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1. 发明授权

US08035876B2 Systems, methods and devices for actuating a moveable miniature platform 有权
标题翻译：用于启动可移动微型平台的系统，方法和设备
公开(公告)号：US08035876B2
公开(公告)日：2011-10-11
申请号：US12623293
申请日：2009-11-20
申请人： Jonathan J. Bernstein , Fran J. Rogomentich , Tommy W. Lee , Mathew Varghese , Gregory A. Kirkos
发明人： Jonathan J. Bernstein , Fran J. Rogomentich , Tommy W. Lee , Mathew Varghese , Gregory A. Kirkos
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B7/1821 , G02B26/101 , Y10S359/90
摘要： Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror.
摘要翻译：这里提出的是与微型可致动平台系统相关的系统，方法和设备。根据一个实施例，系统，方法和装置涉及可控地致动的微型平台组件，包括微型反射镜。

2. 发明申请

US20070139752A1 Systems, methods and devices for actuating a moveable miniature platform 有权
标题翻译：用于启动可移动微型平台的系统，方法和设备
公开(公告)号：US20070139752A1
公开(公告)日：2007-06-21
申请号：US11305053
申请日：2005-12-16
申请人： Jonathan Bernstein , Fran J. Rogomentich , Tommy Lee , Mathew Varghese , Gregory A. Kirkos
发明人： Jonathan Bernstein , Fran J. Rogomentich , Tommy Lee , Mathew Varghese , Gregory A. Kirkos
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B7/1821 , G02B26/101 , Y10S359/90
摘要： Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror.
摘要翻译：这里提出的是与微型可致动平台系统相关的系统，方法和设备。根据一个实施例，系统，方法和装置涉及可控地致动的微型平台组件，包括微型反射镜。

3. 发明授权

US07643196B2 Systems, methods and devices for actuating a moveable miniature platform 有权
标题翻译：用于启动可移动微型平台的系统，方法和设备
公开(公告)号：US07643196B2
公开(公告)日：2010-01-05
申请号：US11305053
申请日：2005-12-16
申请人： Jonathan Bernstein , Fran J. Rogomentich , Tommy Lee , Mathew Varghese , Gregory A. Kirkos
发明人： Jonathan Bernstein , Fran J. Rogomentich , Tommy Lee , Mathew Varghese , Gregory A. Kirkos
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B7/1821 , G02B26/101 , Y10S359/90
摘要： Presented herein are systems, methods and devices relating to miniature actuatable platform systems. According to one embodiment, the systems, methods, and devices relate to controllably actuated miniature platform assemblies including a miniature mirror.
摘要翻译：这里提出的是与微型可致动平台系统相关的系统，方法和设备。根据一个实施例，系统，方法和装置涉及可控地致动的微型平台组件，包括微型反射镜。

4. 发明申请

US20120048019A1 HIGHLY SENSITIVE CAPACITIVE SENSOR AND METHODS OF MANUFACTURING THE SAME 审中-公开
标题翻译：高敏感电容传感器及其制造方法
公开(公告)号：US20120048019A1
公开(公告)日：2012-03-01
申请号：US12869222
申请日：2010-08-26
申请人： Hanqin Zhou , Leyue Jiang , Mathew Varghese , Haidong Liu
发明人： Hanqin Zhou , Leyue Jiang , Mathew Varghese , Haidong Liu
IPC分类号： G01P15/125 , C23F1/00
CPC分类号： G01P15/125 , G01P2015/0814
摘要： Micro-machined capacitive sensors implemented in micro-electro-mechanical system (MEMS) processes that have higher sensitivity, while providing an increased linear capacitive sensing range. Capacitive sensing is achieved via variable-area sensing, which employs a transduction mechanism in which the relationship between changes in the capacitance of variable, parallel-plate capacitors and displacements of a proof mass is generally linear. Each respective variable, parallel-plate capacitor is formed by a finger/electrode pair, in which both the finger and the electrode have rectangular tooth profiles that include a plurality of rectangular teeth. Because changes in the overlapping area of the finger and the electrode are multiplied by the number of rectangular teeth, while the standing capacity of the micro-machined capacitive sensor remains relatively high, the sensitivity of the micro-machined capacitive sensor employing variable-area sensing is significantly increased per unit area of the finger and the electrode.
摘要翻译：在微机电系统（MEMS）工艺中实现的微加工电容传感器具有更高的灵敏度，同时提供增加的线性电容感测范围。通过可变区域感测实现电容感测，其采用转换机制，其中可变平行板电容器的电容变化与校准质量的位移之间的关系通常是线性的。每个可变平行板电容器由手指/电极对形成，其中手指和电极均具有包括多个矩形齿的矩形齿廓。由于手指和电极的重叠区域的变化乘以矩形齿的数量，而微加工的电容式传感器的静态容量保持相对较高，所以采用可变面积感测的微加工电容传感器的灵敏度手指和电极的每单位面积显着增加。

5. 发明授权

US09573802B2 Method and apparatus for building three-dimensional MEMS elements 有权
标题翻译：用于构建三维MEMS元件的方法和装置
公开(公告)号：US09573802B2
公开(公告)日：2017-02-21
申请号：US13397174
申请日：2012-02-15
申请人： Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
发明人： Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
IPC分类号： H01L21/00 , B81C1/00
CPC分类号： B81C1/00007 , B81B2203/0109 , B81C1/0019 , Y10T29/49002
摘要： The disclosure generally relates to method and apparatus for forming three-dimensional MEMS. More specifically, the disclosure relates to a method of controlling out-of-plane buckling in microstructural devices so as to create micro-structures with out-of-plane dimensions which are 1×, 5×, 10×, 100× or 500× the film's thickness or above the surface of the wafer. An exemplary device formed according to the disclosed principles, includes a three dimensional accelerometer having microbridges extending both above and below the wafer surface.
摘要翻译：本发明一般涉及用于形成三维MEMS的方法和装置。更具体地说，本公开涉及一种控制微结构装置中的平面外屈曲的方法，以便产生具有1×，5×，10×，100×或500× 膜的厚度或晶片表面之上。根据所公开的原理形成的示例性装置包括具有在晶片表面上方和下方延伸的微桥的三维加速度计。

6. 发明申请

US20130207511A1 METHOD AND APPARATUS FOR BUILDING THREE-DIMENSIONAL MEMS ELEMENTS 有权
标题翻译：用于建立三维MEMS元件的方法和装置
公开(公告)号：US20130207511A1
公开(公告)日：2013-08-15
申请号：US13397174
申请日：2012-02-15
申请人： Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
发明人： Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
IPC分类号： H02N11/00 , H05K13/00
CPC分类号： B81C1/00007 , B81B2203/0109 , B81C1/0019 , Y10T29/49002
摘要： The disclosure generally relates to method and apparatus for forming three-dimensional MEMS. More specifically, the disclosure relates to a method of controlling out-of-plane buckling in microstructural devices so as to create micro-structures with out-of-plane dimensions which are 1×, 5×, 10×, 100× or 500× the film's thickness or above the surface of the wafer. An exemplary device formed according to the disclosed principles, includes a three dimensional accelerometer having microbridges extending both above and below the wafer surface.
摘要翻译：本发明一般涉及用于形成三维MEMS的方法和装置。更具体地说，本公开涉及一种控制微结构装置中的平面外屈曲的方法，以便产生具有1×，5×，10×，100×或500× 膜的厚度或晶片表面之上。根据所公开的原理形成的示例性装置包括具有在晶片表面上方和下方延伸的微桥的三维加速度计。

7. 发明申请

US20090044619A1 DEVICES AND METHODS FOR PRODUCING A CONTINUOUSLY FLOWING CONCENTRATION GRADIENT IN LAMINAR FLOW 有权
标题翻译：在层流中产生连续流动浓度梯度的装置和方法
公开(公告)号：US20090044619A1
公开(公告)日：2009-02-19
申请号：US12043575
申请日：2008-03-06
申请人： Jason O. Fiering , Mathew Varghese
发明人： Jason O. Fiering , Mathew Varghese
IPC分类号： G01F5/00
CPC分类号： B01J19/0093 , B01F5/0641 , B01F13/0059 , B01J2219/00783 , B01J2219/00822 , B01J2219/00828 , B01J2219/00831 , B01J2219/00833 , B01J2219/0086 , B01J2219/00889 , B01L3/502776 , Y10T137/87281
摘要： The invention generally relates to combining a plurality of flow streams. In various embodiments, a first channel transports a first laminar fluid flow, a second channel transports a second laminar fluid flow, and the first and second channels enter a merging region at an acute angle to one another along separate substantially parallel planes.
摘要翻译：本发明一般涉及组合多个流动流。在各种实施例中，第一通道输送第一层流体流，第二通道输送第二层流体流，并且第一和第二通道沿独立的基本上平行的平面以彼此成锐角进入锐角。

8. 发明申请

US20070240294A1 MEMS piezoelectric longitudinal mode resonator 审中-公开
标题翻译： MEMS压电纵模谐振器
公开(公告)号：US20070240294A1
公开(公告)日：2007-10-18
申请号：US11253451
申请日：2005-10-19
申请人： Amy Duwel , David Carter , Mark Mescher , Mathew Varghese , Bernard Antkowiak , Marc Weinberg
发明人： Amy Duwel , David Carter , Mark Mescher , Mathew Varghese , Bernard Antkowiak , Marc Weinberg
IPC分类号： H04R17/00
CPC分类号： H03H3/02 , H03H9/172 , H03H9/564 , H03H9/586 , H03H2003/027 , H03H2009/241 , H04R17/00 , Y10T29/42 , Y10T29/435
摘要： A longitudinal mode resonator that includes a substrate and a bar that is suspended relative to the substrate. The bar is suspended such that it is free to expand and contract longitudinally in response to the application of an electric field across its thickness. The expansion and contraction of the bar achieves resonance in response to the field having a frequency substantially equal to the fundamental frequency of the bar.
摘要翻译：一种纵模式谐振器，其包括相对于衬底悬挂的衬底和棒。该杆被悬挂使得响应于其整个厚度上的电场的应用而使它自由地纵向膨胀和收缩。棒的膨胀和收缩响应于具有与棒的基本频率基本相等的频率的场来实现谐振。

9. 发明申请

US20050140467A1 Resonator system with a plurality of individual mechanically coupled resonators and method of making same 有权
标题翻译：具有多个单独的机械耦合谐振器的谐振器系统及其制造方法
公开(公告)号：US20050140467A1
公开(公告)日：2005-06-30
申请号：US10946541
申请日：2004-09-21
申请人： Amy Duwel , Luke Hohreiter , Joung-Mo Kang , Douglas White , David Carter , Mathew Varghese
发明人： Amy Duwel , Luke Hohreiter , Joung-Mo Kang , Douglas White , David Carter , Mathew Varghese
IPC分类号： H03H3/02 , H03H9/17 , H03H9/56 , H03H9/58
CPC分类号： H03H3/02 , H03H9/564 , H03H9/582 , H03H9/586 , H03H2003/027 , H03H2009/241 , Y10T29/42
摘要： A resonator system wherein a plurality of resonators each including piezoelectric material are suspended relative to a substrate. An edge of each resonator is mechanically coupled to an edge of another resonator and the plurality of resonators expand and contract reaching resonance in response to an applied electric field.
摘要翻译：一种谐振器系统，其中包括压电材料的多个谐振器相对于衬底悬挂。每个谐振器的边缘机械耦合到另一个谐振器的边缘，并且多个谐振器响应于所施加的电场而扩大和收缩达到谐振。

10. 发明授权

US09511995B2 Method and apparatus for building three-dimensional MEMS elements 有权
公开(公告)号：US09511995B2
公开(公告)日：2016-12-06
申请号：US13397230
申请日：2012-02-15
申请人： Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
发明人： Brian Lee Wardle , Fabio Ferruccio Fachin , Stefan Nikles , Mathew Varghese
IPC分类号： B81C1/00 , G01P15/08
CPC分类号： B05D3/10 , B81B2201/0235 , B81B2203/0109 , B81C1/00007 , B81C1/0019 , G01P15/0802 , Y10T428/24612
摘要： The disclosure generally relates to method and apparatus for forming three-dimensional MEMS. More specifically, the disclosure relates to a method of controlling out-of-plane buckling in microstructural devices so as to create micro-structures with out-of-plane dimensions which are 1×, 5×, 10×, 100× or 500× the film's thickness or above the surface of the wafer. An exemplary device formed according to the disclosed principles, includes a three dimensional accelerometer having microbridges extending both above and below the wafer surface.

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