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    • 8. 发明授权
    • Wheatstone-bridge magnetoresistive device
    • 惠斯通电桥磁阻器件
    • US08415755B2
    • 2013-04-09
    • US11860737
    • 2007-09-25
    • Fernando J. CastanoCaroline A. Ross
    • Fernando J. CastanoCaroline A. Ross
    • H01L29/82H01L21/02
    • G11C11/16Y10T29/49075
    • A magnetoresistive Wheatstone-bridge structure includes a magnetoresistive ring structure. The magnetoresistive ring structure includes a first magnetic layer comprising a ferromagnetic material. A second magnetic layer also includes a ferromagnetic material. A non-magnetic spacer is positioned between the first magnetic layer and the second magnetic layer. A vacant open region is positioned in the center region of the magnetoresistive ring structure. A plurality of magnetic states can exist in either the first magnetic layer or second magnetic layer. Furthermore, the magnetoresistive Wheatstone-bridge structure includes a plurality of voltage and current contacts arranged symmetrically upon the magnetoresistive ring structure. The magnetic state of the ring is detected by measuring its resistance.
    • 磁阻惠斯通电桥结构包括磁阻环结构。 磁阻环结构包括包含铁磁材料的第一磁性层。 第二磁性层还包括铁磁材料。 非磁性间隔物位于第一磁性层和第二磁性层之间。 空位开放区位于磁阻环结构的中心区域。 多个磁状态可存在于第一磁性层或第二磁性层中。 此外,磁阻惠斯通电桥结构包括对称地布置在磁阻环结构上的多个电压和电流触点。 通过测量其阻力来检测环的磁状态。
    • 9. 发明授权
    • Guided self-assembly of block copolymer line structures for integrated circuit interconnects
    • 用于集成电路互连的嵌段共聚物线结构的引导自组装
    • US08309278B2
    • 2012-11-13
    • US12885051
    • 2010-09-17
    • Joel K. W. YangKarl K. BerggrenYeon Sik JungCaroline A. Ross
    • Joel K. W. YangKarl K. BerggrenYeon Sik JungCaroline A. Ross
    • G03F1/50H01L21/31H01L21/469
    • G03F7/40B81C1/00031B81C2201/0149B82Y10/00B82Y40/00G03F7/0002Y10T428/24669
    • Complex self-assembled patterns can be created using a sparse template and local changes to the shape or distribution of the posts of the template to direct pattern generation of block copolymer. The post spacing in the template is formed commensurate with the equilibrium periodicity of the block copolymer, which controls the orientation of the linear features. Further, the posts can be arranged such that the template occupies only a few percent of the area of the final self-assembled patterns. Local aperiodic features can be introduced by changing the period or motif of the lattice or by adding guiding posts. According to one embodiment, an array of carefully spaced and shaped posts, prepared by electron-beam patterning of an inorganic resist, can be used to template complex patterns in a cylindrical-morphology block copolymer. These complex self-assembled patterns can form a mask used in fabrication processes of arbitrary structures such as interconnect layouts.
    • 可以使用稀疏模板创建复杂的自组装图案,并且对模板的柱的形状或分布进行局部变化以引导嵌段共聚物的图案生成。 模板中的柱间距与嵌段共聚物的平衡周期相一致,嵌段共聚物控制线性特征的取向。 此外,柱可以被布置成使得模板仅占最终自组装图案的面积的百分之几。 可以通过改变晶格的周期或图案或添加引导柱来引入局部非周期特征。 根据一个实施例,可以使用通过无机抗蚀剂的电子束图案化制备的仔细间隔和形状的柱的阵列来模制圆柱形形态嵌段共聚物中的复杂图案。 这些复杂的自组装图案可以形成用于诸如互连布局的任意结构的制造工艺中的掩模。