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    • 5. 发明授权
    • Non-volatile semiconductor memory device and depletion-type MOS transistor
    • 非易失性半导体存储器件和耗尽型MOS晶体管
    • US08093664B2
    • 2012-01-10
    • US12359643
    • 2009-01-26
    • Kenji GomikawaMitsuhiro Noguchi
    • Kenji GomikawaMitsuhiro Noguchi
    • H01L29/66
    • H01L29/7838H01L27/11526H01L27/11534
    • A peripheral circuit includes at least a first transistor. The first transistor comprises a gate electrode formed on a surface of a semiconductor layer via a gate insulating film. A channel region of a first conductivity type having a first impurity concentration is formed on a surface of the semiconductor layer directly below and in the vicinity of the gate electrode. A source-drain diffusion region of the first conductivity type is formed on the surface of the semiconductor layer to sandwich the gate electrode and has a second impurity concentration greater than the first impurity concentration. An overlapping region of the first conductivity type is formed on the surface of the semiconductor layer directly below the gate electrode where the channel region and the source-drain diffusion region overlap. The overlapping region has a third impurity concentration greater than the second impurity concentration.
    • 外围电路至少包括第一晶体管。 第一晶体管包括通过栅极绝缘膜形成在半导体层的表面上的栅电极。 具有第一杂质浓度的第一导电类型的沟道区形成在栅电极正下方和附近的半导体层的表面上。 第一导电类型的源极 - 漏极扩散区形成在半导体层的表面上以夹着栅电极,并且具有大于第一杂质浓度的第二杂质浓度。 第一导电类型的重叠区域形成在沟道区域和源极 - 漏极扩散区域重叠的栅电极正下方的半导体层的表面上。 重叠区域具有大于第二杂质浓度的第三杂质浓度。