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    • 4. 发明授权
    • Test structure and method for measuring the resistance of line-end vias
    • 用于测量线端通孔电阻的测试结构和方法
    • US07271047B1
    • 2007-09-18
    • US11327641
    • 2006-01-06
    • Jianhong ZhuMark MichaelDavid Wu
    • Jianhong ZhuMark MichaelDavid Wu
    • H01L21/8238
    • H01L22/34H01L22/14
    • A test structure and methods of using and making the same are provided. In one aspect, a test structure is provided that includes a first conductor that has a first end and a second conductor that has a second end positioned above the first end. A third conductor is positioned between the first end of the first conductor and the second end of the second conductor. A first electrode is coupled to the first conductor at a first distance from the third conductor and a second electrode coupled to the first conductor at a second distance from the third conductor. A third electrode is coupled to the second conductor at a third distance from the third conductor and a fourth electrode is coupled to the second conductor at a fourth distance from the third conductor. The first through fourth electrodes provide voltage sense taps and the first and second conductors provide current sense taps from which the resistance of the third conductor may be derived.
    • 提供了测试结构及其使用和制造方法。 在一个方面,提供一种测试结构,其包括具有第一端和第二导体的第一导体,第二导​​体具有位于第一端上方的第二端。 第三导体位于第一导体的第一端和第二导体的第二端之间。 第一电极以距离第三导体第一距离的第一导体耦合到第一导体,第二电极以距离第三导体第二距离的方式耦合到第一导体。 第三电极以距离第三导体第三距离的方式耦合到第二导体,并且第四电极在距离第三导体的第四距离处耦合到第二导体。 第一至第四电极提供电压检测抽头,并且第一和第二导体提供电流检测抽头,从该第三导体提供第三导体的电阻。
    • 5. 发明授权
    • Method of forming transistor devices with different threshold voltages using halo implant shadowing
    • 使用光晕植入物阴影形成具有不同阈值电压的晶体管器件的方法
    • US07598161B2
    • 2009-10-06
    • US11861534
    • 2007-09-26
    • Jingrong ZhouMark MichaelDonna Michael, legal representativeDavid WuJames F. BullerAkif Sultan
    • Jingrong ZhouMark MichaelDavid WuJames F. BullerAkif Sultan
    • H01L21/425
    • H01L21/26513H01L21/26586H01L21/823807H01L29/1083
    • The halo implant technique described herein employs a halo implant mask that creates a halo implant shadowing effect during halo dopant bombardment. A first transistor device structure and a second transistor device structure are formed on a wafer such that they are orthogonally oriented to each other. A common halo implant mask is created with features that prevent halo implantation of the diffusion region of the second transistor device structure during halo implantation of the diffusion region of the first transistor device structure, and with features that prevent halo implantation of the diffusion region of the first transistor device structure during halo implantation of the diffusion region of the second transistor device structure. The orthogonal orientation of the transistor device structures and the pattern of the halo implant mask obviates the need to create multiple implant masks to achieve different threshold voltages for the transistor device structures.
    • 本文描述的光晕植入技术采用在光晕掺杂剂轰击期间产生晕轮植入物阴影效应的光晕注入掩模。 第一晶体管器件结构和第二晶体管器件结构形成在晶片上,使得它们彼此正交地取向。 创建了常见的光晕注入掩模,其特征在于,在第一晶体管器件结构的扩散区域的晕圈注入期间防止第二晶体管器件结构的扩散区域的光晕注入,并且具有防止第 在第二晶体管器件结构的扩散区的晕圈注入期间的第一晶体管器件结构。 晶体管器件结构的正交取向和光晕注入掩模的图案消除了创建多个注入掩模以实现晶体管器件结构的不同阈值电压的需要。
    • 7. 发明授权
    • Self-aligned Vt implant
    • 自对准Vt植入物
    • US06274415B1
    • 2001-08-14
    • US09489068
    • 2000-01-21
    • Jon D. CheekMark MichaelDerick J. WristersJames F. Buller
    • Jon D. CheekMark MichaelDerick J. WristersJames F. Buller
    • H01L21337
    • H01L29/66583H01L29/105H01L29/66537H01L29/66545
    • Integrated circuits with transistors exhibiting improved junction capacitances and various methods of fabricating the same are provided. In one aspect, a method of manufacturing is provided that includes forming a doped region in an active area of a substrate wherein the doped region has a first conductivity type and a first horizontal junction. A first source/drain region of the first conductivity type is formed in the active area with a second horizontal junction. A second source/drain region of the first conductivity type is formed in the active area with a third horizontal junction and a lateral separation from the first source/drain region that defines a channel region. The second and third horizontal junctions are positioned substantially at the first horizontal junction. The portion of the doped region positioned in the channel region is doped with an impurity of a second conductivity type that is opposite to the first conductivity type. Impurity grading across a source/drain-to-body junction is less abrupt, resulting in improved junction capacitance.
    • 提供具有改善的结电容的晶体管的集成电路及其制造方法。 一方面,提供一种制造方法,其包括在衬底的有源区中形成掺杂区域,其中所述掺杂区域具有第一导电类型和第一水平结。 第一导电类型的第一源极/漏极区域形成在具有第二水平结的有源区域中。 第一导电类型的第二源极/漏极区域在有源区域中形成有第三水平结和与限定沟道区域的第一源极/漏极区域的横向分离。 第二和第三水平接头基本位于第一水平接头处。 位于沟道区域中的掺杂区域的部分掺杂有与第一导电类型相反的第二导电类型的杂质。 通过源极/漏极到体区结的杂质分级不太突然,导致改善的结电容。