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1. 发明授权

US06868310B2 Predictive failure scheme for industrial thin films processing power delivery system 失效
标题翻译：工业薄膜处理电力输送系统的预测故障方案
公开(公告)号：US06868310B2
公开(公告)日：2005-03-15
申请号：US09827408
申请日：2001-04-06
申请人： Kevin P. Nasman , Aaron T. Radomski
发明人： Kevin P. Nasman , Aaron T. Radomski
IPC分类号： H02J13/00 , G05B23/02 , H02H1/00 , H02H3/04 , H02J3/00 , G05D17/00 , G05B11/01
CPC分类号： H02J3/00 , H02H1/0092 , H02H3/04 , H02J13/00
摘要： A predictive failure system for a power delivery system. The power delivery system includes a number of modules which are interconnected to a system monitor. The system monitor collects data on operating parameters of each module and environmental parameters. The system monitor analyzes the data in order to define conditions based upon the parameters. The parameters are then applied against a set of rules to determine whether a warning or a fault indicator should be generated. The system monitor may be implemented locally as part of the power delivery system or may be located remotely from the power delivery system to enable off site data collection and analysis.
摘要翻译：电力输送系统的预测故障系统。电力输送系统包括与系统监视器互连的多个模块。系统监视器收集每个模块的操作参数和环境参数的数据。系统监视器分析数据，以便根据参数定义条件。然后根据一组规则应用参数，以确定是否应生成警告或故障指示符。系统监视器可以作为电力输送系统的一部分在本地实现，或者可以远离电力输送系统定位，以实现非现场数据收集和分析。

2. 发明授权

US06417732B1 Controller for RF power generator with reduced cable length sensitivity 有权
标题翻译：射频功率发生器控制器，电缆长度灵敏度降低
公开(公告)号：US06417732B1
公开(公告)日：2002-07-09
申请号：US09827723
申请日：2001-04-06
申请人： Aaron T. Radomski , Kevin P. Nasman
发明人： Aaron T. Radomski , Kevin P. Nasman
IPC分类号： H03F2100
CPC分类号： H03F3/21 , H03F1/345 , H03F1/52 , H03F3/189
摘要： A radio frequency (RF) power generator system includes a power generator that generates a RF power signal that is output to a load. The RF generator generates a forward power feedback signal and a reverse power feedback signal. A controller receives the forward power feedback signal and the reverse power feedback signal. The controller generates a setpoint signal that is output to the power generator. A setpoint modifier receives the forward feedback signal, the reverse feedback signal and an external setpoint signal. The setpoint modifier calculates a forward power limit based on the forward and reverse power feedback signals. The setpoint modifier and outputs a modified setpoint signal to the controller based on one of the forward power limit and the external setpoint signal. The setpoint modifier and the controller can be integrated.
摘要翻译：射频（RF）发电机系统包括产生输出到负载的RF功率信号的发电机。 RF发生器产生正向功率反馈信号和反向功率反馈信号。控制器接收正向功率反馈信号和反向功率反馈信号。控制器产生输出到发电机的设定值信号。设定值修正器接收正向反馈信号，反向反馈信号和外部设定点信号。设定值修正器根据正向和反向功率反馈信号计算正向功率限制。设定值修正器，并根据正向功率限制和外部设定点信号之一向控制器输出修改的设定值信号。设定值调节器和控制器可以集成。

3. 发明授权

US5971591A Process detection system for plasma process 失效
标题翻译：等离子体工艺过程检测系统
公开(公告)号：US5971591A
公开(公告)日：1999-10-26
申请号：US954387
申请日：1997-10-20
申请人： Daniel F. Vona , Kevin S. Gerrish , Kevin P. Nasman
发明人： Daniel F. Vona , Kevin S. Gerrish , Kevin P. Nasman
IPC分类号： H01J37/32 , B07C17/00 , G06F7/00 , G06F17/00 , G07F7/00
CPC分类号： H01J37/32935 , H01J37/32963 , H01J37/3299
摘要： Plasma process control arrangement controls a plasma generator that provides electrical power to a plasma chamber for an RF or DC plasma process. A sensor system detects operating parameters of the electrical power, including voltage and current levels. A process detection system (pds) controller has inputs coupled to the sensor system to receive the operating parameters, a programmable memory unit for storing a control program to compute an output control signal based on the operating parameters, and a control output coupled to a control input of the plasma generator. An external computer device, includes a monitor, an icon copying device for example, a mouse suitable for drag-and-drop operation, and a memory storing a suitable code-building program for generating a user-selected control program according to user-determined process requirements. Respective graphical icons are presented on the monitor and are selected and connected by use of the icon copying device to represent logic processing of the operational parameters, and the external computer device creates the corresponding user-selected control program. The user-selected control program is downloaded from the external computer device to the programmable memory of the pds controller, e.g., using standard connectors and cables.
摘要翻译：等离子体过程控制装置控制等离子体发生器，其为等离子体室提供用于RF或DC等离子体工艺的电力。传感器系统检测电力的运行参数，包括电压和电流水平。过程检测系统（pds）控制器具有耦合到传感器系统以接收操作参数的输入;可编程存储器单元，用于存储基于操作参数来计算输出控制信号的控制程序;以及耦合到控制器的控制输出输入等离子体发生器。外部计算机设备包括监视器，图标复制设备，例如适用于拖放操作的鼠标，以及存储存储用于根据用户确定的用于生成用户选择的控制程序的合适的代码构建程序的存储器工艺要求。相应的图形图标呈现在监视器上，并且通过使用图标复制设备来选择和连接以表示操作参数的逻辑处理，并且外部计算机设备创建相应的用户选择的控制程序。用户选择的控制程序从外部计算机设备下载到pds控制器的可编程存储器，例如使用标准连接器和电缆。

4. 发明授权

US06657394B2 Reflection coefficient phase detector 有权
公开(公告)号：US06657394B2
公开(公告)日：2003-12-02
申请号：US09827719
申请日：2001-04-06
申请人： Kevin P. Nasman
发明人： Kevin P. Nasman
IPC分类号： H01J724
CPC分类号： G01R25/00
摘要： A phase detector which determines the phase based upon the output signals from a power coupler. The power coupler outputs a first signal and a second signal. The first and second signals are input to a magnitude detector which determines the magnitude of the relative phase between the first and second signals. The first and second signals are also input to a sign discriminator which determines the sign of the phase between the first and second signals.

5. 发明授权

US07133921B2 Portable devices for different control interfaces 失效
公开(公告)号：US07133921B2
公开(公告)日：2006-11-07
申请号：US09827519
申请日：2001-04-06
申请人： Kevin P. Nasman , Daniel J. Vona, Jr.
发明人： Kevin P. Nasman , Daniel J. Vona, Jr.
IPC分类号： G06F15/16 , H02H3/00 , H04M1/00
CPC分类号： G05B19/0423 , G05B2219/25139 , Y02B70/3241 , Y04S20/227
摘要： A communications interface system and method for a plasma generator is provided. The communications interface system includes a power delivery system component that has a standard POD interface for communicating information that complies with a first protocol. A portable device is coupled between the standard POD interface and a second communication interface for communicating information therebetween. The second communication interface communicates information in a format that complies with a second protocol. The portable device is detachable from the standard POD interface and the second communication interface. A first communication link couples the standard POD interface to the portable device. A second communication link couples the portable device to the second communication interface.

6. 发明授权

US06700092B2 Pulsing intelligent RF modulation controller 有权
标题翻译：脉冲智能射频调制控制器
公开(公告)号：US06700092B2
公开(公告)日：2004-03-02
申请号：US10227157
申请日：2002-08-23
申请人： Daniel J. Vona, Jr. , Aaron T. Radomski , Kevin P. Nasman , William R. Pulhamus, Jr.
发明人： Daniel J. Vona, Jr. , Aaron T. Radomski , Kevin P. Nasman , William R. Pulhamus, Jr.
IPC分类号： B23K1000
CPC分类号： H01J37/32146 , H01J37/32082 , H01J37/32174 , H02M2001/0012 , H03C1/36 , H05H1/46
摘要： A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
摘要翻译：提供了一种控制发电机输出的方法。输出提供具有对具有阻抗的负载的建立时间的输出信号。确定输出信号的建立时间。输出信号用调制波形进行幅度调制。产生表示调制输出信号的感测信号。基于输出信号的建立时间，在采样时间对感测信号进行采样。产生采样的感测信号的数字表示。基于采样的感测信号的数字表示来控制输出的幅度调制。

7. 发明授权

US06459067B1 Pulsing intelligent RF modulation controller 有权
标题翻译：脉冲智能射频调制控制器
公开(公告)号：US06459067B1
公开(公告)日：2002-10-01
申请号：US09827880
申请日：2001-04-06
申请人： Daniel J. Vona, Jr. , Aaron T. Radomski , Kevin P. Nasman , William R. Pulhamus, Jr.
发明人： Daniel J. Vona, Jr. , Aaron T. Radomski , Kevin P. Nasman , William R. Pulhamus, Jr.
IPC分类号： B23K1000
CPC分类号： H01J37/32146 , H01J37/32082 , H01J37/32174 , H02M2001/0012 , H03C1/36 , H05H1/46
摘要： A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
摘要翻译：提供了一种控制发电机输出的方法。输出提供具有对具有阻抗的负载的建立时间的输出信号。确定输出信号的建立时间。输出信号用调制波形进行幅度调制。产生表示调制输出信号的感测信号。基于输出信号的建立时间，在采样时间对感测信号进行采样。产生采样的感测信号的数字表示。基于采样的感测信号的数字表示来控制输出的幅度调制。

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