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    • 9. 发明授权
    • Semiconductor device equipped with a field effect transistor having a
floating gate
    • 配备有具有浮动栅极的场效应晶体管的半导体器件
    • US4872041A
    • 1989-10-03
    • US161433
    • 1988-02-24
    • June SugiuraKazuhiro Komori
    • June SugiuraKazuhiro Komori
    • H01L27/112H01L21/28H01L21/336H01L21/8246H01L21/8247H01L27/10H01L27/115H01L29/788H01L29/792
    • H01L29/66825H01L21/28273H01L29/7881Y10S257/90
    • Disclosed is a semiconductor device, and method of manufacture thereof, the device having a conductive layer formed on a semiconductor substrate, with an insulating layer interposed between the substrate and conductive layer, and wherein a dense insulating layer is disposed at the sides of the conductive layer so as to cover the sides of the insulating layer on the substrate, the dense insulating layer acting to increase retention of charge in the conductive layer. The conductive layer can be the floating gate of a field effect transistor, with a control gate formed on the floating gate via another insulating layer whose sides can also be covered by the dense insulating layer. Such field effect transistor, having the floating gate, can be used as the memory cell of an EPROM, with the charge being the data stored in the cell. A field effect transistor of a peripheral circuit of the EPROM can also have the dense insulating layer applied so as to cover the sides of the gate oxide layer thereof.
    • 公开了一种半导体器件及其制造方法,该器件具有形成在半导体衬底上的导电层,绝缘层介于衬底和导电层之间,并且其中致密绝缘层设置在导电层的侧面 层,以覆盖基板上的绝缘层的侧面,致密绝缘层用于增加导电层中电荷的保留。 导电层可以是场效应晶体管的浮动栅极,其中控制栅极通过另一绝缘层形成在浮置栅极上,其另一绝缘层也可以由致密绝缘层覆盖。 具有浮置栅极的这种场效应晶体管可以用作EPROM的存储单元,其中电荷是存储在单元中的数据。 EPROM的外围电路的场效应晶体管也可以具有施加的致密绝缘层,以覆盖其栅极氧化物层的侧面。