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1. 发明授权

US07424392B1 Applying a self-adaptive filter to a drifting process 失效
标题翻译：将自适应滤波器应用于漂移过程
公开(公告)号：US07424392B1
公开(公告)日：2008-09-09
申请号：US10323502
申请日：2002-12-18
申请人： Jin Wang , Robert J. Chong , Christopher A. Bode , Si-Zhao J. Qin , Alexander J. Pasadyn
发明人： Jin Wang , Robert J. Chong , Christopher A. Bode , Si-Zhao J. Qin , Alexander J. Pasadyn
IPC分类号： G06F17/18 , G21C17/00
CPC分类号： G05B19/41875 , G05B2219/32135 , G05B2219/32182 , G05B2219/32184 , G05B2219/37224 , G05B2219/41146 , G05B2219/41147 , G05B2219/50065 , Y02P90/22
摘要： A method and an apparatus are provided for applying a self-adaptive filter to a drifting process. The method includes processing a workpiece, measuring an output characteristic of the processed workpiece and modifying a previous estimated process state based at least on the measured output characteristic. The method further includes estimating a next process state based at least on the modified previous estimated process state.
摘要翻译：提供了一种用于将自适应滤波器应用于漂移过程的方法和装置。该方法包括处理工件，测量被处理工件的输出特性，以及至少基于所测量的输出特性修改先前的估计过程状态。该方法还包括至少基于修改的先前估计的处理状态来估计下一处理状态。

2. 发明授权

US08359494B2 Parallel fault detection 有权
标题翻译：并行故障检测
公开(公告)号：US08359494B2
公开(公告)日：2013-01-22
申请号：US10323272
申请日：2002-12-18
申请人： Elfido Coss, Jr. , Ernest D. Adams, III , Robert J. Chong , Howard E. Castle , Thomas J. Sonderman , Alexander J. Pasadyn
发明人： Elfido Coss, Jr. , Ernest D. Adams, III , Robert J. Chong , Howard E. Castle , Thomas J. Sonderman , Alexander J. Pasadyn
IPC分类号： G06F11/00
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： A method and an apparatus are provided for parallel fault detection. The method comprises receiving data associated with processing of a workpiece by a first processing tool, receiving data associated with processing of a workpiece by a second processing tool and comparing at least a portion of the received data to a common fault model to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool and processing of the workpiece by the second processing tool occurred.
摘要翻译：提供了用于并行故障检测的方法和装置。该方法包括接收与第一处理工具处理工件有关的数据，通过第二处理工具接收与工件的处理有关的数据，并将至少一部分接收到的数据与常见故障模型进行比较，以确定是否存在故障与通过第一处理工具处理工件和由第二处理工具处理工件的至少一个相关联。

3. 发明授权

US06961636B1 Method and apparatus for dynamically monitoring controller tuning parameters 有权
标题翻译：动态监控控制器调谐参数的方法和装置
公开(公告)号：US06961636B1
公开(公告)日：2005-11-01
申请号：US10126172
申请日：2002-04-19
申请人： Robert J. Chong , Alexander J. Pasadyn , Thomas J. Sonderman
发明人： Robert J. Chong , Alexander J. Pasadyn , Thomas J. Sonderman
IPC分类号： G05B13/02 , G05B19/418 , G06F19/00
CPC分类号： G05B19/41875 , G05B13/025 , G05B2219/32187 , Y02P90/20 , Y02P90/22
摘要： A method includes processing a plurality of workpieces in accordance with an operating recipe. Metrology data associated with the processing is collected. A control model including at least one tuning parameter having a default value is provided. A plurality of perturbations is introduced to shift the tuning parameter from its default value. Control actions are generated based on the metrology data and the perturbations to the tuning parameter in the control model to modify the operating recipe. An error signal associated with each of the perturbations is generated. The default value of the tuning parameter is modified based on the error signals.
摘要翻译：一种方法包括根据操作配方处理多个工件。收集与处理相关的计量数据。提供了包括具有默认值的至少一个调谐参数的控制模型。引入多个扰动以从其默认值移位调谐参数。基于测量数据和控制模型中的调谐参数的扰动来生成控制动作，以修改操作配方。产生与每个扰动相关联的误差信号。调整参数的默认值根据错误信号进行修改。

4. 发明授权

US06912433B1 Determining a next tool state based on fault detection information 有权
标题翻译：根据故障检测信息确定下一个工具状态
公开(公告)号：US06912433B1
公开(公告)日：2005-06-28
申请号：US10323554
申请日：2002-12-18
申请人： Robert J. Chong , Michael L. Miller , Alexander J. Pasadyn , Eric O. Green
发明人： Robert J. Chong , Michael L. Miller , Alexander J. Pasadyn , Eric O. Green
IPC分类号： G05B19/418 , G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32182 , G05B2219/45031 , G05B2219/50065 , Y02P90/22
摘要： A method and apparatus are provided for determining a next tool state based on fault detection information. The method comprises receiving operational data associated with processing of a workpiece by a processing tool, determining at least a portion of noise associated with the processing of the workpiece based on analyzing the operational data and estimating a next state of the processing tool based on at least the determined portion of the noise.
摘要翻译：提供了一种基于故障检测信息来确定下一个工具状态的方法和装置。该方法包括：通过处理工具接收与工件的处理有关的操作数据，基于分析操作数据确定与工件的处理相关联的噪声的至少一部分，并基于至少基于估计处理工具的下一个状态确定的噪声部分。

5. 发明授权

US06907369B1 Method and apparatus for modifying design constraints based on observed performance 失效
标题翻译：基于观察性能修改设计约束的方法和装置
公开(公告)号：US06907369B1
公开(公告)日：2005-06-14
申请号：US10425227
申请日：2003-05-02
申请人： Richard J. Markle , Robert J. Chong , Alexander J. Pasadyn
发明人： Richard J. Markle , Robert J. Chong , Alexander J. Pasadyn
IPC分类号： G05B19/418 , G06F17/50 , G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32018 , G05B2219/32101 , G05B2219/45026 , G06F17/5068 , Y02P90/22
摘要： A method for modifying design constraints based on observed performance includes measuring a characteristic of a plurality of devices manufactured in a process flow. A design constraint associated with the characteristic is defined. A performance metric relating the performance of the devices as a function of the measured characteristic and the design constraint is generated. The design constraint is modified based on the performance metric. A manufacturing system includes a metrology tool and a design rule monitor. The metrology tool is configured to measure a characteristic of a plurality of devices manufactured in a process flow. The design rule monitor is configured to receive a design constraint associated with the characteristic, generate a performance metric relating the performance of the devices as a function of the measured characteristic and the design constraint, and modify the design constraint based on the performance metric.
摘要翻译：基于观察到的性能来修改设计约束的方法包括测量在处理流程中制造的多个设备的特性。定义与特性相关的设计约束。产生与测量特性和设计约束相关的设备性能的性能指标。基于性能指标修改设计约束。制造系统包括计量工具和设计规则监视器。计量工具被配置为测量在处理流程中制造的多个装置的特性。设计规则监视器被配置为接收与特性相关联的设计约束，根据测量的特性和设计约束生成与设备的性能相关的性能度量，并且基于性能度量来修改设计约束。

6. 发明授权

US07117062B1 Determining transmission of error effects for improving parametric performance 有权
标题翻译：确定误差效应的传输，以提高参数性能
公开(公告)号：US07117062B1
公开(公告)日：2006-10-03
申请号：US10323553
申请日：2002-12-18
申请人： Thomas J. Sonderman , Robert J. Chong , Brian K. Cusson , Alexander J. Pasadyn
发明人： Thomas J. Sonderman , Robert J. Chong , Brian K. Cusson , Alexander J. Pasadyn
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G01N21/9501 , G05B2219/31442 , G05B2219/32197 , Y02P90/22
摘要： A method and an apparatus for characterizing an uncertainty factor relating to processing workpieces. A first processing step is performed upon a workpiece. A first uncertainty factor associated with the first processing step is calculated. A final uncertainty factor associated with an end-of-line parameter relating to the workpiece is calculated based upon the first uncertainty factor. A process control function based upon the final uncertainty factor is performed.
摘要翻译：一种表征与处理工件有关的不确定因素的方法和装置。对工件进行第一处理步骤。计算与第一处理步骤相关联的第一不确定因素。基于第一不确定因素计算与与工件相关的行尾参数相关联的最终不确定性因子。执行基于最终不确定因素的过程控制功能。

7. 发明授权

US07020535B1 Method and apparatus for providing excitation for a process controller 失效
标题翻译：为过程控制器提供激励的方法和装置
公开(公告)号：US07020535B1
公开(公告)日：2006-03-28
申请号：US10702877
申请日：2003-11-06
申请人： Christopher A. Bode , J. Broc Stirton , Robert J. Chong
发明人： Christopher A. Bode , J. Broc Stirton , Robert J. Chong
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32097 , G05B2219/37538 , G05B2219/45031 , Y02P90/22 , Y02P90/265
摘要： A method includes defining a design window for a manufacturing process performed by a tool and a process window within the design window. A workpiece likely to have a characteristic outside the process window is identified. The characteristic of the identified workpiece is measured. A control model for controlling the tool is updated using the measured characteristic. A system includes a tool, a process controller, a metrology tool, and a sampling controller. The tool is adapted to process workpieces in accordance with a manufacturing process. The manufacturing process has an associated design window and a process window defined within the design window. The process controller is adapted to control the tool using a control model. The sampling controller is adapted to identify a workpiece likely to have a characteristic outside the process window and direct the metrology tool to measure the characteristic of the identified workpiece. The process controller is further adapted to update the control model using the measured characteristic.
摘要翻译：一种方法包括定义由设计窗口内的工具和处理窗口执行的制造过程的设计窗口。识别出可能具有处理窗口外的特征的工件。测量所识别的工件的特性。使用测量特性更新用于控制刀具的控制模型。系统包括工具，过程控制器，计量工具和采样控制器。该工具适于根据制造过程处理工件。制造过程具有关联的设计窗口和在设计窗口内定义的过程窗口。过程控制器适用于使用控制模型来控制工具。采样控制器适于识别可能具有处理窗口外的特征的工件，并引导计量工具测量所识别的工件的特性。过程控制器还适于使用所测量的特征来更新控制模型。

8. 发明授权

US06871114B1 Updating process controller based upon fault detection analysis 失效
标题翻译：基于故障检测分析更新过程控制器
公开(公告)号：US06871114B1
公开(公告)日：2005-03-22
申请号：US10231713
申请日：2002-08-30
申请人： Eric O. Green , Matthew A. Purdy , Elfido Coss, Jr. , Christopher A. Bode , Robert J. Chong , Gregory A. Cherry
发明人： Eric O. Green , Matthew A. Purdy , Elfido Coss, Jr. , Christopher A. Bode , Robert J. Chong , Gregory A. Cherry
IPC分类号： G05B19/404 , G06F19/00
CPC分类号： G05B19/404 , G05B2219/37252 , G05B2219/37345 , G05B2219/45031
摘要： A method and an apparatus for adjusting a process controller based upon a fault detection analysis. A process step upon a workpiece is performed using a processing tool. Manufacturing data relating to processing of the workpiece is acquired. The manufacturing data may include metrology data relating to the processed workpiece and/or tool state data relating to the tool state of a processing tool. A metrology/tool state data integration process is performed based upon the acquired manufacturing data. The metrology/tool state data integration process includes performing an assessment of a tool health related to the processing tool and adjusting an emphasis of the metrology data based upon the assessment of the tool health.
摘要翻译：一种基于故障检测分析调整过程控制器的方法和装置。使用加工工具进行工件的加工步骤。获取与工件的加工有关的制造数据。制造数据可以包括与处理工具有关的计量学数据和/或与加工工具的工具状态有关的刀具状态数据。基于获取的制造数据执行计量/工具状态数据集成处理。计量/工具状态数据集成过程包括对与处理工具相关的工具健康进行评估，并且基于对工具健康的评估来调整计量数据的重点。

9. 发明授权

US06912437B2 Method and apparatus for controlling a fabrication process based on a measured electrical characteristic 有权
标题翻译：基于测量的电气特性来控制制造工艺的方法和装置
公开(公告)号：US06912437B2
公开(公告)日：2005-06-28
申请号：US10262620
申请日：2002-09-30
申请人： Robert J. Chong , Jin Wang
发明人： Robert J. Chong , Jin Wang
IPC分类号： H01L21/66 , G06F19/00
CPC分类号： H01L22/20 , H01L22/12
摘要： A method includes performing at least one process for forming a feature of a semiconductor device in accordance with an operating recipe. An electrical performance characteristic of the feature is measured. The measured electrical performance characteristic is compared to a target value for the electrical performance characteristic. At least one parameter of the operating recipe is determined based on the comparison. A system includes a process tool, a metrology tool, and a controller. The process tool is configured to perform at least one process for forming a feature of a semiconductor device in accordance with an operating recipe. The metrology tool is configured to measure an electrical performance characteristic of the feature. The controller is configured to compare the measured electrical performance characteristic to a target value for the electrical performance characteristic and determine at least one parameter of the operating recipe based on the comparison.
摘要翻译：一种方法包括根据操作配方执行用于形成半导体器件的特征的至少一个处理。测量该特征的电气性能特征。将测量的电性能特性与电性能特性的目标值进行比较。基于比较确定操作配方的至少一个参数。系统包括处理工具，计量工具和控制器。处理工具被配置为执行根据操作配方形成半导体器件的特征的至少一个处理。测量工具被配置为测量该特征的电性能特征。控制器被配置为将测量的电性能特性与电性能特性的目标值进行比较，并且基于该比较确定操作配方的至少一个参数。

10. 发明授权

US06804619B1 Process control based on tool health data 有权
标题翻译：基于工具健康数据的过程控制
公开(公告)号：US06804619B1
公开(公告)日：2004-10-12
申请号：US10231910
申请日：2002-08-30
申请人： Robert J. Chong , Eric O. Green , Jin Wang
发明人： Robert J. Chong , Eric O. Green , Jin Wang
IPC分类号： G06F1900
CPC分类号： G05B19/4065 , G05B2219/37258
摘要： A method is provided for a process control based on tool health data. The method comprises processing a workpiece using a processing tool, receiving trace data associated with the processing of the workpiece from the processing tool and determining at least one value associated with a health of a portion of the processing tool based on at least a portion of the received trace data. The method further comprises adjusting processing of another workpiece based on the determined health value.
摘要翻译：提供了一种基于工具健康数据的过程控制的方法。该方法包括使用处理工具处理工件，从处理工具接收与工件的处理相关联的跟踪数据，并基于至少一部分工作来确定与处理工具的一部分的健康相关联的至少一个值收到跟踪数据。该方法还包括基于所确定的健康值来调整另一工件的处理。

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