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    • 7. 发明授权
    • Solid-state imaging device and method of manufacturing the same
    • 固态成像装置及其制造方法
    • US07851838B2
    • 2010-12-14
    • US11941583
    • 2007-11-16
    • Ikuo Yoshihara
    • Ikuo Yoshihara
    • H01L31/09
    • H01L27/1463H01L27/14612H01L27/14632H01L27/14643H01L27/14645H01L27/14687H01L27/14689H01L31/035281
    • A solid-state imaging device with a semiconductor substrate; a pixel formation region in the substrate and including a pixel made of a photoelectric conversion element; and an element isolation portion in the substrate and including an element isolation insulating layer and an impurity element isolation region. The element isolation insulating layer is positioned in a surface of the substrate. The impurity element isolation region is positioned under the element isolation insulating layer and within the substrate. The impurity element isolation region has at least a portion with a width that is narrower than that of the element isolation insulating layer. The photoelectric conversion element extends to a position under the element isolation insulating layer of the element isolation portion.
    • 一种具有半导体衬底的固态成像器件; 该基板中的像素形成区域包括由光电转换元件构成的像素; 以及衬底中的元件隔离部分,并且包括元件隔离绝缘层和杂质元件隔离区。 元件隔离绝缘层位于基板的表面中。 杂质元素隔离区域位于元件隔离绝缘层下方和衬底内。 杂质元素隔离区具有至少一部分宽度比元件隔离绝缘层窄的部分。 光电转换元件延伸到元件隔离部分的元件隔离绝缘层下方的位置。
    • 8. 发明授权
    • Semiconductor device and method of fabricating same
    • 半导体装置及其制造方法
    • US06362037B1
    • 2002-03-26
    • US09131350
    • 1998-08-10
    • Ikuo YoshiharaKazuaki Kurooka
    • Ikuo YoshiharaKazuaki Kurooka
    • H01L218238
    • H01L27/0623Y10S257/903Y10S257/904
    • An N-type buried diffusion layer as a portion of the collector region of a bipolar transistor and an N-type buried diffusion layer of a memory cell region are simultaneously formed, and the buried diffusion layer of the memory cell region serves as a potential groove for electrons. The threshold voltage of a MOS transistor in the memory cell region is higher than the threshold voltage of a MOS transistor in a peripheral circuit region, preventing an increase in the standby current in the memory cell region. This increases the soft error resistance of the memory cell and prevents a decrease in the operating speed and an increase in the consumption power.
    • 同时形成作为双极晶体管的集电极区域的一部分的N型埋入扩散层和存储单元区域的N型埋入扩散层,并且存储单元区域的埋入扩散层用作电位沟槽 对于电子。 存储单元区域中的MOS晶体管的阈值电压高于外围电路区域中的MOS晶体管的阈值电压,从而防止存储单元区域中的待机电流的增加。 这增加了存储单元的软错误电阻,并且防止了运行速度的降低和消耗功率的增加。