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1. 发明授权

US08497450B2 On-the fly laser beam path dithering for enhancing throughput 有权
标题翻译：用于增强吞吐量的飞行激光束路径抖动
公开(公告)号：US08497450B2
公开(公告)日：2013-07-30
申请号：US11925562
申请日：2007-10-26
申请人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
发明人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
IPC分类号： B23K26/00 , B23K26/06 , B23K26/16
CPC分类号： G02B26/101
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

2. 发明授权

US08238007B2 On-the-fly laser beam path error correction for specimen target location processing 有权
标题翻译：用于样本目标位置处理的实时激光束路径误差校正
公开(公告)号：US08238007B2
公开(公告)日：2012-08-07
申请号：US11616070
申请日：2006-12-26
申请人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
发明人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
IPC分类号： G02B26/08 , B23K26/08
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , Y10S359/90 , H01L2924/00
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

3. 发明授权

US06816294B2 On-the-fly beam path error correction for memory link processing 有权
标题翻译：用于存储器链接处理的动态光束路径误差校正
公开(公告)号：US06816294B2
公开(公告)日：2004-11-09
申请号：US10077691
申请日：2002-02-15
申请人： Mark Unrath , Kelly Bruland , Ho Wai Lo , Stephen Swaringen
发明人： Mark Unrath , Kelly Bruland , Ho Wai Lo , Stephen Swaringen
IPC分类号： G02B2608
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , H01L2924/00
摘要： Laser beam positioners (300, 340) employ a steering mirror (236, 306) that performs small-angle deflection of a laser beam (270) to compensate for cross-axis (110) settling errors of a positioner stage (302). A two-axis mirror is preferred because either axis of the positioner stages may be used for performing work. In one embodiment, the steering mirror is used for error correction only without necessarily requiring coordination with the positioner stage position commands. A fast steering mirror employing a flexure mechanism and piezoelectric actuators to tip and tilt the mirror is preferred in semiconductor link processing (“SLP”) applications. This invention compensates for cross-axis settling time, resulting in increased SLP system throughput and accuracy while simplifying complexity of the positioner stages because the steering mirror corrections relax the positioner stage servo driving requirements.
摘要翻译：激光束定位器（300,340）使用执行激光束（270）的小角度偏转以补偿定位器台（302）的横轴（110）沉降误差的转向镜（236,306）。优选两轴镜，因为定位器台的任一轴可用于执行作业。在一个实施例中，导向镜仅用于纠错，而不需要与定位器台位置命令协调。在半导体连接处理（“SLP”）应用中，优选采用挠曲机构的快速转向镜和压电致动器来使倾斜反射镜。本发明补偿横轴建立时间，从而提高了SLP系统的吞吐量和精度，同时简化了定位器台的复杂性，因为导向镜校正放松了定位器级的伺服驱动要求。

4. 发明申请

US20080093349A1 ON-THE-FLY LASER BEAM PATH DITHERING FOR ENHANCING THROUGHPUT 有权
标题翻译：在飞行激光光束路径加强增强
公开(公告)号：US20080093349A1
公开(公告)日：2008-04-24
申请号：US11925562
申请日：2007-10-26
申请人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Lo , Clint Vandergiessen , Keith Grant
发明人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Lo , Clint Vandergiessen , Keith Grant
IPC分类号： B23K26/38
CPC分类号： G02B26/101
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

5. 发明申请

US20050265408A1 Method of providing consistent quality of target material removal by lasers having different output performance characteristics 有权
标题翻译：通过具有不同输出性能特征的激光提供一致的目标材料去除质量的方法
公开(公告)号：US20050265408A1
公开(公告)日：2005-12-01
申请号：US11131432
申请日：2005-05-17
申请人： Weisheng Lei , Glenn Simenson , Jeff Howerton , Mark Unrath
发明人： Weisheng Lei , Glenn Simenson , Jeff Howerton , Mark Unrath
IPC分类号： B23K26/06 , B23K26/38 , H01S3/10 , H05K3/00
CPC分类号： B23K26/0622 , B23K26/382 , B23K26/40 , B23K2101/34 , B23K2101/35 , B23K2101/36 , B23K2103/16 , B23K2103/42 , B23K2103/50 , H05K3/0032 , H05K2203/163
摘要： Laser pulse energy adjustments are motivated by an understanding of the effect of laser pulse width variations among different lasers on satisfying a quality metric associated with a laser-processed target. In a preferred embodiment, the adjustments normalize this effect among different lasers drilling vias in a target specimen. The number of pulses delivered to the target specimen to form each via can be modified, based on the pulse energy applied to the via location, to control different via quality metrics.
摘要翻译：激光脉冲能量调节是通过了解不同激光器之间的激光脉冲宽度变化对满足与激光处理目标相关联的质量度量的影响。在优选实施例中，调整将目标样品中的不同激光器钻孔中的这种效应归一化。可以基于施加到通孔位置的脉冲能量来修改传递到目标样本以形成每个通孔的脉冲数，以控制不同的通孔质量度量。

6. 发明申请

US20070045253A1 Energy monitoring or control of individual vias formed during laser micromachining 有权
公开(公告)号：US20070045253A1
公开(公告)日：2007-03-01
申请号：US11217077
申请日：2005-08-30
申请人： William Jordens , Lindsey Dotson , Mark Unrath
发明人： William Jordens , Lindsey Dotson , Mark Unrath
IPC分类号： B23K26/38
CPC分类号： B23K26/032 , B23K26/03 , B23K26/0622 , B23K26/0643 , B23K26/38 , B23K26/382 , B23K26/389 , B23K26/40 , B23K26/705 , B23K2101/35 , B23K2101/40 , B23K2103/04 , B23K2103/08 , B23K2103/10 , B23K2103/12 , B23K2103/16 , B23K2103/172 , B23K2103/26 , B23K2103/42 , B23K2103/50 , B23K2103/52 , B23K2103/56
摘要： A method and system increase the quality of results achieved by laser micromachining systems. Data relating to parameters controlling laser micromachining process are recorded during the micromachining process, identified by the feature associated with the parameters used to micromachine, and stored on the system. The stored data can be either retrieved during the micromachining process to enable real time control or retrieved after workpiece processing to conduct statistical process control.

7. 发明申请

US20060261051A1 Synthetic pulse repetition rate processing for dual-headed laser micromachining systems 审中-公开
标题翻译：双头激光微加工系统的合成脉冲重复率处理
公开(公告)号：US20060261051A1
公开(公告)日：2006-11-23
申请号：US11134242
申请日：2005-05-19
申请人： Mark Unrath , Brian Johansen , Ho Lo
发明人： Mark Unrath , Brian Johansen , Ho Lo
IPC分类号： B23K26/067
CPC分类号： B23K26/0673 , B23K26/0006 , B23K26/0604 , B23K26/0613 , B23K26/067 , B23K2103/16 , B23K2103/30 , B23K2103/42
摘要： A method and system for increasing throughput of laser micromachining systems use more than one laser. Two or more pulsed laser beams are combined and then separated into multiple laser beams that enable the system to work simultaneously at multiple locations on the workpiece with pulse rates greater than those achievable with independently operating lasers while maintaining pulse energy equal to or greater than the pulse energy of each of the original independent laser beams. Most laser micromachining applications required multiple sequential pulses to process a workpiece. Increasing the pulse rate while maintaining pulse energy effects more rapid material removal and thereby increases throughput for a laser micromachining system.
摘要翻译：用于增加激光微加工系统的产量的方法和系统使用多于一个的激光器。将两个或多个脉冲激光束组合，然后分离成多个激光束，使得系统能够在工件上的多个位置处同时工作，其脉冲率大于独立操作的激光器可实现的脉冲频率，同时保持等于或大于脉冲的脉冲能量每个原始独立激光束的能量。大多数激光微加工应用需要多个顺序脉冲来处理工件。在保持脉冲能量的同时提高脉搏率可以更快速地去除材料，从而提高激光微加工系统的生产率。

8. 发明授权

US09029731B2 Methods and systems for laser processing continuously moving sheet material 有权
标题翻译：激光加工连续移动片材的方法和系统
公开(公告)号：US09029731B2
公开(公告)日：2015-05-12
申请号：US11949582
申请日：2007-12-03
申请人： Yasu Osako , Mark Unrath , Mark Kosmowski
发明人： Yasu Osako , Mark Unrath , Mark Kosmowski
IPC分类号： B23K26/08
CPC分类号： B23K26/0846 , B23K26/38
摘要： Systems and methods for laser processing continuously moving sheet material include one or more laser processing heads configured to illuminate the moving sheet material with one or more laser beams. The sheet material may include, for example, an optical film continuously moving from a first roller to a second roller during a laser process. In one embodiment, a vacuum chuck is configured to removably affix a first portion of the moving sheet material thereto. The vacuum chuck controls a velocity of the moving sheet material as the first portion is processed by the one or more laser beams. In one embodiment, a conveyor includes a plurality of vacuum chucks configured to successively affix to different portions of the sheet material during laser processing.
摘要翻译：用于激光处理连续移动的片材的系统和方法包括一个或多个激光处理头，其被配置为用一个或多个激光束照射移动片材。片材可以包括例如在激光处理期间从第一辊连续地移动到第二辊的光学膜。在一个实施例中，真空卡盘构造成将可动片材的第一部分可拆卸地固定到其上。当第一部分被一个或多个激光束处理时，真空吸盘控制移动片材的速度。在一个实施例中，输送机包括多个真空卡盘，其构造成在激光加工期间连续地贴附到片材的不同部分。

9. 发明申请

US20060027544A1 Methods for processing holes by moving precisely timed laser pulses in circular and spiral trajectories 有权
标题翻译：通过以圆形和螺旋形轨迹移动精确定时的激光脉冲来处理孔的方法
公开(公告)号：US20060027544A1
公开(公告)日：2006-02-09
申请号：US10912525
申请日：2004-08-04
申请人： Robert Pailthorp , Weisheng Lei , Hisashi Matsumoto , Glenn Simenson , David Watt , Mark Unrath , William Jordens
发明人： Robert Pailthorp , Weisheng Lei , Hisashi Matsumoto , Glenn Simenson , David Watt , Mark Unrath , William Jordens
IPC分类号： B23K26/38
CPC分类号： H05K3/0026 , B23K26/389 , H05K2201/09063
摘要： High speed removal of material from a specimen employs a beam positioner for directing a laser beam axis along various circular and spiral laser tool patterns. A preferred method of material removal entails causing relative movement between the axis of the beam and the specimen, directing the beam axis at an entry segment acceleration and along an entry trajectory to an entry position within the specimen at which laser beam pulse emissions are initiated, moving the beam axis at a circular perimeter acceleration within the specimen to remove material along a circular segment of the specimen, and setting the entry segment acceleration to less than twice the circular perimeter acceleration.
摘要翻译：从样品高速去除材料采用光束定位器，用于沿着各种圆形和螺旋形激光工具图案引导激光束轴线。优选的材料去除方法需要引起梁的轴线和样品之间的相对运动，将束轴线以入口段加速度并沿着入口轨迹引导到在激光束脉冲发射开始的样本内的入口位置，沿着试样中的圆周边加速度移动光束轴，以沿着试样的圆形段移除材料，并将进入段加速度设置为小于圆周边加速度的两倍。

10. 发明申请

US20050285558A1 Adaptive command filtering for servomechanism control systems 有权
标题翻译：伺服机构控制系统的自适应命令过滤
公开(公告)号：US20050285558A1
公开(公告)日：2005-12-29
申请号：US11129059
申请日：2005-05-12
申请人： David Watt , Mehmet Alpay , Mark Unrath , John Wen , Ben Potsaid
发明人： David Watt , Mehmet Alpay , Mark Unrath , John Wen , Ben Potsaid
IPC分类号： G05B13/04 , G05D23/275
CPC分类号： G05B13/041
摘要： Preferred embodiments of the invention implement techniques for modifying the command trajectory, the architecture of a servomechanism control system, or both, to reduce the servo error during and/or after the command trajectory. An iterative refinement procedure generates for use by the servomechanism control system a corrective input, du, which significantly reduces the error between the desired and actual servomechanism control system outputs. In one embodiment, a uniquely identified plant model is employed in the iterative refinement procedure to compute an approximate gradient that improves the performance and reliability of the refinement procedure. In another embodiment, the actual plant response is used in place of the identified model in the iterative refinement procedure. This is accomplished by time-reversing the stored error signal from a training run, before applying it to the plant to generate an update to the corrective input signal du.
摘要翻译：本发明的优选实施例实现了用于修改命令轨迹，伺服机构控制系统的结构或两者的技术，以减少在命令轨迹期间和/或之后的伺服误差。对伺服机构控制系统产生的迭代精制过程可用于校正输入du，这显着地减少了期望的和实际的伺服机构控制系统输出之间的误差。在一个实施例中，在迭代细化过程中采用唯一识别的植物模型来计算提高细化过程的性能和可靠性的近似梯度。在另一个实施例中，在迭代细化过程中使用实际植物响应来代替所识别的模型。这是通过将训练运行中存储的误差信号时间反转，然后将其应用到工厂来产生对纠正输入信号du的更新来实现的。

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