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1. 发明申请

US20080093349A1 ON-THE-FLY LASER BEAM PATH DITHERING FOR ENHANCING THROUGHPUT 有权
标题翻译：在飞行激光光束路径加强增强
公开(公告)号：US20080093349A1
公开(公告)日：2008-04-24
申请号：US11925562
申请日：2007-10-26
申请人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Lo , Clint Vandergiessen , Keith Grant
发明人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Lo , Clint Vandergiessen , Keith Grant
IPC分类号： B23K26/38
CPC分类号： G02B26/101
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

2. 发明授权

US08497450B2 On-the fly laser beam path dithering for enhancing throughput 有权
标题翻译：用于增强吞吐量的飞行激光束路径抖动
公开(公告)号：US08497450B2
公开(公告)日：2013-07-30
申请号：US11925562
申请日：2007-10-26
申请人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
发明人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
IPC分类号： B23K26/00 , B23K26/06 , B23K26/16
CPC分类号： G02B26/101
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

3. 发明授权

US08238007B2 On-the-fly laser beam path error correction for specimen target location processing 有权
标题翻译：用于样本目标位置处理的实时激光束路径误差校正
公开(公告)号：US08238007B2
公开(公告)日：2012-08-07
申请号：US11616070
申请日：2006-12-26
申请人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
发明人： Kelly Bruland , Mark Unrath , Stephen Swaringen , Ho Wai Lo , Clint Vandergiessen , Keith Grant
IPC分类号： G02B26/08 , B23K26/08
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , Y10S359/90 , H01L2924/00
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

4. 发明申请

US20080017618A1 ON-THE-FLY LASER BEAM PATH ERROR CORRECTION FOR SPECIMEN TARGET LOCATION PROCESSING 有权
标题翻译：用于样本目标位置处理的飞行激光束路径误差校正
公开(公告)号：US20080017618A1
公开(公告)日：2008-01-24
申请号：US11616070
申请日：2006-12-26
申请人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
发明人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
IPC分类号： B23K26/04 , B23K26/38
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , Y10S359/90 , H01L2924/00
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

5. 发明授权

US07245412B2 On-the-fly laser beam path error correction for specimen target location processing 有权
标题翻译：用于样本目标位置处理的实时激光束路径误差校正
公开(公告)号：US07245412B2
公开(公告)日：2007-07-17
申请号：US10985840
申请日：2004-11-09
申请人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
发明人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
IPC分类号： G02B26/08 , B23K26/08
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , Y10S359/90 , H01L2924/00
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

6. 发明申请

US20050254109A1 On-the-fly laser beam path error correction for specimen target location processing 有权
标题翻译：用于样本目标位置处理的实时激光束路径误差校正
公开(公告)号：US20050254109A1
公开(公告)日：2005-11-17
申请号：US10985840
申请日：2004-11-09
申请人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
发明人： Kelly Bruland , Clint Vandergiessen , Keith Grant , Stephen Swaringen
IPC分类号： B23K26/02 , B23K26/08 , G02B26/08 , G02B26/10 , H01L23/525
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , Y10S359/90 , H01L2924/00
摘要： A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
摘要翻译：基于激光的工件处理系统包括连接到传感器控制器的传感器，传感器控制器将传感器信号转换成聚焦点运动命令，用于致动诸如双轴转向镜的光束转向装置。传感器可以包括用于校正在光路中检测到的误差的光束位置传感器，例如响应于激光或声光调制器指向稳定性的热感应波束漂移或光学安装动态。

7. 发明授权

US06816294B2 On-the-fly beam path error correction for memory link processing 有权
标题翻译：用于存储器链接处理的动态光束路径误差校正
公开(公告)号：US06816294B2
公开(公告)日：2004-11-09
申请号：US10077691
申请日：2002-02-15
申请人： Mark Unrath , Kelly Bruland , Ho Wai Lo , Stephen Swaringen
发明人： Mark Unrath , Kelly Bruland , Ho Wai Lo , Stephen Swaringen
IPC分类号： G02B2608
CPC分类号： G02B26/101 , B23K26/042 , B23K26/082 , G02B26/0816 , H01L23/5258 , H01L2924/0002 , H01L2924/00
摘要： Laser beam positioners (300, 340) employ a steering mirror (236, 306) that performs small-angle deflection of a laser beam (270) to compensate for cross-axis (110) settling errors of a positioner stage (302). A two-axis mirror is preferred because either axis of the positioner stages may be used for performing work. In one embodiment, the steering mirror is used for error correction only without necessarily requiring coordination with the positioner stage position commands. A fast steering mirror employing a flexure mechanism and piezoelectric actuators to tip and tilt the mirror is preferred in semiconductor link processing (“SLP”) applications. This invention compensates for cross-axis settling time, resulting in increased SLP system throughput and accuracy while simplifying complexity of the positioner stages because the steering mirror corrections relax the positioner stage servo driving requirements.
摘要翻译：激光束定位器（300,340）使用执行激光束（270）的小角度偏转以补偿定位器台（302）的横轴（110）沉降误差的转向镜（236,306）。优选两轴镜，因为定位器台的任一轴可用于执行作业。在一个实施例中，导向镜仅用于纠错，而不需要与定位器台位置命令协调。在半导体连接处理（“SLP”）应用中，优选采用挠曲机构的快速转向镜和压电致动器来使倾斜反射镜。本发明补偿横轴建立时间，从而提高了SLP系统的吞吐量和精度，同时简化了定位器台的复杂性，因为导向镜校正放松了定位器级的伺服驱动要求。

8. 发明申请

US20050282407A1 Semiconductor structure processing using multiple laser beam spots spaced on-axis delivered simultaneously 有权
标题翻译：使用同轴间隔的多个激光束点的半导体结构处理
公开(公告)号：US20050282407A1
公开(公告)日：2005-12-22
申请号：US11051500
申请日：2005-02-04
申请人： Kelly Bruland , Brian Baird , Ho Lo , Stephen Swaringen , Frank Evans
发明人： Kelly Bruland , Brian Baird , Ho Lo , Stephen Swaringen , Frank Evans
IPC分类号： B23K26/067 , H01L21/26 , H01L21/768
CPC分类号： B23K26/067 , H01L21/76894
摘要： Methods and systems selectively irradiate structures on or within a semiconductor substrate using a plurality of laser beams. The structures are arranged in a row extending in a generally lengthwise direction. The method generates a first laser beam that propagates along a first laser beam axis that intersects the semiconductor substrate and a second laser beam that propagates along a second laser beam axis that intersects the semiconductor substrate. The method simultaneously directs the first and second laser beams onto distinct first and second structures in the row. The method moves the first and second laser beam axes relative to the semiconductor substrate substantially in unison in a direction substantially parallel to the lengthwise direction of the row, so as to selectively irradiate structures in the row with one or more of the first and second laser beams simultaneously.
摘要翻译：方法和系统使用多个激光束选择性地照射半导体衬底上或内部的结构。这些结构被布置成在大体上沿长度方向延伸的一排。该方法产生沿着与半导体衬底相交的第一激光束轴传播的第一激光束和沿着与半导体衬底相交的第二激光束轴传播的第二激光束。该方法同时将第一和第二激光束引导到行中不同的第一和第二结构。该方法使第一激光束和第二激光束相对于半导体衬底在基本上平行于该行的长度方向的方向基本上一致地移动，以便用一个或多个第一和第二激光器选择性地照射该行中的结构梁同时进行。

9. 发明申请

US20050279736A1 Semiconductor structure processing using multiple laser beam spots spaced on-axis with cross-axis offset 有权
标题翻译：半导体结构的处理使用多个激光束点间隔轴上与横轴偏移
公开(公告)号：US20050279736A1
公开(公告)日：2005-12-22
申请号：US11051958
申请日：2005-02-04
申请人： Kelly Bruland , Brian Baird , Ho Lo , Stephen Swaringen , Frank Evans
发明人： Kelly Bruland , Brian Baird , Ho Lo , Stephen Swaringen , Frank Evans
IPC分类号： B23K26/00 , B23K26/06 , B23K26/067 , B23K26/08 , B23K26/10 , B23K26/38 , B23K26/40 , H01L21/768 , H01L23/525
CPC分类号： H01L23/5258 , B23K26/0613 , B23K26/0624 , B23K26/067 , B23K26/10 , B23K2101/40 , H01L21/76894 , H01L2924/0002 , H01L2924/00
摘要： Methods and systems selectively irradiate structures on or within a semiconductor substrate using a plurality of laser beams. The structures are arranged in a row extending in a generally lengthwise direction. The method generates a first laser beam that propagates along a first laser beam axis that intersects the semiconductor substrate and a second laser beam that propagates along a second laser beam axis that intersects the semiconductor substrate. The method directs the first and second laser beams onto distinct first and second structures in the row. The second spot is offset from the first spot by some amount in a direction perpendicular to the lengthwise direction of the row. The method moves the first and second laser beam axes relative to the semiconductor substrate along the row substantially in unison in a direction substantially parallel to the lengthwise direction of the row.
摘要翻译：方法和系统使用多个激光束选择性地照射半导体衬底上或内部的结构。这些结构被布置成在大体上沿长度方向延伸的一排。该方法产生沿着与半导体衬底相交的第一激光束轴传播的第一激光束和沿着与半导体衬底相交的第二激光束轴传播的第二激光束。该方法将第一和第二激光束引导到行中不同的第一和第二结构。第二点在与行长度方向垂直的方向上偏离第一点一定量。该方法使第一激光束和第二激光束相对于半导体衬底在基本上平行于该行的长度方向的方向上大致一齐地沿着行移动。

10. 发明申请

US20050281101A1 Semiconductor structure processing using multiple laterally spaced laser beam spots with on-axis offset 有权
标题翻译：使用具有轴上偏移的多个横向间隔开的激光束点的半导体结构处理
公开(公告)号：US20050281101A1
公开(公告)日：2005-12-22
申请号：US11051265
申请日：2005-02-04
申请人： Kelly Bruland , Brian Baird , Ho Lo , Stephen Swaringen
发明人： Kelly Bruland , Brian Baird , Ho Lo , Stephen Swaringen
IPC分类号： G11C17/14 , G11C29/00 , H01L23/525
CPC分类号： H01L23/5258 , B23K26/0613 , B23K26/0622 , B23K26/0624 , B23K26/082 , G11C17/14 , G11C17/143 , H01L2924/0002 , H01L2924/00
摘要： Methods and systems selectively irradiate electrically conductive structures on or within a semiconductor substrate using multiple laser beams. The structures are arranged in a plurality of substantially parallel rows extending in a generally lengthwise direction. One method propagates a first laser beam along a first propagation path having a first axis incident at a first location on or within the semiconductor substrate at a given time. The first location is either on a structure in a first row of structures or between two adjacent structures in the first row. The method also propagates a second laser beam along a second propagation path having a second axis incident at a second location on or within the semiconductor substrate at the given time. The second location is either on a structure in a second row of structures or between two adjacent structures in the second row. The second row is distinct from the first row, and the second location is offset from the first location by some amount in the lengthwise direction of the rows. The method moves the first and second laser beam axes substantially in unison in the lengthwise direction of the rows relative to the semiconductor substrate, so as to selectively irradiate structures in the first and second rows with the first and second laser beams respectively.
摘要翻译：方法和系统使用多个激光束选择性地照射半导体衬底上或内部的导电结构。这些结构被布置成沿大致长度方向延伸的多个基本上平行的行。一种方法在给定时间沿着第一传播路径传播第一激光束，该第一传播路径具有入射在半导体衬底上或半导体衬底上的第一位置的第一轴。第一个位置是在第一行结构中的结构上，或者在第一行的两个相邻结构之间。该方法还在给定时间沿第二传播路径传播第二激光束，该第二传播路径具有入射在半导体衬底上或第二位置的第二轴。第二位置在第二行结构中的结构上，或者位于第二行中的两个相邻结构之间。第二行与第一行不同，第二位置在行的长度方向上偏离第一位置一定量。该方法使第一和第二激光束轴相对于半导体衬底在行的长度方向基本一致地移动，以便分别用第一和第二激光束选择性地照射第一和第二行中的结构。

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