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1. 发明授权

US5635849A Miniature probe positioning actuator 失效
标题翻译：微型探头定位执行器
公开(公告)号：US5635849A
公开(公告)日：1997-06-03
申请号：US643523
申请日：1996-05-06
申请人： Jiann-Chang Lo , Michael Servedio , James M. Hammond , James E. Boyette, Jr. , Hans-George H. Kolan
发明人： Jiann-Chang Lo , Michael Servedio , James M. Hammond , James E. Boyette, Jr. , Hans-George H. Kolan
IPC分类号： G01R31/26 , G01R1/067 , G01R1/073 , G01R31/28 , H01L21/66 , H02K41/03 , G01R31/22
CPC分类号： G01R1/06705
摘要： Disclosed is a Probe Positioning Actuator which is low in cost and mass, capable of high accelerations, relatively long stroke and compact packaging, as well as high in efficiency. The actuator assembly comprises a frame, and at least one pair of spaced apart, laterally extending, conductor carrying, flexible beams attached to the frame. A non-magnetic armature, substantially U-shaped in cross section, is attached adjacent or approximate the extended terminal ends of the beams, and a probe is attached to the base of the "U" of the armature for contacting selected points in the electrical circuit associated with the device being tested. The heart of the actuator includes a coil mounted on the upstanding legs of the U-shaped armature and arranged so that the axis of the coil is perpendicular to the base of the armature but substantially parallel to the probe tip. This arrangement places the `motor` portion of the actuator adjacent the probe and permits accurate and repeatable, fast control of not only probe tip position but probe tip movement. To complete the motor portion of the actuator, means, carried by the frame create a magnetic field across the coil, whereby upon energization of the coil, deflection of the armature (and thus the beams) occurs, effecting movement of the probe tip into contact with selected portions of the device being tested.
摘要翻译：公开了一种探头定位致动器，其成本和质量低，能够具有高加速度，相对长的行程和紧凑的包装以及高的效率。致动器组件包括框架，以及连接到框架的至少一对间隔开的横向延伸的导体承载的柔性梁。基本上U形的横截面的非磁性衔铁被安装在梁的延伸的末端附近或近似的位置，并且探头附接到电枢的“U”的底部，用于接触电气中的选定点与被测设备相关的电路。致动器的心脏包括安装在U形衔铁的直立腿上的线圈，并被布置成使得线圈的轴线垂直于电枢的基部，但基本上平行于探针尖端。这种布置使致动器的“电动机”部分邻近探头，并且允许精确和可重复地，快速地控制探针尖端位置，但是探针尖端运动。为了完成致动器的电动机部分，由框架承载的装置在线圈上产生磁场，由此在线圈通电时，发生电枢（以及因此的梁）的偏转，使探针尖端移动到接触该设备的选定部分被测试。

2. 发明授权

US5532611A Miniature probe positioning actuator 失效
标题翻译：微型探头定位执行器
公开(公告)号：US5532611A
公开(公告)日：1996-07-02
申请号：US451635
申请日：1995-05-26
申请人： Jiann-Chang Lo , Michael Servedio , James M. Hammond , James E. Boyette, Jr. , Hans-George H. Kolan
发明人： Jiann-Chang Lo , Michael Servedio , James M. Hammond , James E. Boyette, Jr. , Hans-George H. Kolan
IPC分类号： G01R31/26 , G01R1/067 , G01R1/073 , G01R31/28 , H01L21/66 , H02K41/03 , G01R31/22
CPC分类号： G01R1/06705
摘要： Disclosed is a Probe Positioning Actuator which is low in cost and mass, capable of high accelerations, relatively long stroke and compact packaging, as well as high in efficiency. The actuator assembly comprises a frame, and at least one pair of spaced apart, laterally extending, conductor carrying, flexible beams attached to the frame. A non-magnetic armature, substantially U-shaped in cross section, is attached adjacent or approximate the extended terminal ends of the beams, and a probe is attached to the base of the "U" of the armature for contacting selected points in the electrical circuit associated with the device being tested. The heart of the actuator includes a coil mounted on the upstanding legs of the U-shaped armature and arranged so that the axis of the coil is perpendicular to the base of the armature but substantially parallel to the probe tip. This arrangement places the `motor` portion of the actuator adjacent the probe and permits accurate and repeatable, fast control of not only probe tip position but probe tip movement. To complete the motor portion of the actuator, means, carried by the frame create a magnetic field across the coil, whereby upon energization of the coil, deflection of the armature (and thus the beams) occurs, effecting movement of the prob into contact with selected portions of the device being tested.
摘要翻译：公开了一种探头定位致动器，其成本和质量低，能够具有高加速度，相对长的行程和紧凑的包装以及高的效率。致动器组件包括框架，以及连接到框架的至少一对间隔开的横向延伸的导体承载的柔性梁。基本上U形的横截面的非磁性衔铁被安装在梁的延伸的末端附近或近似的位置，并且探头附接到电枢的“U”的底部，用于接触电气中的选定点与被测设备相关的电路。致动器的心脏包括安装在U形衔铁的直立腿上的线圈，并被布置成使得线圈的轴线垂直于电枢的基部，但基本上平行于探针尖端。这种布置使致动器的“电动机”部分邻近探头，并且允许精确和可重复地，快速地控制探针尖端位置，但是探针尖端运动。为了完成致动器的电动机部分，由框架承载的装置在线圈上产生磁场，由此在线圈通电时，发生电枢（以及因此的梁）的偏转，从而实现与该正在测试的设备的所选部分。

3. 发明授权

US5550483A High speed test probe positioning system 失效
标题翻译：高速测试探头定位系统
公开(公告)号：US5550483A
公开(公告)日：1996-08-27
申请号：US342433
申请日：1994-11-18
申请人： James E. Boyette, Jr. , James M. Hammond , Jiann-Chang Lo , James C. Mahlbacher , Michael Servedio , Ali R. Taheri
发明人： James E. Boyette, Jr. , James M. Hammond , Jiann-Chang Lo , James C. Mahlbacher , Michael Servedio , Ali R. Taheri
IPC分类号： G01R1/067 , G01R31/02
CPC分类号： G01R1/06705
摘要： Probing system performance is improved by dynamically positioning a test probe at a test site during the gantry settling interval using a high performance secondary positioner to compensate for the inherent moving mass oscillational displacements. A primary positioner positions the gantry and its associated test probe to within a predetermined axis distance of the test site and a secondary positioner dynamically maintains the test probe at a target position corresponding to the test site during the settling interval by imparting compensating displacements to the test probe to counteract the displacement errors incurred as the primary positioner attempts to settle the gantry at the test site. Similarly, automatic machine tool performance is improved by dynamically positioning a work tool at a work site during the gantry settling interval using a high performance secondary positioner to compensate for the inherent moving mass oscillational displacements. A primary positioner positions the gantry and its associated work tool to within a predetermined axis distance of the work site and a secondary positioner dynamically maintains the work tool at a target position corresponding to the work site during the settling interval by imparting compensating displacements to the work tool to counteract the displacement errors incurred as the primary positioner attempts to settle the gantry at the work site.
摘要翻译：通过使用高性能辅助定位器在机架沉降间隔期间在测试位置处动态定位测试探头来补偿固有的移动质量振荡位移，来提高系统性能。主要定位器将机架及其相关联的测试探针定位在测试位置的预定轴距离内，并且辅助定位器通过赋予测试的补偿位移在静止间隔期间将测试探针动态地维持在对应于测试位置的目标位置探测器可以抵消由于主要定位器试图在测试现场安装龙门架时发生的位移误差。类似地，通过使用高性能二次定位器在机架沉降间隔期间通过在工作现场的动态定位工作工具来补偿固有的移动质量振荡位移，从而提高了自动机床性能。主要定位器将机架及其相关联的工作工具定位在工作现场的预定轴距离内，并且辅助定位器通过向工件施加补偿位移来将工作工具在对应于工作现场的目标位置处动态地维持在工作位置作为主要定位者试图在工地上定位龙门架时发生的位移错误的工具。

4. 发明授权

US5635848A Method and system for controlling high-speed probe actuators 失效
标题翻译：控制高速探头执行器的方法和系统
公开(公告)号：US5635848A
公开(公告)日：1997-06-03
申请号：US402417
申请日：1995-03-10
申请人： James M. Hammond , James C. Mahlbacher , Kenneth G. Roessler , Michael Servedio , Li-Cheng R. Zai
发明人： James M. Hammond , James C. Mahlbacher , Kenneth G. Roessler , Michael Servedio , Li-Cheng R. Zai
IPC分类号： G01R1/067 , G01R1/073
CPC分类号： G01R1/06705
摘要： A digital and analog controller for controlling a high-speed probe actuator is disclosed. This method and system provide the probe actuator system with improved damping ratio and reduced impact force, so the throughput of the tester is increased with fast settling actuator armature. With this method and system, the steady-state probe force is less sensitive to the servo system, test probe and variation in the probing distance d. An electronic circuit, which consists of analog operational amplifiers, monostable multivibrators, and D flip-flops, is presented for low-cost applications.
摘要翻译：公开了一种用于控制高速探头致动器的数字和模拟控制器。该方法和系统为探头致动器系统提供了改进的阻尼比和减小的冲击力，因此测试仪的生产量随着快速沉降执行器电枢而增加。利用这种方法和系统，稳态探头力对伺服系统，测试探头和探测距离d的变化敏感度较低。一个电子电路由模拟运算放大器，单稳态多谐振荡器和D触发器组成，用于低成本应用。

5. 发明授权

US5360974A Dual quad flexure scanner 失效
标题翻译：双四重弯曲扫描仪
公开(公告)号：US5360974A
公开(公告)日：1994-11-01
申请号：US963886
申请日：1992-10-20
申请人： James M. Hammond , Martin A. Klos , Yves Martin , Kenneth G. Roessler , Robert M. Stowell
发明人： James M. Hammond , Martin A. Klos , Yves Martin , Kenneth G. Roessler , Robert M. Stowell
IPC分类号： G01B7/34 , B23Q1/34 , B23Q1/36 , B23Q1/56 , G01B5/00 , G01N37/00 , G01Q10/04 , G01Q70/04 , G21K5/10
CPC分类号： G01Q10/04 , B23Q1/36 , B82Y35/00 , G01B5/0002 , G01Q70/04
摘要： A dual quad flexure carriage and assembly, for receiving a sensing probe, is used for scanning the sensing probe across a target surface. The flexure carriage is a unitary structure providing flat motion for the sensing probe during the scanning procedure, while further compensating for thermal creep. The dual quad flexure assembly comprises the dual quad flexure carriage along with piezo actuators and control systems to provide highly linear orthogonal motion.
摘要翻译：用于接收感测探头的双四重弯曲滑架和组件用于在目标表面上扫描感测探头。挠性托架是在扫描过程中为感测探头提供平坦运动的单一结构，同时进一步补偿热蠕变。双四重弯曲组件包括双四重弯曲滑架以及压电致动器和控制系统，以提供高度线性的正交运动。

6. 发明授权

US5260577A Sample carriage for scanning probe microscope 失效
标题翻译：扫描探针显微镜的样品托架
公开(公告)号：US5260577A
公开(公告)日：1993-11-09
申请号：US973796
申请日：1992-11-09
申请人： David W. Abraham , James M. Hammond , Martin A. Klos , Kenneth G. Roessler , Robert M. Stowell , Hemantha K. Wickramasinghe
发明人： David W. Abraham , James M. Hammond , Martin A. Klos , Kenneth G. Roessler , Robert M. Stowell , Hemantha K. Wickramasinghe
IPC分类号： G01B7/34 , G01B21/30 , G01Q70/04 , H01J37/20 , H01J37/28
CPC分类号： H01J37/20 , G01Q70/04 , Y10S977/872
摘要： A sample carriage, for receiving a sample to be scanned and positionable in a scanning probe microscope, is used for physically decoupling the sample from the scanning probe microscope assembly. The sample carriage, constructed from low thermal coefficient material, is physically decoupled by releasably clamping a sample carriage to a bridge support.

7. 发明授权

US5262643A Automatic tip approach method and apparatus for scanning probe microscope 失效
标题翻译：扫描探针显微镜的自动尖端接近方法和装置
公开(公告)号：US5262643A
公开(公告)日：1993-11-16
申请号：US897646
申请日：1992-06-12
申请人： James M. Hammond , Martin A. Klos , Yves Martin , Kenneth G. Roessler , Robert M. Stowell
发明人： James M. Hammond , Martin A. Klos , Yves Martin , Kenneth G. Roessler , Robert M. Stowell
IPC分类号： G01B21/30 , G01N37/00 , G01Q10/02 , G01Q10/04 , G01Q30/18 , G01Q70/18 , G05D3/12 , H01V37/28
CPC分类号： G01Q10/02 , B82Y35/00 , Y10S977/851
摘要： A non-contact, step-wise method for automatically positioning a sensing probe, having a vibrating cantilever and tip, above a target surface utilizing acoustic and Van der Waals interactions respectively during an approach method. The sensing probe is lowered to a substantially optimized tip to target surface distance. The system utilizes the interaction of forces between the vibrating cantilever and target surface to automatically position the sensing probe above the target surface.

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