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1. 发明授权

US09037280B2 Computer-implemented methods for performing one or more defect-related functions 有权
标题翻译：用于执行一个或多个缺陷相关功能的计算机实现的方法
公开(公告)号：US09037280B2
公开(公告)日：2015-05-19
申请号：US11146342
申请日：2005-06-06
申请人： Mark Dishner , Chris W. Lee , Sharon McCauley , Patrick Huet , David Wang
发明人： Mark Dishner , Chris W. Lee , Sharon McCauley , Patrick Huet , David Wang
IPC分类号： G06F19/00 , G05B23/02
CPC分类号： G05B23/0221
摘要： Computer-implemented methods for performing one or more defect-related functions are provided. One method for identifying noise in inspection data includes identifying events detected in a number of sets of inspection data that is less than a predetermined number as noise. One method for binning defects includes binning the defects into groups based on defect characteristics and the sets of the inspection data in which the defects were detected. One method for selecting defects for defect analysis includes binning defects into group(s) based on proximity of the defects to each other and spatial signatures formed by the group(s). A different method for selecting defects for defect analysis includes selecting defects having the greatest diversity of defect characteristic(s) for defect analysis. One method includes classifying defects on a specimen using inspection data generated for the specimen combined with defect review data generated for the specimen.
摘要翻译：提供了用于执行一个或多个缺陷相关功能的计算机实现的方法。用于识别检查数据中的噪声的一种方法包括将小于预定数目的多组检查数据中检测到的事件识别为噪声。分类缺陷的一种方法包括基于缺陷特征和检测缺陷检查数据的集合将缺陷合并成组。用于选择缺陷分析的缺陷的一种方法包括基于缺陷彼此的接近度和由组形成的空间特征将缺陷合并成组。用于选择缺陷分析缺陷的不同方法包括选择具有最大差异缺陷特征的缺陷以进行缺陷分析。一种方法包括使用生成的样本的检查数据与样本产生的缺陷评估数据相结合来对样本进行分类。

2. 发明授权

US08392136B2 In-place management of semiconductor equipment recipes 有权
标题翻译：半导体设备配方的就地管理
公开(公告)号：US08392136B2
公开(公告)日：2013-03-05
申请号：US12833350
申请日：2010-07-09
申请人： Chris W. Lee , Dominic G. David
发明人： Chris W. Lee , Dominic G. David
IPC分类号： G06F19/00 , G01N21/00
CPC分类号： G06Q10/06 , G01N21/9501 , H01L21/00
摘要： Systems and methods for managing optical inspection target components are disclosed. A method may include, but is not limited to: storing at least one external recipe component at an inspection tool node; associating at least one proxy component with the at least one external recipe component; associating the at least one external recipe component with at least one optical inspection target recipe; and storing the at least one optical inspection target recipe including the at least one proxy component in a recipe distribution server. A method may include, but is not limited to: receiving a selection of at least one recipe associated with an optical inspection target to be inspected at a first inspection tool node; and determining whether one or more external recipe components associated with the recipe are stored on at least one of the first inspection tool node and a second node.
摘要翻译：公开了用于管理光学检测目标部件的系统和方法。方法可以包括但不限于：在检查工具节点处存储至少一个外部配方组件; 将至少一个代理组件与所述至少一个外部配方组件相关联; 将所述至少一个外部配方组件与至少一个光学检查目标配方相关联; 以及将包括所述至少一个代理组件的所述至少一个光学检查目标配方存储在配方分发服务器中。方法可以包括但不限于：在第一检查工具节点处接收与要检查的光学检查目标相关联的至少一个配方的选择; 以及确定与所述配方相关联的一个或多个外部配方组件是否存储在所述第一检查工具节点和第二节点中的至少一个上。

3. 发明申请

US20140072203A1 Selecting Parameters for Defect Detection Methods 有权
标题翻译：选择缺陷检测方法的参数
公开(公告)号：US20140072203A1
公开(公告)日：2014-03-13
申请号：US13610658
申请日：2012-09-11
申请人： Kenong Wu , Chris W. Lee , Michael J. Van Riet , Yi Liu
发明人： Kenong Wu , Chris W. Lee , Michael J. Van Riet , Yi Liu
IPC分类号： G06K9/62
CPC分类号： G01N21/9501
摘要： Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for a defect detection method are provided. One method includes selecting one or more parameters of a defect detection method using an optimization function and information for a set of classified defects, which includes defects of interest and nuisance defects, such that the one or more parameters satisfy an objective for the defect detection method.
摘要翻译：提供了计算机实现的方法，计算机可读介质和用于为缺陷检测方法选择一个或多个参数的系统。一种方法包括使用优化函数选择缺陷检测方法的一个或多个参数，以及一组分类缺陷的信息，所述缺陷检测方法包括感兴趣的缺陷和妨碍缺陷，使得一个或多个参数满足缺陷检测方法的目的。

4. 发明授权

US09310316B2 Selecting parameters for defect detection methods 有权
标题翻译：选择缺陷检测方法的参数
公开(公告)号：US09310316B2
公开(公告)日：2016-04-12
申请号：US13610658
申请日：2012-09-11
申请人： Kenong Wu , Chris W. Lee , Michael J. Van Riet , Yi Liu
发明人： Kenong Wu , Chris W. Lee , Michael J. Van Riet , Yi Liu
IPC分类号： G06K9/00 , G01N21/95
CPC分类号： G01N21/9501
摘要： Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for a defect detection method are provided. One method includes selecting one or more parameters of a defect detection method using an optimization function and information for a set of classified defects, which includes defects of interest and nuisance defects, such that the one or more parameters satisfy an objective for the defect detection method.
摘要翻译：提供了计算机实现的方法，计算机可读介质和用于为缺陷检测方法选择一个或多个参数的系统。一种方法包括使用优化函数选择缺陷检测方法的一个或多个参数，以及一组分类缺陷的信息，所述缺陷检测方法包括感兴趣的缺陷和妨碍缺陷，使得一个或多个参数满足缺陷检测方法的目的。

5. 发明申请

US20120010843A1 IN-PLACE MANAGEMENT OF SEMICONDUCTOR EQUIPMENT RECIPES 有权
标题翻译：半导体设备配件的管理
公开(公告)号：US20120010843A1
公开(公告)日：2012-01-12
申请号：US12833350
申请日：2010-07-09
申请人： Chris W. Lee , Dominic G. David
发明人： Chris W. Lee , Dominic G. David
IPC分类号： G06F19/00 , G01N21/00
CPC分类号： G06Q10/06 , G01N21/9501 , H01L21/00
摘要： Systems and methods for managing optical inspection target components are disclosed. A method may include, but is not limited to: storing at least one external recipe component at an inspection tool node; associating at least one proxy component with the at least one external recipe component; associating the at least one external recipe component with at least one optical inspection target recipe; and storing the at least one optical inspection target recipe including the at least one proxy component in a recipe distribution server. A method may include, but is not limited to: receiving a selection of at least one recipe associated with an optical inspection target to be inspected at a first inspection tool node; and determining whether one or more external recipe components associated with the recipe are stored on at least one of the first inspection tool node and a second node.
摘要翻译：公开了用于管理光学检测目标部件的系统和方法。方法可以包括但不限于：在检查工具节点处存储至少一个外部配方组件; 将至少一个代理组件与所述至少一个外部配方组件相关联; 将所述至少一个外部配方组件与至少一个光学检查目标配方相关联; 以及将包括所述至少一个代理组件的所述至少一个光学检查目标配方存储在配方分发服务器中。方法可以包括但不限于：在第一检查工具节点处接收与要检查的光学检查目标相关联的至少一个配方的选择; 以及确定与所述配方相关联的一个或多个外部配方组件是否存储在所述第一检查工具节点和第二节点中的至少一个上。

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