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1. 发明授权

US09052450B2 Nano-fabricated plasmonic optical transformer 有权
标题翻译：纳米制造等离子体光学变压器
公开(公告)号：US09052450B2
公开(公告)日：2015-06-09
申请号：US13083228
申请日：2011-04-08
申请人： Hyuck Choo , Stefano Cabrini , P. James Schuck , Xiaogan Liang , Eli Yablonovitch
发明人： Hyuck Choo , Stefano Cabrini , P. James Schuck , Xiaogan Liang , Eli Yablonovitch
IPC分类号： G11B5/02 , G02F1/035 , G11B5/127 , G11B11/00 , G02B6/122 , B82Y20/00 , G11B7/1387 , G11B7/22
CPC分类号： G02B6/1226 , B82Y20/00 , G11B7/1387 , G11B7/22 , Y10T29/49826 , Y10T428/24612
摘要： The present invention provides a plasmonic optical transformer to produce a highly focuses optical beam spot, where the transformer includes a first metal layer, a dielectric layer formed on the first metal layer, and a second metal layer formed on the dielectric layer, where the first metal layer, the dielectric layer, and the second layer are patterned to a shape including a first section having a first cross section, a second section following the first section having a cross-section tapering from the first section to a smaller cross-section, and a third section following the second section having a cross-section matching the tapered smaller cross-section of the second section.
摘要翻译：本发明提供了一种等离子体激元光变换器，用于产生高度聚焦的光束点，其中变压器包括第一金属层，形成在第一金属层上的电介质层和形成在电介质层上的第二金属层，其中第一金属层，电介质层和第二层被图案化为包括具有第一横截面的第一部分的形状，第一部分之后的第二部分具有从第一部分渐缩到较小横截面的横截面，以及第二部分之后的第三部分具有匹配第二部分的锥形较小横截面的横截面。

2. 发明申请

US20110249546A1 Nano-Fabricated Plasmonic Optical Transformer 有权
标题翻译：纳米制造等离子体光学变压器
公开(公告)号：US20110249546A1
公开(公告)日：2011-10-13
申请号：US13083228
申请日：2011-04-08
申请人： Hyuck Choo , Stefano Cabrini , P. James Schuck , Xiaogan Liang , Eli Yablonovitch
发明人： Hyuck Choo , Stefano Cabrini , P. James Schuck , Xiaogan Liang , Eli Yablonovitch
IPC分类号： G11B7/135 , B23P11/00 , B32B15/04 , G01J3/44 , B32B3/26
CPC分类号： G02B6/1226 , B82Y20/00 , G11B7/1387 , G11B7/22 , Y10T29/49826 , Y10T428/24612
摘要： The present invention provides a plasmonic optical transformer to produce a highly focuses optical beam spot, where the transformer includes a first metal layer, a dielectric layer formed on the first metal layer, and a second metal layer formed on the dielectric layer, where the first metal layer, the dielectric layer, and the second layer are patterned to a shape including a first section having a first cross section, a second section following the first section having a cross-section tapering from the first section to a smaller cross-section, and a third section following the second section having a cross-section matching the tapered smaller cross-section of the second section,
摘要翻译：本发明提供了一种等离子体激元光变换器，用于产生高度聚焦的光束点，其中变压器包括第一金属层，形成在第一金属层上的电介质层和形成在电介质层上的第二金属层，其中第一金属层，电介质层和第二层被图案化为包括具有第一横截面的第一部分的形状，第一部分之后的第二部分具有从第一部分渐缩到较小横截面的横截面，以及第二部分之后的第三部分，其具有与第二部分的锥形较小横截面匹配的横截面，

3. 发明授权

US07573022B2 Method for fabricating vertically-offset interdigitated comb actuator device 有权
标题翻译：用于制造垂直偏移叉指梳发动器装置的方法
公开(公告)号：US07573022B2
公开(公告)日：2009-08-11
申请号：US11492270
申请日：2006-07-25
申请人： Hyuck Choo , David Garmire , Richard S. Muller , James Demmel
发明人： Hyuck Choo , David Garmire , Richard S. Muller , James Demmel
IPC分类号： H01J3/14 , H01L29/78 , G02B26/08
CPC分类号： G02B26/0841
摘要： The present invention relates to systems and methods for fabricating microscanners. The fabrication processes employed pursuant to some embodiments are compatible with well known CMOS fabrication techniques, allowing devices for control, monitoring and/or sensing to be integrated onto a single chip. Both one- and two-dimensional microscanners are described. Applications including optical laser surgery, maskless photolithography, portable displays and large scale displays are described.
摘要翻译：本发明涉及用于制造显微镜的系统和方法。根据一些实施例使用的制造工艺与公知的CMOS制造技术兼容，允许用于控制，监测和/或感测的装置集成到单个芯片上。描述了一维和二维显微镜。描述了包括光学激光手术，无掩模光刻，便携式显示器和大规模显示器的应用。

4. 发明授权

US07355793B2 Optical system applicable to improving the dynamic range of Shack-Hartmann sensors 有权
标题翻译：光学系统适用于改善Shack-Hartmann传感器的动态范围
公开(公告)号：US07355793B2
公开(公告)日：2008-04-08
申请号：US11133455
申请日：2005-05-18
申请人： Hyuck Choo , Richard S. Muller
发明人： Hyuck Choo , Richard S. Muller
IPC分类号： G02B27/10 , G02B26/00 , G02F1/00
CPC分类号： G02B27/0933 , B29D11/00365 , G02B26/0875 , G02B27/0961 , G02B27/46
摘要： An addressable array of lenses is disclosed. Two electrical connections per row address specific lenses within that row. Carriages support individual lenses, thus forming resonant units with frequencies unique within each row. A voltage, having the same frequency as a selected resonant unit is applied. The selected lens produces a resonating image. Testing has verified proper resonance addressing within a 5-by-5 array of microlenses. The array can be applied to a Shack-Hartmann (SH) sensor. To compensate for errant images formed outside of their image area, resonating images are identified by a processor. The array thus improves the dynamic range of the wavefront aberration that can be measured by an SH sensor. The inventors currently estimate the improvement over conventional designs to be about a factor of 30.
摘要翻译：公开了一种可寻址阵列的透镜。每行两个电气连接针对该行中的特定镜头。支架支撑各个镜头，从而形成每排中独特的频率的谐振单元。施加与选择的谐振单元具有相同频率的电压。所选择的透镜产生谐振图像。测试已经验证了在5×5微米微阵列内正确的共振寻址。阵列可应用于Shack-Hartmann（SH）传感器。为了补偿在其图像区域之外形成的错误图像，谐振图像由处理器识别。因此，该阵列改善了可由SH传感器测量的波前像差的动态范围。本发明人目前将传统设计的改进估计为大约30倍。

5. 发明申请

US20070026614A1 CMOS-compatible high-performance microscanners, including structures, high-yield simplified fabrication methods and applications 有权
标题翻译： CMOS兼容的高性能显微镜，包括结构，高产量简化制造方法和应用
公开(公告)号：US20070026614A1
公开(公告)日：2007-02-01
申请号：US11492270
申请日：2006-07-25
申请人： Hyuck Choo , David Garmire , Richard Muller , James Demmel
发明人： Hyuck Choo , David Garmire , Richard Muller , James Demmel
IPC分类号： H01L21/8234
CPC分类号： G02B26/0841
摘要： The present invention relates to systems and methods for fabricating microscanners. The fabrication processes employed pursuant to some embodiments are compatible with well known CMOS fabrication techniques, allowing devices for control, monitoring and/or sensing to be integrated onto a single chip. Both one- and two-dimensional microscanners are described. Applications including optical laser surgery, maskless photolithography, portable displays and large scale displays are described.
摘要翻译：本发明涉及用于制造显微镜的系统和方法。根据一些实施例使用的制造工艺与公知的CMOS制造技术兼容，允许用于控制，监测和/或感测的装置集成到单个芯片上。描述了一维和二维显微镜。描述了包括光学激光手术，无掩模光刻，便携式显示器和大规模显示器的应用。

6. 发明申请

US20090322365A1 INTEGRATED MEMS METROLOGY DEVICE USING COMPLEMENTARY MEASURING COMBS 有权
标题翻译：使用补充测量COMBS的集成MEMS计量器件
公开(公告)号：US20090322365A1
公开(公告)日：2009-12-31
申请号：US11737532
申请日：2007-04-19
申请人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
发明人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
IPC分类号： G01R31/02
CPC分类号： H02N1/008 , B81C99/005 , G02B26/0841
摘要： The present invention provides a device for in-situ monitoring of material, process and dynamic properties of a MEMS device. The monitoring device includes a pair of comb drives, a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives, structures for applying an electrical potential to the comb drives to displace the shuttle, structures for measuring an electrical potential from the pair of comb drives; measuring combs configured to measure the displacement of the shuttle, and structures for measuring an electrical capacitance of the measuring combs. Each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps. The shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle, whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement.
摘要翻译：本发明提供了一种用于原位监测MEMS装置的材料，工艺和动态特性的装置。监测装置包括一对梳状驱动器，悬臂悬架包括与该对梳齿驱动器可操作地连接的平移梭，用于将电位施加到梳齿驱动器以移位梭子的结构，用于测量来自该对的电位的结构梳齿驱动器; 被配置成测量梭子的位移的测量梳，以及用于测量测量梳的电容的结构。每个梳状驱动器可以具有不同尺寸的梳齿间隙和不同数量的梳齿间隙。梭子可以形成在垂直地布置有梭的两个悬臂上，由此悬臂用作弹簧，以在每次移位之后将梭子返回到其初始位置。

7. 发明授权

US08079246B2 Integrated MEMS metrology device using complementary measuring combs 有权
标题翻译：使用互补测量梳的集成MEMS测量装置
公开(公告)号：US08079246B2
公开(公告)日：2011-12-20
申请号：US11737532
申请日：2007-04-19
申请人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
发明人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
IPC分类号： G01P21/00
CPC分类号： H02N1/008 , B81C99/005 , G02B26/0841
摘要： The present invention provides a device for in-situ monitoring of material, process and dynamic properties of a MEMS device. The monitoring device includes a pair of comb drives, a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives, structures for applying an electrical potential to the comb drives to displace the shuttle, structures for measuring an electrical potential from the pair of comb drives; measuring combs configured to measure the displacement of the shuttle, and structures for measuring an electrical capacitance of the measuring combs. Each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps. The shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle, whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement.
摘要翻译：本发明提供了一种用于原位监测MEMS装置的材料，工艺和动态特性的装置。监测装置包括一对梳状驱动器，悬臂悬架包括与该对梳齿驱动器可操作地连接的平移梭，用于向梳状驱动器施加电势以移位梭子的结构，用于测量来自该对的电位的结构梳齿驱动器; 被配置成测量梭子的位移的测量梳，以及用于测量测量梳的电容的结构。每个梳状驱动器可以具有不同尺寸的梳齿间隙和不同数量的梳齿间隙。梭子可以形成在垂直地布置有梭的两个悬臂上，由此悬臂用作弹簧，以在每次移位之后将梭子返回到其初始位置。

8. 发明申请

US20070279638A1 MEMS-based, phase-shifting interferometer 有权
标题翻译：基于MEMS的相移干涉仪
公开(公告)号：US20070279638A1
公开(公告)日：2007-12-06
申请号：US11446552
申请日：2006-06-02
申请人： Hyuck Choo , Richard S. Muller , David Garmire , James W. Demmel , Rishi Kant
发明人： Hyuck Choo , Richard S. Muller , David Garmire , James W. Demmel , Rishi Kant
IPC分类号： G01B11/02
CPC分类号： G01B9/02069 , G01B9/02014 , G01B11/2441 , G01B2290/70 , G01J3/4532 , G01J9/02
摘要： In general, the invention relates to the design and fabrication of optical devices suitable for use in methods and systems associated with phase-shift interferometry.
摘要翻译：通常，本发明涉及适用于与相移干涉测量相关联的方法和系统中的光学装置的设计和制造。

9. 发明申请

US20050275946A1 Optical system applicable to improving the dynamic range of Shack-Hartmann sensors 有权
标题翻译：光学系统适用于改善Shack-Hartmann传感器的动态范围
公开(公告)号：US20050275946A1
公开(公告)日：2005-12-15
申请号：US11133455
申请日：2005-05-18
申请人： Hyuck Choo , Richard Muller
发明人： Hyuck Choo , Richard Muller
IPC分类号： B29D11/00 , G02B26/08 , G02B27/09 , G02B27/10 , G02B27/46
CPC分类号： G02B27/0933 , B29D11/00365 , G02B26/0875 , G02B27/0961 , G02B27/46
摘要： An addressable array of lenses is disclosed. Two electrical connections per row address specific lenses within that row. Carriages support individual lenses, thus forming resonant units with frequencies unique within each row. A voltage, having the same frequency as a selected resonant unit is applied. The selected lens produces a resonating image. Testing has verified proper resonance addressing within a 5-by-5 array of microlenses. The array can be applied to a Shack-Hartmann (SH) sensor. To compensate for errant images formed outside of their image area, resonating images are identified by a processor. The array thus improves the dynamic range of the wavefront aberration that can be measured by an SH sensor. The inventors currently estimate the improvement over conventional designs to be about a factor of 30.
摘要翻译：公开了一种可寻址阵列的透镜。每行两个电气连接针对该行中的特定镜头。支架支撑各个镜头，从而形成每排中独特的频率的谐振单元。施加与选择的谐振单元具有相同频率的电压。所选择的透镜产生谐振图像。测试已经验证了在5×5微米微阵列内正确的共振寻址。阵列可应用于Shack-Hartmann（SH）传感器。为了补偿在其图像区域之外形成的错误图像，谐振图像由处理器识别。因此，该阵列改善了可由SH传感器测量的波前像差的动态范围。本发明人目前将传统设计的改进估计为大约30倍。

10. 发明申请

US20170084815A1 SYSTEMS, DEVICES, AND METHODS FOR ELECTRIC POWER GENERATION FROM VOCAL FOLDS VIBRATIONS 审中-公开
公开(公告)号：US20170084815A1
公开(公告)日：2017-03-23
申请号：US15244980
申请日：2016-08-23
申请人： Hyuck Choo , Hyun Jun Cho
发明人： Hyuck Choo , Hyun Jun Cho
IPC分类号： H01L41/04 , A61N1/378 , H02N2/18 , H01L41/113 , H01L41/187
CPC分类号： A61N1/3785 , A61N1/36007 , A61N1/36036 , A61N1/36046 , A61N1/3605 , H01L41/1136 , H02N2/188
摘要： Apparatus and methods are provided for the generation of electrical power from acousto-mechanical vibrations originating from the vocal folds of the human body. The apparatus and methods can include one or more beams comprising a piezoelectric material, such as lead zirconate titanate (PZT), coupled to a power circuitry. Each of the one or more beams can also have a predetermined resonance frequency that is within the dominant frequency range of the human voice. The power circuitry can be adapted to receive the electrical charge received by the one or more piezoelectric beams and to convert the electrical charge into an electric current. The power circuitry can also be coupled to a battery for the storage of the converted energy, which in turn can provide power to implantable medical electronic devices (e.g., neurostimulators or cochlear implants) and/or wearable electronics. Numerous piezoelectric beam shapes, device packaging structures and array configurations are also disclosed that can provide improved power generation and reduced damping effects.

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