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1. 发明授权

US07522823B2 Thermal processing apparatus, thermal processing method, and substrate processing apparatus 有权
标题翻译：热处理装置，热处理方法以及基板处理装置
公开(公告)号：US07522823B2
公开(公告)日：2009-04-21
申请号：US10926718
申请日：2004-08-26
申请人： Yasuhiro Fukumoto , Mitsuhiro Masuda , Toru Azuma
发明人： Yasuhiro Fukumoto , Mitsuhiro Masuda , Toru Azuma
IPC分类号： F26B19/00 , H05B3/68
CPC分类号： H01L21/67184 , F27B17/0025 , F27D3/0084 , F27D5/0037 , H01L21/67109 , H01L21/67178 , H01L21/67748
摘要： In a thermal processing unit, a substrate is held by a local transport hand to be transported between a transfer section and a heating unit, and subjected to a heat processing by the heating unit. Also, the local transport hand is cooled by a cooling plate in the transfer section.
摘要翻译：在热处理单元中，基板由本地运输手保持以在转印部和加热单元之间输送，并且由加热单元进行热处理。此外，本地运送手由转移部分中的冷却板冷却。

2. 发明申请

US20050058440A1 Thermal processing apparatus, thermal processing method, and substrate processing apparatus 有权
标题翻译：热处理装置，热处理方法以及基板处理装置
公开(公告)号：US20050058440A1
公开(公告)日：2005-03-17
申请号：US10926718
申请日：2004-08-26
申请人： Yasuhiro Fukumoto , Mitsuhiro Masuda , Toru Azuma
发明人： Yasuhiro Fukumoto , Mitsuhiro Masuda , Toru Azuma
IPC分类号： H01L21/677 , F27B17/00 , F27D3/00 , F27D5/00 , F27D11/00 , H01L21/00 , H01L21/027 , H01L21/68
CPC分类号： H01L21/67184 , F27B17/0025 , F27D3/0084 , F27D5/0037 , H01L21/67109 , H01L21/67178 , H01L21/67748
摘要： In a thermal processing unit according to the present invention, a substrate is held by a local transport hand to be transported between a transfer section and a heating unit, and subjected to a heat processing by the heating unit. Also, the local transport hand is cooled by a cooling plate in the transfer section.
摘要翻译：在根据本发明的热处理单元中，基板由本地运输手保持以在转印部和加热单元之间输送，并由加热单元进行热处理。此外，本地运送手由转移部分中的冷却板冷却。

3. 发明申请

US20050065634A1 Substrate processing unit, method for detecting the position of a substrate and substrate processing apparatus 有权
标题翻译：基板处理单元，检测基板和基板处理装置的位置的方法
公开(公告)号：US20050065634A1
公开(公告)日：2005-03-24
申请号：US10941785
申请日：2004-09-15
申请人： Toshihiro Nakajima , Mitsuhiro Masuda , Yasuhiro Shiba , Yasuhiro Fukumoto
发明人： Toshihiro Nakajima , Mitsuhiro Masuda , Yasuhiro Shiba , Yasuhiro Fukumoto
IPC分类号： H01L21/68 , G06F7/00 , H01L21/00 , H01L21/687
CPC分类号： H01L21/68742 , H01L21/67248 , H01L21/67259 , H01L21/6875 , Y10S414/135 , Y10S414/136 , Y10S414/139
摘要： A thermal processing unit is connected to a substrate position detector, which is in turn connected to a bake unit controller. The thermal processing unit includes a temperature control plate and a lifting device. The temperature control plate and lifting device are connected to the bake unit controller. The operations of the temperature control plate and lifting device are controlled by the bake unit controller. A pressure measuring pipe is provided at a lower part of at least one of a plurality of pin inserting holes in the temperature control plate. The pressure measuring pipe is connected to a low differential pressure sensor. The low differential pressure sensor detects the pressure in an airflow exhausted from a space surrounded by a substrate and an upper face of the temperature control plate via the pressure measuring pipe.
摘要翻译：热处理单元连接到基板位置检测器，基板位置检测器又连接到烘烤单元控制器。热处理单元包括温度控制板和提升装置。温控板和提升装置连接到烘烤单元控制器。温控板和提升装置的操作由烘烤单元控制器控制。压力测量管设置在温度控制板中的多个销插入孔中的至少一个的下部。压力测量管连接到低压差传感器。低压差传感器通过压力测量管检测由基板和温度控制板的上表面围绕的空间排出的气流中的压力。

4. 发明授权

US07139638B2 Substrate processing unit, method for detecting the position of a substrate and substrate processing apparatus 有权
标题翻译：基板处理单元，检测基板和基板处理装置的位置的方法
公开(公告)号：US07139638B2
公开(公告)日：2006-11-21
申请号：US10941785
申请日：2004-09-15
申请人： Toshihiro Nakajima , Mitsuhiro Masuda , Yasuhiro Shiba , Yasuhiro Fukumoto
发明人： Toshihiro Nakajima , Mitsuhiro Masuda , Yasuhiro Shiba , Yasuhiro Fukumoto
IPC分类号： G06F7/00
CPC分类号： H01L21/68742 , H01L21/67248 , H01L21/67259 , H01L21/6875 , Y10S414/135 , Y10S414/136 , Y10S414/139
摘要： A thermal processing unit is connected to a substrate position detector, which is in turn connected to a bake unit controller. The thermal processing unit includes a temperature control plate and a lifting device. The temperature control plate and lifting device are connected to the bake unit controller. The operations of the temperature control plate and lifting device are controlled by the bake unit controller. A pressure measuring pipe is provided at a lower part of at least one of a plurality of pin inserting holes in the temperature control plate. The pressure measuring pipe is connected to a low differential pressure sensor. The low differential pressure sensor detects the pressure in an airflow exhausted from a space surrounded by a substrate and an upper face of the temperature control plate via the pressure measuring pipe.
摘要翻译：热处理单元连接到基板位置检测器，基板位置检测器又连接到烘烤单元控制器。热处理单元包括温度控制板和提升装置。温控板和提升装置连接到烘烤单元控制器。温控板和提升装置的操作由烘烤单元控制器控制。压力测量管设置在温度控制板中的多个销插入孔中的至少一个的下部。压力测量管连接到低压差传感器。低压差传感器通过压力测量管检测由基板和温度控制板的上表面围绕的空间排出的气流中的压力。

5. 发明申请

US20100235384A1 INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM 有权
标题翻译：信息处理系统，信息处理方法和计算机可读存储介质
公开(公告)号：US20100235384A1
公开(公告)日：2010-09-16
申请号：US12716393
申请日：2010-03-03
申请人： Daisuke Itai , Kunitaka Ozawa , Hiroaki Fujiwara , Yoshihiro Kawauchi , Hisao Nakagawa , Hajime Nakamura , Mitsuhiro Masuda
发明人： Daisuke Itai , Kunitaka Ozawa , Hiroaki Fujiwara , Yoshihiro Kawauchi , Hisao Nakagawa , Hajime Nakamura , Mitsuhiro Masuda
IPC分类号： G06F7/10 , G06F17/30
CPC分类号： G06F17/30286 , G03F7/70508 , G03F7/70525
摘要： An information processing system which utilizes apparatus data recorded in a database in conformity with a data definition which can be updated as needed, comprises a storage unit configured to store a data definition history in which a data definition version is associated with a period for which a data definition in the data definition version is used, a data definition library configured to register a data definition version and a data definition in the data definition version in association with each other, an extractor configured to extract, from the database, apparatus data which meets an extraction condition including an extraction period designated via a user interface, and a converter configured to convert an expression of the apparatus data extracted by the extractor into an expression conforming to a data definition designated via the user interface.
摘要翻译：一种信息处理系统，其利用与可根据需要进行更新的数据定义一致地记录在数据库中的装置数据，包括：存储单元，被配置为存储数据定义历史，其中数据定义版本与其中的使用数据定义版本中的数据定义，数据定义库被配置为相关联地在数据定义版本中注册数据定义版本和数据定义，提取器被配置为从数据库中提取遇到的设备数据提取条件，包括通过用户界面指定的提取周期，以及转换器，被配置为将由提取器提取的装置数据的表达式转换为符合通过用户界面指定的数据定义的表达式。

6. 发明授权

US06907955B2 Electromagnetic electroacoustic transducer 失效
标题翻译：电磁电声换能器
公开(公告)号：US06907955B2
公开(公告)日：2005-06-21
申请号：US10694219
申请日：2003-10-28
申请人： Mitsuhiro Masuda
发明人： Mitsuhiro Masuda
IPC分类号： H04R13/00 , G10K9/13 , G10K9/22 , H04R9/06 , H05K5/02 , H04R1/02 , H04R1/22 , H04R1/28
CPC分类号： G10K9/22 , G10K9/13 , H04R9/06
摘要： An electromagnetic electroacoustic transducer, includes: a diaphragm; a magnet; an electromagnetic coil; and a casing for storing the diaphragm, the magnet and the electromagnetic coil therein. The case has at least one first sound emitting hole through which a front space on a front surface of the diaphragm in the casing communicates with a front outer space in front of the casing and at least one second sound emitting hole through which a rear space on a rear surface of the diaphragm in the casing communicates with the front outer space in front of the casing. A resonant frequency Fv2 of the rear space is set at a value in the range: F0
摘要翻译：一种电磁电声换能器，包括：隔膜; 磁铁电磁线圈; 以及用于在其中存储隔膜，磁体和电磁线圈的壳体。壳体具有至少一个第一声音发射孔，壳体中的隔膜的前表面上的前空间通过该第一声音发射孔与壳体前面的前外部空间和至少一个第二声音发射孔连通，壳体中的隔膜的后表面与壳体前方的前外侧空间连通。后空间的共振频率Fv 2被设定为F 0

7. 发明申请

US20050030823A1 Electronic circuit device 失效
标题翻译：电子电路装置
公开(公告)号：US20050030823A1
公开(公告)日：2005-02-10
申请号：US10910903
申请日：2004-08-04
申请人： Nobutake Tsuyuno , Toshiaki Ishii , Toshiya Satoh , Mitsuhiro Masuda
发明人： Nobutake Tsuyuno , Toshiaki Ishii , Toshiya Satoh , Mitsuhiro Masuda
IPC分类号： H01L23/28 , H01L21/56 , H01L23/36 , H01L25/04 , H01L25/16 , H01L25/18 , H05K1/03 , H05K3/00 , H05K3/28 , H05K3/38 , G11C8/02
CPC分类号： H01L23/4951 , H01L23/49531 , H01L24/45 , H01L24/48 , H01L24/49 , H01L25/165 , H01L25/18 , H01L2224/05599 , H01L2224/45124 , H01L2224/45144 , H01L2224/48091 , H01L2224/49175 , H01L2224/85099 , H01L2224/85205 , H01L2224/85399 , H01L2924/01012 , H01L2924/01078 , H01L2924/01079 , H01L2924/09701 , H01L2924/14 , H01L2924/15747 , H01L2924/181 , H01L2924/19041 , H01L2924/19105 , H01L2924/19107 , H05K1/0306 , H05K3/0061 , H05K3/284 , H05K3/386 , H05K2201/0209 , H05K2203/0315 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
摘要： In order to provide a low-cost and high heat-radiating electronic circuit device featuring high compactness, little warpage, high air tightness, high moldability, high mass productivity, high reliability against thermal shocks, and high oil-proof reliability, a module structure made by packing a whole multi-layer circuit board which connects a semiconductor operating element, semiconductor memory elements, and passive elements thereon and part of a supporting material on which said multi-layer circuit board is placed into a single package by transfer-molding; wherein said multi-layer circuit board and said supporting material are bonded together with a compound metallic material made up from copper oxide and at least one metal selected from a set of gold, silver, and copper.
摘要翻译：为了提供具有高紧凑性，小弯曲性，高气密性，高成型性，高质量生产率，高耐热冲击可靠性和高耐油可靠性的低成本高散热电子电路装置，模块结构通过将通过转印成型将半导体操作元件，半导体存储元件和无源元件及其上放置有多层电路板的支撑材料的一部分封装在单个封装中的整个多层电路板制成; 其中所述多层电路板和所述支撑材料用由氧化铜和至少一种选自金，银和铜的金属组成的复合金属材料结合在一起。

8. 发明授权

US06807283B2 Electroacoustic transducer 失效
标题翻译：电声换能器
公开(公告)号：US06807283B2
公开(公告)日：2004-10-19
申请号：US10282082
申请日：2002-10-29
申请人： Mitsuhiro Masuda , Yoshiharu Oishi , Kazushi Suzuki , Harunobu Tsuchiya
发明人： Mitsuhiro Masuda , Yoshiharu Oishi , Kazushi Suzuki , Harunobu Tsuchiya
IPC分类号： H04R2500
CPC分类号： H04R13/00
摘要： A core having a coil wound thereon is fixed to a base at the bottom. The base is fixed to a case made of synthetic resin by insert molding. A diaphragm is fixed to the case in circumference, and also a magnetic flux guide member is fixed to the case in circumference. Since the diaphragm and the magnetic flux guide member is commonly fixed to the case, no variation in the distance between the diaphragm and the magnetic flux guide member would occur for every product. Further, a gap L is formed between the magnet and the magnetic flux guide member, and an air hole is formed in the magnetic flux guide member. This improves the passage of air and reduces air dumper effect without modifying the magnet in shape.
摘要翻译：卷绕在其上的线圈的芯部固定在底部的基部。基座通过嵌件成型固定在由合成树脂制成的壳体上。圆周上将隔膜固定在壳体上，并且磁通引导构件也在周围固定在壳体上。由于隔膜和磁通引导构件通常固定在壳体上，所以每个产品不会发生隔膜与磁导引构件之间的距离的变化。此外，在磁体和磁通引导构件之间形成间隙L，并且在磁通引导构件中形成空气孔。这样可以改善空气通过并减少空气排放效应，而不会改变磁体的形状。

9. 外观设计

USD452452S1 Audible signal for alarms 失效
公开(公告)号：USD452452S1
公开(公告)日：2001-12-25
申请号：US29139254
申请日：2001-03-28
申请人： Mitsuhiro Masuda
设计人： Mitsuhiro Masuda

10. 发明授权

US06233946B1 Acoustic refrigeration apparatus 失效
标题翻译：声学制冷装置
公开(公告)号：US06233946B1
公开(公告)日：2001-05-22
申请号：US09399737
申请日：1999-09-20
申请人： Mitsuhiro Masuda
发明人： Mitsuhiro Masuda
IPC分类号： F25B900
CPC分类号： F25B9/145 , F02G2243/52 , F25B2309/1404 , F25B2309/1405
摘要： An acoustic refrigeration apparatus includes an acoustic wave generation device arranged directed to the channel of a hollow annular tube, and a regenerator provided at a predetermined position in the channel of the annular tube. A temperature gradient is obtained across the regenerator by an acoustic wave emitted from the acoustic wave generation device. Therefore, an acoustic refrigeration apparatus realizing a gas cycle approximating the Carnot cycle which is an ideal gas cycle, and realizing simplification of the structure and high efficiency of the apparatus is provided.
摘要翻译：一种声学制冷装置，包括：配置在中空环状管的通道上的声波产生装置，以及设置在环状管的通道内的规定位置的再生器。通过从声波发生装置发出的声波，在再生器两端获得温度梯度。因此，提供了实现作为理想气体循环的卡诺循环近似气体循环的声学制冷装置，并且实现了装置的结构和高效率的简化。

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