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1. 发明授权

US07592131B2 Method for producing fine structured member, method for producing fine hollow structured member and method for producing liquid discharge head 失效
标题翻译：微细结构构件的制造方法，中空结构构件的制造方法和液体排出头的制造方法
公开(公告)号：US07592131B2
公开(公告)日：2009-09-22
申请号：US10615289
申请日：2003-07-09
申请人： Masahiko Kubota , Yoshinori Tagawa , Wataru Hiyama , Tatsuya Masukawa , Shoji Shiba , Yoshiaki Kurihara , Hiroe Ishikura , Akihiko Okano
发明人： Masahiko Kubota , Yoshinori Tagawa , Wataru Hiyama , Tatsuya Masukawa , Shoji Shiba , Yoshiaki Kurihara , Hiroe Ishikura , Akihiko Okano
IPC分类号： G03F7/40 , B41J2/05 , B41J2/16
CPC分类号： B41J2/1645 , B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1639
摘要： The invention is to provide a method for producing a fine structured member and a fine hollow structure, useful for producing a liquid discharge head which is inexpensive, precise and highly reliable, also to provide a method for producing a liquid discharge head utilizing such producing method for the fine structured member and the fine hollow structure and a liquid discharge head obtained by such producing method. A positive-working photosensitive material, including a ternary polymer containing an acrylate ester as a principal component, acrylic acid for thermal crosslinking and a monomer unit for expanding a sensitivity region, is used as a material for forming the Line structured member.
摘要翻译：本发明提供一种制造精细的结构构件和精细中空结构的方法，该方法可用于制造廉价，精确和高度可靠的液体排出头，还提供一种使用这种制造方法制造排液头的方法用于精细结构构件和细小中空结构以及通过这种制造方法获得的液体排出头。使用包含以丙烯酸酯为主要成分的三元聚合物的正性感光材料，用于热交联的丙烯酸和用于扩大感光度区域的单体单元作为用于形成线结构体的材料。

2. 发明授权

US06591500B1 Method of manufacturing a liquid discharge head 失效
标题翻译：液体排出头的制造方法
公开(公告)号：US06591500B1
公开(公告)日：2003-07-15
申请号：US09587054
申请日：2000-06-02
申请人： Yoshiaki Suzuki , Yoshinori Tagawa , Masashi Miyagawa , Makoto Watanabe , Tatsuya Masukawa , Yoshiaki Kurihara , Yasushi Iijima
发明人： Yoshiaki Suzuki , Yoshinori Tagawa , Masashi Miyagawa , Makoto Watanabe , Tatsuya Masukawa , Yoshiaki Kurihara , Yasushi Iijima
IPC分类号： B21D5376
CPC分类号： B41J2/14048 , B41J2/1604 , B41J2/1623 , B41J2/1628 , B41J2/1631 , B41J2/1635 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/13 , Y10S29/016 , Y10T29/49083 , Y10T29/49401
摘要： A method of manufacturing a liquid discharge head having an opening for discharging liquid droplets, a wall member constituting a liquid flow path to the opening, a substrate provided with and for creating a bubble in the liquid, and a movable member supported by and fixed to the substrate with the discharge opening side thereof as a free end displaced away from the substrate by pressure produced by creating the bubble to thereby direct the pressure to the discharge opening side including the steps of preparing the substrate and movable member, filling the gap between the movable member and the substrate with a liquid photo-curing resin, spin coating the resin until the resin covers the movable member, exposing an area of the resin to light to harden a portion corresponding to the wall member, and removing the unexposed portion of the photo-curing resin.
摘要翻译：一种制造具有用于排出液滴的开口的液体排出头的方法，构成到该开口的液体流动通道的壁构件，设置并用于在该液体中产生气泡的基板以及由该液体支撑并固定到将其排出开口侧的基板作为自由端，通过产生气泡产生的压力离开基板，从而将压力引导到排出口侧，包括准备基板和可移动部件的步骤，填充基板和可移动部件之间的间隙可移动部件和基板，用液体光固化树脂旋涂树脂，直到树脂覆盖可移动部件，将树脂的区域曝光以使与壁部件相对应的部分硬化，并且将未曝光部分光固化树脂。

3. 发明授权

US08613141B2 Manufacturing method of liquid ejection head 有权
标题翻译：液体喷头的制造方法
公开(公告)号：US08613141B2
公开(公告)日：2013-12-24
申请号：US12268760
申请日：2008-11-11
申请人： Akihiko Okano , Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato
发明人： Akihiko Okano , Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato
IPC分类号： B41J2/16 , B21D53/76
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/164 , B41J2002/14475
摘要： A manufacturing method of a liquid ejection head provided with a flow passage communicating with an ejection outlet for ejecting liquid includes steps of preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing on the solid layer a pattern having a shape of another part of the flow passage; providing a coating layer, for forming another part of the wall of the flow passage, so as to coat the pattern; providing the ejection outlet to the coating layer; and forming the flow passage by removing the solid layer and the pattern.
摘要翻译：具有与用于喷射液体的喷射口连通的流路的液体喷射头的制造方法包括准备基板的步骤，在基板上形成用于形成流路的壁的一部分的流路壁形成部件和固体层具有所述流路的一部分的形状彼此接触，其中，所述流路壁形成部件具有与所述基板的表面大致相等的所述固体层的高度; 在所述固体层上提供具有所述流路的另一部分的形状的图案; 提供用于形成流路的壁的另一部分以涂覆图案的涂层; 向喷涂层提供喷射出口; 并通过去除固体层和图案形成流动通道。

4. 发明授权

US08191260B2 Liquid ejection head and manufacturing method thereof 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US08191260B2
公开(公告)日：2012-06-05
申请号：US12400440
申请日：2009-03-09
申请人： Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
发明人： Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
IPC分类号： B21D53/76 , B23P17/00 , B41J2/135
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645 , Y10T29/49401
摘要： A manufacturing method of a liquid ejection head includes forming on a substrate a first flow passage wall forming member contacting a solid layer of equal height, exposing a first layer of a negative photosensitive resin material to form an ejection outlet forming member; exposing a second layer, on the first layer, of a negative photosensitive resin material to form a second flow passage wall forming member for forming another part of the wall of the flow passage; placing the exposed first and second layers on the solid layer and the first flow passage wall forming member so that a non-exposed portion of the second layer contacts the solid layer; forming parts of the flow passage and the ejection outlet by removing non-exposed portions of the first and second layers above the substrate; and forming the flow passage by removing the solid layer.
摘要翻译：液体喷射头的制造方法包括在基板上形成与等高的固体层接触的第一流路壁形成部件，暴露第一层的负型感光性树脂材料，形成喷出口形成部件; 在第一层上暴露第二层为负的感光性树脂材料，以形成用于形成流路的壁的另一部分的第二流路壁形成部件; 将暴露的第一和第二层放置在固体层和第一流动通道壁形成构件上，使得第二层的未暴露部分接触固体层; 通过去除衬底上方的第一和第二层的未暴露部分来形成流动通道和喷射出口的部分; 并通过去除固体层形成流动通道。

5. 发明申请

US20090136875A1 MANUFACTURING METHOD OF LIQUID EJECTION HEAD 审中-公开
标题翻译：液体喷射头的制造方法
公开(公告)号：US20090136875A1
公开(公告)日：2009-05-28
申请号：US12268740
申请日：2008-11-11
申请人： Masahiko Kubota , Tamaki Sato , Akihiko Okano , Maki Kato , Kazuhiro Asai , Masaki Ohsumi , Yoshinori Tagawa
发明人： Masahiko Kubota , Tamaki Sato , Akihiko Okano , Maki Kato , Kazuhiro Asai , Masaki Ohsumi , Yoshinori Tagawa
IPC分类号： G03F7/20
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645
摘要： A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and a flow passage communicating with the ejection outlet is constituted by the steps of: preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer, on the solid layer and the flow passage wall forming member, formed of a negative photosensitive resin material for forming another part of the wall of the flow passage; exposing to light a portion of the first layer correspondingly to the another part of the wall of the flow passage; providing a second layer, on the exposed first layer, formed of a negative photosensitive resin material to constitute the ejection outlet forming member; exposing to light a portion of the second layer correspondingly to the ejection outlet forming member; and forming the ejection outlet and another part of the flow passage by removing unexposed portions of the first layer and the second layer.
摘要翻译：一种液体喷射头的制造方法，包括：喷射出口形成部件，其设置有用于喷射液体的喷射出口和与喷射口连通的流动通道的步骤包括：准备基板，在该基板上形成流路壁形成部件，形成流路的壁的一部分，并且具有所述流路的一部分形状的固体层彼此接触，其中所述流路壁形成构件具有与所述基板的表面基本相等的高度的固体层; 在固体层和流路壁形成构件上形成由用于形成流路的壁的另一部分的负型感光性树脂材料形成的第一层; 相对于流动通道的壁的另一部分暴露于第一层的一部分; 在暴露的第一层上形成第二层，由负性感光树脂材料形成以构成喷射出口形成部件; 对应于喷射出口形成构件暴露第二层的一部分; 以及通过去除第一层和第二层的未曝光部分而形成喷射出口和流动通道的另一部分。

6. 发明申请

US20090229125A1 LIQUID EJECTION HEAD AND MANUFACTURING METHOD THEREOF 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US20090229125A1
公开(公告)日：2009-09-17
申请号：US12400440
申请日：2009-03-09
申请人： Maki KATO , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
发明人： Maki KATO , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
IPC分类号： B21D53/76
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645 , Y10T29/49401
摘要： A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and including a flow passage communicating with the ejection outlet is provided. The manufacturing method includes preparing a substrate on which a first flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the first flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer formed of a negative photosensitive resin material; exposing to light a portion of the first layer for constituting the ejection outlet forming member; providing a second layer, on the first layer, formed of a negative photosensitive resin material; exposing to light a portion of the second layer for constituting a second flow passage wall forming member for forming another part of the wall of the flow passage; placing the exposed first layer and the exposed second layer on the solid layer and the first flow passage wall forming member so that a non-exposed portion of the second layer contacts the solid layer; forming a part of the flow passage and the ejection outlet by removing a non-exposed portion of the first layer and the non-exposed portion of the second layer above the substrate; and forming the flow passage by removing the solid layer.
摘要翻译：提供了一种液体喷射头的制造方法，该液体喷射头包括具有用于喷射液体的喷射出口并且包括与喷射口连通的流动通道的喷射出口形成部件。该制造方法包括：准备基板，在基板上形成有形成流路的壁的一部分的第一流路壁形成部件和流路的一部分的形状的固体层彼此接触，其中，第一流路壁形成构件具有与基底表面大致相等的固体层的高度; 提供由负性感光性树脂材料形成的第一层; 暴露于构成喷射出口形成构件的第一层的一部分; 在第一层上形成第二层，由负的感光性树脂材料形成; 暴露于第二层的一部分，用于构成用于形成流道的壁的另一部分的第二流动通道壁形成构件; 将暴露的第一层和暴露的第二层放置在固体层和第一流路壁形成构件上，使得第二层的未暴露部分接触固体层; 通过去除衬底上方的第一层的未暴露部分和第二层的未暴露部分来形成流动通道和喷射出口的一部分; 并通过去除固体层形成流动通道。

7. 发明申请

US20090133256A1 MANUFACTURING METHOD OF LIQUID EJECTION HEAD 有权
标题翻译：液体喷射头的制造方法
公开(公告)号：US20090133256A1
公开(公告)日：2009-05-28
申请号：US12268760
申请日：2008-11-11
申请人： Akihiko Okano , Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato
发明人： Akihiko Okano , Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato
IPC分类号： B21D53/00
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/164 , B41J2002/14475
摘要： A manufacturing method of a liquid ejection head provided with a flow passage communicating with an ejection outlet for ejecting liquid includes steps of preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing on the solid layer a pattern having a shape of another part of the flow passage; providing a coating layer, for forming another part of the wall of the flow passage, so as to coat the pattern; providing the ejection outlet to the coating layer; and forming the flow passage by removing the solid layer and the pattern.
摘要翻译：具有与用于喷射液体的喷射口连通的流路的液体喷射头的制造方法包括准备基板的步骤，在基板上形成用于形成流路的壁的一部分的流路壁形成部件和固体层具有所述流路的一部分的形状彼此接触，其中，所述流路壁形成部件具有与所述基板的表面大致相等的所述固体层的高度; 在所述固体层上提供具有所述流路的另一部分的形状的图案; 提供用于形成流路的壁的另一部分以涂覆图案的涂层; 向喷涂层提供喷射出口; 并通过去除固体层和图案形成流动通道。

8. 发明授权

US08632163B2 Liquid ejecting head and method for manufacturing the same 有权
标题翻译：液体喷头及其制造方法
公开(公告)号：US08632163B2
公开(公告)日：2014-01-21
申请号：US13537204
申请日：2012-06-29
申请人： Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai
发明人： Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai
IPC分类号： B41J2/14
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645
摘要： A liquid ejecting head includes a liquid ejecting port for ejecting a liquid and a nozzle layer having a liquid channel communicating with the liquid ejecting port. The nozzle layer has two layers: a first layer at the side of the liquid channel having a resin film formed with an acid and a second layer. The first layer has a smaller static contact angle of water as compared with that of the second layer.
摘要翻译：液体喷射头包括用于喷射液体的液体喷射口和具有与液体喷射口连通的液体通道的喷嘴层。喷嘴层具有两层：在液体通道侧的第一层具有由酸形成的树脂膜和第二层。与第二层相比，第一层具有较小的水的静态接触角。

9. 发明授权

US08342659B2 Liquid discharge head and method for manufacturing the same 有权
标题翻译：液体排出头及其制造方法
公开(公告)号：US08342659B2
公开(公告)日：2013-01-01
申请号：US12851704
申请日：2010-08-06
申请人： Kenji Fujii , Kazuhiro Asai , Makoto Watanabe , Yoshinori Tagawa , Yoshiyuki Imanaka , Yuuji Tamaru , Kousuke Kubo
发明人： Kenji Fujii , Kazuhiro Asai , Makoto Watanabe , Yoshinori Tagawa , Yoshiyuki Imanaka , Yuuji Tamaru , Kousuke Kubo
IPC分类号： B41J2/05 , B41J2/00
CPC分类号： B41J2/1603 , B41J2/1623 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1639 , B41J2/1645 , H01L23/544 , H01L2223/54406 , H01L2223/54433 , H01L2223/54473 , H01L2924/0002 , Y10T29/49401 , H01L2924/00
摘要： A liquid discharge head includes a substrate and a flow path wall member provided on the substrate and having a wall defining a flow path connected to a discharge port for discharging liquid. The flow path wall member is provided with a cavity not connected to the flow path, when viewed in a direction from the discharge port toward the substrate, the cavity has a shape of a character, and the character corresponds to information regarding the liquid discharge head.
摘要翻译：液体排出头包括衬底和设置在衬底上的流路壁构件，并且具有限定与用于排出液体的排放口连接的流路的壁。流路壁构件具有未从流路连接的空腔，当从排出口朝向基板的方向观察时，空腔具有字符形状，并且该字符对应于关于液体排出头的信息。

10. 发明授权

US08338195B2 Method for manufacturing a liquid-ejection head 有权
标题翻译：液体喷射头的制造方法
公开(公告)号：US08338195B2
公开(公告)日：2012-12-25
申请号：US13191023
申请日：2011-07-26
申请人： Koji Sasaki , Kazuhiro Asai , Keiji Edamatsu , Yoshinori Tagawa
发明人： Koji Sasaki , Kazuhiro Asai , Keiji Edamatsu , Yoshinori Tagawa
IPC分类号： H01L21/00
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2002/14475
摘要： A method for manufacturing a liquid-ejection head having a plurality of nozzles arranged to eject liquid includes: preparing a substrate having a first layer, a second layer, and a third layer stacked in this order, the second layer more resistant than the third layer to etching by an etching method to be used on the third layer; partially etching the third layer by the etching method to expose the second layer; and removing the exposed second layer at least in part to expose some area on the top surface of the first layer, opening a first one of the nozzles down from the exposed area of the top surface, and opening a second one of the nozzles down from the top surface of the third layer.
摘要翻译：一种液体喷射头的制造方法，具有喷出液体的多个喷嘴，其特征在于，具备：具有依次层叠的具有第一层，第二层和第三层的基板，所述第二层比第三层更具抗性通过在第三层上使用的蚀刻方法进行蚀刻; 通过蚀刻方法部分地蚀刻第三层以暴露第二层; 以及至少部分地去除所述暴露的第二层以暴露所述第一层的顶表面上的一些区域，从所述顶表面的暴露区域向下打开所述喷嘴中的第一个，并将所述喷嘴中的第二个向下打开第三层的顶面。

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