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1. 发明授权

US08692153B2 Method for manufacturing photoelectric-conversion-device, device for photoelectric-conversion-device manufacturing device, and photoelectric conversion device 失效
标题翻译：光电转换装置的制造方法，光电转换装置的制造装置以及光电转换装置
公开(公告)号：US08692153B2
公开(公告)日：2014-04-08
申请号：US13131815
申请日：2009-08-25
申请人： Kohei Kawazoe , Kazutaka Uda , Tomoyoshi Baba , Takashi Ishide , Sachiko Nakao
发明人： Kohei Kawazoe , Kazutaka Uda , Tomoyoshi Baba , Takashi Ishide , Sachiko Nakao
IPC分类号： B23K26/40 , B23K26/067
CPC分类号： H01L31/076 , B23K26/0006 , B23K26/0624 , B23K26/064 , B23K26/0676 , B23K26/083 , B23K26/359 , B23K26/364 , B23K26/40 , B23K2103/172 , B23K2103/50 , B23K2103/56 , H01L31/0463 , H01L31/056 , Y02E10/52 , Y02E10/548
摘要： Provided is a method for manufacturing a photoelectric-conversion-device capable of controlling the groove depth of a processed groove to a desired value. The method for manufacturing a photoelectric conversion device (10) includes a groove forming step of irradiating an intermediate-contact-layer separating groove (15) constituting a photoelectric conversion device (10) with a picosecond laser and of moving the picosecond laser relative to the intermediate-contact-layer separating groove (93), thereby forming a processed groove (15) in a predetermined scanning direction. In the groove forming step, interference fringes arranged in parallel in one direction are formed in an irradiated area corresponding to a beam diameter of the picosecond laser, and the picosecond laser is relatively moved such that the interference fringes are joined in the scanning direction.
摘要翻译：提供了一种能够将经处理的槽的槽深度控制到期望值的光电转换装置的制造方法。光电转换装置（10）的制造方法具备：槽形成工序，其对构成光电转换元件（10）的中间接触层分隔槽（15）进行皮秒激光照射，并使皮秒激光相对于中间接触层分离槽（93），从而在预定的扫描方向上形成经处理的槽（15）。在凹槽形成步骤中，在与皮秒激光的光束直径对应的照射区域中形成在一个方向上平行布置的干涉条纹，并且皮秒激光器相对移动，使得干涉条纹沿扫描方向接合。

2. 发明申请

US20110226748A1 METHOD FOR MANUFACTURING PHOTOELECTRIC-CONVERSION-DEVICE, DEVICE FOR PHOTOELECTRIC-CONVERSION-DEVICE MANUFACTURING DEVICE, AND PHOTOELECTRIC CONVERSION DEVICE 失效
标题翻译：用于制造光电转换装置的方法，用于光电转换装置制造装置的装置和光电转换装置
公开(公告)号：US20110226748A1
公开(公告)日：2011-09-22
申请号：US13131815
申请日：2009-08-25
申请人： Kohei Kawazoe , Kazutaka Uda , Tomoyoshi Baba , Takashi Ishide , Sachiko Nakao
发明人： Kohei Kawazoe , Kazutaka Uda , Tomoyoshi Baba , Takashi Ishide , Sachiko Nakao
IPC分类号： B23K26/00
CPC分类号： H01L31/076 , B23K26/0006 , B23K26/0624 , B23K26/064 , B23K26/0676 , B23K26/083 , B23K26/359 , B23K26/364 , B23K26/40 , B23K2103/172 , B23K2103/50 , B23K2103/56 , H01L31/0463 , H01L31/056 , Y02E10/52 , Y02E10/548
摘要： Provided is a method for manufacturing a photoelectric-conversion-device capable of controlling the groove depth of a processed groove to a desired value. The method for manufacturing a photoelectric conversion device (10) includes a groove forming step of irradiating an intermediate-contact-layer separating groove (15) constituting a photoelectric conversion device (10) with a picosecond laser and of moving the picosecond laser relative to the intermediate-contact-layer separating groove (93), thereby forming a processed groove (15) in a predetermined scanning direction. In the groove forming step, interference fringes arranged in parallel in one direction are formed in an irradiated area corresponding to a beam diameter of the picosecond laser, and the picosecond laser is relatively moved such that the interference fringes are joined in the scanning direction.
摘要翻译：提供了一种能够将经处理的槽的槽深度控制到期望值的光电转换装置的制造方法。光电转换装置（10）的制造方法具备：槽形成工序，其对构成光电转换元件（10）的中间接触层分隔槽（15）进行皮秒激光照射，并使皮秒激光相对于中间接触层分离槽（93），从而在预定的扫描方向上形成经处理的槽（15）。在凹槽形成步骤中，在与皮秒激光的光束直径对应的照射区域中形成在一个方向上平行布置的干涉条纹，并且皮秒激光器相对移动，使得干涉条纹沿扫描方向接合。

3. 发明申请

US20110126895A1 PHOTOELECTRIC CONVERSION DEVICE FABRICATION METHOD AND PHOTOELECTRIC CONVERSION DEVICE 审中-公开
标题翻译：光电转换器件制造方法和光电转换器件
公开(公告)号：US20110126895A1
公开(公告)日：2011-06-02
申请号：US13055297
申请日：2009-10-02
申请人： Kazutaka Uda , Tomoyoshi Baba , Takashi Ishide , Kohei Kawazoe , Tatsuyuki Nishimiya
发明人： Kazutaka Uda , Tomoyoshi Baba , Takashi Ishide , Kohei Kawazoe , Tatsuyuki Nishimiya
IPC分类号： H01L31/06 , H01L31/0224 , H01L31/18
CPC分类号： H01L31/03921 , H01L31/077 , H01L31/1804 , H01L31/182 , H01L31/1824 , H01L31/202 , Y02E10/545 , Y02E10/546 , Y02E10/547 , Y02P70/521
摘要： Provided is a method for fabricating a photoelectric conversion device in which current is prevented as much as possible from leaking via an intermediate contact layer separating groove. The method includes: a process of forming a top layer mainly containing amorphous silicon; a process of forming on the top layer an intermediate contact layer electrically and optically connected to the top layer; a process of removing the intermediate contact layer through irradiation with a pulsed laser and forming an intermediate contact layer separating groove that reaches the top layer to separate the intermediate contact layer; and a process of forming, on the intermediate contact layer and in the intermediate contact layer separating groove, a bottom layer that mainly contains microcrystalline silicon and that is electrically and optically connected to the intermediate contact layer. The intermediate contact layer separating groove is terminated in an i-layer of the top layer.
摘要翻译：提供了一种制造光电转换装置的方法，其中尽可能防止电流经由中间接触层分离槽泄漏。该方法包括：形成主要包含非晶硅的顶层的工艺; 在顶层上形成电气和光学连接到顶层的中间接触层的工艺; 通过用脉冲激光照射去除中间接触层并形成到达顶层的中间接触层分离槽以分离中间接触层的过程; 以及在中间接触层和中间接触层分离槽中形成主要包含微晶硅并且电连接和光学连接到中间接触层的底层的工艺。中间接触层分隔槽终止在顶层的i层中。

4. 发明申请

US20110126894A1 PHOTOELECTRIC CONVERSION DEVICE FABRICATION METHOD AND PHOTOELECTRIC CONVERSION DEVICE 有权
标题翻译：光电转换器件制造方法和光电转换器件
公开(公告)号：US20110126894A1
公开(公告)日：2011-06-02
申请号：US13054858
申请日：2009-10-02
申请人： Tatsuyuki Nishimiya , Kazutaka Uda , Kohei Kawazoe , Tomoyoshi Baba , Takashi Ishide
发明人： Tatsuyuki Nishimiya , Kazutaka Uda , Kohei Kawazoe , Tomoyoshi Baba , Takashi Ishide
IPC分类号： H01L31/06 , H01L31/18
CPC分类号： H01L31/1804 , H01L31/03921 , H01L31/077 , H01L31/182 , H01L31/1824 , H01L31/202 , Y02E10/545 , Y02E10/546 , Y02E10/547 , Y02P70/521
摘要： Provided is a photoelectric conversion device fabrication method in which current leakage from an intermediate contact layer via an intermediate-contact-layer separating groove is prevented as much as possible. Included are a step of film-forming a top layer having amorphous silicon as a main component; a step of film-forming, on the top layer, an intermediate contact layer electrically and optically connected thereto; a step of separating the intermediate contact layer by removing the intermediate contact layer by irradiating it with a pulsed laser, forming an intermediate-contact-layer separating groove that reaches the top layer; and a step of film-forming, on the intermediate contact layer and inside the intermediate-contact-layer separating groove, a bottom layer electrically and optically connected thereto and having microcrystalline silicon as a main component. A pulsed laser having a pulse width of 10 ps to 750 ps, inclusive, is used as the pulsed laser for separating the intermediate contact layer.
摘要翻译：提供了尽可能地防止从中间接触层经由中间接触层分离槽的电流泄漏的光电转换器件制造方法。包括以非晶硅为主要成分的顶层成膜的步骤; 在顶层上形成与其电连接和光学连接的中间接触层的成膜步骤; 通过用脉冲激光照射中间接触层来分离中间接触层的步骤，形成到达顶层的中间接触层分隔槽; 以及在中间接触层和中间接触层分离槽内部成膜的步骤，其电层和光学连接到底层，并以微晶硅为主要成分。使用脉冲宽度为10ps至750ps（包括端值）的脉冲激光器作为用于分离中间接触层的脉冲激光器。

5. 发明授权

US08835253B2 Photoelectric conversion device fabrication method and photoelectric conversion device 有权
标题翻译：光电转换装置的制造方法和光电转换装置
公开(公告)号：US08835253B2
公开(公告)日：2014-09-16
申请号：US13054858
申请日：2009-10-02
申请人： Tatsuyuki Nishimiya , Kazutaka Uda , Kohei Kawazoe , Tomoyoshi Baba , Takashi Ishide
发明人： Tatsuyuki Nishimiya , Kazutaka Uda , Kohei Kawazoe , Tomoyoshi Baba , Takashi Ishide
IPC分类号： H01L21/00 , H01L31/18 , H01L31/077 , H01L31/0392 , H01L31/20
CPC分类号： H01L31/1804 , H01L31/03921 , H01L31/077 , H01L31/182 , H01L31/1824 , H01L31/202 , Y02E10/545 , Y02E10/546 , Y02E10/547 , Y02P70/521
摘要： Provided is a photoelectric conversion device fabrication method in which current leakage from an intermediate contact layer via an intermediate-contact-layer separating groove is prevented as much as possible. Included are a step of film-forming a top layer having amorphous silicon as a main component; a step of film-forming, on the top layer, an intermediate contact layer electrically and optically connected thereto; a step of separating the intermediate contact layer by removing the intermediate contact layer by irradiating it with a pulsed laser, forming an intermediate-contact-layer separating groove that reaches the top layer; and a step of film-forming, on the intermediate contact layer and inside the intermediate-contact-layer separating groove, a bottom layer electrically and optically connected thereto and having microcrystalline silicon as a main component. A pulsed laser having a pulse width of 10 ps to 750 ps, inclusive, is used as the pulsed laser for separating the intermediate contact layer.
摘要翻译：提供了尽可能地防止从中间接触层经由中间接触层分离槽的电流泄漏的光电转换器件制造方法。包括以非晶硅为主要成分的顶层成膜的步骤; 在顶层上形成与其电连接和光学连接的中间接触层的成膜步骤; 通过用脉冲激光照射中间接触层来分离中间接触层的步骤，形成到达顶层的中间接触层分隔槽; 以及在中间接触层和中间接触层分离槽内部成膜的步骤，其电层和光学连接到底层，并以微晶硅为主要成分。使用脉冲宽度为10ps至750ps（包括端值）的脉冲激光器作为用于分离中间接触层的脉冲激光器。

6. 发明申请

US20110203630A1 PHOTOVOLTAIC DEVICE AND PROCESS FOR PRODUCING SAME 审中-公开
标题翻译：光伏器件及其制造方法
公开(公告)号：US20110203630A1
公开(公告)日：2011-08-25
申请号：US12672295
申请日：2007-08-14
申请人： Akemi Takano , Tatsuji Horioka , Satoshi Kokaji , Kazutaka Uda
发明人： Akemi Takano , Tatsuji Horioka , Satoshi Kokaji , Kazutaka Uda
IPC分类号： H01L31/042 , H01L31/02
CPC分类号： H01L31/03921 , H01L31/046 , H01L31/0463 , Y02E10/50
摘要： A photovoltaic device that can prevent performance degradation caused by electrodeposition generated as a result of moisture penetration. In the photovoltaic device, two or more intermediate insulation portions that electrically insulate solar cell unit cells positioned adjacently in the X-direction are formed on the substrate center side of side insulation portions so as to extend in the Y-direction in a parallel arrangement across the X-direction, a conductive portion that electrically connects solar cell unit cells positioned adjacently in the X-direction is provided in a position partway along each of the intermediate insulation portions, and the solar cell unit cells where the conductive portion is positioned are electrically insulated from a solar cell unit cell positioned adjacently in the X-direction by another of the intermediate insulation portions positioned distant from the conductive portion in the X-direction.
摘要翻译：一种可以防止由于水分渗透而产生的电沉积引起的性能下降的光伏器件。在光电器件中，在侧绝缘部分的基板中心侧形成两个以上的电绝缘在X方向上相邻配置的太阳能电池单电池的中间绝缘部，以使其在Y方向上以并列的方式跨越 X方向，将沿X方向相邻配置的太阳能电池单电池电连接的导电部设置在沿着各中间绝缘部的中途的位置，导电部所在的太阳能电池单电池电气与位于X方向上远离导电部分的中间绝缘部分之间的另一个中间绝缘部分相邻地设置在与X方向相邻的太阳能电池单元电池。

7. 发明授权

US4682500A Pressure sensitive element 失效
标题翻译：压敏元件
公开(公告)号：US4682500A
公开(公告)日：1987-07-28
申请号：US848930
申请日：1986-04-07
申请人： Kazutaka Uda
发明人： Kazutaka Uda
IPC分类号： G01L9/00 , G02B26/00 , G01L7/08
CPC分类号： G01L9/0079 , G02B26/001
摘要： A pressure sensitive element having a pair of light reflecting thin films formed through a thin film producing process and composing a Fabry-Perot resonator which is arranged so as to face a light transmitting system, and a diaphragm laminated on the light reflecting thin films, wherein an optical path difference is formed in accordance with an interval of an air gap located between the pairs of light reflecting thin films, while the interval of the air gap changes by the deformation of the diaphragm.
摘要翻译：一种具有通过薄膜制造工艺形成的一对反射薄膜的压敏元件，并且构成布置成面对透光系统的法布里 - 珀罗谐振器和层叠在光反射薄膜上的隔膜，其中根据位于两对光反射薄膜之间的气隙的间隔，通过隔膜的变形，气隙的间隔变化，形成光路差。

8. 发明授权

US4773935A Moisture sensor containing cellulose acetate butyrate 失效
标题翻译：含有乙酸丁酸纤维素的水分传感器
公开(公告)号：US4773935A
公开(公告)日：1988-09-27
申请号：US885311
申请日：1986-07-14
申请人： Kazutaka Uda , Masaya Hijikigawa
发明人： Kazutaka Uda , Masaya Hijikigawa
IPC分类号： C08G59/00 , C08B3/22 , C08B15/00 , C08G18/00 , C08G18/64 , C08G59/40 , C08G63/00 , C08G63/181 , C08L63/00 , G01N27/02 , G01N27/12 , G01N27/22 , C08L1/12
CPC分类号： G01N27/126 , C08B15/005 , C08B3/22 , G01N27/121
摘要： A moisture sensitive material prepared by cross-linking cellulose acetate butyrate with at least one compound selected from the group consisting of compounds containing two or more isocyanate groups; copmpounds containing two or more epoxy groups; compounds containing two or more carboxyl groups; and acid anhydrides of carboxylic acids.
摘要翻译：通过将乙酸丁酸纤维素与至少一种选自含有两个或更多个异氰酸酯基团的化合物组成的组中的化合物交联而制备的湿敏材料; 含有两个或更多个环氧基团的组合物; 含有两个或多个羧基的化合物; 和羧酸的酸酐。

9. 发明授权

US5048336A Moisture-sensitive device 失效
标题翻译：湿度敏感装置
公开(公告)号：US5048336A
公开(公告)日：1991-09-17
申请号：US459262
申请日：1989-12-29
申请人： Takashi Sugihara , Kazutaka Uda , Hiroki Tabuchi , Shuji Miyoshi , Yasuhiko Inami , Nobuo Hashizume , Hisatoshi Furubayashi
发明人： Takashi Sugihara , Kazutaka Uda , Hiroki Tabuchi , Shuji Miyoshi , Yasuhiko Inami , Nobuo Hashizume , Hisatoshi Furubayashi
IPC分类号： G01N27/18
CPC分类号： G01N27/18
摘要： A moisture-sensitive device comprising a substrate such as silicon substrate, a pair of belt-like heating elements extending over recesses formed in the substrate, the heating elements being composed of a resistive film of platinum or nickel and a heat-resistant insulating film covering the resistive film in which one of the heating elements acts as a detector element and the other as a reference element, which device can exactly determine an absolute humidity irrespective of sudden changes of temperature.

10. 发明授权

US4928513A Sensor 失效
标题翻译：传感器
公开(公告)号：US4928513A
公开(公告)日：1990-05-29
申请号：US78741
申请日：1987-07-28
申请人： Takashi Sugihara , Kazutaka Uda , Hiroki Tabuchi , Yasuhiko Inami , Masaya Hijikigawa , Shoei Kataoka
发明人： Takashi Sugihara , Kazutaka Uda , Hiroki Tabuchi , Yasuhiko Inami , Masaya Hijikigawa , Shoei Kataoka
IPC分类号： G01N27/12 , G01N33/00
CPC分类号： G01N27/12 , G01N33/0031 , H01L2924/0002
摘要： A sensor having a pair of sensor units, one of which is a detecting sensor unit and the other of which is a reference sensor unit, wherein each of the units comprises a substrate with a hollow portion, a thin insulating layer with a bridge, cantilever or diaphragm shape disposed on the substrate, a sensitive film disposed on the bridge, cantilever or diaphragm portion of the thin insulating layer, and a pair of electrodes being in contact with the sensitive film, the sensitive film section of the detecting sensor unit being exposed to an atmosphere to be measured so that the electrical resistance of the sensitive film changes with a variation in the physical quantity of the atmosphere to be detected, and the sensitive film section of the reference sensor unit being sealed within a shielding container so that the electrical resistance of the sensitive film is not influenced by a variation in the physical quantity of the atmosphere outside of the container, whereby the absolute physical quantity of the atmosphere to be detected is determined by the output power of the sensor based on a difference between the electrical resistance of the detecting sensor unit and the electrical resistance of the reference sensor unit.
摘要翻译：一种传感器，具有一对传感器单元，其中一个是检测传感器单元，另一个是参考传感器单元，其中每个单元包括具有中空部分的基板，具有桥的薄绝缘层，悬臂或隔膜形状，设置在薄壁绝缘层的桥，悬臂或隔膜部分上的敏感膜和与敏感膜接触的一对电极，检测传感器单元的敏感膜部分露出使得测量的气氛使得敏感膜的电阻随着要检测的气氛的物理量的变化而变化，并且参考传感器单元的敏感膜部分被密封在屏蔽容器内，使得电气敏感膜的电阻不受容器外部大气物理量的变化的影响，由此绝对物理基于检测传感器单元的电阻与基准传感器单元的电阻之差，由传感器的输出功率确定要检测的气氛量。

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