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1. 发明授权

US5971591A Process detection system for plasma process 失效
标题翻译：等离子体工艺过程检测系统
公开(公告)号：US5971591A
公开(公告)日：1999-10-26
申请号：US954387
申请日：1997-10-20
申请人： Daniel F. Vona , Kevin S. Gerrish , Kevin P. Nasman
发明人： Daniel F. Vona , Kevin S. Gerrish , Kevin P. Nasman
IPC分类号： H01J37/32 , B07C17/00 , G06F7/00 , G06F17/00 , G07F7/00
CPC分类号： H01J37/32935 , H01J37/32963 , H01J37/3299
摘要： Plasma process control arrangement controls a plasma generator that provides electrical power to a plasma chamber for an RF or DC plasma process. A sensor system detects operating parameters of the electrical power, including voltage and current levels. A process detection system (pds) controller has inputs coupled to the sensor system to receive the operating parameters, a programmable memory unit for storing a control program to compute an output control signal based on the operating parameters, and a control output coupled to a control input of the plasma generator. An external computer device, includes a monitor, an icon copying device for example, a mouse suitable for drag-and-drop operation, and a memory storing a suitable code-building program for generating a user-selected control program according to user-determined process requirements. Respective graphical icons are presented on the monitor and are selected and connected by use of the icon copying device to represent logic processing of the operational parameters, and the external computer device creates the corresponding user-selected control program. The user-selected control program is downloaded from the external computer device to the programmable memory of the pds controller, e.g., using standard connectors and cables.
摘要翻译：等离子体过程控制装置控制等离子体发生器，其为等离子体室提供用于RF或DC等离子体工艺的电力。传感器系统检测电力的运行参数，包括电压和电流水平。过程检测系统（pds）控制器具有耦合到传感器系统以接收操作参数的输入;可编程存储器单元，用于存储基于操作参数来计算输出控制信号的控制程序;以及耦合到控制器的控制输出输入等离子体发生器。外部计算机设备包括监视器，图标复制设备，例如适用于拖放操作的鼠标，以及存储存储用于根据用户确定的用于生成用户选择的控制程序的合适的代码构建程序的存储器工艺要求。相应的图形图标呈现在监视器上，并且通过使用图标复制设备来选择和连接以表示操作参数的逻辑处理，并且外部计算机设备创建相应的用户选择的控制程序。用户选择的控制程序从外部计算机设备下载到pds控制器的可编程存储器，例如使用标准连接器和电缆。

2. 发明授权

US5770922A Baseband V-I probe 失效
标题翻译：基带RF电压电流探头
公开(公告)号：US5770922A
公开(公告)日：1998-06-23
申请号：US684833
申请日：1996-07-22
申请人： Kevin S. Gerrish , Daniel F. Vona, Jr.
发明人： Kevin S. Gerrish , Daniel F. Vona, Jr.
IPC分类号： H05H1/46 , H01J37/32 , H01L21/205 , H01L21/302 , H01L21/3065 , H05H1/00 , H01J7/24
CPC分类号： H01J37/32082 , H01J37/32935 , H05H1/0081
摘要： An RF probe for a plasma chamber picks up current and voltage samples of the RF power applied to an RF plasma chamber, and the RF voltage and current waveforms are supplied to respective mixers. A local oscillator supplies both mixers with a local oscillator signal at the RF frequency plus or minus about 15 KHz, so that the mixers provide respective voltage and current baseband signals that are frequency shifted down to the audio range. The phase relation of the applied current and voltage is preserved in the baseband signals. These baseband signals are then applied to a stereo, two-channel A/D converter, which provides a serial digital signal to a digital signal processor or DSP. A local oscillator interface brings a feedback signal from the DSP to the local oscillator. The DSP can be suitably programmed to obtain complex Fast Fourier Transforms of the voltage and current baseband samples. The frequency-domain spectra are analyzed to obtain, with great accuracy, magnitude of voltage and current and phase angle. Other parameters are derived from these three.
摘要翻译：用于等离子体室的RF探针拾取施加到RF等离子体室的RF功率的电流和电压样本，并且将RF电压和电流波形提供给各个混合器。本地振荡器以RF频率加或减15KHz为本地振荡器信号提供两个混频器，使得混频器提供频移到音频范围的相应的电压和电流基带信号。施加的电流和电压的相位关系保留在基带信号中。然后将这些基带信号应用于立体声双通道A / D转换器，其向数字信号处理器或DSP提供串行数字信号。本地振荡器接口带来了DSP到本地振荡器的反馈信号。可以对DSP进行适当编程，以获得电压和电流基带样本的复杂快速傅立叶变换。分析频域光谱，以高精度获得电压，电流和相位角的大小。其他参数来自这三个。

3. 再颁专利

USRE38273E1 Baseband RF voltage-current probe 有权
标题翻译：基带RF电压电流探头
公开(公告)号：USRE38273E1
公开(公告)日：2003-10-14
申请号：US09599608
申请日：2000-06-22
申请人： Kevin S. Gerrish , Daniel F. Vona, Jr.
发明人： Kevin S. Gerrish , Daniel F. Vona, Jr.
IPC分类号： H01J724
CPC分类号： H01J37/32082 , H01J37/32935 , H05H1/0081
摘要： An RF probe for a plasma chamber picks up current and voltage samples of the RF power applied to an RF plasma chamber, and the RF voltage and current waveforms are supplied to respective mixers. A local oscillator supplies both mixers with a local oscillator signal at the RF frequency plus or minus about 15 KHz, so that the mixers provide respective voltage and current baseband signals that are frequency shifted down to the audio range. The phase relation to the applied current and voltage is preserved in the baseband signals. These baseband signals are then applied to a stereo, two-channel A/D converter, which provides a serial digital signal to a digital signal processor or DSP. A local oscillator interface brings a feedback signal from the DSP to the local oscillator. The DSP can be suitably programmed to obtain complex Fast Fourier Transforms of the voltage and current baseband samples. The frequency-domain spectra are analyzed to obtain, with great accuracy, magnitude of voltage and current and phase angle. Other parameters are derived from these three.

4. 发明授权

US06525873B2 Optical amplifiers with a simple gain/output control device 有权
标题翻译：具有简单增益/输出控制装置的光放大器
公开(公告)号：US06525873B2
公开(公告)日：2003-02-25
申请号：US09821924
申请日：2001-03-30
申请人： Kevin S. Gerrish , Muhidin Lelic
发明人： Kevin S. Gerrish , Muhidin Lelic
IPC分类号： H01S300
CPC分类号： H04B10/2931 , H01S3/06754 , H01S3/10015 , H01S3/1301 , H01S3/1305 , H01S3/1312 , H01S2301/02
摘要： An optical fiber amplifier includes an optical system and an electronic controller. The optical system includes: an optical gain medium; at least one pump source coupled to the optical gain medium; an input port for in-coming signal; and an output port for an out-going signal. It also includes an input optical signal tap coupled to a first optical detector; and an output optical signal tap coupled to a second optical detector. The electronic controller is adapted to utilize inputs received from the tabs to control optical power provided by the pump source. The controller includes a user interface that allows a user to control at least one of the following available functions: desired amplifier gain value; amplifier output power value; ASE noise compensation.
摘要翻译：光纤放大器包括光学系统和电子控制器。光学系统包括：光学增益介质; 耦合到所述光学增益介质的至少一个泵浦源; 用于进入信号的输入端口; 以及用于输出信号的输出端口。它还包括耦合到第一光学检测器的输入光信号抽头; 以及耦合到第二光学检测器的输出光信号抽头。电子控制器适于利用从接头接收的输入来控制由泵浦源提供的光功率。该控制器包括用户界面，其允许用户控制以下可用功能中的至少一个：期望的放大器增益值; 放大器输出功率值; ASE噪声补偿。

5. 发明授权

US06708123B2 Voltage current sensor with high matching directivity 有权
标题翻译：具有高匹配方向性的电压电流传感器
公开(公告)号：US06708123B2
公开(公告)日：2004-03-16
申请号：US10194688
申请日：2002-07-12
申请人： Kevin S. Gerrish
发明人： Kevin S. Gerrish
IPC分类号： G01R2700
CPC分类号： H01J37/32082 , H01J37/32935 , H01J37/3299
摘要： A technique for measuring the current, voltage and phase of a radio frequency (RF) power wave to an RF load, accounts for the finite length of the voltage and current pickups, and corrects for effects of standing wave components of voltage and current. Voltage and current are computed as complex functions of the voltage pickup signal and the current pickup signal, based on coefficients precalibrated for radio frequency. Alternatively, a corrected current value can be based on the corrected voltage value and complex load impedance. The correction coefficients can be obtained, for each of a plurality of calibrating radio frequencies within an RF range, from voltage and current pickup signals under conditions of (a) open circuit load, (b) short circuit load, (c) fixed known impedance load; and (d) one of voltage and current being applied at a precise input level to a know load from an RF calibration source.
摘要翻译：用于测量射频负载的射频（RF）功率波的电流，电压和相位的技术考虑了电压和电流拾取的有限长度，并且校正了电压和电流的驻波分量的影响。电压和电流根据对于射频预先校准的系数计算为电压拾取信号和电流拾取信号的复函数。或者，校正的电流值可以基于校正的电压值和复数负载阻抗。在（a）开路负载，（b）短路负载，（c）固定的已知阻抗的条件下，可以从电压和电流拾取信号中获得针对RF范围内的多个校准射频中的每一个的校正系数加载; 和（d）电压和电流中的一个以精确的输入电平施加到来自RF校准源的已知负载。

6. 发明授权

US06700654B2 Automatic dark current compensation 失效
标题翻译：自动暗电流补偿
公开(公告)号：US06700654B2
公开(公告)日：2004-03-02
申请号：US09784729
申请日：2001-02-15
申请人： Kevin S. Gerrish , Scott T. Hilbert
发明人： Kevin S. Gerrish , Scott T. Hilbert
IPC分类号： G01N2100
CPC分类号： H04B10/66 , H04B10/077 , H04B10/07955
摘要： A monitoring system useful for monitoring the state of a fiber communication channel in which a portion of the fiber signal is tapped and detected by a photodiode. The dark current of the photodiode and other DC offsets of the system may be compensated by passing a known signal through the photodiode and extracting the component due to the known signal. The known signal may be a locally generated optical signal having a predetermined harmonic signature. Optionally, the fiber signal may be selectively attenuated before being combined with the known signal so only the known signal is detected. The known signal may also be a dark signal induced by selectively attenuating the fiber signal. The system may include a temperature sensor which allows the compensation to be performed against stored temperature dependent compensation values while the fiber signal is not attenuated.
摘要翻译：一种用于监视光纤通信信道的状态的监视系统，其中光纤信号的一部分被光电二极管抽头和检测。可以通过使已知信号通过光电二极管并且由于已知信号提取部件来补偿光电二极管的暗电流和系统的其它DC偏移。已知信号可以是具有预定谐波特征的本地产生的光信号。可选地，可以在与已知信号组合之前选择性地衰减光纤信号，从而仅检测已知信号。已知信号也可以是通过选择性衰减光纤信号而引起的暗信号。该系统可以包括温度传感器，其允许在纤维信号未被衰减的同时针对存储的与温度相关的补偿值执行补偿。

7. 发明授权

US06449568B1 Voltage-current sensor with high matching directivity 失效
标题翻译：具有高匹配方向性的电压电流传感器
公开(公告)号：US06449568B1
公开(公告)日：2002-09-10
申请号：US09031879
申请日：1998-02-27
申请人： Kevin S. Gerrish
发明人： Kevin S. Gerrish
IPC分类号： G01R2700
CPC分类号： H01J37/32082 , H01J37/32935 , H01J37/3299
摘要： A technique for measuring the current, voltage and phase of a Radio Frequency (RF) power wave to an RF load, accounts for the finite length of the voltage and current pickups, and corrects for effects of standing wave components of voltage and current. Voltage and current are computed as complex functions of the voltage pickup signal and the current pickup signal, based on coefficients precalibrated for the predetermined radio frequency. Alternatively, a corrected current value can based on the corrected voltage value and complex load impedance. The correction coefficients can be obtained, for each of a plurality of calibrating radio frequencies within an RF range, from voltage and current pickup signals under conditions of (a) open circuit load, (b) short circuit load, (c) fixed known impedance load; and (d) one of voltage and current being applied at a precise input level to a known load from an RF calibration source.
摘要翻译：用于测量射频负载的射频（RF）功率波的电流，电压和相位的技术考虑了电压和电流拾取的有限长度，并且校正了电压和电流的驻波分量的影响。基于预定的预定射频的系数，计算电压和电流作为电压检测信号和电流检测信号的复函数。或者，校正的电流值可以基于校正的电压值和复数负载阻抗。在（a）开路负载，（b）短路负载，（c）固定的已知阻抗的条件下，可以从电压和电流拾取信号中获得针对RF范围内的多个校准射频中的每一个的校正系数加载; 和（d）电压和电流中的一个以精确的输入电平施加到来自RF校准源的已知负载。

8. 发明授权

US06235164B1 Low-pressure processing system for magnetic orientation of thin magnetic film 有权
标题翻译：薄磁膜的磁取向低压处理系统
公开(公告)号：US06235164B1
公开(公告)日：2001-05-22
申请号：US09271959
申请日：1999-03-18
申请人： Kevin S. Gerrish , Paul H. Ballentine , Dorian Heimanson , Alan T. Stephens, II
发明人： Kevin S. Gerrish , Paul H. Ballentine , Dorian Heimanson , Alan T. Stephens, II
IPC分类号： C23C1434
CPC分类号： H01J37/3426 , C23C14/351 , G11B5/851 , G11B5/852 , H01F41/18 , H01J37/3402
摘要： A sputtering apparatus for depositing a thin film (66) of magnetic material on a substrate (26) is modified to include a plate-shaped electromagnet (34, 44, or 70) for orienting magnetic domains within the film (66). The electromagnet (34, 44, or 70) has conductive windings (38; 46, 48, and 50; or 72) that are arranged for producing a magnetic field (42 or 52) within a plane (60) corresponding to a surface of the substrate (26). Field strength vectors (68) vary in absolute magnitude between points located along a first axis (62), but have substantially uniform components of magnitude at the same points measured in a common direction along the first axis (62).
摘要翻译：用于在基板（26）上沉积磁性材料薄膜（66）的溅射装置被修改为包括用于使薄膜（66）内的磁畴定向的板状电磁体（34,44或70）。电磁体（34,44或70）具有导电绕组（38; 46,48和50;或72），其被布置用于在与所述电磁体的表面对应的平面（60）内产生磁场（42或52）衬底（26）。场强矢量（68）在沿着第一轴线（62）的点之间的绝对幅度有所不同，但在沿着第一轴线（62）沿公共方向测量的相同点具有基本均匀的幅度分量。

9. 发明授权

US06836355B2 Universal controller for an optical amplifier that operates over a wide dynamic range of optical signals and optical amplifiers utilizing such controllers 有权
标题翻译：用于光放大器的通用控制器，其在宽的动态范围的光信号和使用这种控制器的光放大器上工作
公开(公告)号：US06836355B2
公开(公告)日：2004-12-28
申请号：US10672610
申请日：2003-09-26
申请人： Muhidin Lelic , Kevin S. Gerrish
发明人： Muhidin Lelic , Kevin S. Gerrish
IPC分类号： H01S300
CPC分类号： H04B10/0731 , H01S3/06704 , H01S3/06754 , H01S3/10015 , H01S3/1301 , H01S3/1305 , H01S2301/02 , H04B10/2931
摘要： An amplifier characterized by gain and output power comprises: (i) at least one gain medium; (ii) at least one pump supplying optical power into the gain medium; and (iii) a controller controlling the gain and the output power of the amplifier. The controller includes a signal compression circuit to cover a wide dynamic range for optical input and output signals, so that resolution for low optical signals is better than resolution for high optical signals.
摘要翻译：以增益和输出功率为特征的放大器包括：（i）至少一个增益介质; （ii）至少一个泵向所述增益介质提供光功率的泵; 和（iii）控制放大器的增益和输出功率的控制器。该控制器包括信号压缩电路，以覆盖光输入和输出信号的宽动态范围，使得低光信号的分辨率优于高光信号的分辨率。

10. 发明授权

US5630916A Magnetic orienting device for thin film deposition and method of use 失效
标题翻译：用于薄膜沉积的磁取向装置及其使用方法
公开(公告)号：US5630916A
公开(公告)日：1997-05-20
申请号：US369381
申请日：1995-01-06
申请人： Kevin S. Gerrish , Paul H. Ballentine , Dorian Heimanson , Alan T. Stephens, II
发明人： Kevin S. Gerrish , Paul H. Ballentine , Dorian Heimanson , Alan T. Stephens, II
IPC分类号： C23C14/35 , G11B5/851 , G11B5/852 , H01F41/18 , H01J37/34 , C23C14/34
CPC分类号： H01J37/3426 , C23C14/351 , G11B5/851 , G11B5/852 , H01F41/18 , H01J37/3402
摘要： A sputtering apparatus for depositing a thin film (66) of magnetic material on a substrate (26) is modified to include a plate-shaped electromagnet (34, 44, or 70) for orienting magnetic domains within the film (66). The electromagnet (34, 44, or 70) has conductive windings (38; 46, 48, and 50; or 72) that are arranged for producing a magnetic field (42 or 52) within a plane (60) corresponding to a surface of the substrate (26). Field strength vectors (68) vary in absolute magnitude between points located along a first axis (62), but have substantially uniform components of magnitude at the same points measured in a common direction along the first axis (62).
摘要翻译：用于在基板（26）上沉积磁性材料薄膜（66）的溅射装置被修改为包括用于使薄膜（66）内的磁畴定向的板状电磁体（34,44或70）。电磁体（34,44或70）具有导电绕组（38; 46,48和50;或72），其被布置用于在与所述电磁体的表面对应的平面（60）内产生磁场（42或52）衬底（26）。场强矢量（68）在沿着第一轴线（62）的点之间的绝对幅度有所不同，但在沿着第一轴线（62）沿公共方向测量的相同点具有基本均匀的幅度分量。

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