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1. 发明专利

CA2371009C GRINDING MACHINE FOR WELDING ELECTRODES 未知
公开(公告)号：CA2371009C
公开(公告)日：2005-11-15
申请号：CA2371009
申请日：2000-11-06
申请人： FUJIKIN KK , JAPAN SCIENCE & TECH CORP
发明人： IKEDA NOBUKAZU , HONIDEN TERUO , KOMEHANA KATUNORI , MORIMOTO AKIHIRO
IPC分类号： B23K35/02 , B24B19/16 , B24B47/04 , B24D7/14 , B24B19/00
摘要： A grinding machine for welding electrodes which grinds the end portion of an electrode to a final form and finishes the tip end of the electrode to a mirror surface. All the grinding work can be done by this grinding machine alone and one grinding disk. The grinding machine for welding electrodes comprises a housing 1, a grinder motor 2, a grinding disk 3, a swing plate 4, a holder guide 6, a electrode holder 7, an electrode turning motor 8 and swing plate moving mechanism 9. And it is so arranged that the axis .PHI.a of electrode A extends along the line perpendicular to the axis .PHI. of a motor drive shaft 2a and that a first grinding part 3a of the grinding disk 3 is so formed to conform to the finishing contour of electrode A. Furthermore, the grinding disk 3 is turned by the grinder motor 2 and at the same time electrode A is turned by the electrode turning motor 8.

2. 发明专利

CA2371009A1 GRINDING MACHINE FOR WELDING ELECTRODES 未知
公开(公告)号：CA2371009A1
公开(公告)日：2002-05-06
申请号：CA2371009
申请日：2000-11-06
申请人： JAPAN SCIENCE & TECH CORP , FUJIKIN KK
发明人： MORIMOTO AKIHIRO , IKEDA NOBUKAZU , HONIDEN TERUO , KOMEHANA KATUNORI
IPC分类号： B23K35/02 , B24B19/16 , B24B47/04 , B24D7/14 , B24B19/00
摘要： A grinding machine for welding electrodes which grinds the end portion of an electrode to a final form and finishes the tip end of the electrode to a mirror surface. All the grinding work can be done by this grinding machine alone and one grinding disk. The grinding machine for welding electrodes comprises a housing 1, a grinder motor 2, a grinding disk 3, a swing plate 4, a holder guide 6, a electrode holder 7, an electrode turning motor 8 and swing plate moving mechanism 9. And it is so arranged that the axis .PHI.a of electrode A extends along the line perpendicular to the axis .PHI. of a motor drive shaft 2a and that a first grinding part 3a of the grinding disk 3 is so formed to conform to the finishing contour of electrode A. Furthermore, the grinding disk 3 is turned by the grinder motor 2 and at the same time electrode A is turned by the electrode turning motor 8.

3. 发明申请

WO0194925A8 GAS DETECTION SENSOR 审中-公开
标题翻译：气体检测传感器
公开(公告)号：WO0194925A8
公开(公告)日：2002-10-03
申请号：PCT/JP0003658
申请日：2000-06-05
申请人： FUJIKIN KK , OHMI TADAHIRO , KAWADA KOUJI , IKEDA NOBUKAZU , MORIMOTO AKIHIRO , MINAMI YUKIO , KOMEHANA KATUNORI , HONIDEN TERUO
发明人： OHMI TADAHIRO , KAWADA KOUJI , IKEDA NOBUKAZU , MORIMOTO AKIHIRO , MINAMI YUKIO , KOMEHANA KATUNORI , HONIDEN TERUO
IPC分类号： G01N25/32 , G01N27/00 , G01N27/16 , G01N33/00
CPC分类号： G01N25/32 , G01N33/0013
摘要： A gas detection sensor capable of being simplified in structure and detecting, with high accuracy, the concentration of inflammable gas contained in a detected gas and the concentration of oxygen gas contained in the detected gas containing the inflammable gas under the presence of H2O or O2, comprising a first detection sensor which has a diaphragm with a platinum coated film applied on a gas contact surface in contact with the detected gas and a thermocouple which is obtained by moving for fixing one end side of each of two dissimilar metals closely to the non-gas contact surface of the diaphragm and is heated by the contact reaction of the inflammable gas and a second detection sensor which has a diaphragm with a gas contact surface in contact with the detected gas and a thermocouple obtained by moving for fixing one end side of each of two dissimilar metals closely to the non-gas contact surface of the diaphragm and detects the temperature of the detected gas, whereby the detection signals of the inflammable gas can be transmitted by the heating of the sensors due to contact reaction of the inflammable gas.
摘要翻译：一种气体检测传感器，其结构简单，并且在H 2 O或O 2存在下，高精度地检测包含在检测气体中的可燃性气体的浓度和包含在含有易燃气体的检测气体中的氧气浓度，包括第一检测传感器，其具有施加在与所检测到的气体接触的气体接触表面上的铂涂覆膜的隔膜和通过移动以将两个不同金属中的每一个的一端侧紧密地固定到非电解槽的热电偶，隔膜的气体接触表面被可燃性气体的接触反应和具有与检测到的气体接触的气体接触表面的隔膜的第二检测传感器加热，以及通过移动固定每个两个不同的金属与隔膜的非气体接触表面紧密相邻，并检测检测到的气体的温度，从而进行检测可燃气体的信号由于可燃性气体的接触反应而通过传感器的加热而传递。

4. 发明授权

US6422264B2 Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus 有权
标题翻译：平行分流式流体供给装置和流体切换式压力式流量控制方法以及用于同一流体供给装置的流体切换型压力式流量控制系统
公开(公告)号：US6422264B2
公开(公告)日：2002-07-23
申请号：US73464000
申请日：2000-12-13
申请人： FUJIKIN KK , OHMI TADAHIRO , TOKYO ELECTRON LTD
发明人： OHMI TADAHIRO , KAGATSUME SATOSHI , SUGIYAMA KAZUHIKO , MINAMI YUKIO , NISHINO KOUJI , DOHI RYOUSUKE , YONEHANA KATSUNORI , IKEDA NOBUKAZU , YAMAJI MICHIO , HIROSE JUN , FUKAZAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI , MORIMOTO AKIHIRO , UNO TOMIO , IDETA EIJI , MATSUMOTO ATSUSHI , UENOYAMA TOYOMI , HIROSE TAKASHI
IPC分类号： G05D7/06
CPC分类号： G05D7/0658 , G05D7/0664 , Y10S438/935 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/86389 , Y10T137/87877 , Y10T137/87917
摘要： A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time DELTAt from the starting point.The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.
摘要翻译：一种流体供给装置，具有从一个压力调节器分支出的多个流动管线，流动线平行布置并构造成使得打开或关闭一个流动通道对其它流动通道的稳定流动将没有暂时的影响。每个流路设置有时间延迟型质量流量控制器MFC，使得当一个封闭流体通道打开时，该流路上的质量流量控制器在起始点的特定延迟时间DELTAt中达到设定流量Qs。本发明包括通过一个压力式流量控制系统以高精度控制多种气体类型的方法和装置。

5. 发明授权

US6360762B2 Method for feeding gases for use in semiconductor manufacturing 有权
标题翻译：供应用于半导体制造的气体的方法
公开(公告)号：US6360762B2
公开(公告)日：2002-03-26
申请号：US76566501
申请日：2001-01-22
申请人： FUJIKIN KK , TOKYO ELECTRON LTD
发明人： KITAYAMA HIROFUMI , KURONO YOICHI , IKEDA NOBUKAZU , MASUDA NAOYA
IPC分类号： C23C16/44 , C23C16/455 , F17D1/04 , H01L21/00 , H01L21/205 , H01L21/302 , H01L21/3065 , F16K31/02
CPC分类号： H01L21/67017 , C23C16/44 , C23C16/455 , C23C16/45561 , F17D1/04 , G05D7/0641 , Y10T137/0318 , Y10T137/0352 , Y10T137/86389 , Y10T137/87314 , Y10T137/87676 , Y10T137/87692
摘要： An apparatus for feeding gases for use in semiconductor manufacturing reduced in size and manufacturing costs and facilitating maintenance and operation of the gas supply system. The apparatus comprises a plurality of gas supply sources, gas source valves provided on the gas lead-out pipes from the respective gas supply sources, flow rate controllers provided on main gas feed pipes into which the lead-out pipes converge, and gas supply valves provided on the outlet side of the flow rate controllers.
摘要翻译：用于半导体制造中供给气体的装置减小了尺寸和制造成本，并促进了供气系统的维护和运行。该装置包括多个气体供给源，从各个气体供给源设置在气体导出管上的气体源，设置在引出管汇接的主要供气管上的流量控制器，以及气体供给阀设置在流量控制器的出口侧。

6. 发明公开

KR20180018740A 유량 신호 보정 방법 및 이것을 사용한 유량 제어 장치 审中-公开
标题翻译：流量信号校正方法及使用该方法的流量控制装置
公开(公告)号：KR20180018740A
公开(公告)日：2018-02-21
申请号：KR20187001282
申请日：2016-10-24
申请人： FUJIKIN KK
发明人： SUGITA KATSUYUKI , IKEDA NOBUKAZU , NISHINO KOUJI , HIRATA KAORU , TAKIMOTO MASAHIKO , KAWASHIMA MASAYOSHI , IMAI TAKAHIRO
IPC分类号： G05D7/06 , G05B6/02
CPC分类号： G05D7/06
摘要： 스로틀부의상류측의압력을제어함으로써유량을제어하는압력식유량제어장치에있어서적용되는유량신호보정방법은스로틀부의상류측에설치된압력센서의출력에기초하여유량을나타내는 1차신호를생성하는스텝과, 1차신호의현재값과, 1차신호의단수또는복수의과거값에관한정보를포함하는값을사용하고, 소정의관계식에의해보정된현재값을도출하도록 1차신호의보정신호로서의 2차신호를생성하는스텝을포함하고, 유량안정기간에있어서 2차신호를유량신호로서출력하고, 과도변화기간에있어서 2차신호를유량신호로서출력하지않는다.
摘要翻译：流信号校正方法是在压力式流量控制装置，适用于通过控制产生指示所述压力传感器安装在节气门部分上游的输出的基础上的流率的第一信号的步骤上游的节流部的压力控制流速并且，作为使用包括在所述第一电流值和信息的单一或多个差分信号的主信号的过去值的值的第一信号的修正信号，并以导出由所述预定关系校正的电流值并且产生次级信号，次级信号在流动稳定时段中作为流量信号输出，并且次级信号在过渡变化时段中不作为流量信号输出。

7. 发明公开

KR20180056710A 유량 제어 장치 및 유량 제어 장치를 사용하는 이상 검지 방법 审中-公开
公开(公告)号：KR20180056710A
公开(公告)日：2018-05-29
申请号：KR20187011033
申请日：2016-12-15
申请人： FUJIKIN KK
发明人： NAGASE MASAAKI , HIRATA KAORU , SAWADA YOHEI , NISHINO KOUJI , IKEDA NOBUKAZU
IPC分类号： G05B23/02 , G01F1/42
CPC分类号： G01F1/42 , G05B23/02 , G05D7/06
摘要： 스로틀부(12), 상류측의제어밸브(18), 상류측의제 1 압력센서(14), 하류측의제 2 압력센서(24)를구비하는유량제어장치(10)와하류밸브(24)를사용하여행하는이상검지방법으로서, 제어밸브및 하류밸브를열림상태로부터닫힘상태로변화시키는스텝과, 제어밸브및 하류밸브를닫힘상태로유지한채 상류압력및 하류압력을측정하는스텝과, (a) 상류압력과하류압력의차가소정값에도달한시점에서의상류압력을상류수속압력으로서추출하고, 하류압력을하류수속압력으로서추출하는스텝및 (b) 제어밸브및 하류밸브를닫힘상태로변화시킨시점으로부터상류압력과하류압력의차가소정값에도달한시점까지의시간을수속시간으로서추출하는스텝중 적어도한쪽을포함하고, 스텝(a) 또는 (b) 중어느하나의스텝에서얻은데이터와기준이되는값의비교에 의거하여이상의유무를판단한다.

8. 发明公开

KR20180054748A 유량 측정 가능한 가스 공급 장치, 유량계, 및 유량 측정 방법 审中-公开
公开(公告)号：KR20180054748A
公开(公告)日：2018-05-24
申请号：KR20187010770
申请日：2017-01-12
申请人： FUJIKIN KK
发明人： SAWADA YOHEI , IKEDA NOBUKAZU , NISHINO KOUJI , NAGASE MASAAKI
IPC分类号： G01F17/00 , G01F25/00
CPC分类号： G01F17/00 , G01F25/00
摘要： 유량측정가능한가스공급장치는, 유통하는가스유량을제어하는유량제어기와, 상기유량제어기의하류에설치된제1차단밸브와, 제1차단밸브의하류측에연통하는상기제1유로에설치된제2차단밸브와, 상기제1유로로부터분기되는제2유로와, 상기제2유로에설치된제3차단밸브와, 상기제1, 제2, 및제3차단밸브에의해둘러싸여지는유로내의압력을검출하는압력검출기와, 상기제1, 제2, 및제3차단밸브에의해둘러싸여지는유로내의온도를검출하는온도검출기와, 상기제3차단밸브의하류에접속되어기지체적을갖는체적측정용탱크와, 상기제1, 제2, 및제3차단밸브에의해둘러싸여지는유로체적을상기제3차단밸브의개방상태와폐쇄상태에보일의법칙을적용함으로써구함과아울러, 상기유로체적과상기압력검출기및 상기온도검출기의검출값을사용해서상기유량제어기의유량을연산하는연산제어장치를구비한다.

9. 发明公开

EP3222995A4 OPTICAL GAS CONCENTRATION MEASUREMENT METHOD, AND METHOD FOR MONITORING GAS CONCENTRATION BY SUCH METHOD 有权
公开(公告)号：EP3222995A4
公开(公告)日：2018-06-06
申请号：EP15860939
申请日：2015-11-20
申请人： FUJIKIN KK , UNIV TOHOKU
发明人： NAGASE MASAAKI , NISHINO KOUJI , IKEDA NOBUKAZU , YAMAJI MICHIO , SUGAWA SHIGETOSHI , KURODA RIHITO
IPC分类号： G01N21/31 , C23C16/18 , C23C16/52 , G01N33/00 , H01L21/205
CPC分类号： G01N21/27 , C23C16/18 , C23C16/52 , G01N21/314 , G01N21/3151 , G01N21/33 , G01N33/0027 , G01N2021/3155 , G01N2021/3159 , G01N2021/3181 , G01N2201/0627 , G01N2201/0696 , G01N2201/12 , H01L21/205
摘要： To provide a concentration measurement method with which the concentrations of predetermined chemical components can be measured non-destructively, accurately, and rapidly by a simple means, up to the concentrations in trace amount ranges, as well as a concentration measurement method with which the concentrations of chemical components in a measurement target can be accurately and rapidly measured in real time up to the concentrations in nano-order trace amount ranges, and which is endowed with a versatility that can be realized in a variety of embodiments and modes. [Solution] In the present invention, a measurement target is irradiated, in a time sharing manner, with light of a first wavelength and light of a second wavelength that have different optical absorption rates with respect to the measurement target. The light of each wavelength, arriving optically via the measurement target as a result of irradiation with the light of each wavelength, is received at a shared light-receiving sensor. A differential signal is formed, the differential signal being of a signal pertaining to the light of the first wavelength and a signal pertaining to the light of the second wavelength, the signals outputted from the light-receiving sensor upon receipt of the light. The concentration of a chemical component in the measurement target is derived on the basis of the differential signal.

10. 发明公开

EP0969342A4 FLUID SUPPLY APPARATUS 有权
标题翻译： FLUIDZUFUHRVORRICHTUNG
公开(公告)号：EP0969342A4
公开(公告)日：2004-05-19
申请号：EP99900168
申请日：1999-01-11
申请人： FUJIKIN KK , TOKYO ELECTRON LTD , OHMI TADAHIRO
发明人： OHMI TADAHIRO , KAGAZUME TETU , SUGIYAMA KAZUHIKO , DOHI RYOUSUKE , MINAMI YUKIO , NISHINO KOUJI , KAWATA KOUJI , IKEDA NOBUKAZU , YAMAJI MICHIO
IPC分类号： F16K31/06 , C01B5/00 , G05D7/06 , G05D11/13 , G05D21/00
CPC分类号： G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： A fluid supply apparatus comprising a pressure flow controller for controlling the rate of flow of fluid, a fluid selector valve for opening/closing the fluid passage on the secondary side, and a fluid supply controller for controlling the operation of them, wherein the pressure flow controller is provided with an orifice (5), a control valve (1) provided on the upstream side of the orifice (5), a pressure sensor (3) provided between the control valve (1) and the orifice (5), and an operation controller (6) for outputting to a driver (2) of the control valve (1) a control signal (Qy) representing the difference between a rate-of-flow signal (Qc=KP1) generated by calculation based on the pressure (P1) measured by the pressure sensor (3) and a rate-of-flow command signal (Qs), and the pressure (P1) on the upstream side of the orifice (5) is adjusted by opening/closing the control valve (1) so as to regulate the rate of flow on the downstream side of the orifice (5).
摘要翻译： 1。一种流体供给装置，其特征在于，具有：控制流体的流量的压力流量控制器;开闭二次侧的流体通路的流体切换阀;以及控制它们的动作的流体供给控制器，（5），设置在节流孔（5）的上游侧的控制阀（1），设置在控制阀（1）和节流孔（5）之间的压力传感器（3），以及（6），用于向控制阀（1）的驱动器（2）输出表示通过基于压力的计算产生的流量信号（Qc = KP1）之间的差值的控制信号（Qy）（3）测量的压力（P1）和流量指令信号（Qs），并且通过打开/关闭控制阀（5）来调节节流孔（5）上游侧的压力（P1） 1）以调节孔口（5）下游侧的流量。

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