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    • 1. 发明授权
    • Method of manufacturing a BiCMOS integrated circuit fully integrated
within a CMOS process flow
    • 制造完全集成在CMOS工艺流程中的BiCMOS集成电路的方法
    • US5888861A
    • 1999-03-30
    • US870474
    • 1997-06-06
    • Chung-Jen ChienJeong Y. ChoiChuen-Der Lien
    • Chung-Jen ChienJeong Y. ChoiChuen-Der Lien
    • H01L21/8249H01L21/8238
    • H01L21/8249
    • A process for manufacturing a BiCMOS integrated circuit is implemented by adapting the masking and doping steps used in forming CMOS devices. Thus simultaneous formation of both CMOS and bipolar device structures eliminates the need for any additional masking or process steps to form bipolar device structures. Collector regions 20 of NPN transistors are formed simultaneously with N-wells 18. Collector regions of PNP transistors, if required, are formed simultaneously with P-wells 16. Base regions 24 of the bipolar transistors are formed using threshold voltage implant steps and/or lightly doped drain implant steps of PMOS transistors. Emitter regions 59 are formed, when using a single polysilicon CMOS process, simultaneously with the CMOS gates 72, 74. When employing a double polysilicon CMOS process, the emitter regions 59 are formed concurrently with the second polysilicon layer interconnect structure and/or source/drain regions 50,52 of NMOS transistors. For single polysilicon CMOS process, the buried layer regions 66 are formed during buried contact formation.
    • BiCMOS集成电路的制造工艺通过适应用于形成CMOS器件的掩模和掺杂步骤来实现。 因此同时形成CMOS和双极器件结构消除了对形成双极器件结构的任何附加掩模或工艺步骤的需要。 NPN晶体管的集电极区域20与N阱18同时形成。如果需要,PNP晶体管的集电极区域与P阱16同时形成。双极晶体管的基极区域24使用阈值电压注入步骤和/或 PMOS晶体管的轻掺杂漏极注入步骤。 当使用单个多晶硅CMOS工艺时,发射极区59与CMOS栅极72,74同时形成。当采用双重多晶硅CMOS工艺时,发射极区59与第二多晶硅层互连结构和/或源/ NMOS晶体管的漏极区域50,52。 对于单多晶硅CMOS工艺,在掩埋接触形成期间形成掩埋层区域66。
    • 7. 发明授权
    • Clock generator and method for providing reliable clock signal using array of MEMS resonators
    • 时钟发生器和使用MEMS谐振器阵列提供可靠时钟信号的方法
    • US07941723B1
    • 2011-05-10
    • US11861869
    • 2007-09-26
    • Chuen-Der LienJimmy Lee
    • Chuen-Der LienJimmy Lee
    • G01R31/3181G01R31/40
    • G01R31/31702G01R31/31727H03B5/32
    • A clock generator is disclosed that includes an array of MEMS resonators and a test circuit. The test circuit is operable at start-up to operate one or more of the MEMS resonators to generate test output and analyze the test output to determine whether the operated MEMS resonators meet test criteria. A MEMS resonator is selected that meets the test criteria and its output is used to generate an output clock signal. In addition, the test circuit is operable to analyze the output of the selected MEMS resonator and select a replacement MEMS resonator when the output of the selected MEMS resonator no longer meets the test criteria. The replacement MEMS resonator is then operated and its output is coupled to the output of the clock generator. Thereby, failing and potentially failing MEMS resonators are automatically replaced during operation of the clock generator in its end-use application.
    • 公开了一种包括MEMS谐振器阵列和测试电路的时钟发生器。 测试电路在启动时可操作以操作一个或多个MEMS谐振器以产生测试输出并分析测试输出以确定所操作的MEMS谐振器是否符合测试标准。 选择符合测试标准的MEMS谐振器,并且其输出用于产生输出时钟信号。 另外,当选择的MEMS谐振器的输出不再满足测试标准时,测试电路可操作以分析所选择的MEMS谐振器的输出并选择替换的MEMS谐振器。 然后更换MEMS谐振器,并将其输出耦合到时钟发生器的输出端。 因此,在其最终用途应用中的时钟发生器的操作期间,故障和潜在故障的MEMS谐振器被自动替换。