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1. 发明申请

US20120048019A1 HIGHLY SENSITIVE CAPACITIVE SENSOR AND METHODS OF MANUFACTURING THE SAME 审中-公开
标题翻译：高敏感电容传感器及其制造方法
公开(公告)号：US20120048019A1
公开(公告)日：2012-03-01
申请号：US12869222
申请日：2010-08-26
申请人： Hanqin Zhou , Leyue Jiang , Mathew Varghese , Haidong Liu
发明人： Hanqin Zhou , Leyue Jiang , Mathew Varghese , Haidong Liu
IPC分类号： G01P15/125 , C23F1/00
CPC分类号： G01P15/125 , G01P2015/0814
摘要： Micro-machined capacitive sensors implemented in micro-electro-mechanical system (MEMS) processes that have higher sensitivity, while providing an increased linear capacitive sensing range. Capacitive sensing is achieved via variable-area sensing, which employs a transduction mechanism in which the relationship between changes in the capacitance of variable, parallel-plate capacitors and displacements of a proof mass is generally linear. Each respective variable, parallel-plate capacitor is formed by a finger/electrode pair, in which both the finger and the electrode have rectangular tooth profiles that include a plurality of rectangular teeth. Because changes in the overlapping area of the finger and the electrode are multiplied by the number of rectangular teeth, while the standing capacity of the micro-machined capacitive sensor remains relatively high, the sensitivity of the micro-machined capacitive sensor employing variable-area sensing is significantly increased per unit area of the finger and the electrode.
摘要翻译：在微机电系统（MEMS）工艺中实现的微加工电容传感器具有更高的灵敏度，同时提供增加的线性电容感测范围。通过可变区域感测实现电容感测，其采用转换机制，其中可变平行板电容器的电容变化与校准质量的位移之间的关系通常是线性的。每个可变平行板电容器由手指/电极对形成，其中手指和电极均具有包括多个矩形齿的矩形齿廓。由于手指和电极的重叠区域的变化乘以矩形齿的数量，而微加工的电容式传感器的静态容量保持相对较高，所以采用可变面积感测的微加工电容传感器的灵敏度手指和电极的每单位面积显着增加。

2. 发明授权

US08701490B2 Z-axis capacitive accelerometer 有权
标题翻译： Z轴电容式加速度计
公开(公告)号：US08701490B2
公开(公告)日：2014-04-22
申请号：US13180970
申请日：2011-07-12
申请人： Leyue Jiang , Hanqin Zhou , Yang Zhao
发明人： Leyue Jiang , Hanqin Zhou , Yang Zhao
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0831 , G01P2015/0837
摘要： A Z-axis capacitive accelerometer includes a substrate, a capacitance sensing plate, a proof mass and at least one pair of spring beams. The capacitance sensing plate includes two symmetrical sense areas to create differential capacitive measurement. A decoupling structure separates the proof mass and the capacitance sensing plate and their rotational motions from each other. In the proposed Z axis capacitive accelerometer, the distance of the capacitance sensing plate relative to its rotation axis is considerably increased, thereby effectively enhancing the sensitivity when measuring the Z-axis acceleration.
摘要翻译： Z轴电容式加速度计包括基板，电容检测板，检验质量块和至少一对弹簧梁。电容感测板包括两个对称的感测区域，以产生差分电容测量。解耦结构将检测质量和电容感测板以及它们的旋转运动彼此分开。在提出的Z轴电容式加速度计中，电容感测板相对于其旋转轴的距离大大增加，从而在测量Z轴加速度时有效提高灵敏度。

3. 发明申请

US20120125103A1 Z-AXIS CAPACITIVE ACCELEROMETER 有权
标题翻译： Z轴电容式加速度计
公开(公告)号：US20120125103A1
公开(公告)日：2012-05-24
申请号：US13180970
申请日：2011-07-12
申请人： Leyue Jiang , Hanqin Zhou , Yang Zhao
发明人： Leyue Jiang , Hanqin Zhou , Yang Zhao
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0831 , G01P2015/0837
摘要： A Z-axis capacitive accelerometer includes a substrate, a capacitance sensing plate, a proof mass and at least one pair of spring beams. The capacitance sensing plate includes two symmetrical sense areas to create differential capacitive measurement. A decoupling structure separates the proof mass and the capacitance sensing plate and their rotational motions from each other. In the proposed Z axis capacitive accelerometer, the distance of the capacitance sensing plate relative to its rotation axis is considerably increased, thereby effectively enhancing the sensitivity when measuring the Z-axis acceleration.
摘要翻译： Z轴电容式加速度计包括基板，电容检测板，检验质量块和至少一对弹簧梁。电容感测板包括两个对称的感测区域，以产生差分电容测量。解耦结构将检测质量和电容感测板以及它们的旋转运动彼此分开。在提出的Z轴电容式加速度计中，电容感测板相对于其旋转轴的距离大大增加，从而在测量Z轴加速度时有效提高灵敏度。

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