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1. 发明授权

US07728602B2 Harmonic derived arc detector 有权
标题翻译：谐波导出电弧检测器
公开(公告)号：US07728602B2
公开(公告)日：2010-06-01
申请号：US11675974
申请日：2007-02-16
申请人： John Valcore , Yufeng Han , Jonathan Smyka , Salvatore Polizzo , Aaron T. Radomski
发明人： John Valcore , Yufeng Han , Jonathan Smyka , Salvatore Polizzo , Aaron T. Radomski
IPC分类号： G01R31/08 , G01N27/62
CPC分类号： H05H1/0062 , H01J37/32082 , H01J37/32935 , H01J37/32944 , H01J2237/0206
摘要： An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.
摘要翻译：电弧检测系统包括射频（RF）信号探针，其感测RF等离子体室的输入处的RF信号，并且基于RF信号的电压，电流和功率中的至少一个产生信号。信号分析仪接收信号，对频率分量的信号进行监视，频率成分的频率大于或等于RF信号的基频，并根据频率成分产生输出信号。输出信号表示在等离子体腔室内发生电弧。

2. 发明申请

US20080197854A1 Harmonic Derived Arc Detector 有权
标题翻译：谐波衍生电弧探测器
公开(公告)号：US20080197854A1
公开(公告)日：2008-08-21
申请号：US11675974
申请日：2007-02-16
申请人： John Valcore , Yufeng Han , Jonathan Smyka , Salvatore Polizzo , Aaron T. Radomski
发明人： John Valcore , Yufeng Han , Jonathan Smyka , Salvatore Polizzo , Aaron T. Radomski
IPC分类号： G01R31/00
CPC分类号： H05H1/0062 , H01J37/32082 , H01J37/32935 , H01J37/32944 , H01J2237/0206
摘要： An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.
摘要翻译：电弧检测系统包括射频（RF）信号探针，其感测RF等离子体室的输入处的RF信号，并且基于RF信号的电压，电流和功率中的至少一个产生信号。信号分析仪接收信号，对频率分量的信号进行监视，频率成分的频率大于或等于RF信号的基频，并根据频率成分产生输出信号。输出信号表示在等离子体室内发生电弧。

3. 发明申请

US20100201371A1 Harmonic Derived Arc Detector 有权
标题翻译：谐波衍生电弧探测器
公开(公告)号：US20100201371A1
公开(公告)日：2010-08-12
申请号：US12764145
申请日：2010-04-21
申请人： John Valcore , Yufeng Han , Jonathan Smyka , Salvatore Polizzo , Aaron T. Radomski
发明人： John Valcore , Yufeng Han , Jonathan Smyka , Salvatore Polizzo , Aaron T. Radomski
IPC分类号： G01R31/12
CPC分类号： H05H1/0062 , H01J37/32082 , H01J37/32935 , H01J37/32944 , H01J2237/0206
摘要： An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.
摘要翻译：电弧检测系统包括射频（RF）信号探针，其感测RF等离子体室的输入处的RF信号，并且基于RF信号的电压，电流和功率中的至少一个产生信号。信号分析仪接收信号，对频率分量的信号进行监视，频率成分的频率大于或等于RF信号的基频，并根据频率成分产生输出信号。输出信号表示在等离子体室内发生电弧。

4. 发明授权

US09214909B2 High reliability RF generator architecture 有权
标题翻译：高可靠性射频发生器架构
公开(公告)号：US09214909B2
公开(公告)日：2015-12-15
申请号：US11460409
申请日：2006-07-27
申请人： Aaron T. Radomski , Jonathan Smyka , Daniel J. Lincoln , Yogendra Chawla , David J. Coumou , Vadim Lubomirsky
发明人： Aaron T. Radomski , Jonathan Smyka , Daniel J. Lincoln , Yogendra Chawla , David J. Coumou , Vadim Lubomirsky
IPC分类号： H01Q11/12 , H04B1/04 , H03F3/60 , H03F1/02 , H03F1/52 , H03F3/21
CPC分类号： H03F3/602 , H03F1/0277 , H03F1/52 , H03F1/526 , H03F3/211 , H03F2200/451
摘要： A scalable radio frequency (RF) generator system including at least one power supply, at least one power amplifier receiving input from the power supply, and a power supply control module, and a system controller. Output from the at least one power supply can be combined and applied to each of the power amplifiers. Output form each of the at least one power amplifiers can be combined to generate a single RF signal. A compensator module controls operation of the at least one power supply. The compensator module, system control module, and power supply controller communicate in a daisy chain configuration.
摘要翻译：一种可扩展的射频（RF）发生器系统，包括至少一个电源，从电源接收输入的至少一个功率放大器，以及电源控制模块和系统控制器。可以将来自至少一个电源的输出组合并应用于每个功率放大器。所述至少一个功率放大器中的每一个的输出可以被组合以产生单个RF信号。补偿器模块控制至少一个电源的操作。补偿器模块，系统控制模块和电源控制器以菊花链配置进行通信。

5. 发明授权

US06868310B2 Predictive failure scheme for industrial thin films processing power delivery system 失效
标题翻译：工业薄膜处理电力输送系统的预测故障方案
公开(公告)号：US06868310B2
公开(公告)日：2005-03-15
申请号：US09827408
申请日：2001-04-06
申请人： Kevin P. Nasman , Aaron T. Radomski
发明人： Kevin P. Nasman , Aaron T. Radomski
IPC分类号： H02J13/00 , G05B23/02 , H02H1/00 , H02H3/04 , H02J3/00 , G05D17/00 , G05B11/01
CPC分类号： H02J3/00 , H02H1/0092 , H02H3/04 , H02J13/00
摘要： A predictive failure system for a power delivery system. The power delivery system includes a number of modules which are interconnected to a system monitor. The system monitor collects data on operating parameters of each module and environmental parameters. The system monitor analyzes the data in order to define conditions based upon the parameters. The parameters are then applied against a set of rules to determine whether a warning or a fault indicator should be generated. The system monitor may be implemented locally as part of the power delivery system or may be located remotely from the power delivery system to enable off site data collection and analysis.
摘要翻译：电力输送系统的预测故障系统。电力输送系统包括与系统监视器互连的多个模块。系统监视器收集每个模块的操作参数和环境参数的数据。系统监视器分析数据，以便根据参数定义条件。然后根据一组规则应用参数，以确定是否应生成警告或故障指示符。系统监视器可以作为电力输送系统的一部分在本地实现，或者可以远离电力输送系统定位，以实现非现场数据收集和分析。

6. 发明授权

US08890537B2 Harmonic derived arc detector 有权
标题翻译：谐波导出电弧检测器
公开(公告)号：US08890537B2
公开(公告)日：2014-11-18
申请号：US12764145
申请日：2010-04-21
申请人： John Valcore, Jr. , Yufeng Han , Jonathan Smyka , Salvatore Polizzo , Aaron T. Radomski
发明人： John Valcore, Jr. , Yufeng Han , Jonathan Smyka , Salvatore Polizzo , Aaron T. Radomski
IPC分类号： H01J37/00 , H05H1/00 , H01J37/32
CPC分类号： H05H1/0062 , H01J37/32082 , H01J37/32935 , H01J37/32944 , H01J2237/0206
摘要： An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.
摘要翻译：电弧检测系统包括射频（RF）信号探针，其感测RF等离子体室的输入处的RF信号，并且基于RF信号的电压，电流和功率中的至少一个产生信号。信号分析仪接收信号，对频率分量的信号进行监视，频率成分的频率大于或等于RF信号的基频，并根据频率成分产生输出信号。输出信号表示在等离子体室内发生电弧。

7. 发明授权

US06700092B2 Pulsing intelligent RF modulation controller 有权
标题翻译：脉冲智能射频调制控制器
公开(公告)号：US06700092B2
公开(公告)日：2004-03-02
申请号：US10227157
申请日：2002-08-23
申请人： Daniel J. Vona, Jr. , Aaron T. Radomski , Kevin P. Nasman , William R. Pulhamus, Jr.
发明人： Daniel J. Vona, Jr. , Aaron T. Radomski , Kevin P. Nasman , William R. Pulhamus, Jr.
IPC分类号： B23K1000
CPC分类号： H01J37/32146 , H01J37/32082 , H01J37/32174 , H02M2001/0012 , H03C1/36 , H05H1/46
摘要： A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
摘要翻译：提供了一种控制发电机输出的方法。输出提供具有对具有阻抗的负载的建立时间的输出信号。确定输出信号的建立时间。输出信号用调制波形进行幅度调制。产生表示调制输出信号的感测信号。基于输出信号的建立时间，在采样时间对感测信号进行采样。产生采样的感测信号的数字表示。基于采样的感测信号的数字表示来控制输出的幅度调制。

8. 发明授权

US06459067B1 Pulsing intelligent RF modulation controller 有权
标题翻译：脉冲智能射频调制控制器
公开(公告)号：US06459067B1
公开(公告)日：2002-10-01
申请号：US09827880
申请日：2001-04-06
申请人： Daniel J. Vona, Jr. , Aaron T. Radomski , Kevin P. Nasman , William R. Pulhamus, Jr.
发明人： Daniel J. Vona, Jr. , Aaron T. Radomski , Kevin P. Nasman , William R. Pulhamus, Jr.
IPC分类号： B23K1000
CPC分类号： H01J37/32146 , H01J37/32082 , H01J37/32174 , H02M2001/0012 , H03C1/36 , H05H1/46
摘要： A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
摘要翻译：提供了一种控制发电机输出的方法。输出提供具有对具有阻抗的负载的建立时间的输出信号。确定输出信号的建立时间。输出信号用调制波形进行幅度调制。产生表示调制输出信号的感测信号。基于输出信号的建立时间，在采样时间对感测信号进行采样。产生采样的感测信号的数字表示。基于采样的感测信号的数字表示来控制输出的幅度调制。

9. 发明授权

US06778921B2 Modular architecture for industrial power delivery system 有权
标题翻译：工业发电系统的模块化架构
公开(公告)号：US06778921B2
公开(公告)日：2004-08-17
申请号：US09827520
申请日：2001-04-06
申请人： Anthony R. A. Keane , Aaron T. Radomski , William R. Pulhamus, Jr.
发明人： Anthony R. A. Keane , Aaron T. Radomski , William R. Pulhamus, Jr.
IPC分类号： G06F1900
CPC分类号： H02J1/102 , H02M3/33515 , Y10T307/406
摘要： An industrial power delivery system configured in a modular architecture and having a plurality of modules. The modules interconnect via digital communication links and exchange data using a digital format. The modularity of the system enables the system to be scaled to vary future content of the product.
摘要翻译：一种配置在模块化架构中并具有多个模块的工业电力输送系统。模块通过数字通信链路进行互连，并使用数字格式交换数据。系统的模块化使系统可以缩放以改变产品的未来内容。

10. 发明授权

US06417732B1 Controller for RF power generator with reduced cable length sensitivity 有权
标题翻译：射频功率发生器控制器，电缆长度灵敏度降低
公开(公告)号：US06417732B1
公开(公告)日：2002-07-09
申请号：US09827723
申请日：2001-04-06
申请人： Aaron T. Radomski , Kevin P. Nasman
发明人： Aaron T. Radomski , Kevin P. Nasman
IPC分类号： H03F2100
CPC分类号： H03F3/21 , H03F1/345 , H03F1/52 , H03F3/189
摘要： A radio frequency (RF) power generator system includes a power generator that generates a RF power signal that is output to a load. The RF generator generates a forward power feedback signal and a reverse power feedback signal. A controller receives the forward power feedback signal and the reverse power feedback signal. The controller generates a setpoint signal that is output to the power generator. A setpoint modifier receives the forward feedback signal, the reverse feedback signal and an external setpoint signal. The setpoint modifier calculates a forward power limit based on the forward and reverse power feedback signals. The setpoint modifier and outputs a modified setpoint signal to the controller based on one of the forward power limit and the external setpoint signal. The setpoint modifier and the controller can be integrated.
摘要翻译：射频（RF）发电机系统包括产生输出到负载的RF功率信号的发电机。 RF发生器产生正向功率反馈信号和反向功率反馈信号。控制器接收正向功率反馈信号和反向功率反馈信号。控制器产生输出到发电机的设定值信号。设定值修正器接收正向反馈信号，反向反馈信号和外部设定点信号。设定值修正器根据正向和反向功率反馈信号计算正向功率限制。设定值修正器，并根据正向功率限制和外部设定点信号之一向控制器输出修改的设定值信号。设定值调节器和控制器可以集成。

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