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1. 发明授权

US06750141B2 Silicon carbide cap layers for low dielectric constant silicon oxide layers 失效
标题翻译：用于低介电常数氧化硅层的碳化硅盖层
公开(公告)号：US06750141B2
公开(公告)日：2004-06-15
申请号：US10236800
申请日：2002-09-06
申请人： Li-Qun Xia , Paul Fisher , Margaret Lynn Gotuaco , Frederic Gaillard , Ellie Yieh
发明人： Li-Qun Xia , Paul Fisher , Margaret Lynn Gotuaco , Frederic Gaillard , Ellie Yieh
IPC分类号： H01L214763
CPC分类号： H01L21/02126 , H01L21/02167 , H01L21/02271 , H01L21/02362 , H01L21/31633 , H01L21/76813 , H01L21/76828 , H01L21/76829
摘要： A method of forming a low dielectric constant silicate material for use in integrated circuit fabrication processes is disclosed. The low dielectric constant silicate material is formed by reacting by reacting a gas mixture comprising an organosilane compound, an oxygen source, and an inert gas. Thereafter, a silicon carbide cap layer is formed on the silicate material by reacting a gas mixture comprising a silicon source and a carbon source. The silicon carbide cap layer protects the underlying organosilicate layer from cracking and peeling when it is hardened during a subsequent annealing step.
摘要翻译：公开了一种形成用于集成电路制造工艺的低介电常数硅酸盐材料的方法。低介电常数硅酸盐材料是通过使包含有机硅烷化合物，氧源和惰性气体的气体混合物反应而形成的。此后，通过使包含硅源和碳源的气体混合物反应，在硅酸盐材料上形成碳化硅盖层。当在随后的退火步骤中硬化时，碳化硅盖层保护下面的有机硅酸盐层不被开裂和剥离。

2. 发明授权

US06472333B2 Silicon carbide cap layers for low dielectric constant silicon oxide layers 失效
标题翻译：用于低介电常数氧化硅层的碳化硅盖层
公开(公告)号：US06472333B2
公开(公告)日：2002-10-29
申请号：US09820439
申请日：2001-03-28
申请人： Li-Qun Xia , Paul Fisher , Margaret Lynn Gotuaco , Frederic Gaillard , Ellie Yieh
发明人： Li-Qun Xia , Paul Fisher , Margaret Lynn Gotuaco , Frederic Gaillard , Ellie Yieh
IPC分类号： H01L2131
CPC分类号： H01L21/02126 , H01L21/02167 , H01L21/02271 , H01L21/02362 , H01L21/31633 , H01L21/76813 , H01L21/76828 , H01L21/76829
摘要： A method of forming a low dielectric constant silicate material for use in integrated circuit fabrication processes is disclosed. The low dielectric constant silicate material is formed by reacting by reacting a gas mixture comprising an organosilane compound, an oxygen source, and an inert gas. Thereafter, a silicon carbide cap layer is formed on the silicate material by reacting a gas mixture comprising a silicon source and a carbon source. The silicon carbide cap layer protects the underlying organosilicate layer from cracking and peeling when it is hardened during a subsequent annealing step.
摘要翻译：公开了一种形成用于集成电路制造工艺的低介电常数硅酸盐材料的方法。低介电常数硅酸盐材料是通过使包含有机硅烷化合物，氧源和惰性气体的气体混合物反应而形成的。此后，通过使包含硅源和碳源的气体混合物反应，在硅酸盐材料上形成碳化硅盖层。当在随后的退火步骤中硬化时，碳化硅盖层保护下面的有机硅酸盐层不被开裂和剥离。

3. 发明授权

US06753258B1 Integration scheme for dual damascene structure 失效
标题翻译：双镶嵌结构的整合方案
公开(公告)号：US06753258B1
公开(公告)日：2004-06-22
申请号：US09706298
申请日：2000-11-03
申请人： Frederic Gaillard , Li-Qun Xia , Ellie Yieh , Paul Fisher , Margaret Gotuaco
发明人： Frederic Gaillard , Li-Qun Xia , Ellie Yieh , Paul Fisher , Margaret Gotuaco
IPC分类号： H01L21302
CPC分类号： H01L21/76801 , H01L21/31608 , H01L21/76807 , H01L21/76834 , H01L21/76885 , H01L23/53295 , H01L2924/0002 , H01L2924/00
摘要： A method and apparatus for processing a substrate to form a feature in low k dielectric materials. One aspect of the invention provides a method for processing a substrate including forming a feature definition in a dielectric material deposited on a surface of a substrate, depositing one or more conductive materials to fill at least a portion of the feature definition, planarizing the substrate surface to expose the dielectric material, removing at least a portion of the dielectric material, and depositing a low k dielectric material.
摘要翻译：一种用于处理基底以在低k电介质材料中形成特征的方法和装置。本发明的一个方面提供一种处理衬底的方法，包括在沉积在衬底的表面上的电介质材料中形成特征定义，沉积一种或多种导电材料以填充特征定义的至少一部分，平坦化衬底表面以暴露电介质材料，去除介电材料的至少一部分，以及沉积低k电介质材料。

4. 发明授权

US06531398B1 Method of depositing organosillicate layers 失效
标题翻译：沉积有机硅酸盐层的方法
公开(公告)号：US06531398B1
公开(公告)日：2003-03-11
申请号：US09702600
申请日：2000-10-30
申请人： Frederic Gaillard , Li-Qun Xia , Ellie Yieh , Paul Fisher , Srinivas D. Nemani
发明人： Frederic Gaillard , Li-Qun Xia , Ellie Yieh , Paul Fisher , Srinivas D. Nemani
IPC分类号： H01L2100
CPC分类号： H01L21/76828 , C23C16/401 , H01L21/02126 , H01L21/02208 , H01L21/02274 , H01L21/31612 , H01L21/76801 , H01L21/7681 , H01L21/76835
摘要： A method of forming an organosilicate layer is disclosed. The organosilicate layer is formed by applying an electric field to a gas mixture comprising an organosilane compound and an oxygen-containing gas. The organosilicate layer is compatible with integrated circuit fabrication processes. In one integrated circuit fabrication process, the organosilicate layer is used as an intermetal dielectric layer. In another integrated circuit fabrication process, the organosilicate layer is incorporated into a damascene structure.
摘要翻译：公开了形成有机硅酸盐层的方法。有机硅酸盐层通过向包含有机硅烷化合物和含氧气体的气体混合物施加电场而形成。有机硅酸盐层与集成电路制造工艺兼容。在一个集成电路制造工艺中，有机硅酸盐层用作金属间介电层。在另一集成电路制造工艺中，有机硅酸盐层被结合到镶嵌结构中。

5. 发明授权

US09106175B2 Diagnostic system and method for an electric power steering system 有权
标题翻译：电动助力转向系统的诊断系统和方法
公开(公告)号：US09106175B2
公开(公告)日：2015-08-11
申请号：US13192867
申请日：2011-07-28
申请人： Paul Fisher , Christian E. Ross , Mohammad S. Islam
发明人： Paul Fisher , Christian E. Ross , Mohammad S. Islam
IPC分类号： H02P29/02
CPC分类号： H02P29/021 , B62D5/0481 , B62D15/021 , B62D15/0235 , H02P29/0241
摘要： A diagnostic system and method for an electric power steering system are provided. The diagnostic system includes a first microprocessor that determines a first relative position value indicating the relative rotational position of the rotatable shaft at the first time based on the signals from first and second position sensors. A second microprocessor determines a second relative position value indicating the relative rotational position of the rotatable shaft at the first time based on the signals from third and fourth position sensors. The first microprocessor determines whether the first relative position value is an acceptable value based on a difference between the first relative position value and the second relative position value.
摘要翻译：提供了一种用于电动助力转向系统的诊断系统和方法。诊断系统包括第一微处理器，其基于来自第一位置传感器和第二位置传感器的信号，确定第一相对位置值，该第一相对位置值指示可旋转轴在第一时间的相对旋转位置。第二微处理器基于来自第三位置传感器和第四位置传感器的信号确定第一相对位置值，该第二相对位置值指示可旋转轴在第一时间的相对旋转位置。第一微处理器基于第一相对位置值和第二相对位置值之间的差来确定第一相对位置值是否为可接受值。

6. 发明申请

US20140220347A1 ELECTRODE COMPOSITION COMPRISING A SILICON POWDER AND METHOD OF CONTROLLING THE CRYSTALLINITY OF A SILICON POWDER 审中-公开
标题翻译：包含硅粉末的电极组合物和控制硅粉的结晶性的方法
公开(公告)号：US20140220347A1
公开(公告)日：2014-08-07
申请号：US14238788
申请日：2012-08-14
申请人： Max Dehtiar , Paul Fisher , Matthew A. Gave , William Herron , Takakazu Hino , Byung K. Hwang , Jennifer Larimer , Jeong Yong Lee , Joel P. McDonald , Mark Schrauben , Raymond Tabler
发明人： Max Dehtiar , Paul Fisher , Matthew A. Gave , William Herron , Takakazu Hino , Byung K. Hwang , Jennifer Larimer , Jeong Yong Lee , Joel P. McDonald , Mark Schrauben , Raymond Tabler
IPC分类号： H01M4/38 , C01B33/027
CPC分类号： H01M4/386 , C01B33/027 , H01M4/134 , H01M4/1395 , Y10T428/2982
摘要： An electrode composition comprises a silicon powder comprising non-crystalline and crystalline silicon, where the crystalline silicon is present in the silicon powder at a concentration of no more than about 20 wt. %. An electrode for an electrochemical cell comprises an electrochemically active material comprising non-crystalline silicon and crystalline silicon, where the non-crystalline silicon and the crystalline silicon are present prior to cycling of the electrode. A method of controlling the crystallinity of a silicon powder includes heating a reactor to a temperature of no more than 650° C. and flowing a feed gas comprising silane and a carrier gas into the reactor while maintaining an internal reactor pressure of about 2 atm or less. The silane decomposes to form a silicon powder having a controlled crystallinity and comprising non-crystalline silicon.
摘要翻译：电极组合物包括含有非结晶和晶体硅的硅粉末，其中结晶硅以不大于约20wt。％的浓度存在于硅粉末中。％。用于电化学电池的电极包括包含非晶硅和晶体硅的电化学活性材料，其中非晶硅和晶体硅在电极循环之前存在。控制硅粉末的结晶度的方法包括将反应器加热到不高于650℃的温度，并将包含硅烷和载气的进料气体流入反应器，同时保持内部反应器压力为约2atm，或减。硅烷分解形成具有可控结晶度并包含非晶硅的硅粉末。

7. 发明授权

US08623301B1 Solid oxide fuel cells, electrolyzers, and sensors, and methods of making and using the same 有权
标题翻译：固体氧化物燃料电池，电解槽和传感器，以及制造和使用它们的方法
公开(公告)号：US08623301B1
公开(公告)日：2014-01-07
申请号：US12420457
申请日：2009-04-08
申请人： Mark Deininger , Mikhail Pozvonkov , Paul Fisher , Leonid V. Budaragin , D. Morgan Spears
发明人： Mark Deininger , Mikhail Pozvonkov , Paul Fisher , Leonid V. Budaragin , D. Morgan Spears
IPC分类号： C01F17/00 , H01M8/10
CPC分类号： C25B9/08 , C25B1/10 , C25B1/46 , C25B13/04 , G01N27/40 , G01N27/406 , G01N27/4073 , H01M8/0232 , H01M8/1246 , H01M8/1253 , H01M8/126 , H01M2008/1293 , H01M2300/0077 , H01M2300/0094 , Y02E60/366 , Y02E60/525 , Y02P70/56
摘要： The present invention provides solid oxide fuel cells, solid oxide electrolyzer cells, solid oxide sensors, components of any of the foregoing, and methods of making and using the same. In some embodiments, a solid oxide fuel cell comprises an air electrode (or cathode), a fuel electrode (or anode), an electrolyte interposed between the air electrode and the fuel electrode, and at least one electrode-electrolyte transition layer. Other embodiments provide novel methods of producing nano-scale films and/or surface modifications comprising one or more metal oxides to form ultra-thin (yet fully-dense) electrolyte layers and electrode coatings. Such layers and coatings may provide greater ionic conductivity and increased operating efficiency, which may lead to lower manufacturing costs, less-expensive materials, lower operating temperatures, smaller-sized fuel cells, electrolyzer cells, and sensors, and a greater number of applications.
摘要翻译：本发明提供固体氧化物燃料电池，固体氧化物电解槽电池，固体氧化物传感器，任何前述的组分，以及制造和使用它们的方法。在一些实施例中，固体氧化物燃料电池包括空气电极（或阴极），燃料电极（或阳极），介于空气电极和燃料电极之间的电解质，以及至少一个电极 - 电解质过渡层。其它实施方案提供了生产包含一种或多种金属氧化物以形成超薄（但完全致密的）电解质层和电极涂层的纳米级膜和/或表面改性的新方法。这样的层和涂层可以提供更大的离子传导性和提高的操作效率，这可能导致较低的制造成本，较便宜的材料，较低的操作温度，较小尺寸的燃料电池，电解池单元和传感器以及更多的应用。

8. 发明申请

US20060292157A1 MDA-7 protein variants having antiproliferative activity 审中-公开
标题翻译：具有抗增殖活性的MDA-7蛋白变体
公开(公告)号：US20060292157A1
公开(公告)日：2006-12-28
申请号：US11292571
申请日：2005-12-02
申请人： Paul Fisher , Pankaj Gupta
发明人： Paul Fisher , Pankaj Gupta
IPC分类号： A61K39/395 , A61K38/17 , A61K48/00 , C07K16/30 , C07K14/82 , C07H21/04
CPC分类号： G01N33/5011 , A61K38/00 , A61K45/06 , A61K48/005 , C07K14/47 , C07K14/52 , C07K14/54 , C07K16/244 , C12N15/86 , C12N2710/10343
摘要： The invention relates to the mda-7 gene, its encoded protein and fragments of the protein. Several of these fragments of the MDA-7 protein exhibit antiproliferative activity and/or inhibited the activity of intact MDA-7. Accordingly, the invention provides, among other things, for methods and compositions that may be used in the treatment of disorders of cell proliferation, including cancer.
摘要翻译：本发明涉及mda-7基因，其编码的蛋白质和蛋白质的片段。 MDA-7蛋白的这些片段中的几个表现出抗增殖活性和/或抑制完整MDA-7的活性。因此，本发明尤其提供了可用于治疗细胞增殖障碍（包括癌症）的方法和组合物。

9. 发明申请

US20060283169A1 METHOD AND APPARATUS FOR THE PREVENTION OF CRITICAL PROCESS VARIABLE EXCURSIONS IN ONE OR MORE TURBOMACHINES 有权
标题翻译：在一个或多个涡轮机中防止关键过程可变爆破的方法和装置
公开(公告)号：US20060283169A1
公开(公告)日：2006-12-21
申请号：US11427515
申请日：2006-06-29
申请人： Krishnan Narayanan , Paul Fisher
发明人： Krishnan Narayanan , Paul Fisher
IPC分类号： F02C9/00
CPC分类号： F04D27/0284 , F04D27/0207
摘要： Many variables in processes such as those using turbocompressors and turbines must be limited or constrained. Limit control loops are provided for the purpose of limiting these variables. By using a combination of closed loop and open loop limit control schemes, excursions into unfavorable operation can be more effectively avoided. Transition between open loop and closed loop may be enhanced by testing the direction and magnitude of the rate at which the limit variable is changing. If the rate of change indicates recovery is imminent, control is passed back to the closed loop limit control function.
摘要翻译：诸如使用涡轮压缩机和涡轮机的过程中的许多变量必须受到限制或约束。提供限制控制回路用于限制这些变量。通过使用闭环和开环限制控制方案的组合，可以更有效地避免对不利操作的偏移。开环和闭环之间的转换可以通过测试极限变量正在改变的速率的方向和幅度来增强。如果变化率指示恢复即将到来，则控制被传回回路限制控制功能。

10. 发明申请

US20060180535A1 Fuel supply unit with filter self-cleaning features 审中-公开
标题翻译：燃油供应单元具有过滤器自清洁功能
公开(公告)号：US20060180535A1
公开(公告)日：2006-08-17
申请号：US11056202
申请日：2005-02-11
申请人： DeQuan Yu , Paul Fisher
发明人： DeQuan Yu , Paul Fisher
IPC分类号： B01D29/00
CPC分类号： B01D35/0273 , F02M37/50
摘要： An in-tank fuel supply unit self cleans the mesh filter of the primary fuel pump, thereby permitting smaller mesh sizes to decrease pump wear and increase the life of the pump. Generally, the in-tank fuel supply unit includes a reservoir, an auxiliary fuel pump, a primary fuel pump and a filter. Fuel exiting the auxiliary fuel pump outlet is directed towards the filter to wash debris from the filter. Preferably a swirling flow is generated within the reservoir, or the system in run in an overflow condition to assist in the self cleaning of the fuel filter.
摘要翻译：内燃机燃料供应单元自洁清洁主燃料泵的网状过滤器，从而允许更小的筛网尺寸以减少泵磨损并增加泵的寿命。通常，舱内燃料供应单元包括储存器，辅助燃料泵，主燃料泵和过滤器。离开辅助燃料泵出口的燃料被引向过滤器以从过滤器洗涤碎屑。优选地，在储存器内或在溢流状态下运行的系统中产生旋流，以有助于燃料过滤器的自清洁。

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