专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5327221A Device for detecting positional relationship between two objects 失效
标题翻译：用于检测两个物体之间的位置关系的装置
公开(公告)号：US5327221A
公开(公告)日：1994-07-05
申请号：US919380
申请日：1992-07-29
申请人： Kenji Saitoh , Masakazu Matsugu , Shigeyuki Suda , Yukichi Niwa , Ryo Kuroda , Noriyuki Nose , Minoru Yoshii , Naoto Abe , Mitsutoshi Ohwada
发明人： Kenji Saitoh , Masakazu Matsugu , Shigeyuki Suda , Yukichi Niwa , Ryo Kuroda , Noriyuki Nose , Minoru Yoshii , Naoto Abe , Mitsutoshi Ohwada
IPC分类号： G03F9/00 , G01B9/02
CPC分类号： G03F9/7023 , G03F9/7049
摘要： A device for detecting the positional relationship between first and second objects in a predetermined direction includes a light source for emitting light in a direction to the first or second object, and a first detecting portion for detecting the position of incidence of a first light deflected by the first and second objects, wherein the position of incidence of the first light upon the first detecting portion is changeable with a change in the positional relationship between the first and second objects in the predetermined direction. A second detecting portion detects the position of incidence of a second light deflected by at least one of the first and second objects, wherein the state of the position of incidence of the second light resulting from a change in the positional relationship between the first and second objects, in the predetermined direction differs from that of the first light. On the basis of the detection by the first and second detecting portions, the positional relationship between the first and second objects is detected without being affected by an inclination thereof.
摘要翻译：一种用于检测在预定方向上的第一和第二物体之间的位置关系的装置包括：用于沿与第一或第二物体的方向发射光的光源;以及第一检测部分，用于检测第一和第二物体偏转的第一光的入射位置第一和第二物体，其中在第一检测部分上的第一光的入射位置随预定方向上第一和第二物体之间的位置关系的改变而改变。第二检测部分检测由第一和第二物体中的至少一个偏转的第二光的入射位置，其中由第一和第二物体之间的位置关系的变化引起的第二光的入射位置的状态在预定方向上的物体与第一光不同。基于第一和第二检测部分的检测，检测第一和第二物体之间的位置关系，而不受其倾斜的影响。

2. 发明授权

US5162656A Position detecting device employing marks and oblique projection 失效
标题翻译：位置检测装置采用标记和倾斜投影
公开(公告)号：US5162656A
公开(公告)日：1992-11-10
申请号：US841790
申请日：1992-03-02
申请人： Masakazu Matsugu , Kenji Saitoh , Shigeyuki Suda , Ryo Kuroda , Yukichi Niwa , Noriyuki Nose
发明人： Masakazu Matsugu , Kenji Saitoh , Shigeyuki Suda , Ryo Kuroda , Yukichi Niwa , Noriyuki Nose
IPC分类号： G03F9/00
CPC分类号： G03F9/7023 , G03F9/7049
摘要： A device for detecting positional relationship between a first and second objects in a predetermined direction is disclosed. The device includes light source for projecting light upon the first object so that the light incident on the first object is deflected thereby and emanates therefrom in a direction perpendicular to the predetermined direction; a light receiving portion disposed in a direction in which the light having been deflected perpendicularly to the predetermined direction and having been deflected again by the second object advances, the light receiving portion being operable to detect the position of incidence of the light thereupon, wherein the position of the light upon the light receiving means is changeable with the position of incidence of the light upon the second object; and a detecting system for detecting the positional relationship between the first and second objects in the predetermined direction, on the basis of the detection by the light receiving portion.
摘要翻译：公开了一种用于检测预定方向上的第一和第二物体之间的位置关系的装置。该装置包括用于将光投射到第一物体上的光源，使得入射在第一物体上的光由此偏转，并在垂直于预定方向的方向上从其发出; 光接收部分沿着垂直于预定方向偏转并被第二物体再次偏转的方向设置的方向延伸，光接收部分可操作以检测其上的光的入射位置，其中，光在光接收装置上的位置可随着第二物体上的光入射位置而改变; 以及检测系统，用于基于光接收部分的检测来检测第一和第二物体在预定方向上的位置关系。

3. 发明授权

US5294980A Positioning detecting method and apparatus 失效
标题翻译：定位检测方法及装置
公开(公告)号：US5294980A
公开(公告)日：1994-03-15
申请号：US58662
申请日：1993-05-10
申请人： Masakazu Matsugu , Kenji Saitoh , Yukichi Niwa , Noriyuki Nose , Ryo Kuroda , Shigeyuki Suda
发明人： Masakazu Matsugu , Kenji Saitoh , Yukichi Niwa , Noriyuki Nose , Ryo Kuroda , Shigeyuki Suda
IPC分类号： G03F9/00 , G01B11/00 , G01N21/85
CPC分类号： G03F9/70
摘要： A device for detecting a relative positional relationship between first and second objects with respect to a predetermined direction includes an illumination system for irradiating the first object with light, wherein the first and second objects are provided with first and second physical optic elements, respectively, each having a light converging or diverging function in at least one direction and wherein the illumination system illuminates the first physical optic element. A photodetecting system detects light passing through the first object and emanating from the second object, and is operable to detect light convergently or divergently influenced by both of the first and physical optic elements, such that the relative positional relationship between the first and second objects can be detected on the basis of the detection by the photodetecting system. At least one of the first and second physical optic elements has a light converging or diverging function in a direction perpendicular to the one direction and has different focal lengths in the perpendicular direction and in the one direction.
摘要翻译：用于检测相对于预定方向的第一和第二物体之间的相对位置关系的装置包括用于用光照射第一物体的照明系统，其中第一和第二物体分别设置有第一和第二物理光学元件，在至少一个方向上具有聚光或发散功能，并且其中所述照明系统照亮所述第一物理光学元件。光检测系统检测穿过第一物体并从第二物体发出的光，并且可操作以从第一物理光学元件和物理光学元件两者收敛或分散地检测光，使得第一和第二物体之间的相对位置关系基于光检测系统的检测来检测。第一和第二物理光学元件中的至少一个在垂直于一个方向的方向上具有聚光或发散功能，并且在垂直方向和一个方向上具有不同的焦距。

4. 发明授权

US5343291A Method and apparatus for measuring an interval between two objects 失效
标题翻译：用于测量两个物体间隔的方法和装置
公开(公告)号：US5343291A
公开(公告)日：1994-08-30
申请号：US851109
申请日：1992-03-16
申请人： Mitsutoshi Ohwada , Masakazu Matsugu , Shigeyuki Suda , Minoru Yoshii , Yukichi Niwa , Noriyuki Nose , Kenji Saitoh , Masanobu Hasegawa
发明人： Mitsutoshi Ohwada , Masakazu Matsugu , Shigeyuki Suda , Minoru Yoshii , Yukichi Niwa , Noriyuki Nose , Kenji Saitoh , Masanobu Hasegawa
IPC分类号： G03F9/00 , G01B11/02
CPC分类号： G03F9/7023 , G03F9/7049
摘要： A device for measuring an interval between two plate-like objects includes a light source for projecting a light toward the objects, a detector for detecting a position of incidence, upon a predetermined surface, of the light projected by the light source and deflected by the two objects, and a calculating portion for measuring the interval of the two objects on the basis of the detection by the detector.
摘要翻译：用于测量两个板状物体之间的间隔的装置包括：用于向物体投射光的光源;检测器，用于检测由光源投射并被光源偏转的预定表面上的入射位置; 两个物体和用于根据检测器的检测来测量两个物体的间隔的计算部分。

5. 发明授权

US5319444A Position detecting method and apparatus 失效
标题翻译：位置检测方法和装置
公开(公告)号：US5319444A
公开(公告)日：1994-06-07
申请号：US20464
申请日：1993-02-22
申请人： Kenji Saitoh , Masakazu Matsugu , Yukichi Niwa , Noriyuki Nose , Minoru Yoshii , Shigeyuki Suda
发明人： Kenji Saitoh , Masakazu Matsugu , Yukichi Niwa , Noriyuki Nose , Minoru Yoshii , Shigeyuki Suda
IPC分类号： G03F9/00 , G01B11/14 , G01N21/86
CPC分类号： G03F9/7049
摘要： A method of detecting relative positional deviation between first and second objects. The method includes the steps of providing the first object with a first mark which functions as a lens, providing the second object with a second mark which functions as a lens, providing an optical system between the first and second objects, directing a radiation beam through the first mark and the optical system to the second mark, and detecting any shift of the radiation beam from the second mark irradiated with the radiation beam from the optical system, to detect the relative positional deviation of the first and second objects.
摘要翻译：一种检测第一和第二物体之间的相对位置偏差的方法。该方法包括以下步骤：向第一物体提供用作透镜的第一标记，为第二物体提供用作透镜的第二标记，在第一和第二物体之间提供光学系统，引导辐射束通过第一标记和第二标记的光学系统，并且检测来自用来自光学系统的辐射束照射的第二标记的辐射束的任何偏移，以检测第一和第二物体的相对位置偏差。

6. 发明授权

US4840473A Optical device 失效
标题翻译：光学装置
公开(公告)号：US4840473A
公开(公告)日：1989-06-20
申请号：US908725
申请日：1986-09-18
申请人： Nobuo Kushibiki , Noriyuki Nose , Toshiyuki Nakajima , Takeshi Baba , Masakazu Matsugu , Yukichi Niwa
发明人： Nobuo Kushibiki , Noriyuki Nose , Toshiyuki Nakajima , Takeshi Baba , Masakazu Matsugu , Yukichi Niwa
IPC分类号： G02B3/12 , G02B3/14 , G02B26/08 , G11B7/09
CPC分类号： G02B26/0875 , G11B7/09
摘要： An optical device is composed by sandwiching a deformable member between sandwiching members. The deformable member has a shear modulus decreasing toward the inside. The deformable member may be a combination of a core and a coating with different shear moduli or a single body having a continuoudly decreasing shear modulus. The sandwiching members may be a flat plate either transparent or opaque or a lens with or without reflecting film. Because of inner soft and outer hard elastic nature of the deformable member, the sandwiching members can easily change their relative position to change an optical path and an imaging position of the optical device with good durability.
摘要翻译：光学装置通过将可变形构件夹在夹层构件之间而构成。可变形构件的剪切模量向内侧减小。可变形构件可以是具有不同剪切模量的芯和涂层的组合，或者具有连续降低的剪切模量的单体。夹层构件可以是透明或不透明的平板或具有或不具有反射膜的透镜。由于可变形构件的内部软和外部的硬弹性，因此夹持构件可以容易地改变其相对位置，以改变具有良好耐用性的光学装置的光路和成像位置。

7. 发明授权

US4985186A Process for producing optical element 失效
标题翻译：光学元件制造工艺
公开(公告)号：US4985186A
公开(公告)日：1991-01-15
申请号：US35773
申请日：1987-04-08
申请人： Noriyuki Nose , Toshiyuki Nakajima , Eigo Kawakami , Takeshi Baba , Nobuo Kushibiki , Masakazu Matsugu , Yukichi Niwa
发明人： Noriyuki Nose , Toshiyuki Nakajima , Eigo Kawakami , Takeshi Baba , Nobuo Kushibiki , Masakazu Matsugu , Yukichi Niwa
IPC分类号： B29C33/46 , B29C37/00 , B29C43/50 , B29D11/00
CPC分类号： B29D11/00855 , B29C33/46 , B29C37/0007 , B29C43/50 , B29D11/00432 , B29D11/00548 , B29L2011/0016 , Y10S425/808
摘要： A process for producing an optical element wherein an optical molding is formed by using a mold and thereafter released from the mold by supplying a gas to the boundary between the mold surface and the optical molding. In the process, no localized external force is applied to the optical molding during the release thereof, and therefore undesirable deformation or flaws of the optical molding are not caused.
摘要翻译：一种光学元件的制造方法，其中通过使用模具形成光学模制件，然后通过向模具表面和光学模制件之间的边界提供气体从模具中释放。在该过程中，在光学成型件的释放过程中不会施加局部的外力，因此不会引起不期望的光学成型的变形或缺陷。

8. 发明授权

US5000572A Distance measuring system 失效
标题翻译：距离测量系统
公开(公告)号：US5000572A
公开(公告)日：1991-03-19
申请号：US542656
申请日：1990-06-25
申请人： Noriyuki Nose , Minoru Yoshii , Yukichi Niwa , Ryo Kuroda
发明人： Noriyuki Nose , Minoru Yoshii , Yukichi Niwa , Ryo Kuroda
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A device for measuring a moving distance of two relatively moving objects includes a first diffraction grating provided on one of the two objects and disposed along the relatively moving direction of the two objects, and a measuring portion provided on the other object. The measuring portion includes a second diffraction grating, a light source and a photodetecting system, wherein the light source provides lights which are projected upon two points on the second diffraction grating so that they emanate from the two points in the form of diffraction lights having different diffraction orders. The diffraction lights are directed to the same point on the first diffraction grating and are diffracted again by the first diffraction grating so that they are emitted in the same direction, and the photodetecting system is operable to detect a change in the light intensity caused due to the interference of the two lights emanating from the first diffraction grating. The device further includes a detecting system for detecting the relative moving distance of the two objects on the basis of the detection by the photodetecting.
摘要翻译：用于测量两个相对移动物体的移动距离的装置包括设置在两个物体中的一个物体上并沿两个物体的相对移动方向设置的第一衍射光栅以及设置在另一物体上的测量部分。测量部分包括第二衍射光栅，光源和光电检测系统，其中光源提供投射在第二衍射光栅上的两个点上的光，使得它们以具有不同的衍射光的形式的两个点发射衍射指令。衍射光被引导到第一衍射光栅上的同一点，并被第一衍射光栅再次衍射，使得它们沿相同的方向发射，并且光电检测系统可操作以检测由于从第一衍射光栅发出的两个光的干涉。该装置还包括检测系统，用于根据受光检测的检测来检测两个物体的相对移动距离。

9. 发明授权

US5122660A Distance measuring system utilizing an object with at least one inclined surface 失效
标题翻译：距离测量系统使用至少一个内置表面的对象
公开(公告)号：US5122660A
公开(公告)日：1992-06-16
申请号：US671657
申请日：1991-03-19
申请人： Minoru Yoshii , Noriyuki Nose , Yukichi Niwa , Ryo Kuroda
发明人： Minoru Yoshii , Noriyuki Nose , Yukichi Niwa , Ryo Kuroda
IPC分类号： G01D5/38 , G02B7/32 , G11B7/085
CPC分类号： G11B7/085 , G01D5/38 , G02B7/32
摘要： A device for measuring a relatively moving distance of two relatively moving objects is disclosed. The device includes a plurality of inclined surfaces formed on one of the objects and arrayed with a predetermined pitch along the relatively moving direction, with each of the inclined surfaces being inclined with respect to the relatively moving direction. A measuring portion is provided on the other object for measuring the distance to at least one of the inclined surfaces in a direction having an angle with respect to the relatively moving direction, and a detecting portion detects the relatively moving distance of the two objects on the basis of the measurement by the measuring portion.
摘要翻译：公开了一种用于测量两个相对移动的物体的相对移动距离的装置。该装置包括形成在一个物体上的多个倾斜表面，并且沿相对移动的方向以预定间距排列，每个倾斜表面相对于相对移动的方向倾斜。测量部分设置在另一物体上，用于测量在相对于相对运动方向具有角度的方向上至少一个倾斜表面的距离，并且检测部分检测两个物体在相对移动方向上的相对移动的距离由测量部分测量的基础。

10. 发明授权

US4912408A Distance measuring system using superconducting quantum interference device 失效
标题翻译：使用超导量子干涉装置的距离测量系统
公开(公告)号：US4912408A
公开(公告)日：1990-03-27
申请号：US199706
申请日：1988-05-27
申请人： Takeshi Sawada , Ryo Kuroda , Noriyuki Nose , Yukichi Niwa
发明人： Takeshi Sawada , Ryo Kuroda , Noriyuki Nose , Yukichi Niwa
IPC分类号： G01B7/00 , G01D5/14 , G01D5/18 , H01L39/00
CPC分类号： G01D5/145 , G01D5/18 , Y10S505/843 , Y10S505/872
摘要： Disclosed is a distance measuring system suitably usable in a semiconductor microcircuit manufacturing lithographic apparatus such as an aligner or a stepper, for measuring the position or the distance of movement of a movable object such as a mask stage or a wafer stage. The system includes a magnetic field producing portion such as a magnet for producing a predetermined magnetic field, a superconducting quantum interference device coupled to the mask stage or the wafer stage. Further, there are provided a magnetic flux detecting portion for outputting signals corresponding to changes in the magnetic flux, in the magnetic field, passing through the superconducting quantum interference device and a signal processing unit for processing the output signals of the magnetic flux detecting portion to detect the position or the distance of movement of the mask stage or the wafer stage. Also, a shielding member is provided to shield at least the magnetic field producing portion and the magnetic flux detecting portion against an external magnetic field, by use of a superconductor. The distance measuring system of the present invention assures accurate measurement with a high resolution, for a wide movable range of the movable member such as a range not less than 100 mm.
摘要翻译：公开了适用于半导体微电路制造光刻设备（例如对准器或步进器）中的距离测量系统，用于测量诸如掩模台或晶片台之类的可移动物体的位置或距离。该系统包括磁场产生部分，例如用于产生预定磁场的磁体，连接到掩模台或晶片台的超导量子干涉装置。此外，提供了一个磁通量检测部分，用于输出与通过超导量子干涉装置的磁场中的磁通量的变化相对应的信号，以及用于处理磁通检测部分的输出信号的信号处理单元检测掩模台或晶片台的位置或移动距离。此外，设置屏蔽构件，以通过使用超导体来抵御外部磁场来屏蔽至少磁场产生部分和磁通量检测部分。本发明的距离测量系统可确保在可移动部件的宽的可移动范围内具有高分辨率的精确测量，例如不小于100mm的范围。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式