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1. 发明申请

US20070187787A1 PIXEL SENSOR STRUCTURE INCLUDING LIGHT PIPE AND METHOD FOR FABRICATION THEREOF 审中-公开
标题翻译：像素传感器结构包括光管及其制造方法
公开(公告)号：US20070187787A1
公开(公告)日：2007-08-16
申请号：US11276160
申请日：2006-02-16
申请人： Kristin Ackerson , James Adkisson , John Ellis-Monaghan , Jeffrey Gambino , Timothy Hoague , Mark Jaffe , Robert Leidy , Matthew Moon , Richard Passel
发明人： Kristin Ackerson , James Adkisson , John Ellis-Monaghan , Jeffrey Gambino , Timothy Hoague , Mark Jaffe , Robert Leidy , Matthew Moon , Richard Passel
IPC分类号： H01L27/14
CPC分类号： H01L27/14643 , H01L27/14625 , H01L27/14632 , H01L27/14636 , H01L27/14685 , H01L27/14687 , H01L27/14689
摘要： A pixel for an image sensor includes a photosensor located within a substrate. A patterned dielectric layer having an aperture registered with the photosensor is located over the substrate. A lens structure is located over the dielectric layer and also registered with the photosensor. A liner layer is located contiguously upon a top surface of the dielectric layer, and the sidewalls and bottom of the aperture. The liner layer provides for enhanced reflection for off-axis incoming light and enhanced capture thereof by the photosensor. When the aperture does not provide a dielectric layer border for a metallization layer embedded within the dielectric layer, an exposed edge of the metallization layer may be chamfered.
摘要翻译：用于图像传感器的像素包括位于衬底内的光电传感器。具有与光电传感器对准的孔径的图案化电介质层位于衬底上。透镜结构位于电介质层上方并且还与光电传感器配准。衬垫层连续地定位在电介质层的顶表面上，孔的侧壁和底部。衬垫层为离轴入射光提供增强的反射，并且通过光电传感器增强其捕获。当孔径不为嵌入在电介质层内的金属化层提供介电层边界时，金属化层的暴露边缘可以被倒角。

2. 发明申请

US20060261427A1 Touching microlens structure for a pixel sensor and method of fabrication 有权
标题翻译：用于像素传感器的触摸微透镜结构和制造方法
公开(公告)号：US20060261427A1
公开(公告)日：2006-11-23
申请号：US11378020
申请日：2006-03-17
申请人： John Dillon , Timothy Hoague , Robert Leidy
发明人： John Dillon , Timothy Hoague , Robert Leidy
IPC分类号： H01L31/0232
CPC分类号： H01L27/14685 , H01L27/14627 , H01L31/02327
摘要： A structure and method for increasing the sensitivity of pixel sensors by eliminating a gap space formed between adjacent microlens structures in a pixel sensor array. Advantageously, exposure and flowing conditions are such that adjacent microlens structures touch (are webbed) at a horizontal cross-section, yet have a round lens shape in all directions. Particularly, exposure and flowing conditions are such that each touching microlens structure is formed to have a matched uniform radius of curvature at a horizontal cross-section and at a 45 degree cross-sections. To improve quality of mircrolens structure uniformity exhibited at all pixel locations including those near a pixel array edge or corner, a top anti-reflective coating layer is applied on top of a photoresist layer prior to the exposure and flowing steps.
摘要翻译：通过消除在像素传感器阵列中相邻的微透镜结构之间形成的间隙空间来增加像素传感器的灵敏度的结构和方法。有利地，曝光和流动条件使得相邻的微透镜结构以水平横截面接触（被蹼状），但在所有方向上具有圆形透镜形状。特别地，曝光和流动条件使得每个触摸的微透镜结构形成为在水平横截面和45度横截面处具有匹配的均匀的曲率半径。为了提高在包括像素阵列边缘或角落附近的像素位置的所有像素位置处显示的微电极结构均匀性的质量，在曝光和流动步骤之前，将顶部抗反射涂层施加在光致抗蚀剂层的顶部。

3. 发明申请

US20060261426A1 A TOUCHING MICROLENS STRUCTURE FOR A PIXEL SENSOR AND METHOD OF FABRICATION 有权
标题翻译：用于像素传感器的触摸式微型结构和制造方法
公开(公告)号：US20060261426A1
公开(公告)日：2006-11-23
申请号：US10908601
申请日：2005-05-18
申请人： Timothy Hoague , Robert Leidy
发明人： Timothy Hoague , Robert Leidy
IPC分类号： H01L31/0232 , G03F7/20
CPC分类号： H01L27/14685 , H01L27/14627 , H01L31/02327
摘要： A structure and method for increasing the sensitivity of pixel sensors by eliminating a gap space formed between adjacent microlens structures in a pixel sensor array. Advantageously, exposure and flowing conditions are such that adjacent microlens structures touch (are webbed) at a horizontal cross-section, yet have a round lens shape in all directions. Particularly, exposure and flowing conditions are such that each touching microlens structure is formed to have a matched uniform radius of curvature at a horizontal cross-section and at a 45 degree cross-sections.
摘要翻译：通过消除在像素传感器阵列中相邻的微透镜结构之间形成的间隙空间来增加像素传感器的灵敏度的结构和方法。有利地，曝光和流动条件使得相邻的微透镜结构以水平横截面接触（被蹼状），但在所有方向上具有圆形透镜形状。特别地，曝光和流动条件使得每个触摸的微透镜结构形成为在水平横截面和45度横截面处具有匹配的均匀的曲率半径。

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