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    • 2. 发明授权
    • Semiconductor device and method of fabricating same
    • 半导体装置及其制造方法
    • US06362037B1
    • 2002-03-26
    • US09131350
    • 1998-08-10
    • Ikuo YoshiharaKazuaki Kurooka
    • Ikuo YoshiharaKazuaki Kurooka
    • H01L218238
    • H01L27/0623Y10S257/903Y10S257/904
    • An N-type buried diffusion layer as a portion of the collector region of a bipolar transistor and an N-type buried diffusion layer of a memory cell region are simultaneously formed, and the buried diffusion layer of the memory cell region serves as a potential groove for electrons. The threshold voltage of a MOS transistor in the memory cell region is higher than the threshold voltage of a MOS transistor in a peripheral circuit region, preventing an increase in the standby current in the memory cell region. This increases the soft error resistance of the memory cell and prevents a decrease in the operating speed and an increase in the consumption power.
    • 同时形成作为双极晶体管的集电极区域的一部分的N型埋入扩散层和存储单元区域的N型埋入扩散层,并且存储单元区域的埋入扩散层用作电位沟槽 对于电子。 存储单元区域中的MOS晶体管的阈值电压高于外围电路区域中的MOS晶体管的阈值电压,从而防止存储单元区域中的待机电流的增加。 这增加了存储单元的软错误电阻,并且防止了运行速度的降低和消耗功率的增加。
    • 5. 发明授权
    • Solid-state imaging device and method of manufacturing the same
    • 固态成像装置及其制造方法
    • US07851838B2
    • 2010-12-14
    • US11941583
    • 2007-11-16
    • Ikuo Yoshihara
    • Ikuo Yoshihara
    • H01L31/09
    • H01L27/1463H01L27/14612H01L27/14632H01L27/14643H01L27/14645H01L27/14687H01L27/14689H01L31/035281
    • A solid-state imaging device with a semiconductor substrate; a pixel formation region in the substrate and including a pixel made of a photoelectric conversion element; and an element isolation portion in the substrate and including an element isolation insulating layer and an impurity element isolation region. The element isolation insulating layer is positioned in a surface of the substrate. The impurity element isolation region is positioned under the element isolation insulating layer and within the substrate. The impurity element isolation region has at least a portion with a width that is narrower than that of the element isolation insulating layer. The photoelectric conversion element extends to a position under the element isolation insulating layer of the element isolation portion.
    • 一种具有半导体衬底的固态成像器件; 该基板中的像素形成区域包括由光电转换元件构成的像素; 以及衬底中的元件隔离部分,并且包括元件隔离绝缘层和杂质元件隔离区。 元件隔离绝缘层位于基板的表面中。 杂质元素隔离区域位于元件隔离绝缘层下方和衬底内。 杂质元素隔离区具有至少一部分宽度比元件隔离绝缘层窄的部分。 光电转换元件延伸到元件隔离部分的元件隔离绝缘层下方的位置。
    • 10. 发明授权
    • Solid-state image pickup device and manufacturing method thereof
    • 固体摄像装置及其制造方法
    • US07964426B2
    • 2011-06-21
    • US12546469
    • 2009-08-24
    • Ikuo Yoshihara
    • Ikuo Yoshihara
    • H01L21/00
    • H01L27/14643H01L27/14609H01L27/14621H01L27/14627H01L27/1463H01L27/14687H01L27/14689
    • A solid-state image pickup device is provided in which a pixel forming region 4 and a peripheral circuit forming region 20 are formed on the same semiconductor substrate, a first element isolation portion is formed by an element isolation layer 21 in which an insulating layer is buried into a semiconductor substrate 10 in the peripheral circuit forming region 20, a second element isolation portion is composed of an element isolation region 11 formed within the semiconductor substrate 10 and an element isolation layer 12 projected in the upper direction from the semiconductor substrate 10 in the pixel forming region 4 and an element isolation layer 21 of the first element isolation portion and the element isolation layer 12 of the second element isolation portion contain the same insulating layers 17, 18 and 19. This solid-state image pickup device has a structure capable of suppressing a noise relative to a pixel signal and which can be microminiaturized in the peripheral circuit forming region.
    • 提供了一种固态图像拾取装置,其中像素形成区域4和外围电路形成区域20形成在同一半导体衬底上,第一元件隔离部分由元件隔离层21形成,其中绝缘层为 埋设在外围电路形成区域20中的半导体衬底10中,第二元件隔离部分由形成在半导体衬底10内的元件隔离区域11和从半导体衬底10沿上方突出的元件隔离层12组成 第一元件隔离部分的像素形成区域4和元件隔离层21以及第二元件隔离部分的元件隔离层12包含相同的绝缘层17,18和19.该固态图像拾取器件具有结构 能够抑制相对于像素信号的噪声,并且可以在外围电路中微型化 ng区域。