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    • 7. 发明申请
    • Transistor and transistor manufacturing method
    • 晶体管和晶体管的制造方法
    • US20070023792A1
    • 2007-02-01
    • US11478854
    • 2006-07-03
    • Yoshiji TakamuraNoboru TakeuchiSatoru Yamagata
    • Yoshiji TakamuraNoboru TakeuchiSatoru Yamagata
    • H01L21/336H01L29/76
    • H01L21/28123H01L21/2652H01L21/266H01L21/76224H01L21/823481
    • In a transistor of the invention, at a boundary between gate oxide 112 formed on a silicon substrate 101 of a device formation region 10 and a device isolation film 110 adjoining the gate oxide 112, a thickness D′ of the gate electrode 114 is set larger than a uniform thickness D of the gate electrode 114 on the gate oxide 112. A height difference A between a surface of the gate oxide 112 and a surface of the device isolation film 110, a width B of a step portion 110b of the device isolation film, and the thickness D of the gate electrode 114 in its uniform-thickness portion satisfy relationships that D>B and A/D+(1−(B/D)2 )0.5>1. By ion implantation via the gate electrode 114 and the gate oxide 112, an impurity is added into a surface portion of the silicon substrate 101 at an end portion 11 of the device formation region, the impurity having concentrations higher than in the surface portion of the silicon substrate 101 in the electrode uniform portion 12 of the device formation region. The transistor can be prevented from occurrence of the inverse narrow channel effect and kink characteristics, thus being suitable for scale-down of LSIs, and yet can be manufactured with less steps.
    • 在本发明的晶体管中,在器件形成区域10的硅衬底101上形成的栅极氧化物112与邻接栅极氧化物112的器件隔离膜110之间的边界处,栅电极114的厚度D' 比栅极氧化物112上的栅电极114的均匀厚度D。栅极氧化物112的表面和器件隔离膜110的表面之间的高度差A,器件隔离膜110的台阶部分110b的宽度B 隔离膜,并且均匀厚度部分中的栅电极114的厚度D满足D> B和A / D +(1-(B / D)≤0.2)的关系, / SUP >> 1。 通过栅电极114和栅极氧化物112的离子注入,在器件形成区域的端部11处,在硅衬底101的表面部分添加杂质,杂质浓度高于器件形成区域的表面部分 硅基板101在器件形成区域的电极均匀部分12中。 可以防止晶体管发生反向窄通道效应和扭结特性,因此适合于LSI的缩小,而且可以以较少的步骤制造。