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1. 发明授权

US5191624A Optical information storing apparatus and method for production of optical deflector 失效
标题翻译：光学信息存储装置及其制造方法
公开(公告)号：US5191624A
公开(公告)日：1993-03-02
申请号：US762935
申请日：1991-09-19
申请人： Kenchi Ito , Kazumi Kawamoto , Naoya Kanda , Yasuo Hira , Hidemi Sato , Atsuko Fukushima , Masataka Shiba , Akira Inagaki , Minoru Yoshida
发明人： Kenchi Ito , Kazumi Kawamoto , Naoya Kanda , Yasuo Hira , Hidemi Sato , Atsuko Fukushima , Masataka Shiba , Akira Inagaki , Minoru Yoshida
IPC分类号： G02B6/12 , G02F1/335 , G11B7/12
CPC分类号： G02B6/12004 , G02F1/335 , G11B7/1245
摘要： An optical waveguide is comprised of an optical substrate and an optical thin-film optical waveguide layer and formed such that ##EQU1## where .theta. is an output angle, n.sub.o1 is an ordinary refractive index of the optical substrate for an ordinary beam, n.sub.e1 is an extraordinary refractive index of the optical substrate for an extraordinary beam, n.sub.o2 is an ordinary refractive index of the optical thin-film optical waveguide layer for the ordinary beam and n.sub.e2 is an extraordinary refractive index of the optical thin-film optical waveguide layer for the extraordinary beam, and an electrode for generating a surface acoustic wave for diffracting light is formed on the optical waveguide to construct a collinear optical deflector. A method for production of the optical thin-film optical waveguide layer is exemplified wherein a target made of tantalic lilthium niobate or tantalic lithium niobate magnesium and an optical substrate made of lithium tantalate are prepared and an optical thin-film optical waveguide layer having a composition of tantalic lithium niobate or tantalic lithium niobate magnesium is formed on the optical substrate through an ion beam sputtering process into which oxygen can be introduced. Proton substitutes for part of an element constituting the optical thin-film optical waveguide layer.
摘要翻译：光波导包括光学基板和光学薄膜光波导层，并且被形成为使得θ是输出角度的θIMA1是普通光束的光学基板的普通折射率，ne1是用于非常光束的光学基板的非常折射率，no2是普通光束的光学薄膜光波导层的普通折射率，ne2是非常优异的光学薄膜光波导层的非常折射率并且在光波导上形成用于产生用于衍射光的表面声波的电极，以构成共线的光学偏转器。制备光学薄膜光波导层的方法被制备，其中制备由钽酸铌酸锂或钽酸铌镁制成的靶和由钽酸锂制成的光学衬底，并且制备具有组成的光学薄膜光波导层通过可以引入氧气的离子束溅射工艺在光学基板上形成铌酸锂或钽酸铌酸镁。质子代替构成光学薄膜光波导层的元件的一部分。

2. 发明授权

US5195070A Optical information processing apparatus and optical pickup therefor 失效
标题翻译：光信息处理装置及其光拾取装置
公开(公告)号：US5195070A
公开(公告)日：1993-03-16
申请号：US551794
申请日：1990-07-12
申请人： Masataka Shiba , Kazumi Kawamoto , Yasuo Hira , Akira Inagaki , Hidemi Sato , Kenchi Ito , Atsuko Fukushima , Ryuichi Funatsu
发明人： Masataka Shiba , Kazumi Kawamoto , Yasuo Hira , Akira Inagaki , Hidemi Sato , Kenchi Ito , Atsuko Fukushima , Ryuichi Funatsu
IPC分类号： G11B7/09 , G11B7/12 , G11B7/125 , G11B7/13 , G11B7/14
CPC分类号： G11B7/131 , G11B7/0903 , G11B7/1245 , G11B7/127 , G11B7/14
摘要： Using an optical pickup, recording/reproducing of information is performed by irradiating light beams to an optical recording medium to form light spots. The optical pickup includes means for generating plural light beams, an optical waveguide for guiding the plural light beams in a row into a flat space, and a light deflecting element for deflecting the light beams, which run in the optical waveguide, within a plane formed by a vector perpendicular to a plane of the optical waveguide and a directional vector of the light beams. The light deflecting element deflects the plural light spots, which are to be arranged in a row, in a direction perpendicular to the light spot row to perform micro seek.
摘要翻译：使用光学拾取器，通过将光束照射到光学记录介质以形成光斑来进行信息的记录/再现。光拾取器包括用于产生多个光束的装置，用于将多个光束一行地引导到平坦空间中的光波导和用于使在光波导中延伸的光束偏转在形成的平面内的光偏转元件通过垂直于光波导的平面的矢量和光束的方向矢量。光偏转元件在垂直于光点行的方向上偏转排列成一列的多个光点，以执行微寻迹。

3. 发明授权

US5070488A Optical integrated circuit and optical apparatus 失效
标题翻译：光学集成电路和光学设备
公开(公告)号：US5070488A
公开(公告)日：1991-12-03
申请号：US372639
申请日：1989-06-28
申请人： Atsuko Fukushima , Yasuo Hira , Hidemi Sato , Kazumi Kawamoto , Kenchi Ito , Masataka Shiba , Akira Arimoto
发明人： Atsuko Fukushima , Yasuo Hira , Hidemi Sato , Kazumi Kawamoto , Kenchi Ito , Masataka Shiba , Akira Arimoto
IPC分类号： G02B6/124 , G02B6/34 , G02B6/42 , G02F1/335 , G11B7/12 , G11B7/125 , G11B7/135
CPC分类号： G02B6/4246 , G02B6/124 , G02B6/34 , G02B6/42 , G02F1/335 , G11B7/1245 , G11B7/125 , G11B7/1384
摘要： An optical integrated circuit and an optical apparatus used in optical communication or an opto-electronics apparatus such as an optical disk recording apparatus, in which various kinds of aberration caused by wavelength variation of a light source when a semiconductor laser is used as the light source. An aberration correcting grating having such grating pitches as to nearly satisfy the Bragg condition preferably with respect to a certain wavelength of the semiconductor laser beam is used. As a result, lowering of incidence (entrance) and radiation (exit) coupling efficiencies of the grating coupler and aberration such as chromatic aberration can be prevented. Even if a multi-mode semiconductor laser is used as a light source, the characteristics of the optical integrated circuit and optical apparatus do not vary largely.
摘要翻译：在光通信中使用的光集成电路和光学装置或光电记录装置等光电装置，其中当使用半导体激光器作为光源时，由光源的波长变化引起的各种像差。使用具有这样的光栅间距几乎满足布拉格条件的像差校正光栅，优选地相对于半导体激光束的特定波长。结果，可以防止光栅耦合器的入射（入射）和辐射（出射）耦合效率的降低以及像差等像差。即使使用多模式半导体激光器作为光源，光集成电路和光学装置的特性也不会很大变化。

4. 发明授权

US5187756A Surface acoustic waveguide device and manufacturing method 失效
标题翻译：表面声波导装置及其制造方法
公开(公告)号：US5187756A
公开(公告)日：1993-02-16
申请号：US758608
申请日：1991-09-12
申请人： Masataka Shiba , Akira Inagaki , Minoru Yoshida , Kenchi Ito , Kazumi Kawamoto
发明人： Masataka Shiba , Akira Inagaki , Minoru Yoshida , Kenchi Ito , Kazumi Kawamoto
IPC分类号： H03H9/25 , G02F1/125
CPC分类号： G02F1/125
摘要： The present invention relates to a surface acoustic wave element comprising a substrate, an optical waveguide layer formed on the aforesaid substrate to guide laser light from a laser light source, a surface acoustic wave portion for deflecting or modulating the laser light traveling through the aforesaid optical waveguide layer, a comb-shaped SAW electrode provided on the aforesaid optical waveguide layer to cause the aforesaid surface acoustic wave portion to generate surface acoustic wave, and a terminal provided on the aforesaid optical waveguide layer and connected to the aforesaid SAW electrode to apply a high-frequency alternating voltage thereto, wherein a protection cover is bonded by a viscoelastic adhesive having a refractive index smaller than that of the aforesaid optical waveguide layer to cover the aforesaid SAW electrode and surface acoustic wave portion with air space in such a manner that the aforesaid terminal is positioned outside thereof, and the manufacturing method of the surface acoustic wave element.
摘要翻译：本发明涉及一种弹性表面波元件，包括基板，形成在上述基板上的用于引导来自激光光源的激光的光波导层，用于偏转或调制通过前述光学器件行进的激光的表面声波部分波导层，设置在上述光波导层上的梳形SAW电极，使上述声表面波部分产生声表面波;以及端子，设置在上述光波导层上，并与上述SAW电极连接，高频交流电压，其中保护盖通过具有比上述光波导层的折射率小的折射率的粘弹性粘合剂粘结，以覆盖上述SAW电极和具有空气空间的表面声波部分，使得上述端子位于其外侧，声表面波元件。

5. 发明授权

US5121449A Information detecting system of scanning type 失效
标题翻译：扫描型信息检测系统
公开(公告)号：US5121449A
公开(公告)日：1992-06-09
申请号：US513911
申请日：1990-04-24
申请人： Masataka Shiba , Ryuichi Funatsu , Motoya Taniguchi , Minoru Tanaka , Akira Inagaki
发明人： Masataka Shiba , Ryuichi Funatsu , Motoya Taniguchi , Minoru Tanaka , Akira Inagaki
IPC分类号： G02F1/335 , G02B6/12 , G11B7/12
CPC分类号： G02B6/12004 , G11B7/1245
摘要： Disclosed is an information detecting system of scanning type which comprises a substrate formed with an optical waveguide layer, a laser oscillator emitting a laser beam, a SAW type beam deflecting device formed on the optical waveguide layer, a beam irradiating section irradiating a specimen with the laser beam derived from the optical waveguide layer, a controller controlling the frequency of a high-frequency voltage applied to the SAW type beam deflecting device so as to scan the specimen with the laser beam directed from the beam irradiating section, and a detecting section detecting the position and/or the intensity of the laser beam scanning the specimen with respect to the SAW control signal controlled by the controller.
摘要翻译：公开了一种扫描型信息检测系统，其包括形成有光波导层的基板，发射激光束的激光振荡器，形成在光波导层上的SAW型光束偏转装置，用该光波导层照射试样的光束照射部衍生自光波导层的激光束，控制施加到SAW型光束偏转装置的高频电压的频率的控制器，以便用从光束照射部分引导的激光束扫描样本;以及检测部分检测相对于由控制器控制的SAW控制信号扫描样本的激光束的位置和/或强度。

6. 发明授权

US5153916A Method and apparatus for detecting focal plane 失效
标题翻译：检测焦平面的方法和装置
公开(公告)号：US5153916A
公开(公告)日：1992-10-06
申请号：US688285
申请日：1991-04-22
申请人： Akira Inagaki , Masataka Shiba , Yoshihiko Aiba
发明人： Akira Inagaki , Masataka Shiba , Yoshihiko Aiba
IPC分类号： G02B7/36 , G02B7/28 , G03B27/34 , G03F1/44 , G03F1/76 , G03F7/20 , G03F9/00 , H01L21/027 , H01L21/66
CPC分类号： G03F7/70591 , G03F7/70641 , G03F9/70
摘要： A method and apparatus measures an image plane of a test pattern projected onto a surface of a sample disposed on a stage to precisely detect the image plane to thereby obtain a precise alignment therebetween for subsequent exposure. The test pattern is provided on a member having a conjugate surface with an upper surface of an illumination detecting unit having at least three optical sensors at different positions thereof and disposed on the stage. The upper surface of the illumination detecting unit has an analogous pattern to the test pattern on each optical sensor and, by moving the stage three dimensionally, outputs of the optical sensors are processed to obtain amounts of light and peak values thereof from which the image plane is obtained.
摘要翻译：一种方法和装置测量投影到设置在台架上的样品表面上的测试图案的图像平面，以精确地检测图像平面，从而在其间获得精确的对准以用于随后的曝光。测试图案设置在具有共轭表面的构件上，照明检测单元的上表面在其不同位置处具有至少三个光学传感器并且设置在平台上。照明检测单元的上表面具有与每个光学传感器上的测试图案类似的图案，并且通过三维地移动台，对光学传感器的输出进行处理，以获得其光像和峰值的量，获得。

7. 发明授权

US06650409B1 Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system 失效
标题翻译：半导体器件制造方法，用于实施相同的系统和包括在同一系统中的半导体工件处理设备
公开(公告)号：US06650409B1
公开(公告)日：2003-11-18
申请号：US08617270
申请日：1996-03-14
申请人： Minori Noguchi , Yukio Kembo , Hiroshi Morioka , Hidetoshi Nishiyama , Hideaki Doi , Masataka Shiba , Yoshiharu Shigyo , Kazuhiko Matsuoka , Kenji Watanabe , Yoshimasa Ohshima , Fumiaki Endo , Yuzo Taniguchi
发明人： Minori Noguchi , Yukio Kembo , Hiroshi Morioka , Hidetoshi Nishiyama , Hideaki Doi , Masataka Shiba , Yoshiharu Shigyo , Kazuhiko Matsuoka , Kenji Watanabe , Yoshimasa Ohshima , Fumiaki Endo , Yuzo Taniguchi
IPC分类号： G01N2189
CPC分类号： H01L21/67288 , G01N21/9501 , H01J2237/0225 , H01L21/67253 , H01L21/681
摘要： A semiconductor device producing method and a semiconductor device producing system employs a processing apparatus provided with a dust particle detecting apparatus. The dust particle detecting apparatus measures the condition of adhesion of dust particles adhering to a work at least before or after processing the work, manages the condition of incremental adhesion of dust particles to the work resulting from processing for each lot of works or for each work on the basis of the measured condition of adhesion of dust particles measured before or after processing the work, and determines the time when the processing apparatus is to be cleaned or the cycle of cleaning the processing apparatus on the basis of the managed condition of adhesion of dust particles.
摘要翻译：半导体器件制造方法和半导体器件制造系统采用具有灰尘粒子检测装置的处理装置。尘埃粒子检测装置至少在工件加工之前或之后测量附着在工件上的灰尘颗粒的附着状态，管理灰尘颗粒对于每批工件或每个工件的加工产生的增加粘附的条件基于在处理工件之前或之后测量的粉尘颗粒的粘附测量条件，并根据管理的粘附条件确定处理设备要清洁的时间或清洁处理设备的循环灰尘颗粒。

8. 发明授权

US06542830B1 Process control system 有权
标题翻译：过程控制系统
公开(公告)号：US06542830B1
公开(公告)日：2003-04-01
申请号：US09142546
申请日：1998-09-10
申请人： Fumio Mizuno , Seiji Isogai , Kenji Watanabe , Yasuhiro Yoshitake , Terushige Asakawa , Yuichi Ohyama , Hidekuni Sugimoto , Seiji Ishikawa , Masataka Shiba , Jun Nakazato , Makoto Ariga , Tetsuji Yokouchi , Toshimitsu Hamada , Ikuo Suzuki , Masami Ikota , Mari Nozoe , Isao Miyazaki , Yoshiharu Shigyo
发明人： Fumio Mizuno , Seiji Isogai , Kenji Watanabe , Yasuhiro Yoshitake , Terushige Asakawa , Yuichi Ohyama , Hidekuni Sugimoto , Seiji Ishikawa , Masataka Shiba , Jun Nakazato , Makoto Ariga , Tetsuji Yokouchi , Toshimitsu Hamada , Ikuo Suzuki , Masami Ikota , Mari Nozoe , Isao Miyazaki , Yoshiharu Shigyo
IPC分类号： H01L2166
CPC分类号： H01L22/20 , G01N21/9501 , G01R31/2894 , G01R33/06 , H01L2223/54466 , H01L2924/0002 , H01L2924/00
摘要： A process management system in accordance with the present invention includes inspection apparatuses for inspecting defects on a wafer, the inspection apparatuses being connected through a communication network, inspection information and image information obtained from these inspection apparatuses being collected to construct a data base and an image file, therein definition of defects is given by combinations of elements which characterize the defect based on the inspection information and the image information obtained from the inspection apparatuses. By giving definition of the defect, characteristics of the defect can be subdivided and known. Therefore, the cause of a defect can be studied.
摘要翻译：根据本发明的处理管理系统包括用于检查晶片上的缺陷的检查装置，通过通信网络连接的检查装置，从这些检查装置获得的检查信息和图像信息被收集以构建数据库和图像文件，其中缺陷的定义通过基于检查信息和从检查装置获得的图像信息来表征缺陷的元件的组合来给出。通过给出缺陷的定义，可以细分和知道缺陷的特征。因此，可以研究缺陷的原因。

9. 发明授权

US06485891B1 Exposure apparatus and method 失效
标题翻译：曝光装置和方法
公开(公告)号：US06485891B1
公开(公告)日：2002-11-26
申请号：US09542072
申请日：2000-04-03
申请人： Minori Noguchi , Yukio Kenbo , Yoshitada Oshida , Masataka Shiba , Yasuhiro Yoshitaka , Makoto Murayama
发明人： Minori Noguchi , Yukio Kenbo , Yoshitada Oshida , Masataka Shiba , Yasuhiro Yoshitaka , Makoto Murayama
IPC分类号： G03F720
CPC分类号： G03F7/705 , G03F7/2002 , G03F7/701 , G03F7/70125 , G03F7/70308 , G03F7/70591 , Y10S430/146
摘要： A production method of a semiconductor device, includes the steps of emitting an excimer laser from a light source, illuminating a pattern on a mask with the excimer laser emitted from the light source and passed through a filter, exposing a resist on a substrate of the semiconductor with the excimer laser passed through the mask, and forming a pattern on the substrate in accordance with a portion of the resist exposed with the excimer laser.
摘要翻译：一种半导体器件的制造方法，包括以下步骤：从光源发射准分子激光器，用从光源发射的准分子激光器照射掩模上的图案，并通过过滤器，将抗蚀剂暴露在基板上半导体与准分子激光器通过掩模，并且根据暴露于准分子激光器的抗蚀剂的一部分在衬底上形成图案。

10. 发明授权

US6002989A System for quality control where inspection frequency of inspection apparatus is reset to minimize expected total loss based on derived frequency function and loss value 失效
标题翻译：基于得出的频率函数和损失值，检查装置的检查频率被复位以最小化预期总损耗的质量控制系统
公开(公告)号：US6002989A
公开(公告)日：1999-12-14
申请号：US831298
申请日：1997-04-01
申请人： Masataka Shiba , Kenji Watanabe , Toshimitsu Hamada , Seiji Ishikawa , Naoki Go , Toshiaki Yachi , Tetsuya Watanabe , Takahiro Jingu
发明人： Masataka Shiba , Kenji Watanabe , Toshimitsu Hamada , Seiji Ishikawa , Naoki Go , Toshiaki Yachi , Tetsuya Watanabe , Takahiro Jingu
IPC分类号： G01N21/84 , B23Q41/08 , G05B19/418 , G06Q50/00 , G06Q50/04 , H01L21/66 , G06F15/18
CPC分类号： H01L22/20 , G05B19/41875 , H01L22/12 , H01L2924/0002 , Y02P90/14 , Y02P90/18 , Y02P90/22
摘要： Inspection apparatuses of an inspection apparatus group are connected to a network and transfer inspected result to a data collection system. The same wafer selected from a specific process is inspected by the different inspection apparatuses and the inspected data are collected and analyzed to calculate a correlation degree among the inspection apparatuses. On the other hand, the course of occurrence of failures in the same process can be analyzed to thereby calculate an average occurrence frequency of failures. An optimum inspection apparatus and inspection frequency are successively obtained on the basis of calculated results of an inter-apparatus correlation degree calculation process and a failure occurrence frequency calculation process, so that a feeding method of wafers to the inspection apparatus group is indicated through an inspection apparatus group management system. In the manufacturing of electronic components, complicated conditions such as the optimum inspection apparatus to be applied, the inspection frequency and the like can be set easily and the expected total loss value can be minimized to improve the economical efficiency of inspection remarkably.
摘要翻译：检查装置组的检查装置连接到网络并将检查结果传送到数据收集系统。通过不同的检查装置检查从具体处理中选出的相同的晶片，收集和分析检查数据，以计算检查装置之间的相关度。另一方面，可以分析相同处理中的故障发生的过程，从而计算故障的平均发生频率。基于设备间相关度计算处理和故障发生频率计算处理的计算结果连续获得最佳检查装置和检查频率，从而通过检查来指示晶片向检查装置组的馈送方法设备组管理系统。在电子部件的制造中，可以容易地设定诸如要应用的最佳检查装置等复杂的条件，并且可以将预期的总损失值最小化，从而提高检查的经济性。

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