/145
摘要： The invention relates to a corpuscular beam device with an objective lens for focussing a primary particle beam onto a specimen and a detector for detecting secondary and/or backscattered particles released at the specimen. Furthermore, there is a sieve electrode arranged above the specimen which has a central hole for the primary particle beam and a plurality of additional holes for the secondary and/or backscattered particles.
摘要翻译：本发明涉及具有用于将一次粒子束聚焦到样本上的物镜的红细胞束装置和用于检测在样品上释放的二次和/或反向散射颗粒的检测器。此外，在试样上设置有筛电极，其具有用于一次粒子束的中心孔和用于次级和/或后向散射粒子的多个附加孔。

9. 发明申请

US20140367586A1 CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THEREOF 有权
标题翻译：充电颗粒束系统及其操作方法
公开(公告)号：US20140367586A1
公开(公告)日：2014-12-18
申请号：US13920284
申请日：2013-06-18
申请人： Jürgen FROSIEN , Benjamin John COOK
发明人： Jürgen FROSIEN , Benjamin John COOK
IPC分类号： H01J37/04
CPC分类号： H01J37/045 , H01J37/1478 , H01J37/153 , H01J37/263 , H01J2237/1534 , H01J2237/281 , H01J2237/2815
摘要： A charged particle beam device is described. In one aspect, the charged particle beam device includes a charged particle beam source, and a switchable multi-aperture for generating two or more beam bundles from a charged particle beam which includes: two or more aperture openings, wherein each of the two or more aperture openings is provided for generating a corresponding beam bundle of the two or more beam bundles; a beam blanker arrangement configured for individually blanking the two or more beam bundles; and a stopping aperture for blocking beam bundles. The device further includes a control unit configured to control the individual blanking of the two or more beam bundles for switching of the switchable multi-aperture and an objective lens configured for focusing the two or more beam bundles on a specimen or wafer.
摘要翻译：描述带电粒子束装置。一方面，带电粒子束装置包括带电粒子束源和用于从带电粒子束产生两个或更多个束束的可切换多孔，其包括：两个或更多个孔口，其中两个或更多个提供孔径开口以产生两个或更多束束的相应束束; 束消除器配置，其被配置为单独地消隐所述两个或更多个束束; 以及用于阻挡束束的止动孔。该装置还包括控制单元，该控制单元被配置为控制用于切换可切换多孔的两个或更多束束的单独消隐，以及被配置用于将两束或更多束束聚焦在样本或晶片上的物镜。

10. 发明申请

US20130327951A1 HIGH BRIGHTNESS ELECTRON GUN WITH MOVING CONDENSER LENS 有权
标题翻译：高亮度电子枪与移动冷凝器镜头
公开(公告)号：US20130327951A1
公开(公告)日：2013-12-12
申请号：US13621720
申请日：2012-09-17
申请人： Jürgen FROSIEN
发明人： Jürgen FROSIEN
IPC分类号： H01J3/20 , H01J3/26
CPC分类号： H01J37/067 , H01J37/141 , H01J2237/06325 , H01J2237/1501
摘要： A condenser lens arrangement for an electron beam system is described. The condenser lens arrangement includes a magnetic condenser lens adapted for generating a magnetic condenser lens field, the condenser lens having a symmetry axis, and a magnetic deflector adapted for generating a magnetic deflector field. The deflector is configured so that the superposition of the magnetic condenser lens field and the magnetic deflector field results in an optical axis of the condenser lens arrangement being movable relative to the symmetry axis. Further, an electron beam optical system including a condenser lens arrangement and a method for moving a condenser lens are described.
摘要翻译：描述了一种用于电子束系统的聚光透镜装置。聚光透镜装置包括适于产生磁聚焦透镜场的聚光透镜，具有对称轴的聚光透镜，以及适于产生磁偏转器场的磁偏转器。偏转器被配置为使得磁聚光透镜场和磁偏转器场的叠加导致聚光透镜装置的光轴相对于对称轴线是可移动的。此外，描述了包括聚光透镜布置的电子束光学系统和用于移动聚光透镜的方法。

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