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1. 发明申请

US20090322365A1 INTEGRATED MEMS METROLOGY DEVICE USING COMPLEMENTARY MEASURING COMBS 有权
标题翻译：使用补充测量COMBS的集成MEMS计量器件
公开(公告)号：US20090322365A1
公开(公告)日：2009-12-31
申请号：US11737532
申请日：2007-04-19
申请人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
发明人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
IPC分类号： G01R31/02
CPC分类号： H02N1/008 , B81C99/005 , G02B26/0841
摘要： The present invention provides a device for in-situ monitoring of material, process and dynamic properties of a MEMS device. The monitoring device includes a pair of comb drives, a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives, structures for applying an electrical potential to the comb drives to displace the shuttle, structures for measuring an electrical potential from the pair of comb drives; measuring combs configured to measure the displacement of the shuttle, and structures for measuring an electrical capacitance of the measuring combs. Each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps. The shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle, whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement.
摘要翻译：本发明提供了一种用于原位监测MEMS装置的材料，工艺和动态特性的装置。监测装置包括一对梳状驱动器，悬臂悬架包括与该对梳齿驱动器可操作地连接的平移梭，用于将电位施加到梳齿驱动器以移位梭子的结构，用于测量来自该对的电位的结构梳齿驱动器; 被配置成测量梭子的位移的测量梳，以及用于测量测量梳的电容的结构。每个梳状驱动器可以具有不同尺寸的梳齿间隙和不同数量的梳齿间隙。梭子可以形成在垂直地布置有梭的两个悬臂上，由此悬臂用作弹簧，以在每次移位之后将梭子返回到其初始位置。

2. 发明授权

US07573022B2 Method for fabricating vertically-offset interdigitated comb actuator device 有权
标题翻译：用于制造垂直偏移叉指梳发动器装置的方法
公开(公告)号：US07573022B2
公开(公告)日：2009-08-11
申请号：US11492270
申请日：2006-07-25
申请人： Hyuck Choo , David Garmire , Richard S. Muller , James Demmel
发明人： Hyuck Choo , David Garmire , Richard S. Muller , James Demmel
IPC分类号： H01J3/14 , H01L29/78 , G02B26/08
CPC分类号： G02B26/0841
摘要： The present invention relates to systems and methods for fabricating microscanners. The fabrication processes employed pursuant to some embodiments are compatible with well known CMOS fabrication techniques, allowing devices for control, monitoring and/or sensing to be integrated onto a single chip. Both one- and two-dimensional microscanners are described. Applications including optical laser surgery, maskless photolithography, portable displays and large scale displays are described.
摘要翻译：本发明涉及用于制造显微镜的系统和方法。根据一些实施例使用的制造工艺与公知的CMOS制造技术兼容，允许用于控制，监测和/或感测的装置集成到单个芯片上。描述了一维和二维显微镜。描述了包括光学激光手术，无掩模光刻，便携式显示器和大规模显示器的应用。

3. 发明申请

US20070026614A1 CMOS-compatible high-performance microscanners, including structures, high-yield simplified fabrication methods and applications 有权
标题翻译： CMOS兼容的高性能显微镜，包括结构，高产量简化制造方法和应用
公开(公告)号：US20070026614A1
公开(公告)日：2007-02-01
申请号：US11492270
申请日：2006-07-25
申请人： Hyuck Choo , David Garmire , Richard Muller , James Demmel
发明人： Hyuck Choo , David Garmire , Richard Muller , James Demmel
IPC分类号： H01L21/8234
CPC分类号： G02B26/0841
摘要： The present invention relates to systems and methods for fabricating microscanners. The fabrication processes employed pursuant to some embodiments are compatible with well known CMOS fabrication techniques, allowing devices for control, monitoring and/or sensing to be integrated onto a single chip. Both one- and two-dimensional microscanners are described. Applications including optical laser surgery, maskless photolithography, portable displays and large scale displays are described.
摘要翻译：本发明涉及用于制造显微镜的系统和方法。根据一些实施例使用的制造工艺与公知的CMOS制造技术兼容，允许用于控制，监测和/或感测的装置集成到单个芯片上。描述了一维和二维显微镜。描述了包括光学激光手术，无掩模光刻，便携式显示器和大规模显示器的应用。

4. 发明授权

US08079246B2 Integrated MEMS metrology device using complementary measuring combs 有权
标题翻译：使用互补测量梳的集成MEMS测量装置
公开(公告)号：US08079246B2
公开(公告)日：2011-12-20
申请号：US11737532
申请日：2007-04-19
申请人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
发明人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
IPC分类号： G01P21/00
CPC分类号： H02N1/008 , B81C99/005 , G02B26/0841
摘要： The present invention provides a device for in-situ monitoring of material, process and dynamic properties of a MEMS device. The monitoring device includes a pair of comb drives, a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives, structures for applying an electrical potential to the comb drives to displace the shuttle, structures for measuring an electrical potential from the pair of comb drives; measuring combs configured to measure the displacement of the shuttle, and structures for measuring an electrical capacitance of the measuring combs. Each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps. The shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle, whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement.
摘要翻译：本发明提供了一种用于原位监测MEMS装置的材料，工艺和动态特性的装置。监测装置包括一对梳状驱动器，悬臂悬架包括与该对梳齿驱动器可操作地连接的平移梭，用于向梳状驱动器施加电势以移位梭子的结构，用于测量来自该对的电位的结构梳齿驱动器; 被配置成测量梭子的位移的测量梳，以及用于测量测量梳的电容的结构。每个梳状驱动器可以具有不同尺寸的梳齿间隙和不同数量的梳齿间隙。梭子可以形成在垂直地布置有梭的两个悬臂上，由此悬臂用作弹簧，以在每次移位之后将梭子返回到其初始位置。

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