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1. 发明授权

US08613141B2 Manufacturing method of liquid ejection head 有权
标题翻译：液体喷头的制造方法
公开(公告)号：US08613141B2
公开(公告)日：2013-12-24
申请号：US12268760
申请日：2008-11-11
申请人： Akihiko Okano , Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato
发明人： Akihiko Okano , Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato
IPC分类号： B41J2/16 , B21D53/76
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/164 , B41J2002/14475
摘要： A manufacturing method of a liquid ejection head provided with a flow passage communicating with an ejection outlet for ejecting liquid includes steps of preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing on the solid layer a pattern having a shape of another part of the flow passage; providing a coating layer, for forming another part of the wall of the flow passage, so as to coat the pattern; providing the ejection outlet to the coating layer; and forming the flow passage by removing the solid layer and the pattern.
摘要翻译：具有与用于喷射液体的喷射口连通的流路的液体喷射头的制造方法包括准备基板的步骤，在基板上形成用于形成流路的壁的一部分的流路壁形成部件和固体层具有所述流路的一部分的形状彼此接触，其中，所述流路壁形成部件具有与所述基板的表面大致相等的所述固体层的高度; 在所述固体层上提供具有所述流路的另一部分的形状的图案; 提供用于形成流路的壁的另一部分以涂覆图案的涂层; 向喷涂层提供喷射出口; 并通过去除固体层和图案形成流动通道。

2. 发明授权

US08191260B2 Liquid ejection head and manufacturing method thereof 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US08191260B2
公开(公告)日：2012-06-05
申请号：US12400440
申请日：2009-03-09
申请人： Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
发明人： Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
IPC分类号： B21D53/76 , B23P17/00 , B41J2/135
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645 , Y10T29/49401
摘要： A manufacturing method of a liquid ejection head includes forming on a substrate a first flow passage wall forming member contacting a solid layer of equal height, exposing a first layer of a negative photosensitive resin material to form an ejection outlet forming member; exposing a second layer, on the first layer, of a negative photosensitive resin material to form a second flow passage wall forming member for forming another part of the wall of the flow passage; placing the exposed first and second layers on the solid layer and the first flow passage wall forming member so that a non-exposed portion of the second layer contacts the solid layer; forming parts of the flow passage and the ejection outlet by removing non-exposed portions of the first and second layers above the substrate; and forming the flow passage by removing the solid layer.
摘要翻译：液体喷射头的制造方法包括在基板上形成与等高的固体层接触的第一流路壁形成部件，暴露第一层的负型感光性树脂材料，形成喷出口形成部件; 在第一层上暴露第二层为负的感光性树脂材料，以形成用于形成流路的壁的另一部分的第二流路壁形成部件; 将暴露的第一和第二层放置在固体层和第一流动通道壁形成构件上，使得第二层的未暴露部分接触固体层; 通过去除衬底上方的第一和第二层的未暴露部分来形成流动通道和喷射出口的部分; 并通过去除固体层形成流动通道。

3. 发明申请

US20090136875A1 MANUFACTURING METHOD OF LIQUID EJECTION HEAD 审中-公开
标题翻译：液体喷射头的制造方法
公开(公告)号：US20090136875A1
公开(公告)日：2009-05-28
申请号：US12268740
申请日：2008-11-11
申请人： Masahiko Kubota , Tamaki Sato , Akihiko Okano , Maki Kato , Kazuhiro Asai , Masaki Ohsumi , Yoshinori Tagawa
发明人： Masahiko Kubota , Tamaki Sato , Akihiko Okano , Maki Kato , Kazuhiro Asai , Masaki Ohsumi , Yoshinori Tagawa
IPC分类号： G03F7/20
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645
摘要： A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and a flow passage communicating with the ejection outlet is constituted by the steps of: preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer, on the solid layer and the flow passage wall forming member, formed of a negative photosensitive resin material for forming another part of the wall of the flow passage; exposing to light a portion of the first layer correspondingly to the another part of the wall of the flow passage; providing a second layer, on the exposed first layer, formed of a negative photosensitive resin material to constitute the ejection outlet forming member; exposing to light a portion of the second layer correspondingly to the ejection outlet forming member; and forming the ejection outlet and another part of the flow passage by removing unexposed portions of the first layer and the second layer.
摘要翻译：一种液体喷射头的制造方法，包括：喷射出口形成部件，其设置有用于喷射液体的喷射出口和与喷射口连通的流动通道的步骤包括：准备基板，在该基板上形成流路壁形成部件，形成流路的壁的一部分，并且具有所述流路的一部分形状的固体层彼此接触，其中所述流路壁形成构件具有与所述基板的表面基本相等的高度的固体层; 在固体层和流路壁形成构件上形成由用于形成流路的壁的另一部分的负型感光性树脂材料形成的第一层; 相对于流动通道的壁的另一部分暴露于第一层的一部分; 在暴露的第一层上形成第二层，由负性感光树脂材料形成以构成喷射出口形成部件; 对应于喷射出口形成构件暴露第二层的一部分; 以及通过去除第一层和第二层的未曝光部分而形成喷射出口和流动通道的另一部分。

4. 发明申请

US20090229125A1 LIQUID EJECTION HEAD AND MANUFACTURING METHOD THEREOF 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US20090229125A1
公开(公告)日：2009-09-17
申请号：US12400440
申请日：2009-03-09
申请人： Maki KATO , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
发明人： Maki KATO , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
IPC分类号： B21D53/76
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645 , Y10T29/49401
摘要： A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and including a flow passage communicating with the ejection outlet is provided. The manufacturing method includes preparing a substrate on which a first flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the first flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer formed of a negative photosensitive resin material; exposing to light a portion of the first layer for constituting the ejection outlet forming member; providing a second layer, on the first layer, formed of a negative photosensitive resin material; exposing to light a portion of the second layer for constituting a second flow passage wall forming member for forming another part of the wall of the flow passage; placing the exposed first layer and the exposed second layer on the solid layer and the first flow passage wall forming member so that a non-exposed portion of the second layer contacts the solid layer; forming a part of the flow passage and the ejection outlet by removing a non-exposed portion of the first layer and the non-exposed portion of the second layer above the substrate; and forming the flow passage by removing the solid layer.
摘要翻译：提供了一种液体喷射头的制造方法，该液体喷射头包括具有用于喷射液体的喷射出口并且包括与喷射口连通的流动通道的喷射出口形成部件。该制造方法包括：准备基板，在基板上形成有形成流路的壁的一部分的第一流路壁形成部件和流路的一部分的形状的固体层彼此接触，其中，第一流路壁形成构件具有与基底表面大致相等的固体层的高度; 提供由负性感光性树脂材料形成的第一层; 暴露于构成喷射出口形成构件的第一层的一部分; 在第一层上形成第二层，由负的感光性树脂材料形成; 暴露于第二层的一部分，用于构成用于形成流道的壁的另一部分的第二流动通道壁形成构件; 将暴露的第一层和暴露的第二层放置在固体层和第一流路壁形成构件上，使得第二层的未暴露部分接触固体层; 通过去除衬底上方的第一层的未暴露部分和第二层的未暴露部分来形成流动通道和喷射出口的一部分; 并通过去除固体层形成流动通道。

5. 发明申请

US20090133256A1 MANUFACTURING METHOD OF LIQUID EJECTION HEAD 有权
标题翻译：液体喷射头的制造方法
公开(公告)号：US20090133256A1
公开(公告)日：2009-05-28
申请号：US12268760
申请日：2008-11-11
申请人： Akihiko Okano , Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato
发明人： Akihiko Okano , Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato
IPC分类号： B21D53/00
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/164 , B41J2002/14475
摘要： A manufacturing method of a liquid ejection head provided with a flow passage communicating with an ejection outlet for ejecting liquid includes steps of preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing on the solid layer a pattern having a shape of another part of the flow passage; providing a coating layer, for forming another part of the wall of the flow passage, so as to coat the pattern; providing the ejection outlet to the coating layer; and forming the flow passage by removing the solid layer and the pattern.
摘要翻译：具有与用于喷射液体的喷射口连通的流路的液体喷射头的制造方法包括准备基板的步骤，在基板上形成用于形成流路的壁的一部分的流路壁形成部件和固体层具有所述流路的一部分的形状彼此接触，其中，所述流路壁形成部件具有与所述基板的表面大致相等的所述固体层的高度; 在所述固体层上提供具有所述流路的另一部分的形状的图案; 提供用于形成流路的壁的另一部分以涂覆图案的涂层; 向喷涂层提供喷射出口; 并通过去除固体层和图案形成流动通道。

6. 发明授权

US08632163B2 Liquid ejecting head and method for manufacturing the same 有权
标题翻译：液体喷头及其制造方法
公开(公告)号：US08632163B2
公开(公告)日：2014-01-21
申请号：US13537204
申请日：2012-06-29
申请人： Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai
发明人： Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai
IPC分类号： B41J2/14
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645
摘要： A liquid ejecting head includes a liquid ejecting port for ejecting a liquid and a nozzle layer having a liquid channel communicating with the liquid ejecting port. The nozzle layer has two layers: a first layer at the side of the liquid channel having a resin film formed with an acid and a second layer. The first layer has a smaller static contact angle of water as compared with that of the second layer.
摘要翻译：液体喷射头包括用于喷射液体的液体喷射口和具有与液体喷射口连通的液体通道的喷嘴层。喷嘴层具有两层：在液体通道侧的第一层具有由酸形成的树脂膜和第二层。与第二层相比，第一层具有较小的水的静态接触角。

7. 发明授权

US08956703B2 Method for manufacturing liquid ejecting head 有权
标题翻译：液体喷头的制造方法
公开(公告)号：US08956703B2
公开(公告)日：2015-02-17
申请号：US13545390
申请日：2012-07-10
申请人： Kazuhiro Asai , Masaki Ohsumi , Yoshinori Tagawa
发明人： Kazuhiro Asai , Masaki Ohsumi , Yoshinori Tagawa
IPC分类号： B05D3/06 , B05D3/12 , B29C39/12 , B41J2/16
CPC分类号： B29C39/12 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645
摘要： A method for manufacturing a liquid ejecting head including an orifice plate having an ejecting orifice and a liquid channel, and a substrate having a liquid ejecting energy generating element and a liquid supply port, the method including: (1) forming a liquid channel mold of a soluble resin dissolved in (6) on the substrate; (2) coating the liquid channel mold with a photosensitive resin layer having a refractive index of n at an exposure wavelength used in (4); (3) forming an antireflective film having a refractive index of √n−0.2 or more to √n+0.2 or less at the exposure wavelength used in (4) on the photosensitive resin layer; (4) exposing and developing the photosensitive resin layer and antireflective film to form the ejecting orifice; (5) forming the liquid supply port on the substrate; and (6) dissolving and removing the liquid channel mold from the liquid supply port.
摘要翻译：一种液体喷射头的制造方法，其特征在于，包括具有排出孔和液体通道的孔板，以及具有液体喷射能量产生元件和液体供给口的基板，所述方法包括：（1）形成液体流道模具溶解在基底上的（6）中的可溶性树脂; （2）在（4）中使用的曝光波长下，用折射率为n的感光性树脂层涂布液体通道模具; （3）在感光性树脂层上的（4）中使用的曝光波长下，形成折射率为-0n以上0.2nm以下的抗反射膜; （4）曝光和显影感光树脂层和抗反射膜以形成喷射孔; （5）在基板上形成液体供给口; 和（6）从液体供给口溶解和除去液体通道模具。

8. 发明授权

US08388084B2 Liquid ejection head, method for evaluation of liquid ejection head, and liquid ejection apparatus having liquid ejection head 有权
标题翻译：液体喷射头，液体喷射头的评价方法和具有液体喷射头的液体喷射装置
公开(公告)号：US08388084B2
公开(公告)日：2013-03-05
申请号：US12952550
申请日：2010-11-23
申请人： Masataka Nagai , Yoshinori Tagawa , Satoshi Ibe , Kazuhiro Asai , Masaki Ohsumi
发明人： Masataka Nagai , Yoshinori Tagawa , Satoshi Ibe , Kazuhiro Asai , Masaki Ohsumi
IPC分类号： B41J29/38 , B41J2/15
CPC分类号： B41J2/14129
摘要： The opening area and shape of ejection orifices provided in an ejection orifice member influence the amount of liquid droplet. Therefore, it is necessary to check the opening area and shape of the ejection orifices in detail. For this purpose, in a liquid ejection head having ejection orifices used for ejecting liquid using energy generated by energy generating elements and a dummy ejection orifice having the same shape as the ejection orifices and not used for ejection of liquid, an examination member is provided at a position facing the dummy ejection orifice.
摘要翻译：设置在喷射孔构件中的喷射孔的开口面积和形状影响液滴的量。因此，需要详细地检查喷射孔的开口面积和形状。为了这个目的，在具有使用能量产生元件产生的能量喷射液体的喷射孔的液体喷射头和具有与喷射孔相同形状并且不用于喷射液体的虚拟喷射孔的情况下，检查部件面对虚拟喷射孔的位置。

9. 发明申请

US20100233630A1 METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD 有权
标题翻译：制造液体放电头的方法
公开(公告)号：US20100233630A1
公开(公告)日：2010-09-16
申请号：US12721415
申请日：2010-03-10
申请人： Makoto Watanabe , Yoshinori Tagawa , Satoshi Ibe , Kazuhiro Asai , Masaki Ohsumi , Masataka Nagai
发明人： Makoto Watanabe , Yoshinori Tagawa , Satoshi Ibe , Kazuhiro Asai , Masaki Ohsumi , Masataka Nagai
IPC分类号： G03F7/20
CPC分类号： B41J2/1603 , B41J2/1626 , B41J2/1631 , B41J2/1639 , B41J2/1645
摘要： A method for manufacturing a liquid discharge head that includes a flow path wall member which forms a wall of a flow path communicating with a discharge port for discharging a liquid and a substrate which forms the flow path in contact with the flow path wall member includes providing a first layer, which is made of a photosensitive resin on the substrate, for forming a pattern having a shape of the flow path, providing a second layer which is capable of absorbing light within a photosensitive wavelength range of the photosensitive resin and has a shape corresponding to the shape of the flow path, on the first layer so as to come into contact with the first layer, performing patterning of the first layer which includes exposure of the first layer with the light using the second layer as a mask, and forming the pattern from the first layer, providing a cover layer which is made of a photosensitive resin and serves as the flow path wall member so as to cover the second layer and the pattern, forming the discharge port on the cover layer by performing patterning of the cover layer which includes exposure of the cover layer with the light, and forming the flow path by removing the second layer and the pattern.
摘要翻译：一种液体排出头的制造方法，其特征在于，包括形成与排出液体的排出口连通的流路壁的流路壁部件和形成与流路壁部件接触的流路的基板，第一层，其由基材上的感光树脂制成，用于形成具有流路形状的图案，提供能够吸收感光性树脂感光波长范围内的光的第二层，并具有形状对应于流路的形状，在第一层上与第一层接触，使用第二层作为掩模进行包括第一层与光的曝光的第一层的图案化，以及形成从第一层的图案，提供由感光树脂制成并用作流路壁构件以覆盖第二层的覆盖层和轻拍通过进行覆盖层的图案化，包括覆盖层与光的曝光，并且通过去除第二层和图案形成流路，从而在覆盖层上形成排出口。

10. 发明申请

US20130029056A1 METHOD FOR MANUFACTURING LIQUID EJECTING HEAD 有权
标题翻译：制造液体喷射头的方法
公开(公告)号：US20130029056A1
公开(公告)日：2013-01-31
申请号：US13545390
申请日：2012-07-10
申请人： Kazuhiro Asai , Masaki Ohsumi , Yoshinori Tagawa
发明人： Kazuhiro Asai , Masaki Ohsumi , Yoshinori Tagawa
IPC分类号： B05D1/00 , B05D3/06 , B05D3/12 , B29C39/12
CPC分类号： B29C39/12 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645
摘要： A method for manufacturing a liquid ejecting head including an orifice plate having an ejecting orifice and a liquid channel, and a substrate having a liquid ejecting energy generating element and a liquid supply port, the method including: (1) forming a liquid channel mold of a soluble resin dissolved in (6) on the substrate; (2) coating the liquid channel mold with a photosensitive resin layer having a refractive index of n at an exposure wavelength used in (4); (3) forming an antireflective film having a refractive index of √n−0.2 or more to √n+0.2 or less at the exposure wavelength used in (4) on the photosensitive resin layer; (4) exposing and developing the photosensitive resin layer and antireflective film to form the ejecting orifice; (5) forming the liquid supply port on the substrate; and (6) dissolving and removing the liquid channel mold from the liquid supply port.
摘要翻译：一种液体喷射头的制造方法，其特征在于，包括具有排出孔和液体通道的孔板，以及具有液体喷射能量产生元件和液体供给口的基板，所述方法包括：（1）形成液体流道模具溶解在基底上的（6）中的可溶性树脂; （2）在（4）中使用的曝光波长下，用折射率为n的感光性树脂层涂布液体通道模具; （3）在感光性树脂层上的（4）中使用的曝光波长下，形成折射率为-0n以上0.2nm以下的抗反射膜; （4）曝光和显影感光树脂层和抗反射膜以形成喷射孔; （5）在基板上形成液体供给口; 和（6）从液体供给口溶解和除去液体通道模具。

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