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    • 4. 发明授权
    • Distributed feedback semiconductor laser and method for fabricating the
same
    • 分布式反馈半导体激光器及其制造方法
    • US5764682A
    • 1998-06-09
    • US606455
    • 1996-02-23
    • Masato IshinoMasahiro KitohNobuyuki OtsukaYasushi Matsui
    • Masato IshinoMasahiro KitohNobuyuki OtsukaYasushi Matsui
    • H01L21/00H01S5/12H01S5/34H01S3/19
    • H01S5/1228B82Y20/00H01S5/2022H01S5/3403H01S5/3428H01S5/3434Y10S148/095
    • A distributed feedback semiconductor laser which includes a semiconductor substrate of a first conductive type; a semiconductor multi-layer structure provided on the semiconductor substrate and including an active layer for generating laser light; and a gain-coupled diffraction grating provided between the semiconductor substrate and the semiconductor multi-layer structure. The diffraction grating includes a plurality of curved projections periodically arranged at a surface of the semiconductor substrate and a quantum well light absorption layer for covering the plurality of curved projections. The quantum well light absorption layer includes a light absorption area having a first thickness at each border between two adjacent curved projections and a non-light absorption area having a second thickness which is smaller than the first thickness at a top of each of the curved projections. The light absorption area has a band gap which is narrower than a band gap of the active layer, and the non-light absorption area has a band gap which is wider than the band gap of the active layer.
    • 一种分布式反馈半导体激光器,包括第一导电类型的半导体衬底; 半导体多层结构,设置在所述半导体基板上并且包括用于产生激光的有源层; 以及设置在半导体衬底和半导体多层结构之间的增益耦合衍射光栅。 衍射光栅包括周期性地布置在半导体衬底的表面上的多个弯曲突起和用于覆盖多个弯曲突起的量子阱光吸收层。 量子阱光吸收层包括在两个相邻弯曲突起之间的每个边界处具有第一厚度的光吸收区域和具有比每个弯曲突起的顶部处的第一厚度小的第二厚度的非光吸收区域 。 光吸收区域具有比有源层的带隙窄的带隙,并且非光吸收区域具有比有源层的带隙宽的带隙。
    • 7. 发明授权
    • Method distributed feedback semiconductor laser for fabricating
    • 制造分布式反馈半导体激光器的方法
    • US5960257A
    • 1999-09-28
    • US933707
    • 1997-09-19
    • Masato IshinoMasahiro KitohNobuyuki OtsukaYasushi Matsui
    • Masato IshinoMasahiro KitohNobuyuki OtsukaYasushi Matsui
    • H01L21/00H01S5/12H01S5/34
    • H01S5/1228B82Y20/00H01S5/2022H01S5/3403H01S5/3428H01S5/3434Y10S148/095
    • A distributed feedback semiconductor laser which includes a semiconductor substrate of a first conductive type; a semiconductor multi-layer structure provided on the semiconductor substrate and including an active layer for generating laser light; and a gain-coupled diffraction grating provided between the semiconductor substrate and the semiconductor multi-layer structure. The diffraction grating includes a plurality of curved projections periodically arranged at a surface of the semiconductor substrate and a quantum well light absorption layer for covering the plurality of curved projections. The quantum well light absorption layer includes a light absorption area having a first thickness at each border between two adjacent curved projections and a non-light absorption area having a second thickness which is smaller than the first thickness at a top of each of the curved projections. The light absorption area has a band gap which is narrower than a band gap of the active layer, and the non-light absorption area has a band gap which is wider than the band gap of the active layer.
    • 一种分布式反馈半导体激光器,包括第一导电类型的半导体衬底; 半导体多层结构,其设置在所述半导体基板上并且包括用于产生激光的有源层; 以及设置在半导体衬底和半导体多层结构之间的增益耦合衍射光栅。 衍射光栅包括周期性地布置在半导体衬底的表面上的多个弯曲突起和用于覆盖多个弯曲突起的量子阱光吸收层。 量子阱光吸收层包括在两个相邻弯曲突起之间的每个边界处具有第一厚度的光吸收区域和具有比每个弯曲突起的顶部处的第一厚度小的第二厚度的非光吸收区域 。 光吸收区域具有比有源层的带隙窄的带隙,并且非光吸收区域具有比有源层的带隙宽的带隙。
    • 9. 发明授权
    • Distributed feedback semiconductor laser
    • 分布式反馈半导体激光器
    • US5539766A
    • 1996-07-23
    • US293987
    • 1994-08-18
    • Masato IshinoMasahiro KitohNobuyuki OtsukaYasushi Matsui
    • Masato IshinoMasahiro KitohNobuyuki OtsukaYasushi Matsui
    • H01L21/00H01S5/12H01S5/34H01S3/08
    • H01S5/1228B82Y20/00H01S5/2022H01S5/3403H01S5/3428H01S5/3434Y10S148/095
    • A distributed feedback semiconductor laser which includes a semiconductor substrate of a first conductive type; a semiconductor multi-layer structure provided on the semiconductor substrate and including an active layer for generating laser light; and a gain-coupled diffraction grating provided between the semiconductor substrate and the semiconductor multi-layer structure. The diffraction grating includes a plurality of curved projections periodically arranged at a surface of the semiconductor substrate and a quantum well light absorption layer for covering the plurality of curved projections. The quantum well light absorption layer includes a light absorption area having a first thickness at each border between two adjacent curved projections and a non-light absorption area having a second thickness which is smaller than the first thickness at a top of each of the curved projections. The light absorption area has a band gap which is narrower than a band gap of the active layer, and the non-light absorption area has a band gap which is wider than the band gap of the active layer.
    • 一种分布式反馈半导体激光器,包括第一导电类型的半导体衬底; 半导体多层结构,设置在所述半导体基板上并且包括用于产生激光的有源层; 以及设置在半导体衬底和半导体多层结构之间的增益耦合衍射光栅。 衍射光栅包括周期性地布置在半导体衬底的表面上的多个弯曲突起和用于覆盖多个弯曲突起的量子阱光吸收层。 量子阱光吸收层包括在两个相邻弯曲突起之间的每个边界处具有第一厚度的光吸收区域和具有比每个弯曲突起的顶部处的第一厚度小的第二厚度的非光吸收区域 。 光吸收区域具有比有源层的带隙窄的带隙,并且非光吸收区域具有比有源层的带隙宽的带隙。