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    • 3. 发明专利
    • Lithography apparatus and pattern forming method using the same
    • 使用该方法的成像装置和图案形成方法
    • JP2005346062A
    • 2005-12-15
    • JP2005155296
    • 2005-05-27
    • Lg Electronics Incエルジー電子株式会社
    • LEE KI DONGAHN SEH-WONPIEH SUNG HOONPARK BYOUNG HOKIM GYU TAE
    • G02F1/13G03F1/84G03F7/20H01L21/027H01L21/28H01L21/3205H01L21/768H01L23/52H01L23/522G03F1/08
    • G03F7/70291G03F7/7065
    • PROBLEM TO BE SOLVED: To selectively form a desired pattern, while observing a substrate.
      SOLUTION: The lithography apparatus comprises a stage 19 on which a test material is mounted; a first light source unit 15 for providing the light used in the case of observing the test material on stage; an optical system 11 equipped with an eyepiece for observing the test material on the stage; an image-obtaining means 21 for obtaining the image of the test material observed through the optical system; an image edit means 23 for editing the image obtained by the image-obtaining means; a liquid crystal panel 5 coupled to the optical system and for displaying the image from image signals of the image edited by the image edit means and for performing photograph mask function; and a second light source unit 1 for providing a light for exposing the test material, using the image displayed on the liquid crystal panel for a photomask.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:在观察基板的同时选择性地形成期望的图案。 解决方案:光刻设备包括其上安装测试材料的台19; 第一光源单元15,用于在观察舞台上的测试材料的情况下提供使用的光; 装备有用于观察台上测试材料的目镜的光学系统11; 用于获得通过光学系统观察的测试材料的图像的图像获取装置21; 用于编辑由图像获取装置获得的图像的图像编辑装置23; 耦合到光学系统并用于从由图像编辑装置编辑的图像的图像信号显示图像并用于执行照片掩码功能的液晶面板5; 以及第二光源单元1,用于使用显示在用于光掩模的液晶面板上的图像来提供用于暴露测试材料的光。 版权所有(C)2006,JPO&NCIPI
    • 4. 发明专利
    • Optical real-time delay device and manufacturing method thereof
    • 光学实时延迟器件及其制造方法
    • JP2005346058A
    • 2005-12-15
    • JP2005152305
    • 2005-05-25
    • Lg Electronics Incエルジー電子株式会社
    • AHN SEH-WONLEE SANG-SHIN
    • G02B6/02G02B6/28G02B6/34G02F1/01G02B6/10
    • G02B6/2861G02B6/021G02B6/02204G02F1/0115G02F2201/307
    • PROBLEM TO BE SOLVED: To provide an optical real-time delay device capable of effectively controlling a real-time delay in optical signal, by changing the effective refractive index of Bragg grating of an optical fiber through the control of the temperature of a heating part. SOLUTION: The optical real-time delay device comprises an optical fiber, composed of a core and a clad wrapping the core, and having a tapered part formed on an outer circumferential surface of the clad, along the circumferential direction of the clad so that a distance from the taper part to the core is gradually changed along the longitudinal direction; a Bragg grating formed in the core at an equal interval corresponding to the formation interval of the taper part; and a heating part formed so that the taper part is wrapped thereby and the distance from the Bragg grating is gradually changed along the longitudinal direction of the optical fiber. COPYRIGHT: (C)2006,JPO&NCIPI
    • 解决的问题:为了提供能够有效地控制光信号的实时延迟的光学实时延迟装置,通过通过控制光纤的温度的改变来改变光纤的布拉格光栅的有效折射率 加热部件。 解决方案:光学实时延迟装置包括由芯和包裹芯的包层组成的光纤,并且沿着包层的圆周方向具有形成在包层的外周表面上的锥形部分 使得从锥形部到芯的距离沿长度方向逐渐变化; 以对应于锥形部分的形成间隔的等间隔在芯中形成布拉格光栅; 以及形成为使得锥形部被包裹的加热部,并且与布拉格光栅的距离沿着光纤的长度方向逐渐变化。 版权所有(C)2006,JPO&NCIPI
    • 6. 发明专利
    • Optical real-time delay apparatus and method for manufacturing the same
    • 光学实时延迟装置及其制造方法
    • JP2005326857A
    • 2005-11-24
    • JP2005139667
    • 2005-05-12
    • Lg Electronics Incエルジー電子株式会社
    • AHN SEH-WONLEE SANG-SHIN
    • G02B6/02G02B6/28G02B6/34G02F1/01
    • G02F1/0118G02B6/021G02B6/02104G02B6/02204G02B6/283G02B6/2861G02F1/0147G02F2201/20G02F2201/307
    • PROBLEM TO BE SOLVED: To provide an optical real-time delay apparatus which is constructed so as to electrically, continuously and accurately control the real-time delay of a radio frequency (RF) signal without mechanical motion, by utilizing an optical fiber equipped with a Bragg grating with the characteristics of its effective refractive index being varied with the temperature variation, and a method for manufacturing the same. SOLUTION: The optical real-time delay apparatus comprises an optical fiber includes a core layer and a cladding layer wrapping the core layer, and having a taper portion formed at a certain part of an outer circumferential surface of the cladding layer; a distance from the taper portion to the core layer being gradually changed along the length direction of the taper portion; and a Bragg grating, formed on a uniform interval in the core layer placed within the section in which the taper portion of the optical fiber is formed; and a heating portion, formed on a part of the taper portion corresponding to the part where the Bragg grating is formed along the length direction of the optical fiber so as to surround the taper portion. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种光学实时延迟装置,其被构造成电气地,连续地和精确地控制无机械运动的射频(RF)信号的实时延迟,通过利用光学 配备有其有效折射率特性的布拉格光栅的光纤随着温度变化而变化,及其制造方法。 光学实时延迟装置包括光纤,其包括芯层和包覆芯层的包层,并且具有形成在包层的外周表面的某一部分的锥形部分; 从锥形部到芯层的距离沿着锥形部的长度方向逐渐变化; 以及在形成有光纤的锥形部分的部分内的芯层中以均匀间隔形成的布拉格光栅; 以及加热部,形成在与沿着光纤的长度方向形成有布拉格光栅的部分对应的锥形部的一部分上,以包围锥形部。 版权所有(C)2006,JPO&NCIPI