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1. 发明申请

US20100072563A1 SUBSTRATE BONDED MEMS SENSOR 有权
标题翻译：基板结合MEMS传感器
公开(公告)号：US20100072563A1
公开(公告)日：2010-03-25
申请号：US12560645
申请日：2009-09-16
申请人： Kiyoshi Sato , Kiyoshi Kobayashi , Yoshitaka Uto , Katsuya Kikuiri , Kazuyoshi Takahashi , Jun Suzuki , Hideki Gochou , Toru Takahashi , Hisanobu Ohkawa
发明人： Kiyoshi Sato , Kiyoshi Kobayashi , Yoshitaka Uto , Katsuya Kikuiri , Kazuyoshi Takahashi , Jun Suzuki , Hideki Gochou , Toru Takahashi , Hisanobu Ohkawa
IPC分类号： H01L29/84
CPC分类号： B81B7/007 , B81B2207/097
摘要： A MEMS sensor includes a first substrate; a second substrate; a movable electrode portion and a fixed electrode portion which are arranged between the first substrate and the second substrate, wherein: conductive supporting portions of the movable electrode portion and the fixed electrode portion are, respectively, fixedly secured to a surface of the first substrate via a first insulating layer; a second insulating layer, a lead layer buried into the second insulating layer, and connection electrode portions that are electrically connected to the lead layer to be individually connected to the conductive supporting portions are provided on a surface of the second substrate; a metallic connection layer is formed on the surface of one of the respective conductive supporting portions; one of the respective connection electrode portions and the metallic connection layer are bonded together by eutectic bonding or diffusion bonding; and, at least each of the connection electrode portions has a thickness of about 4 μm or smaller.
摘要翻译： MEMS传感器包括第一基板; 第二基板; 布置在所述第一基板和所述第二基板之间的可移动电极部分和固定电极部分，其中：所述可动电极部分和所述固定电极部分的导电支撑部分分别固定地固定到所述第一基板的表面，第一绝缘层; 第二绝缘层，埋入第二绝缘层中的引线层和与导电层电连接以连接到导电支撑部分的连接电极部分设置在第二基板的表面上; 在各个导电支撑部分之一的表面上形成金属连接层; 各个连接电极部分和金属连接层中的一个通过共晶接合或扩散接合结合在一起; 并且至少每个连接电极部分具有约4μm或更小的厚度。

2. 发明授权

US08207586B2 Substrate bonded MEMS sensor 有权
标题翻译：基板结合MEMS传感器
公开(公告)号：US08207586B2
公开(公告)日：2012-06-26
申请号：US12560645
申请日：2009-09-16
申请人： Kiyoshi Sato , Kiyoshi Kobayashi , Yoshitaka Uto , Katsuya Kikuiri , Kazuyoshi Takahashi , Jun Suzuki , Hideki Gochou , Toru Takahashi , Hisanobu Ohkawa
发明人： Kiyoshi Sato , Kiyoshi Kobayashi , Yoshitaka Uto , Katsuya Kikuiri , Kazuyoshi Takahashi , Jun Suzuki , Hideki Gochou , Toru Takahashi , Hisanobu Ohkawa
IPC分类号： H01L29/84
CPC分类号： B81B7/007 , B81B2207/097
摘要： A MEMS sensor includes a first substrate; a second substrate; a movable electrode portion and a fixed electrode portion which are arranged between the first substrate and the second substrate, wherein: conductive supporting portions of the movable electrode portion and the fixed electrode portion are, respectively, fixedly secured to a surface of the first substrate via a first insulating layer; a second insulating layer, a lead layer buried into the second insulating layer, and connection electrode portions that are electrically connected to the lead layer to be individually connected to the conductive supporting portions are provided on a surface of the second substrate; a metallic connection layer is formed on the surface of one of the respective conductive supporting portions; one of the respective connection electrode portions and the metallic connection layer are bonded together by eutectic bonding or diffusion bonding; and, at least each of the connection electrode portions has a thickness of about 4 μm or smaller.
摘要翻译： MEMS传感器包括第一基板; 第二基板; 布置在所述第一基板和所述第二基板之间的可移动电极部分和固定电极部分，其中：所述可动电极部分和所述固定电极部分的导电支撑部分分别固定地固定到所述第一基板的表面，第一绝缘层; 第二绝缘层，埋入第二绝缘层中的引线层和与导电层电连接以连接到导电支撑部分的连接电极部分设置在第二基板的表面上; 在各个导电支撑部分之一的表面上形成金属连接层; 各个连接电极部分和金属连接层中的一个通过共晶接合或扩散接合结合在一起; 并且至少每个连接电极部分具有约4μm或更小的厚度。

3. 发明授权

US08459116B2 Physical quantity sensor 有权
标题翻译：物理量传感器
公开(公告)号：US08459116B2
公开(公告)日：2013-06-11
申请号：US13296991
申请日：2011-11-15
申请人： Akira Miyatake , Toru Takahashi , Hisanobu Ohkawa , Katsuya Kikuiri , Hisayuki Yazawa , Toshihiro Kobayashi , Yoshitaka Uto
发明人： Akira Miyatake , Toru Takahashi , Hisanobu Ohkawa , Katsuya Kikuiri , Hisayuki Yazawa , Toshihiro Kobayashi , Yoshitaka Uto
IPC分类号： G01P15/125
CPC分类号： G01P15/08 , B81B3/001 , B81B3/0021 , G01P15/0802 , G01P15/125 , G01P2015/0837 , G01P2015/0871
摘要： A physical quantity sensor includes an anchor portion, a movable portion displaceable in a height direction, a supporting portion rotatably connected to the anchor portion and the movable portion, and a detection portion. The supporting portion includes a first connection arm connecting the anchor portion and the movable portion to each other and a leg portion extending from the anchor portion in a direction opposite to the first connection arm, the leg portion being displaced in a direction opposite to a displacement direction of the movable portion when the supporting portion rotates. A stopper surface is disposed at a position to which a distal end portion of the leg portion is contactable when the leg portion is displaced in the direction opposite to the displacement direction of the movable portion. Displacement of the movable portion is restricted when the distal end portion of the leg portion contacts the stopper surface.
摘要翻译：物理量传感器包括锚固部分，在高度方向上可移动的可移动部分，可转动地连接到锚定部分和可移动部分的支撑部分，以及检测部分。所述支撑部包括将所述锚固部和所述可动部彼此连接的第一连接臂和从所述锚定部沿与所述第一连接臂相反的方向延伸的脚部，所述腿部沿与所述第一连接臂相反的方向移位支撑部旋转时的可动部的方向。止动器表面设置在腿部在与可动部的移动方向相反的方向移位的状态下，腿部的前端部可接触的位置。当腿部的远端部分接触止动表面时，可动部分的位移受到限制。

4. 发明授权

US08418557B2 Physical quantity sensor 有权
标题翻译：物理量传感器
公开(公告)号：US08418557B2
公开(公告)日：2013-04-16
申请号：US12841748
申请日：2010-07-22
申请人： Hisayuki Yazawa , Kiyoshi Sato , Katsuya Kikuiri , Toru Takahashi , Hisanobu Ohkawa
发明人： Hisayuki Yazawa , Kiyoshi Sato , Katsuya Kikuiri , Toru Takahashi , Hisanobu Ohkawa
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , B81B3/0078 , B81B2201/0235 , B81B2203/053 , G01P15/0802 , G01P2015/0831
摘要： A physical quantity sensor includes a support substrate, anchor portions fixed to a top surface of the support substrate, a movable portion positioned above the support substrate and supported by the anchor portions with support portions provided therebetween such that the movable portion is movable in a height direction, and detection portions for detecting a displacement of the movable portion. The support portions include beam portions provided between the movable portion and the anchor portions such that spring portions are provided between the beam portions and each of the movable portion and the anchor portions, the beam portions having a rigidity higher than a rigidity of the spring portions. The movable portion translates in the height direction owing to twisting of the spring portions and displacements in the height direction of distal ends of the beam portions, the movable portion being supported at the distal end.
摘要翻译：物理量传感器包括支撑基板，固定到支撑基板的顶表面的锚定部分，位于支撑基板上方并由锚定部分支撑的可移动部分，其中支撑部分设置在支撑基板之间，使得可移动部分能够在高度方向和检测部分，用于检测可动部分的位移。支撑部分包括设置在可动部分和锚固部分之间的梁部分，使得弹簧部分设置在梁部分与可动部分和锚固部分中的每一个之间，梁部分的刚度高于弹簧部分的刚度。可移动部分由于弹簧部分的扭转和梁部分的远端的高度方向上的位移而在高度方向上平移，可移动部分被支撑在远端。

5. 发明申请

US20100281980A1 PHYSICAL QUANTITY SENSOR 有权
标题翻译：物理量传感器
公开(公告)号：US20100281980A1
公开(公告)日：2010-11-11
申请号：US12841748
申请日：2010-07-22
申请人： Hisayuki Yazawa , Kiyoshi Sato , Katsuya Kikuiri , Toru Takahashi , Hisanobu Ohkawa
发明人： Hisayuki Yazawa , Kiyoshi Sato , Katsuya Kikuiri , Toru Takahashi , Hisanobu Ohkawa
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , B81B3/0078 , B81B2201/0235 , B81B2203/053 , G01P15/0802 , G01P2015/0831
摘要： A physical quantity sensor includes a support substrate, anchor portions fixed to a top surface of the support substrate, a movable portion positioned above the support substrate and supported by the anchor portions with support portions provided therebetween such that the movable portion is movable in a height direction, and detection portions for detecting a displacement of the movable portion. The support portions include beam portions provided between the movable portion and the anchor portions such that spring portions are provided between the beam portions and each of the movable portion and the anchor portions, the beam portions having a rigidity higher than a rigidity of the spring portions. The movable portion translates in the height direction owing to twisting of the spring portions and displacements in the height direction of distal ends of the beam portions, the movable portion being supported at the distal end.
摘要翻译：物理量传感器包括支撑基板，固定到支撑基板的顶表面的锚定部分，位于支撑基板上方并由锚定部分支撑的可移动部分，其中支撑部分设置在支撑基板之间，使得可移动部分能够在高度方向和检测部分，用于检测可动部分的位移。支撑部分包括设置在可动部分和锚固部分之间的梁部分，使得弹簧部分设置在梁部分与可动部分和锚固部分中的每一个之间，梁部分的刚度高于弹簧部分的刚度。可移动部分由于弹簧部分的扭转和梁部分的远端的高度方向上的位移而在高度方向上平移，可移动部分被支撑在远端。

6. 发明申请

US20070115594A1 PERPENDICULAR MAGNETIC RECORDING HEAD HAVING MAIN MAGNETIC POLE LAYER FORMED ON HIGH-FLATNESS SURFACE, AND METHOD OF MANUFACTURING THE HEAD 失效
标题翻译：具有在高平坦表面形成的主磁性层的圆形磁记录头及其制造方法
公开(公告)号：US20070115594A1
公开(公告)日：2007-05-24
申请号：US11624332
申请日：2007-01-18
申请人： Toru Takahashi , Hisayuki Yazawa , Hideki Gochou , Kiyoshi Kobayashi , Minoru Yamada , Kiyoshi Sato , Toshinori Watanabe
发明人： Toru Takahashi , Hisayuki Yazawa , Hideki Gochou , Kiyoshi Kobayashi , Minoru Yamada , Kiyoshi Sato , Toshinori Watanabe
IPC分类号： G11B5/33
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A main magnetic pole layer is formed on an insulating layer flattened into a high-flatness surface, and a yoke layer having a large film thickness is formed on the main magnetic pole layer independently of the main magnetic pole. The main magnetic pole layer has a front end surface formed in a shape with a width size gradually increasing in a direction of track width as the front end surface departs farther away from an auxiliary magnetic pole layer. A perpendicular magnetic recording head can be provided which can suppress the occurrence of fringing in a recording pattern, and can form the main magnetic pole layer with high pattern accuracy, and can satisfactorily-introduce a recording magnetic field to a fore end of the main magnetic pole layer.
摘要翻译：在平坦化面平坦化的绝缘层上形成有主磁极层，独立于主磁极，在主磁极层上形成膜厚大的磁轭层。主磁极层的前端表面形成为具有随着前端表面离开辅助磁极层而在轨道宽度方向上逐渐增加的宽度尺寸的形状。可以提供一种垂直磁记录头，其可以抑制记录图案中的边缘的发生，并且可以以高图案精度形成主磁极层，并且可以令人满意地将记录磁场引入主磁体的前端极层。

7. 发明授权

US07472470B2 Method of manufacturing a perpendicular magnetic recording head 失效
标题翻译：制造垂直磁记录头的方法
公开(公告)号：US07472470B2
公开(公告)日：2009-01-06
申请号：US11624332
申请日：2007-01-18
申请人： Toru Takahashi , Hisayuki Yazawa , Hideki Gochou , Kiyoshi Kobayashi , Minoru Yamada , Kiyoshi Sato , Toshinori Watanabe
发明人： Toru Takahashi , Hisayuki Yazawa , Hideki Gochou , Kiyoshi Kobayashi , Minoru Yamada , Kiyoshi Sato , Toshinori Watanabe
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A main magnetic pore layer is formed on an insulating layer flattened into a high-flatness surface, and a yoke layer having a large film thickness is formed under the main magnetic pole layer independently of the main magnetic pole. The main magnetic pole layer has a front end surface formed in a shape with a width size gradually increasing in a direction of track width as the front end surface departs farther away from an auxiliary magnetic pole layer. A perpendicular magnetic recording head can be provided which can suppress the occurrence of fringing in a recording pattern, and can form the main magnetic pole layer with high pattern accuracy, and can satisfactorily introduce a recording magnetic field to a fore end of the main magnetic pole layer.
摘要翻译：在平坦化面平坦化的绝缘层上形成有主要的磁性孔层，并且在主磁极层的下方形成具有大的膜厚的磁轭层，而与主磁极无关。主磁极层的前端表面形成为具有随着前端表面离开辅助磁极层而在轨道宽度方向上逐渐增加的宽度尺寸的形状。可以提供一种垂直磁记录头，其可以抑制记录图案中的边缘的发生，并且可以形成具有高图案精度的主磁极层，并且可以令人满意地将记录磁场引入主磁极的前端层。

8. 发明授权

US07181829B2 Method of manufacturing a perpendicular magnetic recording head 失效
标题翻译：制造垂直磁记录头的方法
公开(公告)号：US07181829B2
公开(公告)日：2007-02-27
申请号：US11222441
申请日：2005-09-08
申请人： Toru Takahashi , Hisayuki Yazawa , Hideki Gochou , Kiyoshi Kobayashi , Minoru Yamada , Kiyoshi Sato , Toshinori Watanabe
发明人： Toru Takahashi , Hisayuki Yazawa , Hideki Gochou , Kiyoshi Kobayashi , Minoru Yamada , Kiyoshi Sato , Toshinori Watanabe
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A main magnetic pole layer is formed on an insulating layer flattened into a high-flatness surface, and a yoke layer having a large film thickness is formed under the main magnetic pole layer independently of the main magnetic pole. The main magnetic pole layer has a front end surface formed in a shape with a width size gradually increasing in a direction of track width as the front end surface departs farther away from an auxiliary magnetic pole layer. A perpendicular magnetic recording head can be provided which can suppress the occurrence of fringing in a recording pattern, and can form the main magnetic pole layer with high pattern accuracy, and can satisfactorily introduce a recording magnetic field to a fore end of the main magnetic pole layer.
摘要翻译：在平坦化面平坦化的绝缘层上形成有主磁极层，独立于主磁极，在主磁极层的下方形成有膜厚较大的磁轭层。主磁极层的前端表面形成为具有随着前端表面离开辅助磁极层而在轨道宽度方向上逐渐增加的宽度尺寸的形状。可以提供一种垂直磁记录头，其可以抑制记录图案中的边缘的发生，并且可以以高图案精度形成主磁极层，并且可以令人满意地将记录磁场引入主磁极的前端层。

9. 发明申请

US20050168870A1 Thin-film magnetic head appropriately suppressing side fringing and method for fabricating the same 有权
标题翻译：适合抑制边缘的薄膜磁头及其制造方法
公开(公告)号：US20050168870A1
公开(公告)日：2005-08-04
申请号：US11016949
申请日：2004-12-20
申请人： Kiyoshi Sato , Toshinori Watanabe , Hideki Gochou , Kiyoshi Kobayashi , Toru Takahashi , Hisayuki Yazawa , Masaki Ikegami , Hiromi Ikegami , Chiaki Ikegami
发明人： Kiyoshi Sato , Toshinori Watanabe , Hideki Gochou , Kiyoshi Kobayashi , Toru Takahashi , Hisayuki Yazawa , Masaki Ikegami , Hiromi Ikegami , Chiaki Ikegami
IPC分类号： G11B5/31 , G11B5/147
CPC分类号： G11B5/3116 , G11B5/312 , G11B5/313 , G11B5/3163
摘要： A thin-film magnetic head includes a lower core layer; a recording core formed on the lower core layer and exposed at a face surface facing a recording medium, the recording core including a gap layer, an upper pole layer, and optionally, a lower pole layer; an upper core layer magnetically coupled to the upper pole layer; and a coil. A tip surface of the upper core layer at the face surface is set back from the face surface in the height direction, and the tip surface is an inclined surface or a curved surface in which the depth gradually increases from the track width direction. A method for fabricating a thin-film magnetic head is also disclosed.
摘要翻译：薄膜磁头包括下芯层; 记录芯，形成在下芯层上并在面向记录介质的表面上暴露，所述记录芯包括间隙层，上极层和可选的下极层; 磁性地耦合到上极层的上芯层; 和线圈。上表面的上芯层的顶表面在高度方向上从表面返回，并且尖端表面是倾斜表面或深度从轨道宽度方向逐渐增加的曲面。还公开了一种用于制造薄膜磁头的方法。

10. 发明授权

US06687084B2 Perpendicular magnetic recording head having main magnetic pole layer formed on high-flatness surface of yoke layer, and method of manufacturing the head 失效
标题翻译：具有形成在磁轭层的高平坦表面上的主磁极层的垂直磁记录头及其制造方法
公开(公告)号：US06687084B2
公开(公告)日：2004-02-03
申请号：US10025131
申请日：2001-12-18
申请人： Toru Takahashi , Hisayuki Yazawa , Hideki Gochou , Kiyoshi Kobayashi , Minoru Yamada , Kiyoshi Sato , Toshinori Watanabe
发明人： Toru Takahashi , Hisayuki Yazawa , Hideki Gochou , Kiyoshi Kobayashi , Minoru Yamada , Kiyoshi Sato , Toshinori Watanabe
IPC分类号： G11B5127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A main magnetic pole layer is formed on an insulating layer flattened into a high-flatness surface, and a yoke layer having a large film thickness is formed under the main magnetic pole layer independently of the main magnetic pole. The main magnetic pole layer has a front end surface formed in a shape with a width size gradually increasing in a direction of track width as the front end surface departs farther away from an auxiliary magnetic pole layer. A perpendicular magnetic recording head can be provided which can suppress the occurrence of fringing in a recording pattern, and can form the main magnetic pole layer with high pattern accuracy, and can satisfactorily introduce a recording magnetic field to a fore end of the main magnetic pole layer.
摘要翻译：在平坦化面平坦化的绝缘层上形成有主磁极层，独立于主磁极，在主磁极层的下方形成有膜厚较大的磁轭层。主磁极层的前端表面形成为具有随着前端表面离开辅助磁极层而在轨道宽度方向上逐渐增加的宽度尺寸的形状。可以提供一种垂直磁记录头，其可以抑制记录图案中的边缘的发生，并且可以以高图案精度形成主磁极层，并且可以令人满意地将记录磁场引入主磁极的前端层。

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