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1. 发明申请

US20090322365A1 INTEGRATED MEMS METROLOGY DEVICE USING COMPLEMENTARY MEASURING COMBS 有权
标题翻译：使用补充测量COMBS的集成MEMS计量器件
公开(公告)号：US20090322365A1
公开(公告)日：2009-12-31
申请号：US11737532
申请日：2007-04-19
申请人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
发明人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
IPC分类号： G01R31/02
CPC分类号： H02N1/008 , B81C99/005 , G02B26/0841
摘要： The present invention provides a device for in-situ monitoring of material, process and dynamic properties of a MEMS device. The monitoring device includes a pair of comb drives, a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives, structures for applying an electrical potential to the comb drives to displace the shuttle, structures for measuring an electrical potential from the pair of comb drives; measuring combs configured to measure the displacement of the shuttle, and structures for measuring an electrical capacitance of the measuring combs. Each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps. The shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle, whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement.
摘要翻译：本发明提供了一种用于原位监测MEMS装置的材料，工艺和动态特性的装置。监测装置包括一对梳状驱动器，悬臂悬架包括与该对梳齿驱动器可操作地连接的平移梭，用于将电位施加到梳齿驱动器以移位梭子的结构，用于测量来自该对的电位的结构梳齿驱动器; 被配置成测量梭子的位移的测量梳，以及用于测量测量梳的电容的结构。每个梳状驱动器可以具有不同尺寸的梳齿间隙和不同数量的梳齿间隙。梭子可以形成在垂直地布置有梭的两个悬臂上，由此悬臂用作弹簧，以在每次移位之后将梭子返回到其初始位置。

2. 发明授权

US07573022B2 Method for fabricating vertically-offset interdigitated comb actuator device 有权
标题翻译：用于制造垂直偏移叉指梳发动器装置的方法
公开(公告)号：US07573022B2
公开(公告)日：2009-08-11
申请号：US11492270
申请日：2006-07-25
申请人： Hyuck Choo , David Garmire , Richard S. Muller , James Demmel
发明人： Hyuck Choo , David Garmire , Richard S. Muller , James Demmel
IPC分类号： H01J3/14 , H01L29/78 , G02B26/08
CPC分类号： G02B26/0841
摘要： The present invention relates to systems and methods for fabricating microscanners. The fabrication processes employed pursuant to some embodiments are compatible with well known CMOS fabrication techniques, allowing devices for control, monitoring and/or sensing to be integrated onto a single chip. Both one- and two-dimensional microscanners are described. Applications including optical laser surgery, maskless photolithography, portable displays and large scale displays are described.
摘要翻译：本发明涉及用于制造显微镜的系统和方法。根据一些实施例使用的制造工艺与公知的CMOS制造技术兼容，允许用于控制，监测和/或感测的装置集成到单个芯片上。描述了一维和二维显微镜。描述了包括光学激光手术，无掩模光刻，便携式显示器和大规模显示器的应用。

3. 发明授权

US08079246B2 Integrated MEMS metrology device using complementary measuring combs 有权
标题翻译：使用互补测量梳的集成MEMS测量装置
公开(公告)号：US08079246B2
公开(公告)日：2011-12-20
申请号：US11737532
申请日：2007-04-19
申请人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
发明人： David Garmire , Hyuck Choo , Richard S. Muller , James Demmel , Sanjay Govindjee
IPC分类号： G01P21/00
CPC分类号： H02N1/008 , B81C99/005 , G02B26/0841
摘要： The present invention provides a device for in-situ monitoring of material, process and dynamic properties of a MEMS device. The monitoring device includes a pair of comb drives, a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives, structures for applying an electrical potential to the comb drives to displace the shuttle, structures for measuring an electrical potential from the pair of comb drives; measuring combs configured to measure the displacement of the shuttle, and structures for measuring an electrical capacitance of the measuring combs. Each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps. The shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle, whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement.
摘要翻译：本发明提供了一种用于原位监测MEMS装置的材料，工艺和动态特性的装置。监测装置包括一对梳状驱动器，悬臂悬架包括与该对梳齿驱动器可操作地连接的平移梭，用于向梳状驱动器施加电势以移位梭子的结构，用于测量来自该对的电位的结构梳齿驱动器; 被配置成测量梭子的位移的测量梳，以及用于测量测量梳的电容的结构。每个梳状驱动器可以具有不同尺寸的梳齿间隙和不同数量的梳齿间隙。梭子可以形成在垂直地布置有梭的两个悬臂上，由此悬臂用作弹簧，以在每次移位之后将梭子返回到其初始位置。

4. 发明授权

US07564559B2 MEMS-based, phase-shifting interferometer 有权
标题翻译：基于MEMS的相移干涉仪
公开(公告)号：US07564559B2
公开(公告)日：2009-07-21
申请号：US11446552
申请日：2006-06-02
申请人： Hyuck Choo , Richard S. Muller , David Garmire , James W. Demmel , Rishi Kant
发明人： Hyuck Choo , Richard S. Muller , David Garmire , James W. Demmel , Rishi Kant
IPC分类号： G01B9/02 , G01L1/24
CPC分类号： G01B9/02069 , G01B9/02014 , G01B11/2441 , G01B2290/70 , G01J3/4532 , G01J9/02
摘要： Provided herein are optical devices fabricated to include a reflective surface, actuators and stress-relieving structures. Systems containing such devices, and methods of manufacturing such devices, are also provided.
摘要翻译：本文提供了制造成包括反射表面，致动器和应力消除结构的光学器件。还提供了包含这种装置的系统以及制造这种装置的方法。

5. 发明申请

US20070279638A1 MEMS-based, phase-shifting interferometer 有权
标题翻译：基于MEMS的相移干涉仪
公开(公告)号：US20070279638A1
公开(公告)日：2007-12-06
申请号：US11446552
申请日：2006-06-02
申请人： Hyuck Choo , Richard S. Muller , David Garmire , James W. Demmel , Rishi Kant
发明人： Hyuck Choo , Richard S. Muller , David Garmire , James W. Demmel , Rishi Kant
IPC分类号： G01B11/02
CPC分类号： G01B9/02069 , G01B9/02014 , G01B11/2441 , G01B2290/70 , G01J3/4532 , G01J9/02
摘要： In general, the invention relates to the design and fabrication of optical devices suitable for use in methods and systems associated with phase-shift interferometry.
摘要翻译：通常，本发明涉及适用于与相移干涉测量相关联的方法和系统中的光学装置的设计和制造。

6. 发明授权

US07656568B2 Optical switch using frequency-based addressing in a microelectromechanical systems array 有权
标题翻译：在微机电系统阵列中使用基于频率寻址的光开关
公开(公告)号：US07656568B2
公开(公告)日：2010-02-02
申请号：US11436231
申请日：2006-05-17
申请人： Hyuck Choo , Richard S. Muller
发明人： Hyuck Choo , Richard S. Muller
IPC分类号： G02B26/08 , G02B26/02 , G02B6/12
CPC分类号： H01H1/0036 , G02B6/353 , G02B6/3552 , G02B6/356 , G02B6/3566 , G02B6/3568 , G02B6/358 , G02B6/3584 , G02B26/04
摘要： Embodiments of the present invention provide structures for microelectromechanical systems (MEMS) that can be sensed, activated, controlled or otherwise addressed or made to respond by the application of forcing functions. In particular, an optical shutter structure suitable for use in an optical switch arrangement is disclosed. In one embodiment, an optical shutter or switch can be scaled and/or arranged to form arbitrary switch, multiplexer and/or demultiplexer configurations. In another embodiment of the present invention, an optical switch can include: a shutter; and a flexure coupled to the shutter, whereupon a vibration transmitted to the flexure when in the presence of a resonant frequency causes the shutter to move across an opening for the passage of an optical signal.
摘要翻译：本发明的实施例提供了用于微机电系统（MEMS）的结构，其可被感测，激活，控制或以其他方式被寻址或通过施加强制功能来做出响应。特别地，公开了适用于光开关装置的光闸结构。在一个实施例中，光学快门或开关可以被缩放和/或布置成形成任意的开关，多路复用器和/或解复用器配置。在本发明的另一实施例中，光开关可以包括：快门; 以及耦合到快门的挠曲件，于是当存在谐振频率时传递到挠曲件的振动导致快门移动穿过开口以使光信号通过。

7. 发明授权

US07355793B2 Optical system applicable to improving the dynamic range of Shack-Hartmann sensors 有权
标题翻译：光学系统适用于改善Shack-Hartmann传感器的动态范围
公开(公告)号：US07355793B2
公开(公告)日：2008-04-08
申请号：US11133455
申请日：2005-05-18
申请人： Hyuck Choo , Richard S. Muller
发明人： Hyuck Choo , Richard S. Muller
IPC分类号： G02B27/10 , G02B26/00 , G02F1/00
CPC分类号： G02B27/0933 , B29D11/00365 , G02B26/0875 , G02B27/0961 , G02B27/46
摘要： An addressable array of lenses is disclosed. Two electrical connections per row address specific lenses within that row. Carriages support individual lenses, thus forming resonant units with frequencies unique within each row. A voltage, having the same frequency as a selected resonant unit is applied. The selected lens produces a resonating image. Testing has verified proper resonance addressing within a 5-by-5 array of microlenses. The array can be applied to a Shack-Hartmann (SH) sensor. To compensate for errant images formed outside of their image area, resonating images are identified by a processor. The array thus improves the dynamic range of the wavefront aberration that can be measured by an SH sensor. The inventors currently estimate the improvement over conventional designs to be about a factor of 30.
摘要翻译：公开了一种可寻址阵列的透镜。每行两个电气连接针对该行中的特定镜头。支架支撑各个镜头，从而形成每排中独特的频率的谐振单元。施加与选择的谐振单元具有相同频率的电压。所选择的透镜产生谐振图像。测试已经验证了在5×5微米微阵列内正确的共振寻址。阵列可应用于Shack-Hartmann（SH）传感器。为了补偿在其图像区域之外形成的错误图像，谐振图像由处理器识别。因此，该阵列改善了可由SH传感器测量的波前像差的动态范围。本发明人目前将传统设计的改进估计为大约30倍。

8. 发明授权

US5493177A Sealed micromachined vacuum and gas filled devices 失效
标题翻译：密封微加工真空和充气装置
公开(公告)号：US5493177A
公开(公告)日：1996-02-20
申请号：US143220
申请日：1993-10-26
申请人： Richard S. Muller , Carlos H. Mastrangelo , Kirt R. Williams
发明人： Richard S. Muller , Carlos H. Mastrangelo , Kirt R. Williams
IPC分类号： G01J3/10 , G01P15/08 , G03F7/00 , H01J3/00 , H01J5/00 , H01J9/02 , H01J21/10 , H01J61/30 , H01K1/04 , H01K1/12 , H01K1/28 , H01K3/00 , H01K7/04 , H01K13/00 , H01K1/50
CPC分类号： G01J3/108 , G01P15/0894 , G03F7/00 , H01J21/105 , H01J3/00 , H01J5/00 , H01J61/30 , H01J9/02 , H01K1/04 , H01K1/12 , H01K1/28 , H01K13/00 , H01K3/00 , H01K7/04
摘要： A surface and/or bulk micromachined hermetically sealed cavity containing at least one suspended structure in a low pressure ambient, and the associated fabrication method. The cavity is bounded by a thin-film membrane and a substrate which may have a recess. The method can be used for the production, for example, of thermionic-emission vacuum tubes, gas filled tubes and electromechanical devices. In vacuum tubes the cathode is a suspended refractory filament. Other electrodes may also be suspended. In electromechanical devices the suspended members may be cantilever beams capable of low friction motion.
摘要翻译：在低压环境中包含至少一个悬挂结构的表面和/或体积微加工的气密腔，以及相关的制造方法。空腔由可能具有凹部的薄膜膜和基底界定。该方法可用于生产例如热离子发射真空管，充气管和机电装置。在真空管中，阴极是悬浮的耐火长丝。其他电极也可以被悬挂。在机电装置中，悬挂构件可以是能够低摩擦运动的悬臂梁。

9. 发明授权

US4849695A Null-detection magnetometers 失效
标题翻译：零检测磁力计
公开(公告)号：US4849695A
公开(公告)日：1989-07-18
申请号：US259128
申请日：1988-10-18
申请人： Richard S. Muller , Juan I. Coicolea
发明人： Richard S. Muller , Juan I. Coicolea
IPC分类号： G01R33/06 , H01L27/22 , H03K19/0175
CPC分类号： G01R33/06 , H01L27/22 , H03K19/017545
摘要： An integrated-circuit one-way isolation-coupler for a controlling electrical circuit and a controlled electrical circuit and improvements in carrier-domain magnetometers and other applications thereof. In the isolator a magnetic-field source, such as a flat coil, produces a magnetic field from current applied from the controlling circuit, while a detector such as a carrier-domain-magnetometer detects the magnetic field so produced and produces a signal therefrom. A dielectric medium, such as silicon dioxide or silicon nitride separates the source from the detector. The source, the detector, and the dielectric medium, are all incorporated on a single IC chip, such as silicon, or gallium arsenide, or semiconductor material. An amplifier may also be incorporated and may deliver the amplified signal to the controlled circuit. Preferably there are two carrier-domain-magnetometers located so that they are symmetrical with respect to the flat coil.
摘要翻译：一种用于控制电路和受控电路的集成电路单向隔离耦合器，以及载波磁强计及其它应用的改进。在隔离器中，诸如扁平线圈的磁场源由来自控制电路的电流产生磁场，而诸如载流子域磁强计之类的检测器检测如此产生的磁场并从其产生信号。诸如二氧化硅或氮化硅的介电介质将源与检测器分离。源，检测器和电介质都被并入单个IC芯片，例如硅或砷化镓或半导体材料。还可以并入放大器，并且可以将放大的信号传送到受控电路。优选地，存在两个载流子域磁强计，使得它们相对于扁平线圈对称。

10. 发明授权

US4816125A IC processed piezoelectric microphone 失效
标题翻译： IC加工压电麦克风
公开(公告)号：US4816125A
公开(公告)日：1989-03-28
申请号：US217826
申请日：1988-08-19
申请人： Richard S. Muller , Eun S. Kim
发明人： Richard S. Muller , Eun S. Kim
IPC分类号： C23C14/34 , C23C16/34 , H04R17/00 , H04R17/02 , H04R19/00 , H04R31/00
CPC分类号： H04R19/005 , H04R17/00 , Y10T29/49005
摘要： A miniature diaphragm pressure transducer. A thin diaphragm of silicon nitride has an upper face covered by a zinc-oxide piezoelectric film encapsulated in chemical vapor deposited silicon dioxide. A series of annular, basically conentric, polysilicon electrodes are provided in the silicon dioxide between the piezoelectric film and the diaphragm and in contact with the piezoelectric film. A series of annular, basically concentric, aluminum electrodes are on the opposite side of the piezoelectric film from the polysilicon electrodes and are aligned with the polysilicon electrodes; they lie over the silicon dioxide, and are in contact with the piezoelectric film.
摘要翻译：微型隔膜压力传感器。氮化硅的薄膜具有被封装在化学气相沉积二氧化硅中的氧化锌压电薄膜覆盖的上表面。在压电膜和膜片之间的二氧化硅中设置有一系列环形，基本上是中心的多晶硅电极，并与压电膜接触。一系列环形，基本同心的铝电极位于压电薄膜与多晶硅电极相反的一侧，并与多晶硅电极对准; 它们位于二氧化硅上，并与压电膜接触。

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