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1. 发明申请

US20080093349A1 ON-THE-FLY LASER BEAM PATH DITHERING FOR ENHANCING THROUGHPUT 有权
标题翻译：在飞行激光光束路径加强增强
公开(公告)号：US20080093349A1
公开(公告)日：2008-04-24
申请号：US11925562
申请日：2007-10-26
申请人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Lo , Clint Vandergiessen , Keith Grant
发明人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Lo , Clint Vandergiessen , Keith Grant
IPC分类号： B23K26/38
CPC分类号： G02B26/101
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

2. 发明授权

US08497450B2 On-the fly laser beam path dithering for enhancing throughput 有权
标题翻译：用于增强吞吐量的飞行激光束路径抖动
公开(公告)号：US08497450B2
公开(公告)日：2013-07-30
申请号：US11925562
申请日：2007-10-26
申请人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
发明人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
IPC分类号： B23K26/00 , B23K26/06 , B23K26/16
CPC分类号： G02B26/101
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

3. 发明授权

US08238007B2 On-the-fly laser beam path error correction for specimen target location processing 有权
标题翻译：用于样本目标位置处理的实时激光束路径误差校正
公开(公告)号：US08238007B2
公开(公告)日：2012-08-07
申请号：US11616070
申请日：2006-12-26
申请人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
发明人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
IPC分类号： G02B26/08 , B23K26/08
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , Y10S359/90 , H01L2924/00
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

4. 发明申请

US20080017618A1 ON-THE-FLY LASER BEAM PATH ERROR CORRECTION FOR SPECIMEN TARGET LOCATION PROCESSING 有权
标题翻译：用于样本目标位置处理的飞行激光束路径误差校正
公开(公告)号：US20080017618A1
公开(公告)日：2008-01-24
申请号：US11616070
申请日：2006-12-26
申请人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
发明人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
IPC分类号： B23K26/04 , B23K26/38
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , Y10S359/90 , H01L2924/00
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

5. 发明授权

US07245412B2 On-the-fly laser beam path error correction for specimen target location processing 有权
标题翻译：用于样本目标位置处理的实时激光束路径误差校正
公开(公告)号：US07245412B2
公开(公告)日：2007-07-17
申请号：US10985840
申请日：2004-11-09
申请人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
发明人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
IPC分类号： G02B26/08 , B23K26/08
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , Y10S359/90 , H01L2924/00
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

6. 发明申请

US20050254109A1 On-the-fly laser beam path error correction for specimen target location processing 有权
标题翻译：用于样本目标位置处理的实时激光束路径误差校正
公开(公告)号：US20050254109A1
公开(公告)日：2005-11-17
申请号：US10985840
申请日：2004-11-09
申请人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
发明人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
IPC分类号： B23K26/02 , B23K26/08 , G02B26/08 , G02B26/10 , H01L23/525
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , Y10S359/90 , H01L2924/00
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

7. 发明申请

US20070228024A1 Methods and Systems for Decreasing the Effective Pulse Repetition of a Laser 有权
标题翻译：减少激光有效脉冲重复的方法和系统
公开(公告)号：US20070228024A1
公开(公告)日：2007-10-04
申请号：US11758497
申请日：2007-06-05
申请人： Kelly Bruland , Steve Swaringen , Steve Stone , Keith Grant
发明人： Kelly Bruland , Steve Swaringen , Steve Stone , Keith Grant
IPC分类号： B23K26/38
CPC分类号： B23K26/38 , B23K26/04 , B23K26/0622 , B23K26/0853 , B23K2101/40
摘要： A method selectively processes structures on a workpiece with laser pulses. The structures are arranged in a linear pattern having approximately equal pitch. The pulses propagate along a laser beam propagation path terminating at a laser beam spot on the workpiece. The method fires a first processing pulse when the spot coincides with a first structure location, selectively blocks or clears the propagation path during the first pulse, moves the workpiece and the spot relative to one another such that the spot moves toward a second structure location at a speed less than the product of the laser's PRF and the pitch, fires a dummy pulse before the spot reaches the second structure location, blocks the propagation path during the dummy laser pulse, fires another processing pulse when the beam spot coincides with the second structure location, and selectively blocks or clears the propagation path during the second processing pulse.
摘要翻译：一种方法用激光脉冲选择性地处理工件上的结构。这些结构被布置成具有大致相等间距的线性图案。脉冲沿着终止于工件上的激光束点的激光束传播路径传播。当该点与第一结构位置一致时，该方法触发第一处理脉冲，在第一脉冲期间选择性地阻挡或清除传播路径，使工件和光点相对于彼此移动，使得光点向第二结构位置移动小于激光器PRF和音调的乘积的速度，在点到达第二结构位置之前触发虚拟脉冲，在伪激光脉冲期间阻挡传播路径，当光束点与第二结构重合时触发另一个处理脉冲并且在第二处理脉冲期间选择性地阻挡或清除传播路径。

8. 发明授权

US07608800B2 Methods and systems for decreasing the effective pulse repetition of a laser 有权
标题翻译：减少激光有效脉冲重复的方法和系统
公开(公告)号：US07608800B2
公开(公告)日：2009-10-27
申请号：US11758497
申请日：2007-06-05
申请人： Kelly Bruland , Steve Swaringen , Steve Stone , Keith Grant
发明人： Kelly Bruland , Steve Swaringen , Steve Stone , Keith Grant
IPC分类号： B23K26/38
CPC分类号： B23K26/38 , B23K26/04 , B23K26/0622 , B23K26/0853 , B23K2101/40
摘要： A method selectively processes structures on a workpiece with laser pulses. The structures are arranged in a linear pattern having approximately equal pitch. The pulses propagate along a laser beam propagation path terminating at a laser beam spot on the workpiece. The method fires a first processing pulse when the spot coincides with a first structure location, selectively blocks or clears the propagation path during the first pulse, moves the workpiece and the spot relative to one another such that the spot moves toward a second structure location at a speed less than the product of the laser's PRF and the pitch, fires a dummy pulse before the spot reaches the second structure location, blocks the propagation path during the dummy laser pulse, fires another processing pulse when the beam spot coincides with the second structure location, and selectively blocks or clears the propagation path during the second processing pulse.
摘要翻译：一种方法用激光脉冲选择性地处理工件上的结构。这些结构被布置成具有大致相等间距的线性图案。脉冲沿着终止于工件上的激光束点的激光束传播路径传播。当该点与第一结构位置一致时，该方法触发第一处理脉冲，在第一脉冲期间选择性地阻挡或清除传播路径，使工件和光点相对于彼此移动，使得光点向第二结构位置移动小于激光器PRF和音调的乘积的速度，在点到达第二结构位置之前触发虚拟脉冲，在伪激光脉冲期间阻挡传播路径，当光束点与第二结构重合时触发另一个处理脉冲并且在第二处理脉冲期间选择性地阻挡或清除传播路径。

9. 发明申请

US20060027540A1 Method and system for decreasing the effective pulse repetition frequency of a laser 有权
标题翻译：减少激光有效脉冲重复频率的方法和系统
公开(公告)号：US20060027540A1
公开(公告)日：2006-02-09
申请号：US10931461
申请日：2004-08-31
申请人： Kelly Bruland , Steve Swaringen , Steve Stone , Keith Grant
发明人： Kelly Bruland , Steve Swaringen , Steve Stone , Keith Grant
IPC分类号： B23K26/38
CPC分类号： B23K26/38 , B23K26/04 , B23K26/0622 , B23K26/0853 , B23K2101/40
摘要： A laser is characterized by a PRF (pulse repetition frequency) parameter that specifies a PRF at which pulses produced by the laser have desirable pulse properties for irradiating a target on or within a workpiece. The laser emits a laser pulse that propagates along a laser beam propagation path terminating at a laser beam spot on the workpiece. A method is effective to operate the laser at an effective PRF lower than the PRF parameter without substantially degrading the desirable pulse properties. The method receives data indicating the location on the workpiece of the target to be selectively irradiated with the laser pulse. The method determines a firing position of the laser beam spot relative to the workpiece at which the laser should emit a pulse directed at the target and calculates, based on a desired charging time, a charging start position of the laser beam spot relative to the workpiece at which the laser should begin charging so as to charge for the desired charging time before the laser beam spot reaches the firing position. The method moves the workpiece and the laser beam spot relative to one another such that the laser beam spot moves over the charging start position and then to the firing position and senses a position of the laser beam spot relative to the workpiece as the workpiece moves relative to the laser beam spot. The method commences charging of the laser when the laser beam spot is at the charging start position, whereby the laser charges for approximately the desired charging time, and the method fires the laser when the laser beam spot reaches the firing position, whereby the laser emits a pulse having desired pulse properties. Alternatively, the commencing step can be based on time rather than position.
摘要翻译：激光器的特征在于PRF（脉冲重复频率）参数，其指定由激光器产生的脉冲具有期望的脉冲特性以在工件上或工件内照射目标的PRF。激光器发射激光脉冲，其沿着终止于工件上的激光束点的激光束传播路径传播。一种方法有效地在低于PRF参数的有效PRF下操作激光器，而基本上不会降低所需的脉冲特性。该方法接收指示要用激光脉冲选择性地照射的靶的工件上的位置的数据。该方法确定激光束点相对于工件的点火位置，激光在该位置处发射指向目标的脉冲，并且基于期望的充电时间计算激光束点相对于工件的充电开始位置在激光束开始充电之前，为了在激光束点到达点火位置之前对期望的充电时间进行充电。该方法相对于彼此移动工件和激光束点，使得激光束点在充电开始位置移动，然后移动到点火位置，并且随着工件相对移动而感测激光束点相对于工件的位置到激光束点。当激光束点处于充电开始位置时，该方法开始对激光进行充电，由此激光对大约期望的充电时间进行充电，并且当激光束点到达点火位置时该方法激发激光，由此激光发射具有期望脉冲特性的脉冲。或者，开始步骤可以基于时间而不是位置。

10. 发明授权

US07227098B2 Method and system for decreasing the effective pulse repetition frequency of a laser 有权
标题翻译：减少激光有效脉冲重复频率的方法和系统
公开(公告)号：US07227098B2
公开(公告)日：2007-06-05
申请号：US10931461
申请日：2004-08-31
申请人： Kelly Bruland , Steve Swaringen , Steve Stone , Keith Grant
发明人： Kelly Bruland , Steve Swaringen , Steve Stone , Keith Grant
IPC分类号： B23K26/38
CPC分类号： B23K26/38 , B23K26/04 , B23K26/0622 , B23K26/0853 , B23K2101/40
摘要： Methods and systems operate a machine having a laser characterized by a PRF (pulse repetition frequency) parameter that specifies a PRF at which pulses produced by the laser have desirable pulse properties for irradiating structures on or within a workpiece. The structures are arranged on the workpiece in a linear pattern having an approximately equal pitch between adjacent structures. The laser emits a laser pulse that propagates along a laser beam propagation path terminating at a laser beam spot on the workpiece. The method is effective to move the laser beam spot across the structures along the linear pattern at a speed greater than the product of the PRF and the pitch to selectively irradiate selected ones of the structures with the laser without substantially degrading the desirable pulse properties.
摘要翻译：方法和系统操作具有由PRF（脉冲重复频率）参数表征的激光器的机器，该参数指定了由激光器产生的脉冲具有用于在工件上或工件内照射结构的期望的脉冲特性的PRF。结构以相邻结构之间具有大致相等间距的线性图案布置在工件上。激光器发射激光脉冲，其沿着终止于工件上的激光束点的激光束传播路径传播。该方法有效地沿着线性图案以大于PRF和间距的乘积的速度移动激光束点，以选择性地用激光照射所选结构的结构，而不会基本上降低期望的脉冲特性。

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