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1. 发明申请

US20070221610A1 Method using monolayer etch masks in combination with printed masks 失效
标题翻译：使用单层蚀刻掩模与印刷掩模组合的方法
公开(公告)号：US20070221610A1
公开(公告)日：2007-09-27
申请号：US11388718
申请日：2006-03-24
申请人： Eugene Chow , William Wong , Michael Chabinyc , Jeng Lu , Ana Arias
发明人： Eugene Chow , William Wong , Michael Chabinyc , Jeng Lu , Ana Arias
IPC分类号： H01B13/00 , B44C1/22
CPC分类号： H01L21/302 , H01L21/0271 , H01L21/0273 , H01L27/124 , H01L27/1288 , H01L27/1292 , H01L29/66765
摘要： A method to pattern films into dimensions smaller than the printed pixel mask size. A printed mask is deposited on a thin film on a substrate. The second mask layer is selectively deposited onto the film, but not to the printed mask. A third mask is then printed onto the substrate to pattern a portion of the second mask. Certain solvents are then used to remove the printed mask but not the mask layer on the thin film. The mask layer is then used to form a pattern on the thin film in combination with etching. The features formed in the thin film are smaller than the smallest dimension of the printed mask. The coated mask layer can be a self-assembled mono-layer or other material that selectively binds to the thin film.
摘要翻译：将薄膜图案尺寸小于印刷像素掩模尺寸的方法。印刷的掩模沉积在基底上的薄膜上。第二掩模层选择性地沉积在膜上，而不是印刷在掩模上。然后将第三掩模印刷到基底上以对第二掩模的一部分进行图案化。然后使用某些溶剂去除印刷的掩模，而不是薄膜上的掩模层。然后将掩模层与蚀刻结合在薄膜上形成图案。形成在薄膜中的特征小于印刷掩模的最小尺寸。涂覆的掩模层可以是选择性地结合薄膜的自组装单层或其它材料。

2. 发明申请

US20060128057A1 Xerographic micro-assembler 有权
标题翻译：静电复印机
公开(公告)号：US20060128057A1
公开(公告)日：2006-06-15
申请号：US11011652
申请日：2004-12-14
申请人： Jeng Lu , Eugene Chow
发明人： Jeng Lu , Eugene Chow
IPC分类号： H01L21/50 , H01L21/30 , B23P21/00
CPC分类号： H01L25/50 , H01L21/67271 , H01L21/67282 , H01L21/67294 , H01L24/95 , H01L2224/95085 , H01L2224/95144 , H01L2224/95145 , H01L2924/14 , H01L2924/1461 , Y10T29/4913 , Y10T29/49133 , Y10T29/53004 , Y10T29/5313 , Y10T29/53174 , Y10T29/53178 , Y10T29/53278 , H01L2924/00
摘要： Xerographic micro-assembler systems and methods are disclosed. The systems and methods involve manipulating charge-encoded micro-objects. The charge encoding identifies each micro-object and specifies its orientation for sorting. The micro-objects are sorted in a sorting unit so that they have defined positions and orientations. The sorting unit has the capability of electrostatically and magnetically manipulating the micro-objects based on their select charge encoding. The sorted micro-objects are provided to an image transfer unit. The image transfer unit is adapted to receive the sorted micro-objects, maintain them in their sorted order and orientation, and deliver them to a substrate. Maintaining the sorted order as the micro-objects are delivered to the substrate may be accomplished through the use of an electrostatic image, as is done in xerography. The substrate with the micro-objects is further processed to interconnect the micro-objects—through electrical wiring, for example—to form the final micro-assembly.
摘要翻译：公开了静电印刷微组装系统和方法。系统和方法涉及操纵电荷编码的微物体。电荷编码识别每个微物体并指定其排列方向。微物体在分类单元中排序，使得它们具有定义的位置和取向。分选单元具有基于其选择电荷编码的静电和磁性操纵微物体的能力。分类的微物体被提供给图像传送单元。图像传送单元适于接收分类的微物体，将它们保持在排列顺序和方位，并将其传送到基底。将排序的顺序作为微物体传送到基底可以通过使用静电图像来实现，如在静电复印中所做的那样。具有微物体的衬底被进一步处理以使例如微通孔电线互连，以形成最终的微组件。

3. 发明申请

US20070126536A1 Electromechanical switch 失效
标题翻译：机电开关
公开(公告)号：US20070126536A1
公开(公告)日：2007-06-07
申请号：US11292421
申请日：2005-12-02
申请人： David Fork , Thomas Hantschel , Koenraad Van Schuylenbergh , Jeng Lu
发明人： David Fork , Thomas Hantschel , Koenraad Van Schuylenbergh , Jeng Lu
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2059/0081
摘要： In one aspect, an electromechanical switching device is illustrated. The electromechanical switching device includes a relay with at least one first conductive portion, at least one second conductive portion, and at least one actuation component that moves the at least one first conductive portion and the at least one second conductive portion into and out of conductive contact. The at least one first conductive portion includes a conductive stationary end coupled to a substrate and a conductive free-floating end. The at least one actuation component includes an actuation stationary end coupled to the substrate and an actuation free-floating end. The actuation free floating end, when the at least one actuation component is not energized, curls, which curls the conductive free floating end into or out of conductive contact with the at least one second conductive portion.
摘要翻译：在一个方面，示出了机电开关装置。机电开关装置包括具有至少一个第一导电部分，至少一个第二导电部分和至少一个致动部件的继电器，所述至少一个致动部件将至少一个第一导电部分和至少一个第二导电部分移入和移出导电部分联系。所述至少一个第一导电部分包括耦合到衬底的导电固定端和导电自由浮动端。所述至少一个致动部件包括联接到所述基板的致动固定端和致动自由浮动端。当所述至少一个致动部件未通电时，所述致动自由浮动端部卷曲，所述自由浮动端部将所述导电自由浮动端部与所述至少一个第二导电部分导电接触或者脱离所述至少一个第二导电部分的导电接触。

4. 发明申请

US20050258428A1 Thin-film transistor array with ring geometry 有权
公开(公告)号：US20050258428A1
公开(公告)日：2005-11-24
申请号：US11190178
申请日：2005-07-25
申请人： William Wong , Jeng Lu , Alberto Salleo , Michael Chabinyc , Raj Apte , Robert Street
发明人： William Wong , Jeng Lu , Alberto Salleo , Michael Chabinyc , Raj Apte , Robert Street
IPC分类号： H01L27/12 , H01L27/28 , H01L27/32 , H01L29/417 , H01L29/786 , H01L29/04
CPC分类号： H01L27/283 , H01L27/12 , H01L27/3262 , H01L27/3274 , H01L29/41733 , H01L29/78696 , H01L51/0541 , H01L51/0545
摘要： An improved transistor array for a display or sensor device is described. The display or sensor device includes a plurality of pixels. Each pixel includes a width and a length. Each pixel is addressed by a transistor. The transistor addressing each pixel has a channel with a channel width. Each channel width is greater than the width or length of the pixel being addressed. By fabricating transistors with extremely long channel widths, lower mobility semiconductor materials can easily be used to fabricate the display device.

5. 发明申请

US20070057748A1 Traveling wave arrays, separation methods, and purification cells 失效
标题翻译：行波阵列，分离方法和纯化细胞
公开(公告)号：US20070057748A1
公开(公告)日：2007-03-15
申请号：US11224347
申请日：2005-09-12
申请人： Meng Lean , Jeng Lu , Scott Limb , Jurgen Daniel , Armin Volkel , Huangpin Hsieh , Scott Solberg , Bryan Preas
发明人： Meng Lean , Jeng Lu , Scott Limb , Jurgen Daniel , Armin Volkel , Huangpin Hsieh , Scott Solberg , Bryan Preas
IPC分类号： H01P1/18
CPC分类号： B03C5/028
摘要： Various traveling wave grid configurations are disclosed. The grids and systems are well suited for transporting, separating, and classifying small particles dispersed in liquid or gaseous media. Also disclosed are various separation strategies and purification cells utilizing such traveling wave arrays and strategies.
摘要翻译：公开了各种行波网格结构。网格和系统非常适用于分散在液体或气体介质中的小粒子的运输，分离和分类。还公开了利用这种行波阵列和策略的各种分离策略和纯化单元。

6. 发明申请

US20050270135A1 Method of making photolithographically-patterned out-of-plane coil structures 有权
标题翻译：制造光刻图案的平面外线圈结构的方法
公开(公告)号：US20050270135A1
公开(公告)日：2005-12-08
申请号：US11197675
申请日：2005-08-04
申请人： Christopher Chua , Francesco Lemmi , Koenraad Van Schuylenbergh , Jeng Lu , David Fork , Eric Peeters , Decai Sun , Donald Smith , Linda Romano
发明人： Christopher Chua , Francesco Lemmi , Koenraad Van Schuylenbergh , Jeng Lu , David Fork , Eric Peeters , Decai Sun , Donald Smith , Linda Romano
IPC分类号： H01F41/04 , G01R1/067 , G01R3/00 , G03C5/00 , H01F17/00 , H01F17/02 , H01F27/29 , H01L21/02 , H01L21/60 , H01L21/768 , H01L23/485 , H01L23/49 , H01L23/498 , H01L23/522 , H01R9/03 , H05K7/02
CPC分类号： H01L24/13 , G01R1/06727 , G01R3/00 , H01F17/0033 , H01F17/02 , H01F41/041 , H01L21/76838 , H01L21/7688 , H01L23/498 , H01L23/49811 , H01L23/5227 , H01L24/11 , H01L24/16 , H01L24/48 , H01L28/10 , H01L2224/05568 , H01L2224/05573 , H01L2224/05624 , H01L2224/13099 , H01L2224/4847 , H01L2224/8592 , H01L2924/0001 , H01L2924/00014 , H01L2924/00015 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01019 , H01L2924/01022 , H01L2924/01023 , H01L2924/01024 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/0104 , H01L2924/01042 , H01L2924/01047 , H01L2924/01057 , H01L2924/01058 , H01L2924/01061 , H01L2924/01068 , H01L2924/01072 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01084 , H01L2924/014 , H01L2924/10253 , H01L2924/10329 , H01L2924/12034 , H01L2924/14 , H01L2924/181 , H01L2924/19041 , H01L2924/19042 , H01L2924/19043 , H01L2924/30105 , H01L2924/30107 , H01L2924/3011 , Y10T29/4902 , Y10T29/49071 , Y10T29/49147 , Y10T29/49204 , Y10T29/49208 , Y10T29/4921 , Y10T29/49218 , H01L2924/00 , H01L2224/05599 , H01L2224/85399 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要： An out-of-plane micro-structure which can be used for on-chip integration of high-Q inductors and transformers places the magnetic field direction parallel to the substrate plane without requiring high aspect ratio processing. The photolithographically patterned coil structure includes an elastic member having an intrinsic stress profile. The intrinsic stress profile biases a free portion away from the substrate forming a loop winding. An anchor portion remains fixed to the substrate. The free portion end becomes a second anchor portion which may be connected to the substrate via soldering or plating. A series of individual coil structures can be joined via their anchor portions to form inductors and transformers.
摘要翻译：可以用于高Q电感和变压器的片上集成的平面外微结构使得磁场方向平行于衬底平面而不需要高纵横比处理。光刻图案的线圈结构包括具有固有应力分布的弹性构件。固有的应力分布使形成环绕的基板远离基板偏移。锚固部分保持固定到基底上。自由部分端部成为可以通过焊接或电镀而连接到基板的第二锚固部分。一系列单独的线圈结构可以通过它们的锚定部分接合以形成电感器和变压器。

7. 发明申请

US20050123930A1 Traveling wave grids and algorithms for biomolecule separation, transport and focusing 有权
标题翻译：用于生物分子分离，运输和聚焦的旅行波网格和算法
公开(公告)号：US20050123930A1
公开(公告)日：2005-06-09
申请号：US10727301
申请日：2003-12-03
申请人： Meng Lean , Jeng Lu , Jackson Ho , Chinwen Shih , Armin Volkel , Huangpin Hsieh , Jurgen Daniel
发明人： Meng Lean , Jeng Lu , Jackson Ho , Chinwen Shih , Armin Volkel , Huangpin Hsieh , Jurgen Daniel
IPC分类号： B03C5/02 , G01N27/447 , G01N30/02 , C12Q1/68 , G01N33/53
CPC分类号： G01N27/44773 , B03C5/028 , G01N27/44713 , G01N30/02
摘要： Various traveling wave grids and related systems are disclosed that are particularly beneficial for the separation, transport, and focusing of biomolecules or other charged species. An implementation of a vertically integrated traveling wave module is described which allows for scalability to arbitrary gel dimensions through tiling. In addition, several unique traveling wave algorithms are also described which when used in conjunction with the traveling wave grids, impart selective motion to biomolecules or other charged species.
摘要翻译：公开了对生物分子或其他带电物质的分离，运输和聚焦特别有利的各种行波网格和相关系统。描述了垂直集成的行波模块的实现，其允许通过平铺来扩展任意的凝胶尺寸。此外，还描述了当与行波网格结合使用时，对生物分子或其他带电物质赋予选择性运动的几种独特的行波算法。

8. 发明申请

US20050102833A1 RELEASE HEIGHT ADJUSTMENT OF STRESSY METAL DEVICES BY ANNEALING BEFORE AND AFTER RELEASE 有权
标题翻译：通过在发布之前和之后通过退火释放强度金属器件的高度调整
公开(公告)号：US20050102833A1
公开(公告)日：2005-05-19
申请号：US10715978
申请日：2003-11-17
申请人： Thomas Hantschel , David Fork , Dirk De Bruyker , Chinnwen Shih , Jeng Lu , Christopher Chua , Raj Apte , Brent Krusor
发明人： Thomas Hantschel , David Fork , Dirk De Bruyker , Chinnwen Shih , Jeng Lu , Christopher Chua , Raj Apte , Brent Krusor
IPC分类号： G01R1/067 , G01R3/00 , H05K3/40 , H05K1/00
CPC分类号： G01R1/06744 , G01R1/06727 , G01R3/00 , H05K3/4092 , Y10T29/49204 , Y10T29/49208 , Y10T29/49218 , Y10T29/49222
摘要： Spring structures are subjected to pre-release and post-release annealing to tune their tip height to match a specified target. Post-release annealing increases tip height, and pre-release annealing decreases tip height. The amount of tuning is related to the annealing temperature and/or time. Annealing schedules are determined for a pre-fabricated cache of unreleased spring structures such that finished spring structures having a variety of target heights can be economically produced by releasing/annealing the cache according to associated annealing schedules. Selective annealing is performed using lasers and heat absorbing/reflecting materials. Localized annealing is used to generate various spring structure shapes. Both stress-engineered and strain-engineered spring structures are tuned by annealing.
摘要翻译：弹簧结构经受预释放和后释放退火以调节其尖端高度以匹配指定的靶。后释放退火增加尖端高度，并且预释放退火使尖端高度降低。调谐量与退火温度和/或时间有关。对于未发布的弹簧结构的预制缓存来确定退火计划，使得可以通过根据相关联的退火计划释放/退火高速缓存来经济地产生具有各种目标高度的成品弹簧结构。使用激光和吸热/反射材料进行选择性退火。定位退火用于产生各种弹簧结构形状。应力设计和应变工程弹簧结构都通过退火进行调整。

9. 发明申请

US20050127357A1 Thin-film transistor array with ring geometry 有权
标题翻译：具有环形几何形状的薄膜晶体管阵列
公开(公告)号：US20050127357A1
公开(公告)日：2005-06-16
申请号：US10734429
申请日：2003-12-12
申请人： William Wong , Jeng Lu , Alberto Salleo , Michael Chabinyc , Raj Apte , Robert Street
发明人： William Wong , Jeng Lu , Alberto Salleo , Michael Chabinyc , Raj Apte , Robert Street
IPC分类号： H01L27/12 , H01L27/28 , H01L27/32 , H01L29/417 , H01L29/786 , H01L29/08
CPC分类号： H01L27/283 , H01L27/12 , H01L27/3262 , H01L27/3274 , H01L29/41733 , H01L29/78696 , H01L51/0541 , H01L51/0545
摘要： An improved transistor array for a display or sensor device is described. The display or sensor device includes a plurality of pixels. Each pixel includes a width and a length. Each pixel is addressed by a transistor. The transistor addressing each pixel has a channel with a channel width. Each channel width is greater than the width or length of the pixel being addressed. By fabricating transistors with extremely long channel widths, lower mobility semiconductor materials can easily be used to fabricate the display device.
摘要翻译：描述了用于显示器或传感器装置的改进的晶体管阵列。显示器或传感器装置包括多个像素。每个像素包括宽度和长度。每个像素由晶体管寻址。寻址每个像素的晶体管具有通道宽度。每个通道宽度大于要寻址的像素的宽度或长度。通过制造具有非常长的沟道宽度的晶体管，可以容易地使用低迁移率半导体材料来制造显示器件。

10. 发明申请

US20050112433A1 Micro-machined fuel cells 有权
标题翻译：微加工燃料电池
公开(公告)号：US20050112433A1
公开(公告)日：2005-05-26
申请号：US10722156
申请日：2003-11-24
申请人： Raj Apte , David Duff , Christian Van de Walle , Jeng Lu , Alberto Salleo , Stephen White
发明人： Raj Apte , David Duff , Christian Van de Walle , Jeng Lu , Alberto Salleo , Stephen White
IPC分类号： H01M8/02 , H01M8/10 , H01M8/24 , H01M8/00 , H01M2/00 , H01M2/02 , H01M2/08 , H01M2/14
CPC分类号： H01M8/1016 , H01M8/1004 , H01M8/1097 , H01M8/241 , H01M8/2418 , H01M8/242 , H01M8/2483 , Y02P70/56
摘要： An improved fuel cell is described. The invention addresses the problem of mechanical failure in thin electrolytes. One embodiment varies the thickness of the electrolyte and positions at least either the anode or cathode in the recessed region to provide a short travel distance for ions traveling from the anode to the cathode or from the cathode to the anode. A second embodiment uses a uniquely shaped manifold cover to allow close positioning of the anode to the cathode. Using the described structures results in a substantial improvement in fuel cell reliability and performance.
摘要翻译：描述了改进的燃料电池。本发明解决了薄电解液中机械故障的问题。一个实施例改变电解质的厚度并且在凹陷区域中至少位于阳极或阴极之间，以便为从阳极到阴极或从阴极到阳极的离子提供短的行进距离。第二实施例使用独特形状的歧管盖，以允许阳极到阴极的紧密定位。使用所述结构可以显着提高燃料电池的可靠性和性能。

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