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1. 发明申请

US20120010843A1 IN-PLACE MANAGEMENT OF SEMICONDUCTOR EQUIPMENT RECIPES 有权
标题翻译：半导体设备配件的管理
公开(公告)号：US20120010843A1
公开(公告)日：2012-01-12
申请号：US12833350
申请日：2010-07-09
申请人： Chris W. Lee , Dominic G. David
发明人： Chris W. Lee , Dominic G. David
IPC分类号： G06F19/00 , G01N21/00
CPC分类号： G06Q10/06 , G01N21/9501 , H01L21/00
摘要： Systems and methods for managing optical inspection target components are disclosed. A method may include, but is not limited to: storing at least one external recipe component at an inspection tool node; associating at least one proxy component with the at least one external recipe component; associating the at least one external recipe component with at least one optical inspection target recipe; and storing the at least one optical inspection target recipe including the at least one proxy component in a recipe distribution server. A method may include, but is not limited to: receiving a selection of at least one recipe associated with an optical inspection target to be inspected at a first inspection tool node; and determining whether one or more external recipe components associated with the recipe are stored on at least one of the first inspection tool node and a second node.
摘要翻译：公开了用于管理光学检测目标部件的系统和方法。方法可以包括但不限于：在检查工具节点处存储至少一个外部配方组件; 将至少一个代理组件与所述至少一个外部配方组件相关联; 将所述至少一个外部配方组件与至少一个光学检查目标配方相关联; 以及将包括所述至少一个代理组件的所述至少一个光学检查目标配方存储在配方分发服务器中。方法可以包括但不限于：在第一检查工具节点处接收与要检查的光学检查目标相关联的至少一个配方的选择; 以及确定与所述配方相关联的一个或多个外部配方组件是否存储在所述第一检查工具节点和第二节点中的至少一个上。

2. 发明授权

US08392136B2 In-place management of semiconductor equipment recipes 有权
标题翻译：半导体设备配方的就地管理
公开(公告)号：US08392136B2
公开(公告)日：2013-03-05
申请号：US12833350
申请日：2010-07-09
申请人： Chris W. Lee , Dominic G. David
发明人： Chris W. Lee , Dominic G. David
IPC分类号： G06F19/00 , G01N21/00
CPC分类号： G06Q10/06 , G01N21/9501 , H01L21/00
摘要： Systems and methods for managing optical inspection target components are disclosed. A method may include, but is not limited to: storing at least one external recipe component at an inspection tool node; associating at least one proxy component with the at least one external recipe component; associating the at least one external recipe component with at least one optical inspection target recipe; and storing the at least one optical inspection target recipe including the at least one proxy component in a recipe distribution server. A method may include, but is not limited to: receiving a selection of at least one recipe associated with an optical inspection target to be inspected at a first inspection tool node; and determining whether one or more external recipe components associated with the recipe are stored on at least one of the first inspection tool node and a second node.
摘要翻译：公开了用于管理光学检测目标部件的系统和方法。方法可以包括但不限于：在检查工具节点处存储至少一个外部配方组件; 将至少一个代理组件与所述至少一个外部配方组件相关联; 将所述至少一个外部配方组件与至少一个光学检查目标配方相关联; 以及将包括所述至少一个代理组件的所述至少一个光学检查目标配方存储在配方分发服务器中。方法可以包括但不限于：在第一检查工具节点处接收与要检查的光学检查目标相关联的至少一个配方的选择; 以及确定与所述配方相关联的一个或多个外部配方组件是否存储在所述第一检查工具节点和第二节点中的至少一个上。

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