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    • 2. 发明授权
    • Ultraviolet transmitting fluoropolymer and pellicle comprising said polymer
    • 包含所述聚合物的紫外透射含氟聚合物和防护薄膜
    • US07442815B2
    • 2008-10-28
    • US11061689
    • 2005-02-22
    • Ikuo MatsukuraHidekazu OkamotoEisuke MurotaniKazuya Oharu
    • Ikuo MatsukuraHidekazu OkamotoEisuke MurotaniKazuya Oharu
    • C07D307/77
    • C07D307/16C07D307/18C07D307/30C08F34/02G03F1/62G03F1/64
    • A pellicle which is excellent in transmittance and durability against short wavelength light, and which can be used for photolithography by using e.g. a KrF excimer laser, is provided.A pellicle for exposure to a light having a wavelength of at most 200 nm, which comprises a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane and/or the adhesive comprises a polymer containing repeating units represented by the following formula (1): wherein Q represents a C1-3 polyfluoroalkylene group having a linear structure, or a group having at least one atom selected from hydrogen atoms and fluorine atoms in such a polyfluoroalkylene group substituted by a substituent comprising a polyfluoroalkyl group which may contain an ethereal oxygen atom, or the like, and X represents a hydrogen atom, a fluorine atom or a C1-3 polyfluoroalkyl group which may contain an ethereal oxygen atom.
    • 对于短波长光透射率和耐久性优异的防护薄膜组件,其可以通过使用例如紫外线照射用于光刻。 提供KrF准分子激光器。 用于暴露于具有至多200nm的波长的光的防护薄膜组件,其包括通过粘合剂粘合到框架上的框架和防护薄膜组件,其中防护薄膜组件和/或粘合剂包含含有重复单元的聚合物 通过下式(1)表示:其中Q表示具有直链结构的C 1-3-3多氟亚烷基或在该多氟亚烷基中具有至少一个选自氢原子和氟原子的原子的基团 被含有可以含有醚性氧原子的多氟烷基等的取代基取代,X表示可以含有醚原子的氢原子,氟原子或C 1-3-3多氟烷基 氧原子。
    • 3. 发明申请
    • METHOD FOR PRODUCING COMPOUND HAVING FLUOROSULFONYL GROUP BY COUPLING REACTION
    • 通过联合反应生产具有氟代甲基的化合物的方法
    • US20080097125A1
    • 2008-04-24
    • US11874255
    • 2007-10-18
    • Masao IwayaKazuya OharuHidekazu Okamoto
    • Masao IwayaKazuya OharuHidekazu Okamoto
    • C07C323/00
    • C25B3/10
    • To provide a method for producing a fluorinated compound having a fluorosulfonyl group by coupling reaction. A method for producing a compound represented by the formula [(FSO2-)a(Z-)3-aC—]nR(—COY)b-n, which comprises subjecting a compound represented by the formula (FSO2-)a(Z-)3-aC(—COX) and a compound represented by the formula R(—COY)b to photocoupling reaction when X and Y are a fluorine atom or to electrolytic coupling reaction when X and Y are each independently a hydroxyl group or a group represented by the formula —OM, provided that X and Y are a fluorine atom, a hydroxyl group or a group represented by the formula —OM, Z is a hydrogen atom, a fluorine atom, a chlorine atom or a monovalent organic group, R is a b-valent organic group, M is an alkali metal atom, “a” is an integer of from 1 to 3, and “b” and “n” are each independently an integer of from 1 to 4, provided that b≧n.
    • 提供通过偶联反应制备具有氟磺酰基的氟化化合物的方法。 由式[(FSO 2 - ))a(Z - )3-a C - ]表示的化合物的制备方法 其中包括使由式(FSO 2) - 表示的化合物(其中, Z - )3-a C(-COX)和由式R(-COY)b表示的化合物,当X和Y为氟原子时,进行光电耦合反应,或 当X和Y各自独立地是羟基或由式-OM表示的基团进行电解偶联反应,条件是X和Y是氟原子,羟基或由-OM表示的基团,Z是 氢原子,氟原子,氯原子或一价有机基团,R为b价有机基团,M为碱金属原子,“a”为1〜3的整数,“b”,“ n“分别独立地为1〜4的整数,条件是b> = n。
    • 4. 发明申请
    • Method for producing fluoroalkyl ether
    • 氟烷基醚的制备方法
    • US20060094908A1
    • 2006-05-04
    • US11293200
    • 2005-12-05
    • Hidekazu OkamotoMasazumi NagaiKazuya Oharu
    • Hidekazu OkamotoMasazumi NagaiKazuya Oharu
    • C07C41/06
    • C07C41/06C07C43/123
    • A method for producing a fluoroalkyl ether, which comprises reacting a fluoroalkyl alcohol with a fluorinated olefin in the presence of a solvent and a catalyst, wherein the fluoroalkyl alcohol and the fluorinated olefin are continuously supplied into a reactor, a reaction product containing the fluoroalkyl ether is continuously withdrawn from the reactor, and the reaction is carried out while the concentration of the fluoroalkyl alcohol present in the reactor is maintained to be at most 7 mass % based on the total organic component present in the reactor. According to the present invention, a fluoroalkyl ether having a high purity can be produced in an industrial scale and at a high reaction rate.
    • 一种制备氟烷基醚的方法,其包括在溶剂和催化剂存在下使氟代烷基醇与氟化烯烃反应,其中将氟代烷基醇和氟化烯烃连续地供入反应器中,将含有氟代烷基醚 从反应器中连续取出,反应进行,同时反应器中存在的氟代烷基醇的浓度维持在反应器中存在的总有机成分的7质量%以下。 根据本发明,可以以工业规模和高反应速度制备高纯度的氟烷基醚。
    • 5. 发明申请
    • Process for producing fluorinated alkyl ether
    • 制备氟化烷基醚的方法
    • US20060128915A1
    • 2006-06-15
    • US11348490
    • 2006-02-07
    • Masazumi NagaiHidekazu OkamotoKazuya Oharu
    • Masazumi NagaiHidekazu OkamotoKazuya Oharu
    • C08F16/24
    • C07C41/06C07C43/123
    • To provide a process for producing a fluorinated alkyl ether, whereby a sufficient reaction rate can be attained even under mild reaction conditions, and a post-process such as distillation after the reaction can be efficiently carried out. A process for producing a fluorinated alkyl ether, which comprises introducing an aprotic polar solvent, a fluorinated ether, a catalyst, a fluorinated alkyl alcohol and a fluorinated olefin into a reactor, and then, reacting the fluorinated alkyl alcohol with the fluorinated olefin, characterized in that the ratio of the two components of the aprotic polar solvent and the fluorinated ether introduced into the reactor is the aprotic polar solvent/the fluorinated ether=5/95 to 80/20 by mass ratio.
    • 为了提供氟化烷基醚的制造方法,即使在温和的反应条件下也能够得到充分的反应速度,能够有效地进行反应后的蒸馏等后处理。 一种制备氟化烷基醚的方法,包括将非质子极性溶剂,氟化醚,催化剂,氟化烷基醇和氟化烯烃引入反应器中,然后使氟化烷基醇与氟化烯烃反应,其特征在于 引入到反应器中的非质子极性溶剂和氟化醚的两种组分的比例是非质子极性溶剂/氟化醚= 5/95〜80/20质量比。
    • 8. 发明授权
    • Method for producing disulfonyl fluoride compound
    • 二磺酰氟化合物的制备方法
    • US08067585B2
    • 2011-11-29
    • US11865267
    • 2007-10-01
    • Masao IwayaKazuya OharuHidekazu Okamoto
    • Masao IwayaKazuya OharuHidekazu Okamoto
    • C07D281/02C07C309/00C07C313/00C07C53/50
    • C25B3/10C07C303/22C07D285/01C07C309/80
    • The present invention relates to producing a disulfonyl fluoride compound easily and efficiently by utilizing coupling reaction where a compound (2) is obtained by subjecting a compound (1) wherein Y is a fluorine atom to photocoupling reaction, or subjecting a compound (1) wherein Y is a hydroxyl group, —OMa wherein Ma is an alkali metal atom, or —O(Mb)1/2 wherein Mb is an alkaline earth metal atom to electrolytic coupling reaction, and derivatives such as the following compound (7A) are obtained from the compound (2): FSO2-E-CX2—COY  (1) FSO2-E-CX2—CX2-E-SO2F  (2) wherein E is a single bond, —O—, a C1-20 alkylene group which may contain an etheric oxygen atom, or the like, X is a fluorine atom or the like, and Y is a fluorine atom, a hydroxyl group, or the like.
    • 本发明涉及通过利用偶氮反应容易且有效地制备二磺酰氟化合物,其中通过使其中Y是氟原子的化合物(1)进行光学偶联反应而获得化合物(2),或者使其中化合物 Y是羟基,其中M a是碱金属原子的-OMa或-O(Mb)1/2,其中Mb是碱土金属原子与电解偶合反应,得到衍生物如下列化合物(7A) 化合物(2):FSO2-E-CX2-COY(1)FSO2-E-CX2-CX2-E-SO2F(2)其中E是单键,-O-,C1-20亚烷基, 含有醚性氧原子等,X为氟原子等,Y为氟原子,羟基等。
    • 9. 发明申请
    • METHOD FOR PRODUCING DISULFONYL FLURIDE COMPOUND
    • 生产氟磷酸盐化合物的方法
    • US20080091009A1
    • 2008-04-17
    • US11865267
    • 2007-10-01
    • Masao IWAYAKazuya OharuHidekazu Okamoto
    • Masao IWAYAKazuya OharuHidekazu Okamoto
    • C07D285/36C07D285/01
    • C25B3/10C07C303/22C07D285/01C07C309/80
    • To produce a disulfonyl fluoride compound easily and efficiently by utilizing coupling reaction. Further, to produce useful compounds by converting the above compound. A compound (2) is obtained by subjecting a compound (1) in which Y is a fluorine atom to photocoupling reaction or the compound wherein Y is a hydroxyl group, —OMa (wherein Ma is an alkali metal atom) or —O(Mb)1/2 wherein Mb is an alkaline earth metal atom) to electrolytic coupling reaction. Further, derivatives such as the following compound (7A) obtainable from the compound (2) are provided. FSO2-E-CX2—COY  (1) FSO2-E-CX2—CX2-E-SO2F  (2) wherein E is a single bond, —O—, a C1-20 alkylene group which may contain an etheric oxygen atom, or the like, X is a fluorine atom or the like, and Y is a fluorine atom, a hydroxyl group, or the like.
    • 通过利用偶联反应容易且有效地制备二磺酰氟化合物。 此外,通过转化上述化合物制备有用的化合物。 化合物(2)通过使其中Y是氟原子的化合物(1)进行光学偶联反应或其中Y是羟基的化合物,其中M < a是碱金属原子)或-O(M)B 1/2)其中M b是碱土金属 原子)到电解偶联反应。 此外,提供了由化合物(2)得到的衍生物如下列化合物(7A)。 <?in-line-formula description =“In-line Formulas”end =“lead”?> FSO -E-CX <2> -COY(1)<? in-line-formula description =“In-line Formulas”end =“tail”?> <?in-line-formula description =“In-line Formulas”end =“lead”?> FSO <2>