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1. 发明授权

US07973942B2 Optical displacement detection mechanism and surface information measurement device using the same 有权
标题翻译：光学位移检测机构和表面信息测量装置使用相同
公开(公告)号：US07973942B2
公开(公告)日：2011-07-05
申请号：US11841445
申请日：2007-08-20
申请人： Masato Iyoki , Hiroyoshi Yamamoto , Kazutoshi Watanabe , Masatsugu Shigeno
发明人： Masato Iyoki , Hiroyoshi Yamamoto , Kazutoshi Watanabe , Masatsugu Shigeno
IPC分类号： G01B11/14 , G01B11/30 , G01N21/55 , G01N23/00 , G01N21/86 , G21K7/00 , G01V8/00 , G01Q20/02
CPC分类号： G01B11/024 , G01Q20/02
摘要： There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions. In an optical displacement detection mechanism comprising a light source irradiating a light to a cantilever becoming the measurement object, a light source drive circuit driving the light source, a photodetector receiving the light after irradiated to the cantilever from the light source to thereby detect an intensity of the light, and an amplifier amplifying a detection signal of the photodetector at a predetermined amplification rate, there is made such that, by providing a light intensity regulator and an amplification rate regulator, an irradiated light intensity to the cantilever and an amplification rate of the photodetector can be made variable.
摘要翻译：提供了一种光学位移检测机构，其中即使测量对象改变，检测灵敏度和噪声比可以调节，而不依赖于诸如反射率的光学特性或测量对象的形状和机械特性，可以使通过照射光将测量对象的热变形对测量对象的影响减小，并且可以在最佳条件下确保测量精度。在包括将光照射到作为测量对象的悬臂的光源的光学位移检测机构中，驱动光源的光源驱动电路，从光源照射到悬臂的光接收器，其接收光，从而检测强度以及以预定的放大率放大光检测器的检测信号的放大器，通过提供光强度调节器和放大率调节器，对悬臂的照射光强度和放大率可以使光电检测器变得可变。

2. 发明申请

US20080049236A1 Optical Displacement Detection Mechanism and Surface Information Measurement Device Using the Same 有权
标题翻译：光学位移检测机构及其表面信息测量装置
公开(公告)号：US20080049236A1
公开(公告)日：2008-02-28
申请号：US11841445
申请日：2007-08-20
申请人： Masato Iyoki , Hiroyoshi Yamamoto , Kazutoshi Watanabe , Masatsugu Shigeno
发明人： Masato Iyoki , Hiroyoshi Yamamoto , Kazutoshi Watanabe , Masatsugu Shigeno
IPC分类号： G01B11/14
CPC分类号： G01B11/024 , G01Q20/02
摘要： There is provided an optical displacement detection mechanism in which, even if a measurement object changes, a detection sensitivity and a ratio of a noise are adjustable without depending on optical characteristics such as reflectivity, or a shape and mechanical characteristics of a measurement object, an influence of a thermal deformation of the measurement object by an irradiated light to the measurement object can be made small, and a measurement accuracy can be ensured under optimum conditions. In an optical displacement detection mechanism comprising a light source irradiating a light to a cantilever becoming the measurement object, a light source drive circuit driving the light source, a photodetector receiving the light after irradiated to the cantilever from the light source to thereby detect an intensity of the light, and an amplifier amplifying a detection signal of the photodetector at a predetermined amplification rate, there is made such that, by providing a light intensity regulator and an amplification rate regulator, an irradiated light intensity to the cantilever and an amplification rate of the photodetector can be made variable.
摘要翻译：提供了一种光学位移检测机构，其中即使测量对象改变，检测灵敏度和噪声比可以调节，而不依赖于诸如反射率的光学特性或测量对象的形状和机械特性，可以使通过照射光将测量对象的热变形对测量对象的影响减小，并且可以在最佳条件下确保测量精度。在包括将光照射到作为测量对象的悬臂的光源的光学位移检测机构中，驱动光源的光源驱动电路，从光源照射到悬臂的光接收器，其接收光，从而检测强度以及以预定的放大率放大光检测器的检测信号的放大器，通过提供光强度调节器和放大率调节器，对悬臂的照射光强度和放大率可以使光电检测器变得可变。

3. 发明授权

US08214915B2 Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever 有权
标题翻译：悬臂，悬臂系统，扫描探针显微镜，质量传感器装置，粘弹性测量仪器，操纵装置，悬臂位移测定方法，悬臂振动方法及悬臂变形方法
公开(公告)号：US08214915B2
公开(公告)日：2012-07-03
申请号：US12455556
申请日：2009-06-03
申请人： Masatsugu Shigeno , Kazutoshi Watanabe , Masato Iyoki , Naoya Watanabe
发明人： Masatsugu Shigeno , Kazutoshi Watanabe , Masato Iyoki , Naoya Watanabe
IPC分类号： G01Q20/00
CPC分类号： G01Q70/14 , G01G3/12 , G01G9/00 , G01Q10/045 , G01Q60/32
摘要： Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.
摘要翻译：本发明提供一种能够以活跃的方式自身弯曲和变形的悬臂。悬臂包括：杠杆部分，其具有由主体部分支撑的近端; 以及形成在悬臂中并在施加电压时产生热量的电阻器构件，从而通过由于热量的热膨胀而使杆部变形。

4. 发明申请

US20100107284A1 Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever 有权
标题翻译：悬臂，悬臂系统，扫描探针显微镜，质量传感器装置，粘弹性测量仪器，操纵装置，悬臂位移测定方法，悬臂振动方法及悬臂变形方法
公开(公告)号：US20100107284A1
公开(公告)日：2010-04-29
申请号：US12455556
申请日：2009-06-03
申请人： Masatsugu Shigeno , Kazutoshi Watanabe , Masato Iyoki , Naoya Watanabe
发明人： Masatsugu Shigeno , Kazutoshi Watanabe , Masato Iyoki , Naoya Watanabe
IPC分类号： G01Q20/00 , G01Q70/08 , G01G3/16
CPC分类号： G01Q70/14 , G01G3/12 , G01G9/00 , G01Q10/045 , G01Q60/32
摘要： Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.
摘要翻译：本发明提供一种能够以活跃的方式自身弯曲和变形的悬臂。悬臂包括：杠杆部分，其具有由主体部分支撑的近端; 以及形成在悬臂中并在施加电压时产生热量的电阻器构件，从而通过由于热量的热膨胀而使杆部变形。

5. 发明申请

US20080049223A1 OPTICAL DISPLACEMENT-DETECTING MECHANISM AND PROBE MICROSCOPE USING THE SAME 有权
标题翻译：使用光学位移检测机制和探针显微镜
公开(公告)号：US20080049223A1
公开(公告)日：2008-02-28
申请号：US11840549
申请日：2007-08-17
申请人： Masato Iyoki , Hiroyoshi Yamamoto , Kazutoshi Watanabe
发明人： Masato Iyoki , Hiroyoshi Yamamoto , Kazutoshi Watanabe
IPC分类号： G01J4/00 , G01B11/14 , G01N21/47
CPC分类号： G01Q20/02
摘要： The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.
摘要翻译：光学位移检测机构具有：用光照射被测物的光源; 用于驱动光源的光源驱动电路; 由半导体制成的光检测器，用于在由光源照射测量目标物之后接收光，并将光转换成电信号从而检测光的强度; 以及放大器，其包括用于以预定的放大系数对光学检测器的检测信号进行电流 - 电压转换的电流 - 电压转换电路。在光学位移检测机构中，使用光谱半宽度为10nm以上的光源，由此可以以2mW以上的输出功率驱动光源，而不产生模式跳噪声和光反馈噪声。

6. 发明授权

US07787133B2 Optical displacement-detecting mechanism and probe microscope using the same 有权
标题翻译：光学位移检测机构和探针显微镜使用相同
公开(公告)号：US07787133B2
公开(公告)日：2010-08-31
申请号：US11840549
申请日：2007-08-17
申请人： Masato Iyoki , Hiroyoshi Yamamoto , Kazutoshi Watanabe
发明人： Masato Iyoki , Hiroyoshi Yamamoto , Kazutoshi Watanabe
IPC分类号： G01B11/14
CPC分类号： G01Q20/02
摘要： The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.
摘要翻译：光学位移检测机构具有：用光照射被测物的光源; 用于驱动光源的光源驱动电路; 由半导体制成的光检测器，用于在由光源照射测量目标物之后接收光，并将光转换成电信号从而检测光的强度; 以及放大器，其包括用于以预定的放大系数对光学检测器的检测信号进行电流 - 电压转换的电流 - 电压转换电路。在光学位移检测机构中，使用光谱半宽度为10nm以上的光源，由此可以以2mW以上的输出功率驱动光源，而不产生模式跳噪声和光反馈噪声。

7. 发明授权

US4902892A Method of measurement by scanning tunneling microscope 失效
标题翻译：扫描隧道显微镜测量方法
公开(公告)号：US4902892A
公开(公告)日：1990-02-20
申请号：US257468
申请日：1988-10-13
申请人： Shigeo Okayama , Hiroshi Tokumoto , Hiroshi Bando , Wataru Mizutani , Masayuki Shimura , Haruki Nakagawa , Masatsugu Shigeno , Kazutoshi Watanabe
发明人： Shigeo Okayama , Hiroshi Tokumoto , Hiroshi Bando , Wataru Mizutani , Masayuki Shimura , Haruki Nakagawa , Masatsugu Shigeno , Kazutoshi Watanabe
IPC分类号： G01B7/34 , G01N23/00 , G01N27/00 , G01N37/00 , G01Q10/02 , G01Q10/06 , G01Q60/10 , H01J37/22 , H01J37/26 , H01J37/28
CPC分类号： G01Q60/10 , B82Y35/00 , G01Q10/06 , Y10S977/851
摘要： A probe is shifted at a distance where the probe and a material to be obsed are sufficiently far away from each other relative to the roughness of the material's surface. This method prevents the probe from colliding with the material's surface during the shift of the probe thereby enabling high speed shift of the probe. Further, a micro-drive mechanism for controlling tunnel currents may be stopped during the shift in order to minimize the drift which may be caused by heat generated inside the micro-drive mechanism. Therefore, it is particularly advantageous to apply this STM measuring method for high-speed and stable measurement of a very large surface area and a very rough surface.
摘要翻译：探针在探针和待观察材料相对于材料表面的粗糙度彼此足够远的距离处移动。这种方法可以防止探头在探头移动期间与材料的表面碰撞，从而实现探头的高速移动。此外，在移动期间可以停止用于控制隧道电流的微驱动机构，以便最小化可能由微驱动机构内部产生的热引起的漂移。因此，将STM测量方法应用于非常大的表面积和非常粗糙的表面的高速和稳定的测量是特别有利的。

8. 发明申请

US20110038392A1 Softening point measuring apparatus and thermal conductivity measuring apparatus 有权
标题翻译：软化点测量仪和热导率测量仪
公开(公告)号：US20110038392A1
公开(公告)日：2011-02-17
申请号：US12806364
申请日：2010-08-11
申请人： Kazunori Ando , Masayuki Iwasa , Masatsugu Shigeno , Hiroumi Momota , Kazutoshi Watanabe
发明人： Kazunori Ando , Masayuki Iwasa , Masatsugu Shigeno , Hiroumi Momota , Kazutoshi Watanabe
IPC分类号： G01N25/02 , G01N25/18
CPC分类号： G01N25/18 , G01N25/04 , G01Q60/58
摘要： In a local softening point measuring apparatus and thermal conductivity measuring apparatus using a probe microscope as a base, environment of the prob˜ and a sample surface is set to 1/100 atmospheric pressure (103 Pa) or lower. Otherwise, a side surface of the probe is coated with a thermal insulation material having a thickness that enables thermal dissipation to be reduced to 1/100 or lower, to thereby reduce the thermal dissipation from the side surface of the probe, and exchange heat substantially only at the contacting portion between the probe and the sample surface.
摘要翻译：在使用探针显微镜作为基础的局部软化点测定装置和热导率测定装置中，将试样表面的环境设定为1/100大气压（103Pa）以下。否则，探针的侧表面涂覆有能够使散热减小到1/100或更低的厚度的绝热材料，从而减少从探针侧表面的散热，并且基本上交换热量仅在探针和样品表面之间的接触部分处。

9. 发明申请

US20050231066A1 Fine-adjustment mechanism for scanning probe microscopy 有权
标题翻译：扫描探针显微镜微调机构
公开(公告)号：US20050231066A1
公开(公告)日：2005-10-20
申请号：US11045916
申请日：2005-01-28
申请人： Masato Iyoki , Akihiko Hidaka , Kazutoshi Watanabe
发明人： Masato Iyoki , Akihiko Hidaka , Kazutoshi Watanabe
IPC分类号： G01B7/16 , G01B7/34 , G01B21/30 , G01L1/22 , G01N37/00 , G01Q10/00 , G01Q10/04 , H01L41/04 , H01L41/09
CPC分类号： G01Q10/04 , Y10S977/872
摘要： The invention provides a fine-adjustment mechanism for a scanning probe microscopy with high rigidity and high degree of measurement accuracy wherein a strain gauge displacement sensor which can be installed in a small space is arranged so that temperature compensation is achieved. The fine-adjustment mechanism composed of a piezoelectric device is provided with at least two-piece electrode. One of the electrodes is configured as a dummy electrode, to which no voltage is applied, and the other electrode is configured as an active electrode which generates strain when voltage is applied. One or two resistors are provided on each of the active electrode and dummy electrode, and a bridge circuit is configured by the resistors.
摘要翻译：本发明提供了一种用于具有高刚性和高测量精度的扫描探针显微镜的精细调节机构，其中可以安装在小空间中的应变片位移传感器被布置成实现温度补偿。由压电元件构成的微调机构具有至少两片电极。其中一个电极被配置为没有施加电压的虚拟电极，另一个电极被配置为当施加电压时产生应变的有源电极。有源电极和虚拟电极均设置有一个或两个电阻器，桥接电路由电阻器构成。

10. 发明授权

US08608373B2 Softening point measuring apparatus and thermal conductivity measuring apparatus 有权
标题翻译：软化点测量仪和热导率测量仪
公开(公告)号：US08608373B2
公开(公告)日：2013-12-17
申请号：US12806364
申请日：2010-08-11
申请人： Kazunori Ando , Masayuki Iwasa , Masatsugu Shigeno , Hiroumi Momota , Kazutoshi Watanabe
发明人： Kazunori Ando , Masayuki Iwasa , Masatsugu Shigeno , Hiroumi Momota , Kazutoshi Watanabe
IPC分类号： G01N25/02 , G01N25/18
CPC分类号： G01N25/18 , G01N25/04 , G01Q60/58
摘要： In a local softening point measuring apparatus and thermal conductivity measuring apparatus using a probe microscope as a base, environment of the prob˜ and a sample surface is set to 1/100 atmospheric pressure (103 Pa) or lower. Otherwise, a side surface of the probe is coated with a thermal insulation material having a thickness that enables thermal dissipation to be reduced to 1/100 or lower, to thereby reduce the thermal dissipation from the side surface of the probe, and exchange heat substantially only at the contacting portion between the probe and the sample surface.
摘要翻译：在使用探针显微镜作为基础的局部软化点测定装置和热导率测定装置中，将试样表面的环境设定为1/100大气压（103Pa）以下。否则，探针的侧表面涂覆有能够使散热减小到1/100或更低的厚度的绝热材料，从而减少从探针侧表面的散热，并且基本上交换热量仅在探针和样品表面之间的接触部分处。

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